TWI380130B - Photosensitive composition and laminated body thereof - Google Patents

Photosensitive composition and laminated body thereof Download PDF

Info

Publication number: TWI380130B
Authority: TW; Taiwan
Prior art keywords: photosensitive resin; substrate; mass; group; resin composition
Prior art date: 2007-08-15

Application number

TW97131356A

Other languages

English (en)

Chinese (zh)

Other versions

TW200921275A (en

Inventor

Yukimasa Baba

Original Assignee

Asahi Kasei Emd Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-08-15

Filing date

2008-08-15

Publication date

2012-12-21

2008-08-15 Application filed by Asahi Kasei Emd Corp filed Critical Asahi Kasei Emd Corp

2009-05-16 Publication of TW200921275A publication Critical patent/TW200921275A/zh

2012-12-21 Application granted granted Critical

2012-12-21 Publication of TWI380130B publication Critical patent/TWI380130B/zh

Links

239000000203 mixture Substances 0.000 title claims description 11
150000001875 compounds Chemical class 0.000 claims description 55
239000011342 resin composition Substances 0.000 claims description 54
239000000758 substrate Substances 0.000 claims description 52
-1 acridine compound Chemical class 0.000 claims description 46
229920005989 resin Polymers 0.000 claims description 43
239000011347 resin Substances 0.000 claims description 43
229920002120 photoresistant polymer Polymers 0.000 claims description 41
238000000034 method Methods 0.000 claims description 34
OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 32
238000004519 manufacturing process Methods 0.000 claims description 28
DZBUGLKDJFMEHC-UHFFFAOYSA-N benzoquinolinylidene Natural products C1=CC=CC2=CC3=CC=CC=C3N=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-N 0.000 claims description 18
239000002253 acid Substances 0.000 claims description 13
239000000178 monomer Substances 0.000 claims description 13
239000000126 substance Substances 0.000 claims description 13
125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 11
229920000642 polymer Polymers 0.000 claims description 10
229910052751 metal Inorganic materials 0.000 claims description 9
239000002184 metal Substances 0.000 claims description 9
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
229910052799 carbon Inorganic materials 0.000 claims description 8
239000003999 initiator Substances 0.000 claims description 8
125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 8
238000010030 laminating Methods 0.000 claims description 7
239000011521 glass Substances 0.000 claims description 6
125000002947 alkylene group Chemical group 0.000 claims description 5
238000007747 plating Methods 0.000 claims description 4
239000004020 conductor Substances 0.000 claims description 3
229910052737 gold Inorganic materials 0.000 claims description 3
239000010931 gold Substances 0.000 claims description 3
229910052739 hydrogen Inorganic materials 0.000 claims description 3
239000001257 hydrogen Substances 0.000 claims description 3
125000003396 thiol group Chemical group [H]S* 0.000 claims description 3
125000003118 aryl group Chemical group 0.000 claims description 2
239000003795 chemical substances by application Substances 0.000 claims description 2
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 claims 2
125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 claims 1
125000000547 substituted alkyl group Chemical group 0.000 claims 1
239000010410 layer Substances 0.000 description 31
NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 20
DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 20
239000004471 Glycine Substances 0.000 description 10
239000011241 protective layer Substances 0.000 description 10
239000000243 solution Substances 0.000 description 10
ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 8
VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 7
230000000052 comparative effect Effects 0.000 description 7
229920001451 polypropylene glycol Polymers 0.000 description 7
CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 6
239000007864 aqueous solution Substances 0.000 description 6
239000000463 material Substances 0.000 description 6
230000035945 sensitivity Effects 0.000 description 6
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
239000002202 Polyethylene glycol Substances 0.000 description 5
244000028419 Styrax benzoin Species 0.000 description 5
235000000126 Styrax benzoin Nutrition 0.000 description 5
235000008411 Sumatra benzointree Nutrition 0.000 description 5
239000002585 base Substances 0.000 description 5
229960002130 benzoin Drugs 0.000 description 5
125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 5
229920001577 copolymer Polymers 0.000 description 5
239000013078 crystal Substances 0.000 description 5
150000002148 esters Chemical class 0.000 description 5
235000019382 gum benzoic Nutrition 0.000 description 5
125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 5
125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 5
229920001223 polyethylene glycol Polymers 0.000 description 5
238000005488 sandblasting Methods 0.000 description 5
239000004065 semiconductor Substances 0.000 description 5
238000003860 storage Methods 0.000 description 5
HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 4
IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 4
229910052802 copper Inorganic materials 0.000 description 4
239000010949 copper Substances 0.000 description 4
125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 4
230000001747 exhibiting effect Effects 0.000 description 4
BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 4
150000002923 oximes Chemical class 0.000 description 4
QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 4
239000002904 solvent Substances 0.000 description 4
239000000052 vinegar Substances 0.000 description 4
235000021419 vinegar Nutrition 0.000 description 4
ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
KFJDQPJLANOOOB-UHFFFAOYSA-N 2h-benzotriazole-4-carboxylic acid Chemical class OC(=O)C1=CC=CC2=NNN=C12 KFJDQPJLANOOOB-UHFFFAOYSA-N 0.000 description 3
IBPADELTPKRSCQ-UHFFFAOYSA-N 9h-fluoren-1-yl prop-2-enoate Chemical compound C1C2=CC=CC=C2C2=C1C(OC(=O)C=C)=CC=C2 IBPADELTPKRSCQ-UHFFFAOYSA-N 0.000 description 3
UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
239000005977 Ethylene Substances 0.000 description 3
PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
239000004698 Polyethylene Substances 0.000 description 3
PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 3
150000001412 amines Chemical class 0.000 description 3
238000004040 coloring Methods 0.000 description 3
239000000539 dimer Substances 0.000 description 3
238000011156 evaluation Methods 0.000 description 3
150000002366 halogen compounds Chemical class 0.000 description 3
239000003112 inhibitor Substances 0.000 description 3
238000003475 lamination Methods 0.000 description 3
238000005192 partition Methods 0.000 description 3
238000000206 photolithography Methods 0.000 description 3
229920000573 polyethylene Polymers 0.000 description 3
238000010526 radical polymerization reaction Methods 0.000 description 3
AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 2
FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-naphthoquinone Chemical compound C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 description 2
YBYIRNPNPLQARY-UHFFFAOYSA-N 1H-indene Natural products C1=CC=C2CC=CC2=C1 YBYIRNPNPLQARY-UHFFFAOYSA-N 0.000 description 2
SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
DAWJJMYZJQJLPZ-UHFFFAOYSA-N 2-sulfanylprop-2-enoic acid Chemical compound OC(=O)C(S)=C DAWJJMYZJQJLPZ-UHFFFAOYSA-N 0.000 description 2
OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 2
125000004800 4-bromophenyl group Chemical group [H]C1=C([H])C(*)=C([H])C([H])=C1Br 0.000 description 2
MTRFEWTWIPAXLG-UHFFFAOYSA-N 9-phenylacridine Chemical compound C1=CC=CC=C1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 MTRFEWTWIPAXLG-UHFFFAOYSA-N 0.000 description 2
ZSGMOQYDNJRFDX-UHFFFAOYSA-N 9-propylacridine Chemical compound C1=CC=C2C(CCC)=C(C=CC=C3)C3=NC2=C1 ZSGMOQYDNJRFDX-UHFFFAOYSA-N 0.000 description 2
HKMTVMBEALTRRR-UHFFFAOYSA-N Benzo[a]fluorene Chemical compound C1=CC=CC2=C3CC4=CC=CC=C4C3=CC=C21 HKMTVMBEALTRRR-UHFFFAOYSA-N 0.000 description 2
229930185605 Bisphenol Natural products 0.000 description 2
FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 2
VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
239000005057 Hexamethylene diisocyanate Substances 0.000 description 2
QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
239000004793 Polystyrene Substances 0.000 description 2
229910000831 Steel Inorganic materials 0.000 description 2
DOOTYTYQINUNNV-UHFFFAOYSA-N Triethyl citrate Chemical group CCOC(=O)CC(O)(C(=O)OCC)CC(=O)OCC DOOTYTYQINUNNV-UHFFFAOYSA-N 0.000 description 2
239000000654 additive Substances 0.000 description 2
230000000996 additive effect Effects 0.000 description 2
125000000217 alkyl group Chemical group 0.000 description 2
WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
239000012965 benzophenone Substances 0.000 description 2
230000015572 biosynthetic process Effects 0.000 description 2
239000004305 biphenyl Substances 0.000 description 2
238000005422 blasting Methods 0.000 description 2
NNBFNNNWANBMTI-UHFFFAOYSA-M brilliant green Chemical compound OS([O-])(=O)=O.C1=CC(N(CC)CC)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](CC)CC)C=C1 NNBFNNNWANBMTI-UHFFFAOYSA-M 0.000 description 2
125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
150000001732 carboxylic acid derivatives Chemical class 0.000 description 2
150000002009 diols Chemical class 0.000 description 2
238000005530 etching Methods 0.000 description 2
125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 2
STVZJERGLQHEKB-UHFFFAOYSA-N ethylene glycol dimethacrylate Chemical compound CC(=C)C(=O)OCCOC(=O)C(C)=C STVZJERGLQHEKB-UHFFFAOYSA-N 0.000 description 2
239000003925 fat Substances 0.000 description 2
235000019253 formic acid Nutrition 0.000 description 2
239000007789 gas Substances 0.000 description 2
238000010438 heat treatment Methods 0.000 description 2
RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 2
125000003454 indenyl group Chemical group C1(C=CC2=CC=CC=C12)* 0.000 description 2
125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
239000007788 liquid Substances 0.000 description 2
VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
HDZGCSFEDULWCS-UHFFFAOYSA-N monomethylhydrazine Chemical compound CNN HDZGCSFEDULWCS-UHFFFAOYSA-N 0.000 description 2
DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 2
125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 2
229920001515 polyalkylene glycol Polymers 0.000 description 2
229920002503 polyoxyethylene-polyoxypropylene Polymers 0.000 description 2
229920002223 polystyrene Polymers 0.000 description 2
238000002360 preparation method Methods 0.000 description 2
125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 2
ODLMAHJVESYWTB-UHFFFAOYSA-N propylbenzene Chemical compound CCCC1=CC=CC=C1 ODLMAHJVESYWTB-UHFFFAOYSA-N 0.000 description 2
125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 2
230000001681 protective effect Effects 0.000 description 2
WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
239000007787 solid Substances 0.000 description 2
239000007921 spray Substances 0.000 description 2
239000010959 steel Substances 0.000 description 2
229910052715 tantalum Inorganic materials 0.000 description 2
GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
YHYKLKNNBYLTQY-UHFFFAOYSA-N 1,1-diphenylhydrazine Chemical compound C=1C=CC=CC=1N(N)C1=CC=CC=C1 YHYKLKNNBYLTQY-UHFFFAOYSA-N 0.000 description 1
PAAZPARNPHGIKF-UHFFFAOYSA-N 1,2-dibromoethane Chemical compound BrCCBr PAAZPARNPHGIKF-UHFFFAOYSA-N 0.000 description 1
IMSVBNQVZVQSND-UHFFFAOYSA-N 1,5-bis(sulfanyl)pentan-3-one Chemical compound SCCC(=O)CCS IMSVBNQVZVQSND-UHFFFAOYSA-N 0.000 description 1
YXZFFTJAHVMMLF-UHFFFAOYSA-N 1-bromo-3-methylbutane Chemical compound CC(C)CCBr YXZFFTJAHVMMLF-UHFFFAOYSA-N 0.000 description 1
YZWKKMVJZFACSU-UHFFFAOYSA-N 1-bromopentane Chemical compound CCCCCBr YZWKKMVJZFACSU-UHFFFAOYSA-N 0.000 description 1
HUOBWFKCWUVATL-UHFFFAOYSA-N 1-butyl-2-ethenylbenzene Chemical compound CCCCC1=CC=CC=C1C=C HUOBWFKCWUVATL-UHFFFAOYSA-N 0.000 description 1
RMSGQZDGSZOJMU-UHFFFAOYSA-N 1-butyl-2-phenylbenzene Chemical group CCCCC1=CC=CC=C1C1=CC=CC=C1 RMSGQZDGSZOJMU-UHFFFAOYSA-N 0.000 description 1
INOGLHRUEYDAHX-UHFFFAOYSA-N 1-chlorobenzotriazole Chemical compound C1=CC=C2N(Cl)N=NC2=C1 INOGLHRUEYDAHX-UHFFFAOYSA-N 0.000 description 1
BTUGGGLMQBJCBN-UHFFFAOYSA-N 1-iodo-2-methylpropane Chemical compound CC(C)CI BTUGGGLMQBJCBN-UHFFFAOYSA-N 0.000 description 1
RUFPHBVGCFYCNW-UHFFFAOYSA-N 1-naphthylamine Chemical compound C1=CC=C2C(N)=CC=CC2=C1 RUFPHBVGCFYCNW-UHFFFAOYSA-N 0.000 description 1
MUJPTTGNHRHIPH-UHFFFAOYSA-N 1-tert-butyl-3-ethylbenzene Chemical compound CCC1=CC=CC(C(C)(C)C)=C1 MUJPTTGNHRHIPH-UHFFFAOYSA-N 0.000 description 1
UPQQXPKAYZYUKO-UHFFFAOYSA-N 2,2,2-trichloroacetamide Chemical compound OC(=N)C(Cl)(Cl)Cl UPQQXPKAYZYUKO-UHFFFAOYSA-N 0.000 description 1
LWWBASKPXDRZPE-UHFFFAOYSA-N 2,3,4,5-tetrabutylphenol Chemical compound CCCCC1=CC(O)=C(CCCC)C(CCCC)=C1CCCC LWWBASKPXDRZPE-UHFFFAOYSA-N 0.000 description 1
FWALJUXKWWBNEO-UHFFFAOYSA-N 2-(4-chloroanilino)acetic acid Chemical compound OC(=O)CNC1=CC=C(Cl)C=C1 FWALJUXKWWBNEO-UHFFFAOYSA-N 0.000 description 1
DVVXXHVHGGWWPE-UHFFFAOYSA-N 2-(dimethylamino)benzoic acid Chemical compound CN(C)C1=CC=CC=C1C(O)=O DVVXXHVHGGWWPE-UHFFFAOYSA-N 0.000 description 1
CRBAESRLGGRIKR-UHFFFAOYSA-N 2-(hydroxymethyl)-2-pentan-2-ylpropane-1,3-diol Chemical compound CCCC(C)C(CO)(CO)CO CRBAESRLGGRIKR-UHFFFAOYSA-N 0.000 description 1
GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 1
TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 1
URJAPAUARDTRTJ-UHFFFAOYSA-N 2-acridin-9-ylbenzonitrile Chemical compound N#CC1=CC=CC=C1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 URJAPAUARDTRTJ-UHFFFAOYSA-N 0.000 description 1
BMKCHYNIIHMNPB-UHFFFAOYSA-N 2-acridin-9-ylethanol Chemical compound C1=CC=C2C(CCO)=C(C=CC=C3)C3=NC2=C1 BMKCHYNIIHMNPB-UHFFFAOYSA-N 0.000 description 1
VZMLJEYQUZKERO-UHFFFAOYSA-N 2-hydroxy-1-(2-methylphenyl)-2-phenylethanone Chemical compound CC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 VZMLJEYQUZKERO-UHFFFAOYSA-N 0.000 description 1
125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
VHSHLMUCYSAUQU-UHFFFAOYSA-N 2-hydroxypropyl methacrylate Chemical compound CC(O)COC(=O)C(C)=C VHSHLMUCYSAUQU-UHFFFAOYSA-N 0.000 description 1
RKOMYGSVLTVDAD-UHFFFAOYSA-N 3-acridin-9-ylpropanenitrile Chemical compound C1=CC=C2C(CCC#N)=C(C=CC=C3)C3=NC2=C1 RKOMYGSVLTVDAD-UHFFFAOYSA-N 0.000 description 1
MECNWXGGNCJFQJ-UHFFFAOYSA-N 3-piperidin-1-ylpropane-1,2-diol Chemical compound OCC(O)CN1CCCCC1 MECNWXGGNCJFQJ-UHFFFAOYSA-N 0.000 description 1
JIGUICYYOYEXFS-UHFFFAOYSA-N 3-tert-butylbenzene-1,2-diol Chemical compound CC(C)(C)C1=CC=CC(O)=C1O JIGUICYYOYEXFS-UHFFFAOYSA-N 0.000 description 1
LYCNQAIOLGIAFA-UHFFFAOYSA-N 4-[bis[4-(dimethylamino)-2-methylphenyl]methyl]-n,n,3-trimethylaniline Chemical compound CC1=CC(N(C)C)=CC=C1C(C=1C(=CC(=CC=1)N(C)C)C)C1=CC=C(N(C)C)C=C1C LYCNQAIOLGIAFA-UHFFFAOYSA-N 0.000 description 1
WNLBSXDSYUMNDJ-UHFFFAOYSA-N 4-acridin-9-yl-n,n-dimethylaniline Chemical compound C1=CC(N(C)C)=CC=C1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 WNLBSXDSYUMNDJ-UHFFFAOYSA-N 0.000 description 1
125000004172 4-methoxyphenyl group Chemical group [H]C1=C([H])C(OC([H])([H])[H])=C([H])C([H])=C1* 0.000 description 1
PBKGDGNXERIGPN-UHFFFAOYSA-N 5-phenylpent-4-en-2-ol Chemical compound CC(O)CC=CC1=CC=CC=C1 PBKGDGNXERIGPN-UHFFFAOYSA-N 0.000 description 1
RWHRFHQRVDUPIK-UHFFFAOYSA-N 50867-57-7 Chemical group CC(=C)C(O)=O.CC(=C)C(O)=O RWHRFHQRVDUPIK-UHFFFAOYSA-N 0.000 description 1
YYVYAPXYZVYDHN-UHFFFAOYSA-N 9,10-phenanthroquinone Chemical compound C1=CC=C2C(=O)C(=O)C3=CC=CC=C3C2=C1 YYVYAPXYZVYDHN-UHFFFAOYSA-N 0.000 description 1
CZAZRIWJMXBMNQ-UHFFFAOYSA-N 9-(2-chloroethyl)acridine Chemical compound C1=CC=C2C(CCCl)=C(C=CC=C3)C3=NC2=C1 CZAZRIWJMXBMNQ-UHFFFAOYSA-N 0.000 description 1
CYPATAPWKWHTFV-UHFFFAOYSA-N 9-(3-butylphenyl)acridine Chemical compound CCCCC1=CC=CC(C=2C3=CC=CC=C3N=C3C=CC=CC3=2)=C1 CYPATAPWKWHTFV-UHFFFAOYSA-N 0.000 description 1
KTPOHTDATNALFV-UHFFFAOYSA-N 9-(3-chlorophenyl)acridine Chemical compound ClC1=CC=CC(C=2C3=CC=CC=C3N=C3C=CC=CC3=2)=C1 KTPOHTDATNALFV-UHFFFAOYSA-N 0.000 description 1
QTDDKSCJWAPWEV-UHFFFAOYSA-N 9-(3-ethoxyphenyl)anthracene Chemical compound CCOC1=CC=CC(C=2C3=CC=CC=C3C=C3C=CC=CC3=2)=C1 QTDDKSCJWAPWEV-UHFFFAOYSA-N 0.000 description 1
ZRODAHDDPILBSK-UHFFFAOYSA-N 9-(3-methoxyphenyl)acridine Chemical compound COC1=CC=CC(C=2C3=CC=CC=C3N=C3C=CC=CC3=2)=C1 ZRODAHDDPILBSK-UHFFFAOYSA-N 0.000 description 1
YVQFMSIAMGCKOK-UHFFFAOYSA-N 9-(3-propan-2-ylphenyl)acridine Chemical compound CC(C)C1=CC=CC(C=2C3=CC=CC=C3N=C3C=CC=CC3=2)=C1 YVQFMSIAMGCKOK-UHFFFAOYSA-N 0.000 description 1
IEFIKULVPIMIPQ-UHFFFAOYSA-N 9-(4-butylphenyl)acridine Chemical compound C1=CC(CCCC)=CC=C1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 IEFIKULVPIMIPQ-UHFFFAOYSA-N 0.000 description 1
HANIQCCYEOXWSU-UHFFFAOYSA-N 9-(4-ethoxyphenyl)acridine Chemical compound C1=CC(OCC)=CC=C1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 HANIQCCYEOXWSU-UHFFFAOYSA-N 0.000 description 1
RZALXPATCFPFDA-UHFFFAOYSA-N 9-(4-ethylphenyl)acridine Chemical compound C1=CC(CC)=CC=C1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 RZALXPATCFPFDA-UHFFFAOYSA-N 0.000 description 1
MQMCZRZPDPSXTD-UHFFFAOYSA-N 9-(4-methoxyphenyl)acridine Chemical compound C1=CC(OC)=CC=C1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 MQMCZRZPDPSXTD-UHFFFAOYSA-N 0.000 description 1
CVPHOGZTLPMGBU-UHFFFAOYSA-N 9-ethylacridine Chemical compound C1=CC=C2C(CC)=C(C=CC=C3)C3=NC2=C1 CVPHOGZTLPMGBU-UHFFFAOYSA-N 0.000 description 1
ZHBWKWDAMIJZPW-UHFFFAOYSA-N 9-methoxyacridine Chemical compound C1=CC=C2C(OC)=C(C=CC=C3)C3=NC2=C1 ZHBWKWDAMIJZPW-UHFFFAOYSA-N 0.000 description 1
FLDRLXJNISEWNZ-UHFFFAOYSA-N 9-methylacridine Chemical compound C1=CC=C2C(C)=C(C=CC=C3)C3=NC2=C1 FLDRLXJNISEWNZ-UHFFFAOYSA-N 0.000 description 1
HDLFSWMFFDMLRQ-UHFFFAOYSA-N 9-propan-2-ylacridine Chemical compound C1=CC=C2C(C(C)C)=C(C=CC=C3)C3=NC2=C1 HDLFSWMFFDMLRQ-UHFFFAOYSA-N 0.000 description 1
REIHTKGNTQFKOQ-UHFFFAOYSA-N 9-propan-2-yloxyacridine Chemical compound C1=CC=C2C(OC(C)C)=C(C=CC=C3)C3=NC2=C1 REIHTKGNTQFKOQ-UHFFFAOYSA-N 0.000 description 1
NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
239000005711 Benzoic acid Substances 0.000 description 1
NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
HPLCKUJBJYLEGG-UHFFFAOYSA-N C(C)=C1NN=NC2=C1C=CC=C2 Chemical compound C(C)=C1NN=NC2=C1C=CC=C2 HPLCKUJBJYLEGG-UHFFFAOYSA-N 0.000 description 1
VOJUJYFOJAVWEQ-UHFFFAOYSA-N C(C)NC=1C=C(C=CC1)C=1C2=CC=CC=C2N=C2C=CC=CC12 Chemical compound C(C)NC=1C=C(C=CC1)C=1C2=CC=CC=C2N=C2C=CC=CC12 VOJUJYFOJAVWEQ-UHFFFAOYSA-N 0.000 description 1
FRORSBAIQPMKNS-UHFFFAOYSA-N C(C=C)(=O)OCCCCCCCCCC.C(C(C)O)O Chemical compound C(C=C)(=O)OCCCCCCCCCC.C(C(C)O)O FRORSBAIQPMKNS-UHFFFAOYSA-N 0.000 description 1
GAWIXWVDTYZWAW-UHFFFAOYSA-N C[CH]O Chemical group C[CH]O GAWIXWVDTYZWAW-UHFFFAOYSA-N 0.000 description 1
WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 1
OMPIYDSYGYKWSG-UHFFFAOYSA-N Citronensaeure-alpha-aethylester Natural products CCOC(=O)CC(O)(C(O)=O)CC(O)=O OMPIYDSYGYKWSG-UHFFFAOYSA-N 0.000 description 1
229910000881 Cu alloy Inorganic materials 0.000 description 1
239000004593 Epoxy Substances 0.000 description 1
OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
IMROMDMJAWUWLK-UHFFFAOYSA-N Ethenol Chemical compound OC=C IMROMDMJAWUWLK-UHFFFAOYSA-N 0.000 description 1
VQTUBCCKSQIDNK-UHFFFAOYSA-N Isobutene Chemical group CC(C)=C VQTUBCCKSQIDNK-UHFFFAOYSA-N 0.000 description 1
ROHFNLRQFUQHCH-YFKPBYRVSA-N L-leucine Chemical compound CC(C)C[C@H](N)C(O)=O ROHFNLRQFUQHCH-YFKPBYRVSA-N 0.000 description 1
KZSNJWFQEVHDMF-BYPYZUCNSA-N L-valine Chemical compound CC(C)[C@H](N)C(O)=O KZSNJWFQEVHDMF-BYPYZUCNSA-N 0.000 description 1
ROHFNLRQFUQHCH-UHFFFAOYSA-N Leucine Natural products CC(C)CC(N)C(O)=O ROHFNLRQFUQHCH-UHFFFAOYSA-N 0.000 description 1
UBUCNCOMADRQHX-UHFFFAOYSA-N N-Nitrosodiphenylamine Chemical compound C=1C=CC=CC=1N(N=O)C1=CC=CC=C1 UBUCNCOMADRQHX-UHFFFAOYSA-N 0.000 description 1
NPKSPKHJBVJUKB-UHFFFAOYSA-N N-phenylglycine Chemical compound OC(=O)CNC1=CC=CC=C1 NPKSPKHJBVJUKB-UHFFFAOYSA-N 0.000 description 1
JUKUURGIXBLUTP-UHFFFAOYSA-N NC=C1C(=C2C(=NN=N2)C=C1)C(=O)O Chemical compound NC=C1C(=C2C(=NN=N2)C=C1)C(=O)O JUKUURGIXBLUTP-UHFFFAOYSA-N 0.000 description 1
UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 1
WVGNCWQGAVQJBY-UHFFFAOYSA-N OCCOCCOCCO.CCCCCCCCCCCCO Chemical compound OCCOCCOCCO.CCCCCCCCCCCCO WVGNCWQGAVQJBY-UHFFFAOYSA-N 0.000 description 1
ZCQWOFVYLHDMMC-UHFFFAOYSA-N Oxazole Chemical compound C1=COC=N1 ZCQWOFVYLHDMMC-UHFFFAOYSA-N 0.000 description 1
YNPNZTXNASCQKK-UHFFFAOYSA-N Phenanthrene Natural products C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 1
229920002675 Polyoxyl Polymers 0.000 description 1
239000004743 Polypropylene Substances 0.000 description 1
239000004372 Polyvinyl alcohol Substances 0.000 description 1
229920001328 Polyvinylidene chloride Polymers 0.000 description 1
OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical group CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
ZHKDLDMGVZHAOL-UHFFFAOYSA-N S(O)(O)(=O)=O.CC(=CC)C Chemical compound S(O)(O)(=O)=O.CC(=CC)C ZHKDLDMGVZHAOL-UHFFFAOYSA-N 0.000 description 1
ZFOZVQLOBQUTQQ-UHFFFAOYSA-N Tributyl citrate Chemical group CCCCOC(=O)CC(O)(C(=O)OCCCC)CC(=O)OCCCC ZFOZVQLOBQUTQQ-UHFFFAOYSA-N 0.000 description 1
ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
239000007983 Tris buffer Substances 0.000 description 1
KZSNJWFQEVHDMF-UHFFFAOYSA-N Valine Natural products CC(C)C(N)C(O)=O KZSNJWFQEVHDMF-UHFFFAOYSA-N 0.000 description 1
XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
150000008065 acid anhydrides Chemical class 0.000 description 1
230000002378 acidificating effect Effects 0.000 description 1
125000005396 acrylic acid ester group Chemical group 0.000 description 1
238000012644 addition polymerization Methods 0.000 description 1
239000012790 adhesive layer Substances 0.000 description 1
150000001298 alcohols Chemical class 0.000 description 1
239000003513 alkali Substances 0.000 description 1
239000012670 alkaline solution Substances 0.000 description 1
125000005083 alkoxyalkoxy group Chemical group 0.000 description 1
229910045601 alloy Inorganic materials 0.000 description 1
239000000956 alloy Substances 0.000 description 1
150000001408 amides Chemical class 0.000 description 1
125000006295 amino methylene group Chemical group [H]N(*)C([H])([H])* 0.000 description 1
150000008365 aromatic ketones Chemical class 0.000 description 1
125000004429 atom Chemical group 0.000 description 1
150000003851 azoles Chemical class 0.000 description 1
235000010233 benzoic acid Nutrition 0.000 description 1
239000012964 benzotriazole Substances 0.000 description 1
150000001565 benzotriazoles Chemical class 0.000 description 1
235000021028 berry Nutrition 0.000 description 1
235000010290 biphenyl Nutrition 0.000 description 1
125000006267 biphenyl group Chemical group 0.000 description 1
VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 1
DIKBFYAXUHHXCS-UHFFFAOYSA-N bromoform Chemical compound BrC(Br)Br DIKBFYAXUHHXCS-UHFFFAOYSA-N 0.000 description 1
229910000019 calcium carbonate Inorganic materials 0.000 description 1
238000011088 calibration curve Methods 0.000 description 1
239000001913 cellulose Substances 0.000 description 1
229920002678 cellulose Polymers 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
125000003636 chemical group Chemical group 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
239000007795 chemical reaction product Substances 0.000 description 1
125000001309 chloro group Chemical group Cl* 0.000 description 1
229930016911 cinnamic acid Natural products 0.000 description 1
235000013985 cinnamic acid Nutrition 0.000 description 1
210000000078 claw Anatomy 0.000 description 1
229940125904 compound 1 Drugs 0.000 description 1
239000011889 copper foil Substances 0.000 description 1
238000005520 cutting process Methods 0.000 description 1
PDXRQENMIVHKPI-UHFFFAOYSA-N cyclohexane-1,1-diol Chemical compound OC1(O)CCCCC1 PDXRQENMIVHKPI-UHFFFAOYSA-N 0.000 description 1
GTBGXKPAKVYEKJ-UHFFFAOYSA-N decyl 2-methylprop-2-enoate Chemical group CCCCCCCCCCOC(=O)C(C)=C GTBGXKPAKVYEKJ-UHFFFAOYSA-N 0.000 description 1
210000003298 dental enamel Anatomy 0.000 description 1
125000004177 diethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
ATUOYWHBWRKTHZ-UHFFFAOYSA-N dimethylmethane Natural products CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 1
FDSSXGWHNYLFSX-UHFFFAOYSA-N diphenylsulfanium bromide Chemical compound [Br-].[SH+](c1ccccc1)c1ccccc1 FDSSXGWHNYLFSX-UHFFFAOYSA-N 0.000 description 1
238000001035 drying Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
239000003480 eluent Substances 0.000 description 1
229940057975 ethyl citrate Drugs 0.000 description 1
229920001038 ethylene copolymer Polymers 0.000 description 1
KUDUQBURMYMBIJ-UHFFFAOYSA-N ethylene glycol diacrylate Substances C=CC(=O)OCCOC(=O)C=C KUDUQBURMYMBIJ-UHFFFAOYSA-N 0.000 description 1
WHRIKZCFRVTHJH-UHFFFAOYSA-N ethylhydrazine Chemical compound CCNN WHRIKZCFRVTHJH-UHFFFAOYSA-N 0.000 description 1
FWQHNLCNFPYBCA-UHFFFAOYSA-N fluoran Chemical compound C12=CC=CC=C2OC2=CC=CC=C2C11OC(=O)C2=CC=CC=C21 FWQHNLCNFPYBCA-UHFFFAOYSA-N 0.000 description 1
239000011888 foil Substances 0.000 description 1
239000001530 fumaric acid Substances 0.000 description 1
ACCCMOQWYVYDOT-UHFFFAOYSA-N hexane-1,1-diol Chemical compound CCCCCC(O)O ACCCMOQWYVYDOT-UHFFFAOYSA-N 0.000 description 1
125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
229910052738 indium Inorganic materials 0.000 description 1
RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
229910052500 inorganic mineral Inorganic materials 0.000 description 1
229910052742 iron Inorganic materials 0.000 description 1
125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
238000002955 isolation Methods 0.000 description 1
150000002576 ketones Chemical class 0.000 description 1
229910052743 krypton Inorganic materials 0.000 description 1
DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
229940107698 malachite green Drugs 0.000 description 1
FDZZZRQASAIRJF-UHFFFAOYSA-M malachite green Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1 FDZZZRQASAIRJF-UHFFFAOYSA-M 0.000 description 1
VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
239000011976 maleic acid Substances 0.000 description 1
FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
229910052753 mercury Inorganic materials 0.000 description 1
229940086559 methyl benzoin Drugs 0.000 description 1
STZCRXQWRGQSJD-GEEYTBSJSA-M methyl orange Chemical compound [Na+].C1=CC(N(C)C)=CC=C1\N=N\C1=CC=C(S([O-])(=O)=O)C=C1 STZCRXQWRGQSJD-GEEYTBSJSA-M 0.000 description 1
229940012189 methyl orange Drugs 0.000 description 1
WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 1
239000011859 microparticle Substances 0.000 description 1
239000011707 mineral Substances 0.000 description 1
238000002156 mixing Methods 0.000 description 1
229930003658 monoterpene Natural products 0.000 description 1
150000002773 monoterpene derivatives Chemical class 0.000 description 1
235000002577 monoterpenes Nutrition 0.000 description 1
125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
101150115538 nero gene Proteins 0.000 description 1
CBFCDTFDPHXCNY-UHFFFAOYSA-N octyldodecane Natural products CCCCCCCCCCCCCCCCCCCC CBFCDTFDPHXCNY-UHFFFAOYSA-N 0.000 description 1
125000006353 oxyethylene group Chemical group 0.000 description 1
125000003854 p-chlorophenyl group Chemical group [H]C1=C([H])C(*)=C([H])C([H])=C1Cl 0.000 description 1
125000001037 p-tolyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1*)C([H])([H])[H] 0.000 description 1
238000000059 patterning Methods 0.000 description 1
125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
COLNVLDHVKWLRT-UHFFFAOYSA-N phenylalanine Natural products OC(=O)C(N)CC1=CC=CC=C1 COLNVLDHVKWLRT-UHFFFAOYSA-N 0.000 description 1
ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 1
229940067157 phenylhydrazine Drugs 0.000 description 1
239000004014 plasticizer Substances 0.000 description 1
229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
229920002239 polyacrylonitrile Polymers 0.000 description 1
229920000139 polyethylene terephthalate Polymers 0.000 description 1
239000005020 polyethylene terephthalate Substances 0.000 description 1
239000004926 polymethyl methacrylate Substances 0.000 description 1
229920001155 polypropylene Polymers 0.000 description 1
229920002451 polyvinyl alcohol Polymers 0.000 description 1
239000004800 polyvinyl chloride Substances 0.000 description 1
229920000915 polyvinyl chloride Polymers 0.000 description 1
239000005033 polyvinylidene chloride Substances 0.000 description 1
238000003918 potentiometric titration Methods 0.000 description 1
238000003825 pressing Methods 0.000 description 1
239000001294 propane Substances 0.000 description 1
125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
125000004076 pyridyl group Chemical group 0.000 description 1
125000005554 pyridyloxy group Chemical group 0.000 description 1
229940079877 pyrogallol Drugs 0.000 description 1
230000002940 repellent Effects 0.000 description 1
239000005871 repellent Substances 0.000 description 1
229910000679 solder Inorganic materials 0.000 description 1
238000005507 spraying Methods 0.000 description 1
210000002784 stomach Anatomy 0.000 description 1
PXQLVRUNWNTZOS-UHFFFAOYSA-N sulfanyl Chemical class [SH] PXQLVRUNWNTZOS-UHFFFAOYSA-N 0.000 description 1
239000012085 test solution Substances 0.000 description 1
MPCYPRXRVWZKGF-UHFFFAOYSA-J tetrasodium 5-amino-3-[[4-[4-[(8-amino-1-hydroxy-3,6-disulfonatonaphthalen-2-yl)diazenyl]phenyl]phenyl]diazenyl]-4-hydroxynaphthalene-2,7-disulfonate Chemical compound [Na+].[Na+].[Na+].[Na+].C1=C(S([O-])(=O)=O)C=C2C=C(S([O-])(=O)=O)C(N=NC3=CC=C(C=C3)C3=CC=C(C=C3)N=NC3=C(C=C4C=C(C=C(C4=C3O)N)S([O-])(=O)=O)S([O-])(=O)=O)=C(O)C2=C1N MPCYPRXRVWZKGF-UHFFFAOYSA-J 0.000 description 1
DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
150000003852 triazoles Chemical class 0.000 description 1
235000013769 triethyl citrate Nutrition 0.000 description 1
229940096522 trimethylolpropane triacrylate Drugs 0.000 description 1
ODHUFJLMXDXVRC-UHFFFAOYSA-N tripropyl 2-hydroxypropane-1,2,3-tricarboxylate Chemical compound CCCOC(=O)CC(O)(C(=O)OCCC)CC(=O)OCCC ODHUFJLMXDXVRC-UHFFFAOYSA-N 0.000 description 1
239000004474 valine Substances 0.000 description 1
238000005406 washing Methods 0.000 description 1
239000003021 water soluble solvent Substances 0.000 description 1

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers

Landscapes

Physics & Mathematics (AREA)
Spectroscopy & Molecular Physics (AREA)
General Physics & Mathematics (AREA)
Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Materials For Photolithography (AREA)
Polymerisation Methods In General (AREA)
Graft Or Block Polymers (AREA)
Macromonomer-Based Addition Polymer (AREA)
Manufacturing Of Printed Circuit Boards (AREA)
Manufacturing Of Printed Wiring (AREA)
Laminated Bodies (AREA)

TW97131356A 2007-08-15 2008-08-15 Photosensitive composition and laminated body thereof TWI380130B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2007211622		2007-08-15

Publications (2)

Publication Number	Publication Date
TW200921275A TW200921275A (en)	2009-05-16
TWI380130B true TWI380130B (en)	2012-12-21

Family

ID=40350777

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW97131356A TWI380130B (en)	2007-08-15	2008-08-15	Photosensitive composition and laminated body thereof

Country Status (5)

Country	Link
JP (1)	JP5221543B2 (fr)
KR (1)	KR101167537B1 (fr)
CN (1)	CN101779165B (fr)
TW (1)	TWI380130B (fr)
WO (1)	WO2009022724A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2947016B2 (ja)	1993-04-09	1999-09-13	豊田合成株式会社	樹脂製品及びその製造方法
KR20150017384A (ko) *	2010-12-24	2015-02-16	아사히 가세이 이-매터리얼즈 가부시키가이샤	감광성 수지 조성물
JP6019902B2 (ja) *	2011-09-06	2016-11-02	日立化成株式会社	感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法、及びプリント配線板の製造方法
JP5826006B2 (ja) *	2011-12-01	2015-12-02	旭化成イーマテリアルズ株式会社	感光性樹脂組成物
CN103064253B (zh) *	2012-12-05	2015-04-08	北京化工大学常州先进材料研究院	一种含有吖啶类氧化物的感光性组合物
JP6486672B2 (ja) *	2013-12-20	2019-03-20	旭化成株式会社	感光性エレメント、及びその製造方法
WO2017033868A1 (fr)	2015-08-25	2017-03-02	旭化成株式会社	Composition de résine photosensible
KR102600211B1 (ko)	2015-09-11	2023-11-08	아사히 가세이 가부시키가이샤	감광성 수지 조성물
WO2018225748A1 (fr) *	2017-06-08	2018-12-13	Jsr株式会社	Composition, procédé de fabrication de film durci, et composant électronique

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4519356B2 (ja)	2001-04-26	2010-08-04	旭化成イーマテリアルズ株式会社	感光性樹脂積層体
US20070269738A1 (en) *	2004-07-30	2007-11-22	Hitachi Chemical Company, Ltd.	Photosensitive Film, Photosensitive Film Laminate and Photosensitive Film Roll
JP2006208734A (ja) *	2005-01-27	2006-08-10	Fuji Photo Film Co Ltd	パターン形成方法
JP4761909B2 (ja) *	2005-10-05	2011-08-31	旭化成イーマテリアルズ株式会社	感光性樹脂組成物及び積層体
JP4752650B2 (ja) *	2006-04-13	2011-08-17	日立化成工業株式会社	感光性樹脂組成物
KR101036784B1 (ko) *	2006-05-09	2011-05-25	아사히 가세이 일렉트로닉스 가부시끼가이샤	감광성 수지 조성물
JP2008020629A (ja) *	2006-07-12	2008-01-31	Fujifilm Corp	パターン形成材料、並びに、パターン形成装置及びパターン形成方法
KR101059408B1 (ko) *	2006-08-03	2011-08-29	아사히 가세이 일렉트로닉스 가부시끼가이샤	감광성 수지 조성물 및 적층체

2008
- 2008-08-14 KR KR1020107002027A patent/KR101167537B1/ko active Active
- 2008-08-14 CN CN200880102779.0A patent/CN101779165B/zh active Active
- 2008-08-14 WO PCT/JP2008/064585 patent/WO2009022724A1/fr not_active Ceased
- 2008-08-14 JP JP2009528148A patent/JP5221543B2/ja active Active
- 2008-08-15 TW TW97131356A patent/TWI380130B/zh active

Also Published As

Publication number	Publication date
CN101779165B (zh)	2014-09-24
JP5221543B2 (ja)	2013-06-26
KR20100027240A (ko)	2010-03-10
TW200921275A (en)	2009-05-16
JPWO2009022724A1 (ja)	2010-11-18
KR101167537B1 (ko)	2012-07-20
WO2009022724A1 (fr)	2009-02-19
CN101779165A (zh)	2010-07-14

Publication	Publication Date	Title
TWI380130B (en)	2012-12-21	Photosensitive composition and laminated body thereof
TWI530757B (zh)	2016-04-21	A photosensitive resin composition
JP4847582B2 (ja)	2011-12-28	感光性樹脂組成物および積層体
JP5344034B2 (ja)	2013-11-20	感光性樹脂組成物、並びにこれを用いた感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法
JPWO2017043544A1 (ja)	2018-03-15	感光性樹脂組成物
TW201013310A (en)	2010-04-01	Photosensitive resin composition, photosensitive element, resist pattern manufacturing method, and printed circuit board manufacturing method
TWI536094B (zh)	2016-06-01	Photosensitive resin laminate
TWI240149B (en)	2005-09-21	Photosensitive resin composition, photosensitive element comprising the same, process for producing resist pattern, and process for producing printed circuit board
TWI376573B (fr)	2012-11-11
CN103430100A (zh)	2013-12-04	感光性树脂组合物、使用其的光致抗蚀膜、抗蚀图案的形成方法以及导体图案的形成方法
JP5793924B2 (ja)	2015-10-14	感光性樹脂組成物、感光性エレメント、レジストパターンの製造方法、及びプリント配線板の製造方法
CN102144189B (zh)	2015-06-10	感光性树脂组合物、层压体、抗蚀图案形成方法以及导体图案、印刷电路板的制造方法
TW201001065A (en)	2010-01-01	Photosensitive resin composition and layered object obtained therewith
WO2007114014A1 (fr)	2007-10-11	Composition de resine photosensible, element photosensible utilisant cette composition, procede de formation d'un motif de resist et procede de production de cartes de circuits imprimes
TWI356972B (fr)	2012-01-21
JP2009069465A (ja)	2009-04-02	感光性樹脂組成物
JP5376043B2 (ja)	2013-12-25	感光性樹脂組成物並びにこれを用いた感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法
JP5411521B2 (ja)	2014-02-12	感光性樹脂積層体
TWI883599B (zh)	2025-05-11	感光性樹脂組成物、感光性樹脂積層體、及光阻圖案之形成方法
WO2013125429A1 (fr)	2013-08-29	Composition de résine photosensible, élément photosensible, procédé consistant à former un motif de résine, et procédé de fabrication d'une carte de circuit imprimé
JP6064480B2 (ja)	2017-01-25	感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法
JP5469399B2 (ja)	2014-04-16	感光性樹脂組成物
JP2009229657A (ja)	2009-10-08	感光性樹脂組成物および積層体
TWI903461B (zh)	2025-11-01	感光性樹脂積層體、及光阻圖案之形成方法
JP2011145517A (ja)	2011-07-28	感光性樹脂組成物、並びにこれを用いた感光性エレメント、レジストパターンの製造法及びプリント配線板の製造法