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WO2008126244A1 - 駆動装置 - Google Patents

駆動装置 Download PDF

Info

Publication number
WO2008126244A1
WO2008126244A1 PCT/JP2007/057070 JP2007057070W WO2008126244A1 WO 2008126244 A1 WO2008126244 A1 WO 2008126244A1 JP 2007057070 W JP2007057070 W JP 2007057070W WO 2008126244 A1 WO2008126244 A1 WO 2008126244A1
Authority
WO
WIPO (PCT)
Prior art keywords
section
stage
moving
stage section
driven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/057070
Other languages
English (en)
French (fr)
Inventor
Jun Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corp filed Critical Pioneer Corp
Priority to US12/532,797 priority Critical patent/US7893642B2/en
Priority to JP2009508794A priority patent/JP4542618B2/ja
Priority to PCT/JP2007/057070 priority patent/WO2008126244A1/ja
Publication of WO2008126244A1 publication Critical patent/WO2008126244A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/02—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using ferroelectric record carriers; Record carriers therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Micromachines (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

駆動装置（１００ｐ、１００ｓ）は、ベース部（１３０－１）と、被駆動物（１２）が搭載されると共に、移動可能なステージ部（１３０－２）と、ステージ部を一の方向（Ｙ軸）に沿って移動させるような弾性を有する弾性部（１２０－２）と、ステージ部及び弾性部により定まる共振周波数でステージ部が一の方向に沿って共振するようにステージ部を移動させるための加振力を加える第１印加部（１５１－２－、１５２－２、２２）と、ステージ部を又はステージ部上に搭載される被駆動物を他の方向（Ｘ軸）に沿って段階的に又は連続的に移動させるための駆動力を加える第２印加部（１５１－１、１５２－１、２２）とを備え、ステージ部又はステージ部上に被駆動部として搭載される他のステージ部は、複数のステージ部分に分割されている。
PCT/JP2007/057070 2007-03-30 2007-03-30 駆動装置 Ceased WO2008126244A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/532,797 US7893642B2 (en) 2007-03-30 2007-03-30 Driving apparatus
JP2009508794A JP4542618B2 (ja) 2007-03-30 2007-03-30 駆動装置
PCT/JP2007/057070 WO2008126244A1 (ja) 2007-03-30 2007-03-30 駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057070 WO2008126244A1 (ja) 2007-03-30 2007-03-30 駆動装置

Publications (1)

Publication Number Publication Date
WO2008126244A1 true WO2008126244A1 (ja) 2008-10-23

Family

ID=39863425

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057070 Ceased WO2008126244A1 (ja) 2007-03-30 2007-03-30 駆動装置

Country Status (3)

Country Link
US (1) US7893642B2 (ja)
JP (1) JP4542618B2 (ja)
WO (1) WO2008126244A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8330329B2 (en) * 2007-03-30 2012-12-11 Pioneer Corporation Scanning probe driver
US7893642B2 (en) * 2007-03-30 2011-02-22 Pioneer Corporation Driving apparatus
DE102008012992A1 (de) * 2008-03-07 2009-09-10 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
US9527733B2 (en) * 2014-11-07 2016-12-27 The Chinese University Of Hong Kong Method and apparatus for dynamic-tuning

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH05314549A (ja) * 1992-05-07 1993-11-26 Canon Inc 記録再生装置
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62105440A (ja) * 1985-11-01 1987-05-15 Olympus Optical Co Ltd 振動型ステ−ジ装置
JP3817120B2 (ja) 2000-07-07 2006-08-30 住友重機械工業株式会社 移動テーブルの変位制御方法、部材加工方法、ｘ−ｙステージ装置、該ｘ−ｙステージ装置の製造方法
DE102006024381B3 (de) * 2006-05-24 2007-12-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS Vakuumsensor nach dem Reibungsprinzip
US20100122386A1 (en) * 2007-03-30 2010-05-13 Jun Suzuki Driving apparatus
WO2008126243A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
US7825565B2 (en) * 2007-03-30 2010-11-02 Pioneer Corporation Driving apparatus
US8330329B2 (en) * 2007-03-30 2012-12-11 Pioneer Corporation Scanning probe driver
US7893642B2 (en) * 2007-03-30 2011-02-22 Pioneer Corporation Driving apparatus
US8022597B2 (en) * 2007-03-30 2011-09-20 Pioneer Corporation Driver
JP4493057B2 (ja) * 2007-03-30 2010-06-30 パイオニア株式会社 駆動装置
US7808152B2 (en) * 2007-03-30 2010-10-05 Pioneer Corporation Drive device
JP4542615B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
WO2008126248A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH05314549A (ja) * 1992-05-07 1993-11-26 Canon Inc 記録再生装置
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置

Also Published As

Publication number Publication date
JPWO2008126244A1 (ja) 2010-07-22
US20100102769A1 (en) 2010-04-29
US7893642B2 (en) 2011-02-22
JP4542618B2 (ja) 2010-09-15

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