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WO2008126231A1 - 駆動装置 - Google Patents

駆動装置 Download PDF

Info

Publication number
WO2008126231A1
WO2008126231A1 PCT/JP2007/057040 JP2007057040W WO2008126231A1 WO 2008126231 A1 WO2008126231 A1 WO 2008126231A1 JP 2007057040 W JP2007057040 W JP 2007057040W WO 2008126231 A1 WO2008126231 A1 WO 2008126231A1
Authority
WO
WIPO (PCT)
Prior art keywords
section
stage
stage section
driver
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/057040
Other languages
English (en)
French (fr)
Inventor
Jun Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corp filed Critical Pioneer Corp
Priority to PCT/JP2007/057040 priority Critical patent/WO2008126231A1/ja
Publication of WO2008126231A1 publication Critical patent/WO2008126231A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/02—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using ferroelectric record carriers; Record carriers therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/11—Read heads, write heads or micropositioners for hard- or optical disks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/055—Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

駆動装置（１００）は、ベース部（１１０）と、被駆動物（１２）が搭載されると共に、移動可能なステージ部（１３０）と、ベース部とステージ部とを接続すると共に、ステージ部を一の方向（Ｘ軸）に沿って移動させるような弾性を有する弾性部（１２）と、ステージ部がステージ部及び弾性部により定まる共振周波数で一の方向に沿って共振するようにステージ部を移動させるための加振力を加える印加部（１４１、１４２、２２）とを備える。
PCT/JP2007/057040 2007-03-30 2007-03-30 駆動装置 Ceased WO2008126231A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057040 WO2008126231A1 (ja) 2007-03-30 2007-03-30 駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057040 WO2008126231A1 (ja) 2007-03-30 2007-03-30 駆動装置

Publications (1)

Publication Number Publication Date
WO2008126231A1 true WO2008126231A1 (ja) 2008-10-23

Family

ID=39863412

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057040 Ceased WO2008126231A1 (ja) 2007-03-30 2007-03-30 駆動装置

Country Status (1)

Country Link
WO (1) WO2008126231A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011061831A1 (ja) * 2009-11-19 2011-05-26 パイオニア株式会社 駆動装置
JP4852185B2 (ja) * 2009-11-19 2012-01-11 パイオニア株式会社 駆動装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011061831A1 (ja) * 2009-11-19 2011-05-26 パイオニア株式会社 駆動装置
WO2011061955A1 (ja) * 2009-11-19 2011-05-26 パイオニア株式会社 駆動装置
JP4852185B2 (ja) * 2009-11-19 2012-01-11 パイオニア株式会社 駆動装置

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