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WO2008126235A1 - 駆動装置 - Google Patents

駆動装置 Download PDF

Info

Publication number
WO2008126235A1
WO2008126235A1 PCT/JP2007/057045 JP2007057045W WO2008126235A1 WO 2008126235 A1 WO2008126235 A1 WO 2008126235A1 JP 2007057045 W JP2007057045 W JP 2007057045W WO 2008126235 A1 WO2008126235 A1 WO 2008126235A1
Authority
WO
WIPO (PCT)
Prior art keywords
stage portion
drive device
excitation force
elastic portions
portions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/057045
Other languages
English (en)
French (fr)
Inventor
Jun Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corp filed Critical Pioneer Corp
Priority to JP2009508785A priority Critical patent/JP4542616B2/ja
Priority to PCT/JP2007/057045 priority patent/WO2008126235A1/ja
Priority to US12/532,926 priority patent/US20100122386A1/en
Publication of WO2008126235A1 publication Critical patent/WO2008126235A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/02—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using ferroelectric record carriers; Record carriers therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

駆動装置（１００ａ）は、ベース部（１１０）と、被駆動物（１２）が搭載されると共に、移動可能なステージ部（１３０）と、ベース部とステージ部とを接続すると共に、ステージ部を一の方向（Ｙ軸）に沿って移動させるような弾性を有する弾性部（１２）と、ステージ部及び弾性部により定まる共振周波数でステージ部が一の方向に沿って共振するようにステージ部を移動させるための加振力であって且つ圧電効果に起因した加振力を、間欠的に加える印加部（１４１、１４２、２２）とを備える。
PCT/JP2007/057045 2007-03-30 2007-03-30 駆動装置 Ceased WO2008126235A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009508785A JP4542616B2 (ja) 2007-03-30 2007-03-30 駆動装置
PCT/JP2007/057045 WO2008126235A1 (ja) 2007-03-30 2007-03-30 駆動装置
US12/532,926 US20100122386A1 (en) 2007-03-30 2007-03-30 Driving apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057045 WO2008126235A1 (ja) 2007-03-30 2007-03-30 駆動装置

Publications (1)

Publication Number Publication Date
WO2008126235A1 true WO2008126235A1 (ja) 2008-10-23

Family

ID=39863416

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057045 Ceased WO2008126235A1 (ja) 2007-03-30 2007-03-30 駆動装置

Country Status (3)

Country Link
US (1) US20100122386A1 (ja)
JP (1) JP4542616B2 (ja)
WO (1) WO2008126235A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008126246A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
WO2008126244A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
JP4542617B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH05231493A (ja) * 1992-02-19 1993-09-07 Kowa Co Ｘｙステージ装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62105440A (ja) * 1985-11-01 1987-05-15 Olympus Optical Co Ltd 振動型ステ−ジ装置
US5260562A (en) * 1989-09-29 1993-11-09 Regents Of The University Of California High-resolution light microscope using coherent light reflected from a target to modulate the power output from a laser
JP3029499B2 (ja) * 1992-05-07 2000-04-04 キヤノン株式会社 記録再生装置
US5526165A (en) * 1992-08-21 1996-06-11 Olympus Optical Co., Ltd. Scanner system
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置
JP2924630B2 (ja) * 1993-09-20 1999-07-26 富士通株式会社 磁気記憶装置
US5557156A (en) * 1994-12-02 1996-09-17 Digital Instruments, Inc. Scan control for scanning probe microscopes
JP3817120B2 (ja) * 2000-07-07 2006-08-30 住友重機械工業株式会社 移動テーブルの変位制御方法、部材加工方法、ｘ−ｙステージ装置、該ｘ−ｙステージ装置の製造方法
US7111504B2 (en) * 2004-09-30 2006-09-26 Lucent Technologies Inc. Atomic force microscope
WO2008126248A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
JP4542617B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH05231493A (ja) * 1992-02-19 1993-09-07 Kowa Co Ｘｙステージ装置

Also Published As

Publication number Publication date
JPWO2008126235A1 (ja) 2010-07-22
JP4542616B2 (ja) 2010-09-15
US20100122386A1 (en) 2010-05-13

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