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WO2002059050A8 - A method and a device for measurement in a process for manufacturing a planar glass coating - Google Patents

A method and a device for measurement in a process for manufacturing a planar glass coating

Info

Publication number
WO2002059050A8
WO2002059050A8 PCT/FI2002/000012 FI0200012W WO02059050A8 WO 2002059050 A8 WO2002059050 A8 WO 2002059050A8 FI 0200012 W FI0200012 W FI 0200012W WO 02059050 A8 WO02059050 A8 WO 02059050A8
Authority
WO
WIPO (PCT)
Prior art keywords
aerosol particles
substrate
measurement
planar glass
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/FI2002/000012
Other languages
French (fr)
Other versions
WO2002059050A1 (en
Inventor
Juha Tikkanen
Jorma Keskinen
Markku Rajala
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Liekki Oy
Original Assignee
Liekki Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Liekki Oy filed Critical Liekki Oy
Publication of WO2002059050A1 publication Critical patent/WO2002059050A1/en
Anticipated expiration legal-status Critical
Publication of WO2002059050A8 publication Critical patent/WO2002059050A8/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/34—Liquid, e.g. mist or aerosol
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/46—Comprising performance enhancing means, e.g. electrostatic charge or built-in heater

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Glass (AREA)
  • Coating Apparatus (AREA)

Abstract

The invention relates to a measurement method and device to be used in connection with a manufacturing process of a planar glass coating, in which manufacturing process for example a thermal reactor (10), such as a flame or plasma is used to produce aerosol particles (13) from reactants (12), which said aerosol particles (13) are guided on the surface of a substrate (14), thus forming a coating layer. According to the invention, the electric charge conveyed on the substrate (14) by the aerosol particles (13) entering the substrate is measured by means of a current measurement means (17) during the process to monitor the coating process. The current measurement means (17) is arranged to communicate with a process control unit (18) to adjust the process conditions according to predetermined threshold value. In an embodiment of the invention, the measurement is based on the electric charge attained intrinsically by the aerosol particles (13) during their formation. If necessary, it is also possible to use a separate charger (23), for example a so-called corona charger to charge the aerosol particles (13).
PCT/FI2002/000012 2001-01-09 2002-01-08 A method and a device for measurement in a process for manufacturing a planar glass coating Ceased WO2002059050A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20010036 2001-01-09
FI20010036A FI112648B (en) 2001-01-09 2001-01-09 Measurement method and measuring device in the manufacturing process of a flat glass surface coating

Publications (2)

Publication Number Publication Date
WO2002059050A1 WO2002059050A1 (en) 2002-08-01
WO2002059050A8 true WO2002059050A8 (en) 2003-10-30

Family

ID=8559921

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FI2002/000012 Ceased WO2002059050A1 (en) 2001-01-09 2002-01-08 A method and a device for measurement in a process for manufacturing a planar glass coating

Country Status (2)

Country Link
FI (1) FI112648B (en)
WO (1) WO2002059050A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009030234A1 (en) * 2009-06-23 2010-12-30 J-Plasma Gmbh Process for the production of glass, in particular Glaspreform and Smoker for its production

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844361A (en) * 1981-09-11 1983-03-15 Toshiba Corp Measuring device for electrostatic change on pulverulent body
EP0157003B1 (en) * 1984-02-10 1988-11-23 Präzisions-Werkzeuge AG Method of measuring the quantity of particle coating on a metallic body to be coated with said particle coating, device for carrying out the method, and its application
US5296255A (en) * 1992-02-14 1994-03-22 The Regents Of The University Of Michigan In-situ monitoring, and growth of thin films by means of selected area CVD

Also Published As

Publication number Publication date
FI20010036A0 (en) 2001-01-09
FI20010036L (en) 2002-07-10
FI112648B (en) 2003-12-31
WO2002059050A1 (en) 2002-08-01

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