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Carl-Mikael Zetterling
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SiC power devices—Present status, applications and future perspective
M Östling, R Ghandi, CM Zetterling
2011 IEEE 23rd International Symposium on Power Semiconductor Devices and …, 2011
3132011
Process technology for silicon carbide devices
CM Zetterling
Iet, 2002
3032002
Inductively coupled plasma etching of bulk 6H-SiC and thin-film SiCN in chemistries
JJ Wang, ES Lambers, SJ Pearton, M Ostling, CM Zetterling, JM Grow, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 16 (4 …, 1998
1661998
500Bipolar Integrated OR/NOR Gate in 4H-SiC
L Lanni, BG Malm, M Östling, CM Zetterling
IEEE Electron Device Letters 34 (9), 1091-1093, 2013
1192013
A monolithic, 500 C operational amplifier in 4H-SiC bipolar technology
R Hedayati, L Lanni, S Rodriguez, BG Malm, A Rusu, CM Zetterling
IEEE Electron Device Letters 35 (7), 693-695, 2014
1012014
Ohmic contact properties of magnetron sputtered Ti3SiC2 on n-and p-type 4H-silicon carbide
K Buchholt, R Ghandi, M Domeij, CM Zetterling, J Lu, P Eklund, L Hultman, ...
Applied physics letters 98 (4), 2011
1002011
Investigation of aluminum nitride grown by metal–organic chemical-vapor deposition on silicon carbide
CM Zetterling, M Östling, K Wongchotigul, MG Spencer, X Tang, CI Harris, ...
Journal of applied physics 82 (6), 2990-2995, 1997
991997
High-voltage 4H-SiC PiN diodes with etched junction termination extension
R Ghandi, B Buono, M Domeij, G Malm, CM Zetterling, M Ostling
IEEE Electron Device Letters 30 (11), 1170-1172, 2009
922009
Reduction of the Schottky barrier height on silicon carbide using Au nano-particles
SK Lee, CM Zetterling, M Östling, I Åberg, MH Magnusson, K Deppert, ...
Solid-State Electronics 46 (9), 1433-1440, 2002
852002
Ultradeep, low-damage dry etching of SiC
H Cho, P Leerungnawarat, DC Hays, SJ Pearton, SNG Chu, RM Strong, ...
Applied Physics Letters 76 (6), 739-741, 2000
852000
Surface-passivation effects on the performance of 4H-SiC BJTs
R Ghandi, B Buono, M Domeij, R Esteve, A Schöner, J Han, S Dimitrijev, ...
IEEE Transactions on Electron Devices 58 (1), 259-265, 2010
822010
Low resistivity ohmic titanium carbide contacts to n-and p-type 4H-silicon carbide
SK Lee, CM Zetterling, M Östling, JP Palmquist, H Högberg, U Jansson
Solid-State Electronics 44 (7), 1179-1186, 2000
812000
Geometrical effects in high current gain 1100-V 4H-SiC BJTs
M Domeij, HS Lee, E Danielsson, CM Zetterling, M Ostling, A Schoner
IEEE electron device letters 26 (10), 743-745, 2005
792005
Modeling and characterization of current gain versus temperature in 4H-SiC power BJTs
B Buono, R Ghandi, M Domeij, BG Malm, CM Zetterling, M Ostling
IEEE Transactions on Electron Devices 57 (3), 704-711, 2010
782010
1200-V 5.2-4H-SiC BJTs With a High Common-Emitter Current Gain
HS Lee, M Domeij, CM Zetterling, M Ostling, F Allerstam, ...
IEEE Electron Device Letters 28 (11), 1007-1009, 2007
742007
ICP etching of SiC
JJ Wang, ES Lambers, SJ Pearton, M Ostling, CM Zetterling, JM Grow, ...
Solid-State Electronics 42 (12), 2283-2288, 1998
731998
Design and characterization of high-temperature ECL-based bipolar integrated circuits in 4H-SiC
L Lanni, R Ghandi, BG Malm, CM Zetterling, M Ostling
IEEE Transactions on Electron Devices 59 (4), 1076-1083, 2012
692012
Integrated circuits in silicon carbide for high-temperature applications
CM Zetterling
MRS bulletin 40 (5), 431-438, 2015
652015
Via-hole etching for SiC
P Leerungnawarat, DC Hays, H Cho, SJ Pearton, RM Strong, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1999
651999
15 kV-class implantation-free 4H-SiC BJTs with record high current gain
A Salemi, H Elahipanah, K Jacobs, CM Zetterling, M Östling
IEEE Electron Device Letters 39 (1), 63-66, 2017
632017
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Articles 1–20