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WO2008152820A1 - 振動型アクチュエータ及びそれを備えた駆動装置 - Google Patents

振動型アクチュエータ及びそれを備えた駆動装置 Download PDF

Info

Publication number
WO2008152820A1
WO2008152820A1 PCT/JP2008/001533 JP2008001533W WO2008152820A1 WO 2008152820 A1 WO2008152820 A1 WO 2008152820A1 JP 2008001533 W JP2008001533 W JP 2008001533W WO 2008152820 A1 WO2008152820 A1 WO 2008152820A1
Authority
WO
WIPO (PCT)
Prior art keywords
mldr
drivers
actuator
oscillation
actuator body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/001533
Other languages
English (en)
French (fr)
Inventor
Yusuke Adachi
Takayuki Hayashi
Eiichi Nagaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Priority to US12/664,086 priority Critical patent/US8179020B2/en
Priority to JP2009519169A priority patent/JP5194006B2/ja
Publication of WO2008152820A1 publication Critical patent/WO2008152820A1/ja
Anticipated expiration legal-status Critical
Priority to US13/419,777 priority patent/US8350446B2/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0065—Friction interface
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

　駆動子との摩擦により被当接体に轍が形成される場合でも、可動体を安定して駆動することができる振動型アクチュエータを提供する。 　超音波アクチュエータ（２）は、縦振動と屈曲振動とを行うアクチュエータ本体（４）と、アクチュエータ本体（４）の一の側面である設置面（４０ａ）上に設けられて、アクチュエータ本体（４）の振動に従って周回運動することで駆動力を出力する駆動子（８ａ，…，８ｂ，…）とを備えている。駆動子（８ａ，…，８ｂ，…）は、設置面（４０ａ）上において、アクチュエータ本体（４）の長手方向における異なる位置に設けられた第１駆動子（８ａ，８ａ，…）と第２駆動子（８ｂ，８ｂ，…）とを含んでいる。第１駆動子（８ａ，８ａ，…）と第２駆動子（８ｂ，８ｂ，…）とは、アクチュエータ本体（４）の厚み方向における異なる位置に位置する。
PCT/JP2008/001533 2007-06-14 2008-06-13 振動型アクチュエータ及びそれを備えた駆動装置 Ceased WO2008152820A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/664,086 US8179020B2 (en) 2007-06-14 2008-06-13 Vibratory actuator and drive device using the same
JP2009519169A JP5194006B2 (ja) 2007-06-14 2008-06-13 振動型アクチュエータ及びそれを備えた駆動装置
US13/419,777 US8350446B2 (en) 2007-06-14 2012-03-14 Vibratory actuator and drive device using the same

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007-157151 2007-06-14
JP2007157151 2007-06-14
JP2007157149 2007-06-14
JP2007-157149 2007-06-14
JP2007157146 2007-06-14
JP2007-157146 2007-06-14

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/664,086 A-371-Of-International US8179020B2 (en) 2007-06-14 2008-06-13 Vibratory actuator and drive device using the same
US13/419,777 Continuation US8350446B2 (en) 2007-06-14 2012-03-14 Vibratory actuator and drive device using the same

Publications (1)

Publication Number Publication Date
WO2008152820A1 true WO2008152820A1 (ja) 2008-12-18

Family

ID=40129434

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/001533 Ceased WO2008152820A1 (ja) 2007-06-14 2008-06-13 振動型アクチュエータ及びそれを備えた駆動装置

Country Status (3)

Country Link
US (2) US8179020B2 (ja)
JP (1) JP5194006B2 (ja)
WO (1) WO2008152820A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018125431A (ja) * 2017-02-01 2018-08-09 Tdk株式会社 圧電アクチュエータ
WO2022085564A1 (ja) * 2020-10-23 2022-04-28 京セラ株式会社 圧電アクチュエータ

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5791237B2 (ja) * 2010-06-14 2015-10-07 キヤノン株式会社 振動型駆動装置
CN102751902B (zh) * 2012-06-25 2016-02-17 南京航空航天大学 并联减摩驱动式超声电机
FR2993066B1 (fr) * 2012-07-04 2015-04-10 Commissariat Energie Atomique Dispositif tactile d'aide a la navigation
EP3276817A1 (en) 2016-07-29 2018-01-31 Physik Instrumente (PI) GmbH & Co. Kg Actuator
EP3301730B1 (de) * 2016-09-29 2018-12-26 Airbus Defence and Space GmbH Energiewandlervorrichtung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03251088A (ja) * 1990-02-27 1991-11-08 Kazuma Suzuki 超音波モータ
JPH09285155A (ja) * 1996-04-12 1997-10-31 Nikon Corp 振動アクチュエータ
JP2003244978A (ja) * 2002-02-21 2003-08-29 Iai:Kk ステージと該ステージに使用される超音波モータ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5698930A (en) * 1993-11-15 1997-12-16 Nikon Corporation Ultrasonic wave motor and method of manufacture
US5912525A (en) * 1996-03-21 1999-06-15 Nikon Corporation Vibration actuator
JP2004304963A (ja) 2003-03-31 2004-10-28 Seiko Epson Corp 圧電アクチュエータ
JP4794897B2 (ja) * 2005-04-26 2011-10-19 オリンパス株式会社 超音波モータ
JP2006304963A (ja) 2005-04-27 2006-11-09 Tau Giken:Kk 非接触診断装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03251088A (ja) * 1990-02-27 1991-11-08 Kazuma Suzuki 超音波モータ
JPH09285155A (ja) * 1996-04-12 1997-10-31 Nikon Corp 振動アクチュエータ
JP2003244978A (ja) * 2002-02-21 2003-08-29 Iai:Kk ステージと該ステージに使用される超音波モータ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018125431A (ja) * 2017-02-01 2018-08-09 Tdk株式会社 圧電アクチュエータ
WO2022085564A1 (ja) * 2020-10-23 2022-04-28 京セラ株式会社 圧電アクチュエータ
JP7596398B2 (ja) 2020-10-23 2024-12-09 京セラ株式会社 圧電アクチュエータ

Also Published As

Publication number Publication date
US20120212104A1 (en) 2012-08-23
US20100176690A1 (en) 2010-07-15
US8179020B2 (en) 2012-05-15
JP5194006B2 (ja) 2013-05-08
JPWO2008152820A1 (ja) 2010-08-26
US8350446B2 (en) 2013-01-08

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