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WO2008146438A1 - 貼り合わせ装置、接着剤の溶解を防ぐ方法、及び貼り合わせ方法 - Google Patents

貼り合わせ装置、接着剤の溶解を防ぐ方法、及び貼り合わせ方法 Download PDF

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Publication number
WO2008146438A1
WO2008146438A1 PCT/JP2008/000956 JP2008000956W WO2008146438A1 WO 2008146438 A1 WO2008146438 A1 WO 2008146438A1 JP 2008000956 W JP2008000956 W JP 2008000956W WO 2008146438 A1 WO2008146438 A1 WO 2008146438A1
Authority
WO
WIPO (PCT)
Prior art keywords
sticking
dissolving
preventing adhesive
sticking device
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/000956
Other languages
English (en)
French (fr)
Inventor
Satoshi Ohya
Atsushi Miyanari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to US12/451,629 priority Critical patent/US8425713B2/en
Publication of WO2008146438A1 publication Critical patent/WO2008146438A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68318—Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

　ウエハ（１２）とサポートプレート（１４）とを接着剤（１６）を介して貼り合わせ、貼り合わせ体（１８）を形成する貼り合わせ部（２０）と、貼り合わせ体（１８）をプラズマ処理するプラズマ処理部（２２）とを備えている。
PCT/JP2008/000956 2007-05-30 2008-04-11 貼り合わせ装置、接着剤の溶解を防ぐ方法、及び貼り合わせ方法 Ceased WO2008146438A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/451,629 US8425713B2 (en) 2007-05-30 2008-04-11 Bonding apparatus, method for preventing dissolving of adhesive agent, and bonding method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-143127 2007-05-30
JP2007143127A JP5090789B2 (ja) 2007-05-30 2007-05-30 貼り合わせ装置、接着剤の溶解を防ぐ方法、及び貼り合わせ方法

Publications (1)

Publication Number Publication Date
WO2008146438A1 true WO2008146438A1 (ja) 2008-12-04

Family

ID=40074716

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000956 Ceased WO2008146438A1 (ja) 2007-05-30 2008-04-11 貼り合わせ装置、接着剤の溶解を防ぐ方法、及び貼り合わせ方法

Country Status (4)

Country Link
US (1) US8425713B2 (ja)
JP (1) JP5090789B2 (ja)
TW (1) TW200903607A (ja)
WO (1) WO2008146438A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012109538A (ja) * 2010-10-29 2012-06-07 Tokyo Ohka Kogyo Co Ltd 積層体、およびその積層体の分離方法
US9308715B2 (en) 2010-11-15 2016-04-12 Tokyo Ohka Kogyo Co., Ltd. Laminate and method for separating the same
JP2021111675A (ja) * 2020-01-09 2021-08-02 ハイソル株式会社 半導体チップと支持基板との貼合わせ方法、半導体チップ研磨方法、及びウェハと支持基板との貼合わせ方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2523209B1 (de) 2010-04-23 2017-03-08 EV Group GmbH Vorrichtung und Verfahren zum Ablösen eines Produktsubstrats von einem Trägersubstrat
JP5586314B2 (ja) * 2010-04-23 2014-09-10 芝浦メカトロニクス株式会社 半導体装置の製造装置及び半導体装置の製造方法
JP5134673B2 (ja) * 2010-10-29 2013-01-30 東京エレクトロン株式会社 貼り合わせ装置及び貼り合わせ方法
US8507363B2 (en) * 2011-06-15 2013-08-13 Applied Materials, Inc. Laser and plasma etch wafer dicing using water-soluble die attach film
JP6034625B2 (ja) * 2012-09-03 2016-11-30 東京応化工業株式会社 剥離方法
JP2014160743A (ja) * 2013-02-19 2014-09-04 Tokyo Ohka Kogyo Co Ltd 貼付装置及び貼付装置の洗浄方法
JP6165647B2 (ja) * 2014-01-31 2017-07-19 東京エレクトロン株式会社 塗布装置および接合システム
JP6437404B2 (ja) * 2015-09-09 2018-12-12 東芝メモリ株式会社 半導体装置の製造方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000042402A (ja) * 1998-07-29 2000-02-15 Kawamura Inst Of Chem Res 液体輸送デバイス及びその製造方法
JP2002292776A (ja) * 2001-03-28 2002-10-09 Tdk Corp 物体表面の防汚処理方法及び防汚処理された物体
JP2003324042A (ja) * 2002-05-01 2003-11-14 Sony Corp 基板接着方法
JP2004349540A (ja) * 2003-05-23 2004-12-09 Seiko Epson Corp 薄膜装置の製造方法、電気光学装置、及び電子機器
JP2005129919A (ja) * 2003-10-02 2005-05-19 Semiconductor Energy Lab Co Ltd 半導体素子の作製方法
JP2005252173A (ja) * 2004-03-08 2005-09-15 Toyota Motor Corp 半導体素子の製造方法及び該方法に利用され得る装置
JP2006156683A (ja) * 2004-11-29 2006-06-15 Tokyo Ohka Kogyo Co Ltd サポートプレートの貼り付け方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5451547A (en) 1991-08-26 1995-09-19 Nippondenso Co., Ltd. Method of manufacturing semiconductor substrate
JP3175323B2 (ja) * 1991-08-26 2001-06-11 株式会社デンソー 半導体基板の製造方法
JPH08188758A (ja) * 1995-01-13 1996-07-23 Sekisui Chem Co Ltd 表面保護フィルム
US6506457B2 (en) * 2001-03-30 2003-01-14 Cardiac Pacemakers, Inc. Lubricious, wear resistant surface coating by plasma polymerization
DE10137376A1 (de) * 2001-07-31 2003-02-27 Infineon Technologies Ag Geklebte Chip- und Waferstapel
US6897128B2 (en) * 2002-11-20 2005-05-24 Matsushita Electric Industrial Co., Ltd. Method of manufacturing semiconductor device, plasma processing apparatus and plasma processing method
US20050042881A1 (en) * 2003-05-12 2005-02-24 Tokyo Electron Limited Processing apparatus
CN100568457C (zh) 2003-10-02 2009-12-09 株式会社半导体能源研究所 半导体装置的制造方法
JP2006258958A (ja) * 2005-03-15 2006-09-28 Shibaura Mechatronics Corp 基板接着方法及び基板接着装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000042402A (ja) * 1998-07-29 2000-02-15 Kawamura Inst Of Chem Res 液体輸送デバイス及びその製造方法
JP2002292776A (ja) * 2001-03-28 2002-10-09 Tdk Corp 物体表面の防汚処理方法及び防汚処理された物体
JP2003324042A (ja) * 2002-05-01 2003-11-14 Sony Corp 基板接着方法
JP2004349540A (ja) * 2003-05-23 2004-12-09 Seiko Epson Corp 薄膜装置の製造方法、電気光学装置、及び電子機器
JP2005129919A (ja) * 2003-10-02 2005-05-19 Semiconductor Energy Lab Co Ltd 半導体素子の作製方法
JP2005252173A (ja) * 2004-03-08 2005-09-15 Toyota Motor Corp 半導体素子の製造方法及び該方法に利用され得る装置
JP2006156683A (ja) * 2004-11-29 2006-06-15 Tokyo Ohka Kogyo Co Ltd サポートプレートの貼り付け方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012109538A (ja) * 2010-10-29 2012-06-07 Tokyo Ohka Kogyo Co Ltd 積層体、およびその積層体の分離方法
US9492986B2 (en) 2010-10-29 2016-11-15 Tokyo Ohka Kogyo Co., Ltd. Laminate and method for separating the same
US9308715B2 (en) 2010-11-15 2016-04-12 Tokyo Ohka Kogyo Co., Ltd. Laminate and method for separating the same
JP2021111675A (ja) * 2020-01-09 2021-08-02 ハイソル株式会社 半導体チップと支持基板との貼合わせ方法、半導体チップ研磨方法、及びウェハと支持基板との貼合わせ方法

Also Published As

Publication number Publication date
US8425713B2 (en) 2013-04-23
JP2008300487A (ja) 2008-12-11
TW200903607A (en) 2009-01-16
US20100096080A1 (en) 2010-04-22
JP5090789B2 (ja) 2012-12-05
TWI375261B (ja) 2012-10-21

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