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WO2008152821A1 - 振動型アクチュエータ及びそれを備えた駆動装置 - Google Patents

振動型アクチュエータ及びそれを備えた駆動装置 Download PDF

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Publication number
WO2008152821A1
WO2008152821A1 PCT/JP2008/001534 JP2008001534W WO2008152821A1 WO 2008152821 A1 WO2008152821 A1 WO 2008152821A1 JP 2008001534 W JP2008001534 W JP 2008001534W WO 2008152821 A1 WO2008152821 A1 WO 2008152821A1
Authority
WO
WIPO (PCT)
Prior art keywords
oscillation
same
drive device
type actuator
oscillation type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/001534
Other languages
English (en)
French (fr)
Inventor
Eiichi Nagaoka
Yusuke Adachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Priority to US12/664,115 priority Critical patent/US8237331B2/en
Priority to JP2009519170A priority patent/JP5186495B2/ja
Publication of WO2008152821A1 publication Critical patent/WO2008152821A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0065—Friction interface
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

　駆動子の重量を重くすることなく、振動型アクチュエータの駆動効率を向上させる。 　超音波アクチュエータ（２）は、縦振動と屈曲振動とを行うアクチュエータ本体（４）と、アクチュエータ本体（４）の一の側面である設置面（４０ａ）上に設けられて、アクチュエータ本体（４）の振動に従って周回運動することで駆動力を出力する駆動子（８，８）とを備えている。駆動子（８）には、貫通孔（８０）が形成されている。
PCT/JP2008/001534 2007-06-14 2008-06-13 振動型アクチュエータ及びそれを備えた駆動装置 Ceased WO2008152821A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/664,115 US8237331B2 (en) 2007-06-14 2008-06-13 Vibratory actuator and drive unit including the same
JP2009519170A JP5186495B2 (ja) 2007-06-14 2008-06-13 振動型アクチュエータ及びそれを備えた駆動装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-157154 2007-06-14
JP2007157154 2007-06-14

Publications (1)

Publication Number Publication Date
WO2008152821A1 true WO2008152821A1 (ja) 2008-12-18

Family

ID=40129435

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/001534 Ceased WO2008152821A1 (ja) 2007-06-14 2008-06-13 振動型アクチュエータ及びそれを備えた駆動装置

Country Status (3)

Country Link
US (1) US8237331B2 (ja)
JP (1) JP5186495B2 (ja)
WO (1) WO2008152821A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110047132A (ko) * 2009-10-29 2011-05-06 시코 가부시키가이샤 리니어 구동장치
JP2011234608A (ja) * 2010-04-06 2011-11-17 Canon Inc 振動型アクチュエータ、振動子及び振動子の製造方法
JP2019517767A (ja) * 2016-06-01 2019-06-24 フィジック インストゥルメント（ピーアイ）ゲーエムベーハー アンド ツェーオー．カーゲー 対角方向に励起可能なアクチュエータプレートを有する超音波モータ

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008126354A1 (ja) * 2007-03-15 2008-10-23 Panasonic Corporation 超音波アクチュエータ
WO2008120454A1 (ja) * 2007-03-16 2008-10-09 Panasonic Corporation 振動型アクチュエータの制御装置
JP2009254198A (ja) * 2008-04-10 2009-10-29 Sharp Corp 超音波モータおよび超音波振動子
KR101653826B1 (ko) * 2009-06-29 2016-09-02 삼성전자주식회사 초음파 모터 및 그 제조 방법
JP5909624B2 (ja) * 2010-08-04 2016-04-27 パナソニックＩｐマネジメント株式会社 駆動装置
JP5959915B2 (ja) 2012-04-19 2016-08-02 キヤノン株式会社 振動子の製造方法
JP2018019529A (ja) * 2016-07-28 2018-02-01 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボットおよび電子部品搬送装置
CN110601597B (zh) * 2019-09-24 2022-07-15 太原科技大学 一种双模态复合型尺蠖超声波电机

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001086775A (ja) * 1999-09-13 2001-03-30 Nikon Corp 振動アクチュエータ
JP2001157474A (ja) * 1999-09-13 2001-06-08 Nikon Corp 振動アクチュエータ
JP2001224186A (ja) * 2000-02-08 2001-08-17 Nikon Corp 振動アクチュエータ及びその製造方法
JP2004297910A (ja) * 2003-03-27 2004-10-21 Canon Inc 振動型駆動装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6747394B2 (en) * 2002-06-19 2004-06-08 Piezomotor Uppsala Ab Near-resonance electromechanical motor
JP2004304963A (ja) 2003-03-31 2004-10-28 Seiko Epson Corp 圧電アクチュエータ
JP4309736B2 (ja) * 2003-10-01 2009-08-05 オリンパス株式会社 振動波リニアモータ
JP2006087233A (ja) * 2004-09-16 2006-03-30 Rikogaku Shinkokai 超音波モータのステータ
JP4794897B2 (ja) * 2005-04-26 2011-10-19 オリンパス株式会社 超音波モータ
JP5153184B2 (ja) 2007-03-30 2013-02-27 キヤノン株式会社 振動波駆動装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001086775A (ja) * 1999-09-13 2001-03-30 Nikon Corp 振動アクチュエータ
JP2001157474A (ja) * 1999-09-13 2001-06-08 Nikon Corp 振動アクチュエータ
JP2001224186A (ja) * 2000-02-08 2001-08-17 Nikon Corp 振動アクチュエータ及びその製造方法
JP2004297910A (ja) * 2003-03-27 2004-10-21 Canon Inc 振動型駆動装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110047132A (ko) * 2009-10-29 2011-05-06 시코 가부시키가이샤 리니어 구동장치
JP2011095446A (ja) * 2009-10-29 2011-05-12 Shicoh Engineering Co Ltd リニア駆動装置
KR101659630B1 (ko) 2009-10-29 2016-09-26 신시코 카기 가부시키가이샤 리니어 구동장치
JP2011234608A (ja) * 2010-04-06 2011-11-17 Canon Inc 振動型アクチュエータ、振動子及び振動子の製造方法
JP2019517767A (ja) * 2016-06-01 2019-06-24 フィジック インストゥルメント（ピーアイ）ゲーエムベーハー アンド ツェーオー．カーゲー 対角方向に励起可能なアクチュエータプレートを有する超音波モータ

Also Published As

Publication number Publication date
JP5186495B2 (ja) 2013-04-17
US20100181870A1 (en) 2010-07-22
JPWO2008152821A1 (ja) 2010-08-26
US8237331B2 (en) 2012-08-07

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