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WO2008146489A1 - Elastic boundary wave substrate and elastic boundary wave functional element using the substrate - Google Patents

Elastic boundary wave substrate and elastic boundary wave functional element using the substrate Download PDF

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Publication number
WO2008146489A1
WO2008146489A1 PCT/JP2008/001329 JP2008001329W WO2008146489A1 WO 2008146489 A1 WO2008146489 A1 WO 2008146489A1 JP 2008001329 W JP2008001329 W JP 2008001329W WO 2008146489 A1 WO2008146489 A1 WO 2008146489A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
thin film
boundary wave
elastic boundary
functional element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/001329
Other languages
French (fr)
Japanese (ja)
Inventor
Kazuhiko Yamanouchi
Yusuke Satoh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2008098723A external-priority patent/JP5154285B2/en
Application filed by Panasonic Corp filed Critical Panasonic Corp
Priority to US12/601,687 priority Critical patent/US8508101B2/en
Publication of WO2008146489A1 publication Critical patent/WO2008146489A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

Provided is a substrate wherein a metal electrode, a dielectric thin film and another dielectric thin film are adhered on a piezoelectric substrate. The substrate confines elastic wave energy therein. Especially by using a SiO2 thin film as a thin film (4) and an AlN thin film as a thin film (5), the substrate having a high electromechanical coupling coefficient (k2) and excellent frequency-temperature characteristics is obtained by making the film thicknesses of electrodes (2, 3) and those of the thin film (4) and the thin film (5) optimum.
PCT/JP2008/001329 2007-05-28 2008-05-28 Elastic boundary wave substrate and elastic boundary wave functional element using the substrate Ceased WO2008146489A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/601,687 US8508101B2 (en) 2007-05-28 2008-05-28 Elastic boundary wave substrate and elastic boundary wave functional element using the substrate

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007166939 2007-05-28
JP2007-166939 2007-05-28
JP2008-098723 2008-03-09
JP2008098723A JP5154285B2 (en) 2007-05-28 2008-03-09 Boundary acoustic wave functional element

Publications (1)

Publication Number Publication Date
WO2008146489A1 true WO2008146489A1 (en) 2008-12-04

Family

ID=40074763

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/001329 Ceased WO2008146489A1 (en) 2007-05-28 2008-05-28 Elastic boundary wave substrate and elastic boundary wave functional element using the substrate

Country Status (1)

Country Link
WO (1) WO2008146489A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998052279A1 (en) * 1997-05-12 1998-11-19 Hitachi, Ltd. Elastic wave device
WO2005093949A1 (en) * 2004-03-29 2005-10-06 Murata Manufacturing Co., Ltd. Boundary acoustic wave device manufacturing method and boundary acoustic wave device
JP2006279609A (en) * 2005-03-29 2006-10-12 Fujitsu Media Device Kk Boundary acoustic wave element, resonator and ladder type filter
WO2006114930A1 (en) * 2005-04-25 2006-11-02 Murata Manufacturing Co., Ltd. Boundary acoustic wave device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998052279A1 (en) * 1997-05-12 1998-11-19 Hitachi, Ltd. Elastic wave device
WO2005093949A1 (en) * 2004-03-29 2005-10-06 Murata Manufacturing Co., Ltd. Boundary acoustic wave device manufacturing method and boundary acoustic wave device
JP2006279609A (en) * 2005-03-29 2006-10-12 Fujitsu Media Device Kk Boundary acoustic wave element, resonator and ladder type filter
WO2006114930A1 (en) * 2005-04-25 2006-11-02 Murata Manufacturing Co., Ltd. Boundary acoustic wave device

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