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WO2009008258A1 - センサ装置及びその製造方法 - Google Patents

センサ装置及びその製造方法 Download PDF

Info

Publication number
WO2009008258A1
WO2009008258A1 PCT/JP2008/061446 JP2008061446W WO2009008258A1 WO 2009008258 A1 WO2009008258 A1 WO 2009008258A1 JP 2008061446 W JP2008061446 W JP 2008061446W WO 2009008258 A1 WO2009008258 A1 WO 2009008258A1
Authority
WO
WIPO (PCT)
Prior art keywords
sensor device
board
manufacturing
section
thermistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/061446
Other languages
English (en)
French (fr)
Inventor
Hajime Yamada
Yoshimitsu Ushimi
Tomoyuki Kuro
Takahiro Oguchi
Naoko Aizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of WO2009008258A1 publication Critical patent/WO2009008258A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0252—Constructional arrangements for compensating for fluctuations caused by, e.g. temperature, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a photometer; Purge systems, cleaning devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Thermistors And Varistors (AREA)

Abstract

　特性が安定し、感度が高く、容易にかつ低コストで製造できるセンサ装置及びその製造方法を提供する。 　センサ装置１０は、特定の対象物を検出する検出層１８と、その上に検出層１８が配置され、温度変化を検知する温度検出部とを備えた少なくとも一つの反応検知素子を有する。温度検出部は、薄化されたバルク材からなるサーミスタ基板１２と、サーミスタ基板１２上に形成され、サーミスタ基板１２の電気抵抗の変化を検出するための電極１４とを備え、かつ、支持部２０を介して支持基板２２に接合され、メンブレン構造をなす。
PCT/JP2008/061446 2007-07-09 2008-06-24 センサ装置及びその製造方法 Ceased WO2009008258A1 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007180267 2007-07-09
JP2007-180267 2007-07-09
JP2008-035336 2008-02-15
JP2008035336 2008-02-15

Publications (1)

Publication Number Publication Date
WO2009008258A1 true WO2009008258A1 (ja) 2009-01-15

Family

ID=40228437

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/061446 Ceased WO2009008258A1 (ja) 2007-07-09 2008-06-24 センサ装置及びその製造方法

Country Status (1)

Country Link
WO (1) WO2009008258A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009157123A1 (ja) * 2008-06-26 2009-12-30 株式会社 村田製作所 センサ装置及びその製造方法
WO2013125734A1 (en) * 2012-02-24 2013-08-29 Nec Corporation Bolometer and manufacturing method thereof
EP4478040A1 (de) * 2023-06-15 2024-12-18 Drägerwerk AG & Co. KGaA Vorrichtung und verfahren zum detektieren eines zielgases mittels mehrerer detektor-kompensator-paare

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06160177A (ja) * 1992-11-20 1994-06-07 Tdk Corp 赤外線検出器
JP2000009672A (ja) * 1998-06-26 2000-01-14 Yazaki Corp 接触燃焼式ガスセンサ
JP2000121431A (ja) * 1998-10-14 2000-04-28 Mitsubishi Materials Corp 焦電型赤外線センサ
JP2002168818A (ja) * 2000-12-01 2002-06-14 Yazaki Corp ガス検出装置及びガス検出方法
JP2004093470A (ja) * 2002-09-03 2004-03-25 Ngk Spark Plug Co Ltd シリコン製マイクロセンサ
JP2005098846A (ja) * 2003-09-25 2005-04-14 Tdk Corp ガスセンサ
JP2005098742A (ja) * 2003-09-22 2005-04-14 Oizumi Seisakusho:Kk 接触燃焼式水素センサー
JP2005539218A (ja) * 2002-09-16 2005-12-22 コミサリア、ア、レネルジ、アトミク ２つの重複する検出器を備える一体化ハウジングを有する電磁放射検出装置
JP2006047276A (ja) * 2004-07-07 2006-02-16 National Institute Of Advanced Industrial & Technology 微細パターン形成方法
WO2007129547A1 (ja) * 2006-05-10 2007-11-15 Murata Manufacturing Co., Ltd. 赤外線センサおよびその製造方法

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06160177A (ja) * 1992-11-20 1994-06-07 Tdk Corp 赤外線検出器
JP2000009672A (ja) * 1998-06-26 2000-01-14 Yazaki Corp 接触燃焼式ガスセンサ
JP2000121431A (ja) * 1998-10-14 2000-04-28 Mitsubishi Materials Corp 焦電型赤外線センサ
JP2002168818A (ja) * 2000-12-01 2002-06-14 Yazaki Corp ガス検出装置及びガス検出方法
JP2004093470A (ja) * 2002-09-03 2004-03-25 Ngk Spark Plug Co Ltd シリコン製マイクロセンサ
JP2005539218A (ja) * 2002-09-16 2005-12-22 コミサリア、ア、レネルジ、アトミク ２つの重複する検出器を備える一体化ハウジングを有する電磁放射検出装置
JP2005098742A (ja) * 2003-09-22 2005-04-14 Oizumi Seisakusho:Kk 接触燃焼式水素センサー
JP2005098846A (ja) * 2003-09-25 2005-04-14 Tdk Corp ガスセンサ
JP2006047276A (ja) * 2004-07-07 2006-02-16 National Institute Of Advanced Industrial & Technology 微細パターン形成方法
WO2007129547A1 (ja) * 2006-05-10 2007-11-15 Murata Manufacturing Co., Ltd. 赤外線センサおよびその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009157123A1 (ja) * 2008-06-26 2009-12-30 株式会社 村田製作所 センサ装置及びその製造方法
WO2013125734A1 (en) * 2012-02-24 2013-08-29 Nec Corporation Bolometer and manufacturing method thereof
EP4478040A1 (de) * 2023-06-15 2024-12-18 Drägerwerk AG & Co. KGaA Vorrichtung und verfahren zum detektieren eines zielgases mittels mehrerer detektor-kompensator-paare

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