[go: up one dir, main page]

WO2009030299A3 - Verfahren zum fertigen einer solarzelle mit einer doppellagigen dielektrikumschicht - Google Patents

Verfahren zum fertigen einer solarzelle mit einer doppellagigen dielektrikumschicht Download PDF

Info

Publication number
WO2009030299A3
WO2009030299A3 PCT/EP2008/005339 EP2008005339W WO2009030299A3 WO 2009030299 A3 WO2009030299 A3 WO 2009030299A3 EP 2008005339 W EP2008005339 W EP 2008005339W WO 2009030299 A3 WO2009030299 A3 WO 2009030299A3
Authority
WO
WIPO (PCT)
Prior art keywords
dielectric layer
layer
producing
solar cell
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2008/005339
Other languages
English (en)
French (fr)
Other versions
WO2009030299A2 (de
Inventor
Dominik Huljic
Willi Brendle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Q Cells SE
Original Assignee
Q Cells SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Q Cells SE filed Critical Q Cells SE
Publication of WO2009030299A2 publication Critical patent/WO2009030299A2/de
Anticipated expiration legal-status Critical
Publication of WO2009030299A3 publication Critical patent/WO2009030299A3/de
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H10F77/311—Coatings for devices having potential barriers for photovoltaic cells
    • H10F77/315—Coatings for devices having potential barriers for photovoltaic cells the coatings being antireflective or having enhancing optical properties
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/129—Passivating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/40—Optical elements or arrangements
    • H10F77/42—Optical elements or arrangements directly associated or integrated with photovoltaic cells, e.g. light-reflecting means or light-concentrating means
    • H10F77/48—Back surface reflectors [BSR]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/52—PV systems with concentrators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)

Abstract

Es wird ein Verfahren zum Fertigen einer Silizium-Solarzelle vorgestellt, das die folgenden Prozessschritte in der angegebenen Reihenfolge aufweist: Bereitstellen eines Siliziumsubstrates (1); Erzeugen einer ersten Dielektrikumschicht (5) an einer zu beschichtenden Oberfläche (3) des Siliziumsubstrates (1); und Erzeugen einer zweiten Dielektrikumschicht (7) in Form einer Siliziumdioxidschicht an einer Grenzfläche zwischen der ersten Dielektrikumschicht (5) und der zu beschichtenden Oberfläche des Siliziumsubstrates (1) durch thermische Oxidation. Durch das vorgestellte Verfahren kann einerseits die erste Dielektrikumschicht (5) verschiedenen Zwecken wie zum Beispiel einer Wirkung als Diffusionsbarriere oder Ätzbarriere während der Fertigung selbst und einer Eigenschaft als Antireflexschicht oder Rückseiten-Spiegel-Schicht für die fertige Solarzelle dienen, während andererseits die zweite Dielektrikumschicht (7) für eine optimale Oberflächenpassivierung des Siliziumwafers (1) sorgen kann.
PCT/EP2008/005339 2007-08-31 2008-06-30 Verfahren zum fertigen einer solarzelle mit einer doppellagigen dielektrikumschicht Ceased WO2009030299A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007041392.2 2007-08-31
DE102007041392A DE102007041392A1 (de) 2007-08-31 2007-08-31 Verfahren zum Fertigen einer Solarzelle mit einer doppellagigen Dielektrikumschicht

Publications (2)

Publication Number Publication Date
WO2009030299A2 WO2009030299A2 (de) 2009-03-12
WO2009030299A3 true WO2009030299A3 (de) 2010-03-11

Family

ID=40299031

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/005339 Ceased WO2009030299A2 (de) 2007-08-31 2008-06-30 Verfahren zum fertigen einer solarzelle mit einer doppellagigen dielektrikumschicht

Country Status (2)

Country Link
DE (1) DE102007041392A1 (de)
WO (1) WO2009030299A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010025983A1 (de) * 2010-03-03 2011-09-08 Centrotherm Photovoltaics Ag Solarzelle mit dielektrischer Rückseitenverspiegelung und Verfahren zu deren Herstellung
DE102010003784A1 (de) * 2010-04-09 2011-10-13 Robert Bosch Gmbh Verfahren zur Herstellung einer Solarzelle
DE102011051707A1 (de) 2011-07-08 2013-01-10 Schott Solar Ag Verfahren zum Herstellen einer Solarzelle
CN102938431B (zh) * 2012-10-19 2015-09-16 上海中智光纤通讯有限公司 一种太阳电池的硅片清洗制绒方法
JP5994895B2 (ja) * 2015-04-24 2016-09-21 信越化学工業株式会社 太陽電池の製造方法
CN111574071B (zh) * 2020-06-01 2022-06-24 中建材玻璃新材料研究院集团有限公司 一种高透过宽色系盖板玻璃的制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5792280A (en) * 1994-05-09 1998-08-11 Sandia Corporation Method for fabricating silicon cells
US6323143B1 (en) * 2000-03-24 2001-11-27 Taiwan Semiconductor Manufacturing Company Method for making silicon nitride-oxide ultra-thin gate insulating layers for submicrometer field effect transistors
WO2006025203A1 (ja) * 2004-08-31 2006-03-09 Sharp Kabushiki Kaisha 太陽電池およびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4217428A1 (de) * 1991-12-09 1993-06-17 Deutsche Aerospace Hochleistungs-solarzellenstruktur
EP1763086A1 (de) * 2005-09-09 2007-03-14 Interuniversitair Micro-Elektronica Centrum Solarzellen mit dickem Siliziumoxid und Siliziumnitrid zur Passivierung und entsprechendes Herstellungsverfahren

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5792280A (en) * 1994-05-09 1998-08-11 Sandia Corporation Method for fabricating silicon cells
US6323143B1 (en) * 2000-03-24 2001-11-27 Taiwan Semiconductor Manufacturing Company Method for making silicon nitride-oxide ultra-thin gate insulating layers for submicrometer field effect transistors
WO2006025203A1 (ja) * 2004-08-31 2006-03-09 Sharp Kabushiki Kaisha 太陽電池およびその製造方法

Also Published As

Publication number Publication date
DE102007041392A1 (de) 2009-03-05
WO2009030299A2 (de) 2009-03-12

Similar Documents

Publication Publication Date Title
CN102290473B (zh) 一种背面点接触晶体硅太阳电池及制备方法
WO2011157422A3 (de) Verfahren zur herstellung einer photovoltaischen solarzelle
WO2007115105A3 (en) Method for making an improved thin film solar cell interconnect using etch and deposition processes
WO2009030299A3 (de) Verfahren zum fertigen einer solarzelle mit einer doppellagigen dielektrikumschicht
WO2008039067A3 (en) Method of manufacturing crystalline silicon solar cells with improved surface passivation
WO2010062341A3 (en) Thin interdigitated backside contact solar cell and manufacturing process thereof
WO2010081505A3 (de) Solarzelle und verfahren zur herstellung einer solarzelle aus einem siliziumsubstrat
WO2009013307A3 (en) Method for producing a silicon solar cell with a back-etched emitter as well as a corresponding solar cell
WO2009025502A3 (en) Solar cell having porous structure and method for fabrication thereof
EP3971998A1 (de) Solarzelle und verfahren zu ihrer herstellung, verfahren zur behandlung einer n-dotierten siliziumschicht und halbleiterbauelement
WO2006053032A8 (en) Thermal process for creation of an in-situ junction layer in cigs
WO2007059578A8 (en) High efficiency solar cell fabrication
WO2011085143A3 (en) Solar cell including sputtered reflective layer and method of manufacture thereof
WO2008143885A3 (en) Protection layer for fabricating a solar cell
WO2012136387A3 (de) Metallpartikelhaltiges und ätzendes druckbares medium insbesondere zur kontaktbildung mit silizium beim herstellen einer solarzelle
EP2711989B1 (de) Ätzzusammensetzung und verfahren zum ätzen eines siliziumwafers
US10263135B2 (en) Method for producing a solar cell involving doping by ion implantation and depositing an outdiffusion barrier
WO2011091959A8 (de) Verfahren zur lokalen hochdotierung und kontaktierung einer halbleiterstruktur, welche eine solarzelle oder eine vorstufe einer solarzelle ist
WO2011116762A3 (de) Herstellungsverfahren einer halbleitersolarzelle
WO2009038323A3 (en) Solar cell and method for manufacturing the same
CN103354954A (zh) 制作具有正面纹理和平滑背面表面的硅太阳能电池的方法
JP2010093194A (ja) 太陽電池の製造方法
Chaoui et al. Porous silicon antireflection layer for solar cells using metal‐assisted chemical etching
CN105723520A (zh) 用于制造太阳能电池的方法
WO2011160814A3 (en) Method for creating a passivated boron-doped region, especially during production of a solar cell, and solar cell with passivated boron-diffused region

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08773778

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08773778

Country of ref document: EP

Kind code of ref document: A2