PL2355126T3 - Warstwa twardego materiału - Google Patents

Warstwa twardego materiału

Info

Publication number: PL2355126T3
Authority: PL; Poland
Prior art keywords: workpiece; hard material; halogen content; noble gas; arc
Prior art date: 2005-03-24

Application number

PL10011124T

Other languages

English (en)

Inventor

Jürgen Ramm

Beno Widrig

Wolfgang Kalss

Original Assignee

Oerlikon Surface Solutions Ag Truebbach

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2005-03-24

Filing date

2006-01-19

Publication date

2016-04-29

2006-01-19 Application filed by Oerlikon Surface Solutions Ag Truebbach filed Critical Oerlikon Surface Solutions Ag Truebbach

2016-04-29 Publication of PL2355126T3 publication Critical patent/PL2355126T3/pl

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
- F01D5/12—Blades
- F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
- F01D5/288—Protective coatings for blades
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/30—Manufacture with deposition of material
- F05D2230/31—Layer deposition
- F05D2230/313—Layer deposition by physical vapour deposition

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physics & Mathematics (AREA)
Health & Medical Sciences (AREA)
Toxicology (AREA)
General Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
Analytical Chemistry (AREA)
Physical Vapour Deposition (AREA)
Cutting Tools, Boring Holders, And Turrets (AREA)
Plasma Technology (AREA)
Polishing Bodies And Polishing Tools (AREA)
Glass Compositions (AREA)
Inorganic Insulating Materials (AREA)
Laminated Bodies (AREA)
Chemical Vapour Deposition (AREA)

PL10011124T 2005-03-24 2006-01-19 Warstwa twardego materiału PL2355126T3 (pl)

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
CH5182005		2005-03-24
CH12892005		2005-08-03
EP10011124.4A EP2355126B1 (de)	2005-03-24	2006-01-19	Hartstoffschicht
EP06700563A EP1863947B1 (de)	2005-03-24	2006-01-19	Hartstoffschicht

Publications (1)

Publication Number	Publication Date
PL2355126T3 true PL2355126T3 (pl)	2016-04-29

Family

ID=36102569

Family Applications (3)

Application Number	Title	Priority Date	Filing Date
PL10011124T PL2355126T3 (pl)	2005-03-24	2006-01-19	Warstwa twardego materiału
PL06700563T PL1863947T3 (pl)	2005-03-24	2006-01-19	Warstwa z twardego materiału
PL06705365T PL1864314T3 (pl)	2005-03-24	2006-03-01	Sposób wykorzystywania impulsowego, źródła odparowywania łukowego i instalacja do wykonywania procesów próżniowych z impulsowym źródłem odparowywania łukowego

Family Applications After (2)

Application Number	Title	Priority Date	Filing Date
PL06700563T PL1863947T3 (pl)	2005-03-24	2006-01-19	Warstwa z twardego materiału
PL06705365T PL1864314T3 (pl)	2005-03-24	2006-03-01	Sposób wykorzystywania impulsowego, źródła odparowywania łukowego i instalacja do wykonywania procesów próżniowych z impulsowym źródłem odparowywania łukowego

Country Status (13)

Country	Link
EP (3)	EP1863947B1 (pl)
JP (1)	JP5877147B2 (pl)
KR (3)	KR101361240B1 (pl)
AT (1)	ATE527392T1 (pl)
BR (2)	BRPI0609673A2 (pl)
CA (2)	CA2601722C (pl)
ES (3)	ES2562454T3 (pl)
HU (1)	HUE026952T2 (pl)
MX (1)	MX2007011703A (pl)
PL (3)	PL2355126T3 (pl)
PT (2)	PT1863947E (pl)
SG (3)	SG160397A1 (pl)
WO (2)	WO2006099754A1 (pl)

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US9605338B2 (en) *	2006-10-11	2017-03-28	Oerlikon Surface Solutions Ag, Pfaffikon	Method for depositing electrically insulating layers
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PL2540858T3 (pl)	2011-06-30	2015-06-30	Lamina Tech Sa	Osadzania za pomocą łuku katodowego
EP2607517A1 (en) *	2011-12-22	2013-06-26	Oerlikon Trading AG, Trübbach	Low temperature arc ion plating coating
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JP6441318B2 (ja) *	2013-05-23	2018-12-19	エリコンサーフェスソリューションズアーゲー、プフェフィコン	ターボチャージャー用バリア層
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2006
- 2006-01-19 CA CA2601722A patent/CA2601722C/en not_active Expired - Fee Related
- 2006-01-19 MX MX2007011703A patent/MX2007011703A/es active IP Right Grant
- 2006-01-19 SG SG201001774-7A patent/SG160397A1/en unknown
- 2006-01-19 BR BRPI0609673-5A patent/BRPI0609673A2/pt not_active Application Discontinuation
- 2006-01-19 AT AT06700563T patent/ATE527392T1/de active
- 2006-01-19 EP EP06700563A patent/EP1863947B1/de active Active
- 2006-01-19 PL PL10011124T patent/PL2355126T3/pl unknown
- 2006-01-19 SG SG2013068739A patent/SG193877A1/en unknown
- 2006-01-19 ES ES10011124.4T patent/ES2562454T3/es active Active
- 2006-01-19 WO PCT/CH2006/000042 patent/WO2006099754A1/de not_active Ceased
- 2006-01-19 PT PT06700563T patent/PT1863947E/pt unknown
- 2006-01-19 EP EP10011124.4A patent/EP2355126B1/de active Active
- 2006-01-19 ES ES06700563T patent/ES2374832T3/es active Active
- 2006-01-19 KR KR1020077024393A patent/KR101361240B1/ko not_active Expired - Fee Related
- 2006-01-19 HU HUE10011124A patent/HUE026952T2/en unknown
- 2006-01-19 PL PL06700563T patent/PL1863947T3/pl unknown
- 2006-01-19 KR KR1020137004861A patent/KR101361224B1/ko not_active Expired - Fee Related
- 2006-03-01 EP EP06705365A patent/EP1864314B1/de active Active
- 2006-03-01 WO PCT/CH2006/000125 patent/WO2006099760A2/de not_active Ceased
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Also Published As

Publication number	Publication date
KR101361224B1 (ko)	2014-02-10
ATE527392T1 (de)	2011-10-15
EP2355126B1 (de)	2015-12-02
WO2006099754A1 (de)	2006-09-28
KR101361240B1 (ko)	2014-02-11
EP1864314A2 (de)	2007-12-12
JP5877147B2 (ja)	2016-03-02
EP1863947B1 (de)	2011-10-05
KR20070114832A (ko)	2007-12-04
PL1863947T3 (pl)	2012-06-29
PT1864314E (pt)	2012-07-12
WO2006099760A2 (de)	2006-09-28
CA2601729A1 (en)	2006-09-28
PT1863947E (pt)	2011-12-15
SG160397A1 (en)	2010-04-29
SG160398A1 (en)	2010-04-29
HUE026952T2 (en)	2016-08-29
EP1863947A1 (de)	2007-12-12
PL1864314T3 (pl)	2012-11-30
KR101235393B1 (ko)	2013-02-22
CA2601729C (en)	2014-07-08
SG193877A1 (en)	2013-10-30
JP2013079452A (ja)	2013-05-02
EP2355126A3 (de)	2011-10-19
BRPI0609673A2 (pt)	2010-04-20
KR20130027584A (ko)	2013-03-15
ES2374832T3 (es)	2012-02-22
BRPI0609466A2 (pt)	2010-04-13
EP1864314B1 (de)	2012-05-16
EP2355126A2 (de)	2011-08-10
KR20070114402A (ko)	2007-12-03
WO2006099760A3 (de)	2007-12-06
MX2007011703A (es)	2008-03-10
ES2562454T3 (es)	2016-03-04
CA2601722A1 (en)	2006-09-28
CA2601722C (en)	2014-02-25
ES2388175T3 (es)	2012-10-10

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