[go: up one dir, main page]

WO2025074174A1 - Unités de tête d'appareil de réduction améliorées - Google Patents

Unités de tête d'appareil de réduction améliorées Download PDF

Info

Publication number
WO2025074174A1
WO2025074174A1 PCT/IB2024/058650 IB2024058650W WO2025074174A1 WO 2025074174 A1 WO2025074174 A1 WO 2025074174A1 IB 2024058650 W IB2024058650 W IB 2024058650W WO 2025074174 A1 WO2025074174 A1 WO 2025074174A1
Authority
WO
WIPO (PCT)
Prior art keywords
head unit
flow
inject
effluent
contact surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/IB2024/058650
Other languages
English (en)
Inventor
Austin Leland HENRY
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Vacuum LLC
Original Assignee
Edwards Vacuum LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB2316151.6A external-priority patent/GB2634338A/en
Application filed by Edwards Vacuum LLC filed Critical Edwards Vacuum LLC
Publication of WO2025074174A1 publication Critical patent/WO2025074174A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/008—Incineration of waste; Incinerator constructions; Details, accessories or control therefor adapted for burning two or more kinds, e.g. liquid and solid, of waste being fed through separate inlets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20—Direct sintering or melting
    • B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F5/008—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of engine cylinder parts or of piston parts other than piston rings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/44—Details; Accessories
    • F23G5/442—Waste feed arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/50—Control or safety arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane

Definitions

  • the effluent flow may have a generally downward primary flow direction.
  • the primary flow direction may be substantially towards the combustion chamber of the abatement apparatus.
  • the effluent flow may be substantially parallel to a major axis of the head unit.
  • the effluent flow conduit may have an effluent inlet through which the effluent fluid flow enters the effluent flow conduit.
  • the effluent inlet may be arranged on an upstream side of the head unit.
  • the effluent flow conduit may have an effluent outlet through which effluent fluid exits the effluent flow conduit, in use.
  • the effluent outlet may be arranged on a downstream side of the head unit.
  • the head unit may include a channel for receiving an inlet nozzle.
  • An inlet nozzle may be configured to at least partially direct fluid flow.
  • substantially the entire head unit may be substantially monolithic, including, for example, one or more inlet nozzles.
  • the head unit may comprise one or more effluent flow conduits which extend substantially vertically from the planar portion and which may be substantially unitarily formed therewith.
  • the monolithic head unit may not include components that are removably attached thereto. For example, components that are fastened, bolted, screwed, or otherwise connected via removable fixing(s) may not form part of the monolithic head unit.
  • the monolithic head unit may not include components that are removably inserted within the monolithic head unit.
  • the head unit may comprise a plurality of inject flow conduits associated with a said effluent flow conduit.
  • the head unit may comprise a plurality of effluent flow conduits each having a plurality of inject flow conduits associated therewith.
  • a said inject flow contact surface of each inject flow conduit may be defined by the head plate.
  • a said inject flow contact surface of each inject flow conduit may be substantially entirely defined by the head plate.
  • the or each inject flow conduit may include one or more bends.
  • the or each inject flow conduit may have a bend radius which is at least 1.5 times greater, for example 1.5 times greater, than the orifice diameter of the same inject flow conduit. Potential pressure drops within an inject flow conduit are therefore eliminated or at least significantly reduced.
  • at least two of the plurality of inject flow conduits may be arranged substantially concentrically within the head plate.
  • at least one inject flow conduit associated with a said effluent flow conduit may be routed substantially closer to the perimeter of the head unit than the centre of the head unit.
  • each inject flow conduit may be routed substantially closer to the perimeter of the head unit than the centre of the head unit.
  • the head plate may define a plurality of inject flow conduits.
  • the head plate may define a combination of substantially concentrically arranged inject flow conduits and substantially non-concentrically arranged inject flow conduits.
  • the head unit may comprise a plurality of effluent flow conduits.
  • the head unit may comprise 4 to 8 effluent flow conduits.
  • the head unit may comprise 6 effluent flow conduits.
  • each effluent flow conduit may be as defined hereinbefore. 8
  • Each effluent flow conduit may be configured to be coupled to a process tool during operation.
  • each effluent flow conduit may be configured to be coupled to a separate process tool during operation.
  • the effluent flow conduits may be arranged about a central axis of the head unit.
  • the effluent flow conduits may be arranged in a generally circular array when viewed along a central axis of the head unit.
  • the effluent flow conduits may be substantially uniformly separated about the circumference of the head unit.
  • the central axis of the head unit may be substantially coaxial with a central axis of the combustion chamber.
  • the head plate may comprise one or more channels configured to receive an inlet nozzle, or “plug”, associated with an effluent flow conduit.
  • a said effluent flow contact surface of each effluent flow conduit may be defined by the head plate.
  • each effluent flow contact surface of each effluent flow conduit may be substantially entirely defined by the head plate.
  • the or each inject flow conduit may extend from an inject flow port.
  • the head unit may comprise a bank including the inject flow ports associated with more than one effluent flow conduit.
  • the bank may include the inject flow ports associated with all of the effluent flow conduits of the head unit.
  • an inject flow port may be defined by the head plate.
  • a said inlet flow port may be substantially unitarily formed with the head plate.
  • the head unit may be substantially symmetrically formed about a radial cross section which passes substantially through the centre of the bank of inject flow ports.
  • a hollow at a region which, in use, gets relatively hotter compared to other regions may have a greater depth than a hollow at a relatively cooler region.
  • the head unit may define a region including a repeated pattern of hollows.
  • a said hollow may have a substantially hexagonal transverse cross section.
  • the head unit may comprise one or more relief cut outs.
  • a downstream side of the head unit may comprise one or more relief cut outs. The risk of deforming (e.g. warping) of the head unit is thereby reduced during manufacture and the weight of the head unit is further reduced.
  • the head unit may be comprised of a metallic material.
  • the head unit may be comprised of an aluminium alloy or a stainless 10 steel alloy. In embodiments, the head unit may be comprise of a material which is additively manufactured, e.g. printed.
  • the effluent flow contact surface and/or the inject flow contact surface and/or the coolant flow contact surface may include a corrosion-resistant surface layer.
  • each effluent flow contact surface, inject flow contact surface, and coolant flow contact surface may include a corrosion-resistant surface layer.
  • the corrosion-resistant surface layer may be a nickel-based surface layer.
  • the present invention provides a method of manufacturing an head unit according to any preceding aspect by additive manufacture.
  • the present invention provides an abatement apparatus comprising an head unit according to any preceding aspect, or as manufactured in accordance with the immediately preceding aspect.
  • the abatement apparatus may comprise a main body defining a combustion chamber having an inlet and an outlet.
  • the head unit may be arranged at or towards the inlet of the combustion chamber and be configured to direct an effluent fluid flow not the combustion chamber.
  • the present invention provides a method of conveying an effluent gas flow into an abatement apparatus.
  • Figure 1 shows a perspective view of a head unit according to the present invention.
  • Figure 2 shows a skeletonised perspective view of the head unit of Figure 1.
  • Figure 3 shows a skeletonised plan view of a head unit according to the present invention.
  • Figure 1 illustrates a generally cylindrical head unit referenced generally as 10. The head unit is for arrangement at an inlet of a combustion chamber of an abatement apparatus (not shown). When arranged at an inlet of a combustion chamber of an abatement apparatus, the head unit 10 defines a portion of the combustion chamber.
  • each effluent flow conduit 14 is an integral part of the head plate 12.
  • the head unit 10 of Figure 1 is substantially monolithic. In the head unit 10 of Figure 1, the head unit 10 is monolithic with the exception of distinct nozzles (not shown) which, in use, are inserted in channels 36. [079] As shown in Figures 2 and 3, the head unit 10 also comprises a plurality of inject flow conduits 18, 20, 22 associated with each effluent flow conduit 14. Each inject flow conduit terminates at an inject flow port, such as 24a-24c. In the embodiment of Figure 1, the inject conduits terminating an inject flow ports 24a-24c are associated with effluent flow conduit 14c.
  • Each effluent flow conduit in Figure 1 has a fuel inject 18, an oxygen-based inject 20, and a nitrogen-based inject 22.
  • the nitrogen-based inject 22 is configured, in use, to maintain a forward flow of the effluent gas flow.
  • Each of the inject flow conduits has an inject flow contact surface which is defined by the head plate 12.
  • each of the inject flow conduits 18, 20, 22 is an integral part of the head plate 12.
  • the inject flow conduits are therefore substantially internally routed within the head plate 12.
  • an inject flow port associated with an effluent flow conduit may be located in a different sector of the head unit 10 to the corresponding effluent flow conduit when the head unit is viewed from above.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Incineration Of Waste (AREA)

Abstract

La présente invention concerne une unité de tête destinée à être disposée au niveau d'une entrée d'une chambre de combustion d'un appareil de réduction, l'unité de tête comprenant : une plaque de tête conçue pour coiffer une chambre de combustion ; un conduit d'écoulement d'effluent ayant une surface de contact d'écoulement d'effluent pour transporter un écoulement d'effluent vers une chambre de combustion d'un appareil de réduction ; et un conduit d'écoulement d'injection ayant une surface de contact d'écoulement d'injection pour transporter un fluide d'injection vers l'écoulement d'effluent ; la surface de contact d'écoulement d'effluent et/ou la surface de contact d'écoulement d'injection étant définies, de préférence sensiblement entièrement définies, par la plaque de tête.
PCT/IB2024/058650 2023-10-03 2024-09-05 Unités de tête d'appareil de réduction améliorées Pending WO2025074174A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US202363587511P 2023-10-03 2023-10-03
US63/587,511 2023-10-03
GB2316151.6 2023-10-23
GB2316151.6A GB2634338A (en) 2023-10-03 2023-10-23 Improved abatement apparatus head units

Publications (1)

Publication Number Publication Date
WO2025074174A1 true WO2025074174A1 (fr) 2025-04-10

Family

ID=92973290

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2024/058650 Pending WO2025074174A1 (fr) 2023-10-03 2024-09-05 Unités de tête d'appareil de réduction améliorées

Country Status (1)

Country Link
WO (1) WO2025074174A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010055555A1 (en) * 1998-01-12 2001-12-27 Advanced Technology Materials, Inc. Advanced apparatus and method for abatement of gaseous pollutants
US7892506B2 (en) * 2007-04-04 2011-02-22 Edwards Limited Combustive destruction of noxious substances
GB2595748A (en) * 2020-11-13 2021-12-08 Csk Inc A scrubber burner

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010055555A1 (en) * 1998-01-12 2001-12-27 Advanced Technology Materials, Inc. Advanced apparatus and method for abatement of gaseous pollutants
US7892506B2 (en) * 2007-04-04 2011-02-22 Edwards Limited Combustive destruction of noxious substances
GB2595748A (en) * 2020-11-13 2021-12-08 Csk Inc A scrubber burner

Similar Documents

Publication Publication Date Title
CN101300067B (zh) 多用途流动模块
US7981472B2 (en) Methods of providing uniform gas delivery to a reactor
DE69230401T2 (de) Cvd-vorrichtung und verfahren mit primärström
US10549253B2 (en) Reactor system for high throughput applications
US20190264323A1 (en) Apparatus for deposition of a iii-v semiconductor layer
CN100451528C (zh) 废热锅炉
JPH03113295A (ja) 管束式熱交換器
KR20220119353A (ko) 방위각 믹서
US20180170750A1 (en) MILLIMETER-SCALE EXCHANGER-REACTOR FOR HYDROGEN PRODUCTION OF LESS THAN 10 Nm3/h
CN111868299A (zh) 用于在部件的内表面上施加涂层的反应器
WO2025074174A1 (fr) Unités de tête d'appareil de réduction améliorées
GB2634338A (en) Improved abatement apparatus head units
JP3869778B2 (ja) 成膜装置
JP3663400B2 (ja) 成膜装置
JP2016114349A (ja) 急冷システム
US7131489B2 (en) Heat exchanger
US4010797A (en) Heat exchanger
CN115851320A (zh) 通过含烃燃料的气化来生产产物气体的反应器和方法
JPH03113291A (ja) 反応ガスを冷却する熱交換器
GB2634574A (en) Head unit for abatement apparatus
WO2025074176A1 (fr) Unité de tête pour appareil de réduction et procédé de production de l'unité de tête
US6261512B1 (en) Oxyacetylene cutting apparatus
CN101056703A (zh) Sncr分布栅板
KR20030033062A (ko) 화학증착(ｃｖｄ)방법 및 장치를 위한 기체 유입 장치
US20250369613A1 (en) Effusion cooled fuel nozzle tip

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 24783793

Country of ref document: EP

Kind code of ref document: A1