[go: up one dir, main page]

WO2008146489A1 - 弾性境界波基板とその基板を用いた弾性境界波機能素子 - Google Patents

弾性境界波基板とその基板を用いた弾性境界波機能素子 Download PDF

Info

Publication number
WO2008146489A1
WO2008146489A1 PCT/JP2008/001329 JP2008001329W WO2008146489A1 WO 2008146489 A1 WO2008146489 A1 WO 2008146489A1 JP 2008001329 W JP2008001329 W JP 2008001329W WO 2008146489 A1 WO2008146489 A1 WO 2008146489A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
thin film
boundary wave
elastic boundary
functional element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/001329
Other languages
English (en)
French (fr)
Inventor
Kazuhiko Yamanouchi
Yusuke Satoh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2008098723A external-priority patent/JP5154285B2/ja
Application filed by Panasonic Corp filed Critical Panasonic Corp
Priority to US12/601,687 priority Critical patent/US8508101B2/en
Publication of WO2008146489A1 publication Critical patent/WO2008146489A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

　圧電基板上に金属電極、誘電体薄膜、更に誘電体薄膜を付着した基板が本特許の構成であり、基板内部に弾性波のエネルギーを閉じ込めた基板を得ることができる。特に、薄膜４として、ＳｉＯ２薄膜、薄膜５として、ＡｌＮ薄膜を用いることにより、大きな電気機械結合係数（ｋ２）と周波数温度特性に優れた基板を電極２、３の膜厚、薄膜４、薄膜５の膜厚を最適の値とすることにより得ることが出来る。
PCT/JP2008/001329 2007-05-28 2008-05-28 弾性境界波基板とその基板を用いた弾性境界波機能素子 Ceased WO2008146489A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/601,687 US8508101B2 (en) 2007-05-28 2008-05-28 Elastic boundary wave substrate and elastic boundary wave functional element using the substrate

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-166939 2007-05-28
JP2007166939 2007-05-28
JP2008098723A JP5154285B2 (ja) 2007-05-28 2008-03-09 弾性境界波機能素子
JP2008-098723 2008-03-09

Publications (1)

Publication Number Publication Date
WO2008146489A1 true WO2008146489A1 (ja) 2008-12-04

Family

ID=40074763

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/001329 Ceased WO2008146489A1 (ja) 2007-05-28 2008-05-28 弾性境界波基板とその基板を用いた弾性境界波機能素子

Country Status (1)

Country Link
WO (1) WO2008146489A1 (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998052279A1 (fr) * 1997-05-12 1998-11-19 Hitachi, Ltd. Dispositif a onde elastique
WO2005093949A1 (ja) * 2004-03-29 2005-10-06 Murata Manufacturing Co., Ltd. 弾性境界波装置の製造方法及び弾性境界波装置
JP2006279609A (ja) * 2005-03-29 2006-10-12 Fujitsu Media Device Kk 弾性境界波素子、共振子およびラダー型フィルタ
WO2006114930A1 (ja) * 2005-04-25 2006-11-02 Murata Manufacturing Co., Ltd. 弾性境界波装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998052279A1 (fr) * 1997-05-12 1998-11-19 Hitachi, Ltd. Dispositif a onde elastique
WO2005093949A1 (ja) * 2004-03-29 2005-10-06 Murata Manufacturing Co., Ltd. 弾性境界波装置の製造方法及び弾性境界波装置
JP2006279609A (ja) * 2005-03-29 2006-10-12 Fujitsu Media Device Kk 弾性境界波素子、共振子およびラダー型フィルタ
WO2006114930A1 (ja) * 2005-04-25 2006-11-02 Murata Manufacturing Co., Ltd. 弾性境界波装置

Similar Documents

Publication Publication Date Title
WO2009075088A1 (ja) 表面波装置及びデュプレクサ
WO2020175234A9 (ja) 弾性表面波装置
CN103283147B (zh) 弹性波装置及其制造方法
CN109314503A (zh) 弹性波装置及其制造方法
WO2009057699A1 (ja) 弾性波装置
WO2003058813A1 (en) Surface acoustic wave device, electronic component using the device, and composite module
GB2596956A8 (en) High-order mode surface acoustic wave device
WO2006069327A3 (en) Implantable transducer devices
WO2009112969A3 (en) Patterned ultrasonic transducers
WO2008146449A1 (ja) 弾性波素子
EP1722473A4 (en) RAND SOUND WAVE DEVICE
TW200603418A (en) A film bulk acoustic resonator package and method of fabricating same
WO2007100606A3 (en) Compliant electroactive polymer transducers for sonic applications
EP1947763A3 (en) Boundary acoustic wave device
CN109639251A (zh) 体声波谐振器及其制作方法、滤波器
TW200718008A (en) Adjusted frequency temperature coefficient resonator
TW200644329A (en) Antenna duplexer
CN108028636A (zh) 弹性波装置
WO2009057195A1 (ja) 弾性波素子、デュープレクサ、通信モジュール、および通信装置
EP4050795A1 (en) Bulk acoustic resonator, filter, and electronic device
JPWO2021060150A5 (ja)
WO2009077917A3 (en) Mems microphone
WO2015137054A1 (ja) 弾性波装置
TW200623929A (en) Transducer
EP2068442A4 (en) Boundary acoustic wave device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08763929

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 12601687

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08763929

Country of ref document: EP

Kind code of ref document: A1