PL1863947T3 - Warstwa z twardego materiału - Google Patents

Warstwa z twardego materiału

Info

Publication number: PL1863947T3
Authority: PL; Poland
Prior art keywords: workpiece; hard material; halogen content; noble gas; arc
Prior art date: 2005-03-24

Application number

PL06700563T

Other languages

English (en)

Inventor

Jürgen Ramm

Beno Widrig

Wolfgang Kalss

Original Assignee

Oerlikon Trading Ag

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2005-03-24

Filing date

2006-01-19

Publication date

2012-06-29

2006-01-19 Application filed by Oerlikon Trading Ag filed Critical Oerlikon Trading Ag

2012-06-29 Publication of PL1863947T3 publication Critical patent/PL1863947T3/pl

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
- F01D5/12—Blades
- F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
- F01D5/288—Protective coatings for blades
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/30—Manufacture with deposition of material
- F05D2230/31—Layer deposition
- F05D2230/313—Layer deposition by physical vapour deposition

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physics & Mathematics (AREA)
Toxicology (AREA)
General Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
Analytical Chemistry (AREA)
Health & Medical Sciences (AREA)
Physical Vapour Deposition (AREA)
Cutting Tools, Boring Holders, And Turrets (AREA)
Plasma Technology (AREA)
Polishing Bodies And Polishing Tools (AREA)
Glass Compositions (AREA)
Chemical Vapour Deposition (AREA)
Inorganic Insulating Materials (AREA)
Laminated Bodies (AREA)

PL06700563T 2005-03-24 2006-01-19 Warstwa z twardego materiału PL1863947T3 (pl)

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
CH5182005		2005-03-24
CH12892005		2005-08-03
EP06700563A EP1863947B1 (de)	2005-03-24	2006-01-19	Hartstoffschicht
PCT/CH2006/000042 WO2006099754A1 (de)	2005-03-24	2006-01-19	Hartstoffschicht

Publications (1)

Publication Number	Publication Date
PL1863947T3 true PL1863947T3 (pl)	2012-06-29

Family

ID=36102569

Family Applications (3)

Application Number	Title	Priority Date	Filing Date
PL06700563T PL1863947T3 (pl)	2005-03-24	2006-01-19	Warstwa z twardego materiału
PL10011124T PL2355126T3 (pl)	2005-03-24	2006-01-19	Warstwa twardego materiału
PL06705365T PL1864314T3 (pl)	2005-03-24	2006-03-01	Sposób wykorzystywania impulsowego, źródła odparowywania łukowego i instalacja do wykonywania procesów próżniowych z impulsowym źródłem odparowywania łukowego

Family Applications After (2)

Application Number	Title	Priority Date	Filing Date
PL10011124T PL2355126T3 (pl)	2005-03-24	2006-01-19	Warstwa twardego materiału
PL06705365T PL1864314T3 (pl)	2005-03-24	2006-03-01	Sposób wykorzystywania impulsowego, źródła odparowywania łukowego i instalacja do wykonywania procesów próżniowych z impulsowym źródłem odparowywania łukowego

Country Status (13)

Country	Link
EP (3)	EP2355126B1 (pl)
JP (1)	JP5877147B2 (pl)
KR (3)	KR101361224B1 (pl)
AT (1)	ATE527392T1 (pl)
BR (2)	BRPI0609673A2 (pl)
CA (2)	CA2601722C (pl)
ES (3)	ES2374832T3 (pl)
HU (1)	HUE026952T2 (pl)
MX (1)	MX2007011703A (pl)
PL (3)	PL1863947T3 (pl)
PT (2)	PT1863947E (pl)
SG (3)	SG160397A1 (pl)
WO (2)	WO2006099754A1 (pl)

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US9771648B2 (en)	2004-08-13	2017-09-26	Zond, Inc.	Method of ionized physical vapor deposition sputter coating high aspect-ratio structures
MX2009003130A (es) *	2006-10-10	2009-06-22	Oerlikon Trading Ag	Sistema de capa que tiene por lo menos una capa de cristal mezclado de un polioxido.
US9605338B2 (en) *	2006-10-11	2017-03-28	Oerlikon Surface Solutions Ag, Pfaffikon	Method for depositing electrically insulating layers
DE102006057386A1 (de) *	2006-12-04	2008-06-05	Uhde Gmbh	Verfahren zum Beschichten von Substraten
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US8129040B2 (en)	2007-05-16	2012-03-06	Oerlikon Trading Ag, Truebbach	Cutting tool
JP5537782B2 (ja) *	2007-09-14	2014-07-02	スルザーメタプラスゲーエムベーハー	切削工具及び切削工具の製造方法
WO2009040406A2 (de)	2007-09-25	2009-04-02	Von Ardenne Anlagentechnik Gmbh	Verfahren und anordnung zum redundanten anoden-sputtern mit einer dual-anoden-anordnung
US8968830B2 (en)	2007-12-06	2015-03-03	Oerlikon Trading Ag, Trubbach	PVD—vacuum coating unit
US8652589B2 (en) *	2008-01-25	2014-02-18	Oerlikon Trading Ag, Truebbach	Permeation barrier layer
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DE102009028579B4 (de) *	2009-08-17	2013-08-22	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Beschichtete Körper aus Metall, Hartmetall, Cermet oder Keramik sowie Verfahren zur Beschichtung derartiger Körper
EP2369031B1 (de) *	2010-03-18	2016-05-04	Oerlikon Trading AG, Trübbach	Beschichtung auf nial2o4 basis in spinellstruktur
DE102010053751A1 (de) *	2010-10-28	2012-05-03	Oerlikon Trading Ag, Trübbach	Molybdänmonoxidschichten und deren Herstellung mittels PVD
DE102010052687A1 (de) *	2010-11-26	2012-05-31	GFE Gesellschaft für Fertigungstechnik u. Entwicklung Schmalkalden e.V.	Hartstoff-Beschichtung für Maschinenteile und Werkzeuge zum Verschleißschutz und zur Wärmedämmung
DE102011016681A1 (de) *	2011-04-11	2012-10-11	Oerlikon Trading Ag, Trübbach	Kohlenstofffunkenverdampfung
ES2532898T3 (es)	2011-06-30	2015-04-01	Lamina Technologies Sa	Deposición por arco catódico
EP2607517A1 (en) *	2011-12-22	2013-06-26	Oerlikon Trading AG, Trübbach	Low temperature arc ion plating coating
MX384092B (es) *	2013-04-16	2025-03-14	Oerlikon Surface Solutions Ag Pfaeffikon	Capa de protección contra la oxidación a base de cromo.
EP2999807B1 (de) *	2013-05-23	2019-03-06	Oerlikon Surface Solutions AG, Pfäffikon	Barriereschicht für turbolader
EP2829635B1 (en) *	2013-07-23	2017-12-27	Semih Oncel	Method for controlled production of diffusion based coatings by vacuum cathodic arc systems
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2006
- 2006-01-19 EP EP10011124.4A patent/EP2355126B1/de active Active
- 2006-01-19 SG SG201001774-7A patent/SG160397A1/en unknown
- 2006-01-19 BR BRPI0609673-5A patent/BRPI0609673A2/pt not_active Application Discontinuation
- 2006-01-19 MX MX2007011703A patent/MX2007011703A/es active IP Right Grant
- 2006-01-19 SG SG2013068739A patent/SG193877A1/en unknown
- 2006-01-19 ES ES06700563T patent/ES2374832T3/es active Active
- 2006-01-19 EP EP06700563A patent/EP1863947B1/de active Active
- 2006-01-19 PL PL06700563T patent/PL1863947T3/pl unknown
- 2006-01-19 PL PL10011124T patent/PL2355126T3/pl unknown
- 2006-01-19 AT AT06700563T patent/ATE527392T1/de active
- 2006-01-19 ES ES10011124.4T patent/ES2562454T3/es active Active
- 2006-01-19 PT PT06700563T patent/PT1863947E/pt unknown
- 2006-01-19 CA CA2601722A patent/CA2601722C/en not_active Expired - Fee Related
- 2006-01-19 WO PCT/CH2006/000042 patent/WO2006099754A1/de not_active Ceased
- 2006-01-19 KR KR1020137004861A patent/KR101361224B1/ko not_active Expired - Fee Related
- 2006-01-19 KR KR1020077024393A patent/KR101361240B1/ko not_active Expired - Fee Related
- 2006-01-19 HU HUE10011124A patent/HUE026952T2/en unknown
- 2006-03-01 PL PL06705365T patent/PL1864314T3/pl unknown
- 2006-03-01 CA CA2601729A patent/CA2601729C/en active Active
- 2006-03-01 SG SG201001776-2A patent/SG160398A1/en unknown
- 2006-03-01 EP EP06705365A patent/EP1864314B1/de active Active
- 2006-03-01 BR BRPI0609466-0A patent/BRPI0609466A2/pt not_active IP Right Cessation
- 2006-03-01 ES ES06705365T patent/ES2388175T3/es active Active
- 2006-03-01 PT PT06705365T patent/PT1864314E/pt unknown
- 2006-03-01 KR KR1020077024392A patent/KR101235393B1/ko not_active Expired - Fee Related
- 2006-03-01 WO PCT/CH2006/000125 patent/WO2006099760A2/de not_active Ceased
2012
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Also Published As

Publication number	Publication date
WO2006099754A1 (de)	2006-09-28
KR20070114402A (ko)	2007-12-03
BRPI0609673A2 (pt)	2010-04-20
EP1864314B1 (de)	2012-05-16
SG160397A1 (en)	2010-04-29
ES2388175T3 (es)	2012-10-10
KR101235393B1 (ko)	2013-02-22
MX2007011703A (es)	2008-03-10
CA2601729C (en)	2014-07-08
WO2006099760A2 (de)	2006-09-28
PT1864314E (pt)	2012-07-12
ES2562454T3 (es)	2016-03-04
HUE026952T2 (en)	2016-08-29
KR20070114832A (ko)	2007-12-04
KR101361224B1 (ko)	2014-02-10
WO2006099760A3 (de)	2007-12-06
CA2601729A1 (en)	2006-09-28
SG160398A1 (en)	2010-04-29
CA2601722A1 (en)	2006-09-28
PL2355126T3 (pl)	2016-04-29
JP2013079452A (ja)	2013-05-02
JP5877147B2 (ja)	2016-03-02
EP1864314A2 (de)	2007-12-12
EP2355126A3 (de)	2011-10-19
ATE527392T1 (de)	2011-10-15
KR20130027584A (ko)	2013-03-15
PT1863947E (pt)	2011-12-15
EP2355126A2 (de)	2011-08-10
BRPI0609466A2 (pt)	2010-04-13
CA2601722C (en)	2014-02-25
PL1864314T3 (pl)	2012-11-30
EP1863947B1 (de)	2011-10-05
EP1863947A1 (de)	2007-12-12
EP2355126B1 (de)	2015-12-02
SG193877A1 (en)	2013-10-30
KR101361240B1 (ko)	2014-02-11
ES2374832T3 (es)	2012-02-22

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