[go: up one dir, main page]

WO2009034843A1 - 半導体式ガスセンサ及びその製造方法 - Google Patents

半導体式ガスセンサ及びその製造方法 Download PDF

Info

Publication number
WO2009034843A1
WO2009034843A1 PCT/JP2008/065320 JP2008065320W WO2009034843A1 WO 2009034843 A1 WO2009034843 A1 WO 2009034843A1 JP 2008065320 W JP2008065320 W JP 2008065320W WO 2009034843 A1 WO2009034843 A1 WO 2009034843A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas sensor
semiconductor gas
manufacturing
same
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/065320
Other languages
English (en)
French (fr)
Inventor
Jun Tamaki
Yoshiaki Nakata
Yutaka Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Ritsumeikan Trust
Original Assignee
Horiba Ltd
Ritsumeikan Trust
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd, Ritsumeikan Trust filed Critical Horiba Ltd
Priority to US12/677,646 priority Critical patent/US20110186939A1/en
Priority to EP08831153A priority patent/EP2187202A1/en
Priority to CN200880107211A priority patent/CN101809436A/zh
Priority to JP2008541182A priority patent/JP4911788B2/ja
Publication of WO2009034843A1 publication Critical patent/WO2009034843A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0037—NOx
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

　この発明は、低濃度ガスに対する検出感度を著しく増大できるとともに、応答－回復速度を速めて全体性能の顕著な向上を達成できる半導体式ガスセンサ及びその製造方法を提供する。 　この発明では、中央部に空洞部１ａを有するＳｉ基板１と、この基板１上に前記空洞部１ａを遮るように張設されたダイヤフラム構造の絶縁膜２と、この絶縁膜２上に形成されたヒータ４と、抵抗測定用電極６及びその抵抗測定用電極６上に形成されたガス感応膜７とを備えてなる半導体式ガスセンサにおいて、前記ガス感応膜７が、六方晶酸化タングステン結晶を含む単斜晶酸化タングステンからなる。
PCT/JP2008/065320 2007-09-11 2008-08-27 半導体式ガスセンサ及びその製造方法 Ceased WO2009034843A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US12/677,646 US20110186939A1 (en) 2007-09-11 2008-08-27 Semiconductor type gas sensor and manufacturing method thereof
EP08831153A EP2187202A1 (en) 2007-09-11 2008-08-27 Semiconductor gas sensor and method for manufacturing the same
CN200880107211A CN101809436A (zh) 2007-09-11 2008-08-27 半导体式气体传感器及其制造方法
JP2008541182A JP4911788B2 (ja) 2007-09-11 2008-08-27 半導体式ガスセンサ及びその製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-234807 2007-09-11
JP2007234807 2007-09-11

Publications (1)

Publication Number Publication Date
WO2009034843A1 true WO2009034843A1 (ja) 2009-03-19

Family

ID=40451853

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/065320 Ceased WO2009034843A1 (ja) 2007-09-11 2008-08-27 半導体式ガスセンサ及びその製造方法

Country Status (5)

Country Link
US (1) US20110186939A1 (ja)
EP (1) EP2187202A1 (ja)
JP (1) JP4911788B2 (ja)
CN (1) CN101809436A (ja)
WO (1) WO2009034843A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2293060A2 (en) 2009-09-01 2011-03-09 HORIBA, Ltd. Gas sensor
JP2013513110A (ja) * 2009-12-02 2013-04-18 ザ・リサーチ・フアウンデーシヨン・オブ・ステイト・ユニバーシテイ・オブ・ニユーヨーク 強誘電性材料、混合酸化物、または酸化物多形の安定性の温度モジュレーションに基づく選択的ケモセンサー
JP2013174627A (ja) * 2013-06-14 2013-09-05 Tdk Corp ガスセンサ
JP2014101531A (ja) * 2012-11-16 2014-06-05 Nagoya Univ ナノ流体の製造方法
WO2014192375A1 (ja) * 2013-05-28 2014-12-04 シャープ株式会社 センシングシステム、及び、センシング方法

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102730621B (zh) * 2012-06-15 2015-05-27 西安交通大学 一种加热丝嵌入式硅基微热板及加工方法
CN103543183B (zh) * 2013-10-16 2016-05-04 华东师范大学 基于微通道板三维结构的高灵敏度气体传感器制作方法
CN104931539B (zh) * 2015-06-11 2017-12-19 福建工程学院 一种半导体气敏器件及其制作方法
TWI557527B (zh) 2015-12-28 2016-11-11 財團法人工業技術研究院 具儲熱元件的微機電溫度控制系統
CN105911104A (zh) * 2016-04-21 2016-08-31 林业城 一种具备气体可视化功能的机房环境监控系统
CN105823804A (zh) * 2016-04-21 2016-08-03 林业城 一种基于可视化传感功能的电力巡检设备
CN107520751A (zh) * 2016-06-22 2017-12-29 汪超 一种立式玻璃四边磨边机的玻璃边缘探测装置
CN106198644A (zh) * 2016-06-24 2016-12-07 苏州纳格光电科技有限公司 一种半导体气体传感器及其制备方法
US20180128774A1 (en) * 2016-11-07 2018-05-10 Epistar Corporation Sensing device
CN108195891B (zh) * 2017-11-10 2021-11-23 中国人民解放军陆军防化学院 半导体传感器及芥子气或者芥子气模拟剂气体的定量检测方法
JP6944662B2 (ja) * 2018-07-13 2021-10-06 富士電機株式会社 二酸化炭素ガスセンサ
CN108946815B (zh) * 2018-08-23 2020-11-06 东北大学 一种wo3纳米颗粒和其制备方法及其在传感器中的应用
JP7336729B2 (ja) * 2019-05-21 2023-09-01 パナソニックＩｐマネジメント株式会社 ガスセンサ
CN111474211B (zh) * 2019-06-28 2023-06-02 黑龙江大学 一种生物质炭-双晶相金属氧化物（wo3）复合材料及其制备和应用
CN115128134A (zh) * 2022-06-21 2022-09-30 武汉铂纳智感科技有限公司 一种基于光激发的气敏传感器、制备方法及应用

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06102224A (ja) 1992-01-28 1994-04-15 Kurabe Ind Co Ltd 窒素酸化物ガス検知素子
JP2002526362A (ja) * 1998-09-23 2002-08-20 キャプチャー センサーズ アンド アナライザーズ リミティド 固体ガスセンサーおよびそのための化合物
JP2007064908A (ja) 2005-09-02 2007-03-15 Ritsumeikan 半導体式薄膜ガスセンサ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5605612A (en) * 1993-11-11 1997-02-25 Goldstar Electron Co., Ltd. Gas sensor and manufacturing method of the same
US5798556A (en) * 1996-03-25 1998-08-25 Motorola, Inc. Sensor and method of fabrication
EP0882978A1 (en) * 1997-06-04 1998-12-09 STMicroelectronics S.r.l. Integrated semi-conductor device comprising a chemoresistive gas microsensor and manufacturing process thereof
US20050229676A1 (en) * 2002-08-14 2005-10-20 Moseley Patrick T Exhaust gas oxygen sensor
US8485983B2 (en) * 2003-04-21 2013-07-16 The Research Foundation Of State University Of New York Selective nanoprobe for olfactory medicine
KR100799577B1 (ko) * 2006-08-31 2008-01-30 한국전자통신연구원 가스 및 생화학물질 감지용 센서 제조 방법과 그 센서를포함하는 집적회로 및 그 제조 방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06102224A (ja) 1992-01-28 1994-04-15 Kurabe Ind Co Ltd 窒素酸化物ガス検知素子
JP2002526362A (ja) * 1998-09-23 2002-08-20 キャプチャー センサーズ アンド アナライザーズ リミティド 固体ガスセンサーおよびそのための化合物
JP2007064908A (ja) 2005-09-02 2007-03-15 Ritsumeikan 半導体式薄膜ガスセンサ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
WANG LISHENG,ET AL.: "Nanostructured hexagonal tungsten oxides for ammonia sensing", PROC SPIE INT SOC OPT ENG, vol. 6769, 13 September 2007 (2007-09-13), pages 67690E.1 - 67690E.8, XP008130433 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2293060A2 (en) 2009-09-01 2011-03-09 HORIBA, Ltd. Gas sensor
JP2013513110A (ja) * 2009-12-02 2013-04-18 ザ・リサーチ・フアウンデーシヨン・オブ・ステイト・ユニバーシテイ・オブ・ニユーヨーク 強誘電性材料、混合酸化物、または酸化物多形の安定性の温度モジュレーションに基づく選択的ケモセンサー
JP2014101531A (ja) * 2012-11-16 2014-06-05 Nagoya Univ ナノ流体の製造方法
WO2014192375A1 (ja) * 2013-05-28 2014-12-04 シャープ株式会社 センシングシステム、及び、センシング方法
JP2013174627A (ja) * 2013-06-14 2013-09-05 Tdk Corp ガスセンサ

Also Published As

Publication number Publication date
JPWO2009034843A1 (ja) 2010-12-24
EP2187202A1 (en) 2010-05-19
US20110186939A1 (en) 2011-08-04
CN101809436A (zh) 2010-08-18
JP4911788B2 (ja) 2012-04-04

Similar Documents

Publication Publication Date Title
WO2009034843A1 (ja) 半導体式ガスセンサ及びその製造方法
US10935509B2 (en) Gas sensing method with chemical and thermal conductivity sensing
CN101639391B (zh) 带温度传感器的多晶硅纳米膜压力传感器及其制作方法
TWI422818B (zh) 氫離子感測場效電晶體及其製造方法
CN104089727B (zh) 集成温度的高性能压力传感器芯片及制造方法
JP2008215974A (ja) 電界効果トランジスタ型イオンセンサ
CN105444931B (zh) 基于牺牲层技术的soi压力敏感芯片及其制造方法
US8754453B2 (en) Capacitive pressure sensor and method for manufacturing same
CN211013319U (zh) 一种mems压力传感器
CN103018289A (zh) 一种电容式湿度传感器
US20180340901A1 (en) Gas sensor platform and the method of making the same
CN108226236B (zh) 一种集成化湿度传感器及其制作工艺
CN101241030A (zh) Mos力敏传感器
WO2009041463A1 (ja) 半導体圧力センサ
CN103196596A (zh) 基于牺牲层技术的纳米膜压力传感器及其制造方法
CN103344375B (zh) 一种提高压力传感器检测灵敏度装置
RU2457577C1 (ru) Многофункциональный измерительный модуль
EP2028483A3 (en) Chemical sensor on diamond film
US7737514B1 (en) MEMS pressure sensor using area-change capacitive technique
WO2006005332A3 (de) Festelektrolyt-gassenor mit heizelement
WO2007104483A3 (de) Epitaktischer stoffsensitiver sensor
WO2009008258A1 (ja) センサ装置及びその製造方法
US20250224286A1 (en) Sensor chip, pressure sensor, method of fabricating pressure sensor
WO2011112059A3 (ko) 나노 재료를 이용한 센서 시스템 및 그 제조 방법
CN1929086A (zh) 硅soi基片上制造检测磁场/压力mosfet的方法

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880107211.8

Country of ref document: CN

ENP Entry into the national phase

Ref document number: 2008541182

Country of ref document: JP

Kind code of ref document: A

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08831153

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2008831153

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 1363/CHENP/2010

Country of ref document: IN

WWE Wipo information: entry into national phase

Ref document number: 12677646

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE