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WO2025074176A1 - Unité de tête pour appareil de réduction et procédé de production de l'unité de tête - Google Patents

Unité de tête pour appareil de réduction et procédé de production de l'unité de tête Download PDF

Info

Publication number
WO2025074176A1
WO2025074176A1 PCT/IB2024/058657 IB2024058657W WO2025074176A1 WO 2025074176 A1 WO2025074176 A1 WO 2025074176A1 IB 2024058657 W IB2024058657 W IB 2024058657W WO 2025074176 A1 WO2025074176 A1 WO 2025074176A1
Authority
WO
WIPO (PCT)
Prior art keywords
head unit
effluent
flow
conduit
gas flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/IB2024/058657
Other languages
English (en)
Inventor
Austin Leland HENRY
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Vacuum LLC
Original Assignee
Edwards Vacuum LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB2316153.2A external-priority patent/GB2634574A/en
Application filed by Edwards Vacuum LLC filed Critical Edwards Vacuum LLC
Publication of WO2025074176A1 publication Critical patent/WO2025074176A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/20—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2212/00—Burner material specifications
    • F23D2212/20—Burner material specifications metallic
    • F23D2212/203—Particles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2213/00—Burner manufacture specifications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane

Definitions

  • the head unit When arranged at an inlet of a combustion chamber of the abatement apparatus, the head unit may define a portion of the combustion chamber. Specifically, the head unit may define a portion of the surface defining the combustion chamber. The head unit may have an upstream side that faces generally away from the combustion chamber when in use, and a downstream side that faces towards the combustion chamber when in use. Preferably, in use, a surface of the generally planar portion of the head unit may define a portion of the surface of the combustion chamber.
  • upstream and downstream may refer to the relative positioning of components along the flow path of the effluent gas flow.
  • the head unit may be configured to receive incoming effluent gas flows from one or more sources.
  • the effluent gas flow may be the exhaust flow from one or more process tools.
  • the head unit may be configured to direct said gas flow(s) into the combustion chamber of the abatement apparatus.
  • the effluent flow conduit may have a conduit inlet through which the effluent gas flow enters the effluent flow conduit.
  • the conduit inlet may be on an upstream side of the head unit.
  • the effluent flow conduit may also have a conduit outlet through which the effluent gas flow exits the effluent flow conduit.
  • the conduit outlet may be on a downstream side of the head unit.
  • the conduit outlet may be configured to convey the effluent gas flow directly into the combustion chamber, or alternatively, into a further component, such as an inlet nozzle.
  • the first and second directions are different.
  • the first direction may be the major direction of flow of the effluent gas flow.
  • the first direction when in use, may be generally downwards.
  • the second direction may be generally radially inward.
  • the second direction may be at an angle of from about 90° to about 180° to the first direction.
  • the smooth curved section may substantially continuously transition the direction of flow of the effluent gas flow from the first direction to the second direction. Said substantially continuous transition may occur along the length of the smooth curved section.
  • the effluent flow conduit may have a circular or elliptical cross-section.
  • the surface defining the smooth curved section of the effluent flow conduit may be substantially free from angles or comers. More preferably, the surface defining the effluent flow conduit may be substantially free from angles or comers.
  • the effluent flow conduit may be defined by a single surface of the head unit.
  • the tapered section may be defined as a section of the effluent flow conduit wherein the cross-sectional area at the start of the section is larger than the cross-sectional area at the end of the section.
  • the tapered section may be a substantially uniform taper.
  • the tapered section may be a non-uniform taper.
  • the cross-sectional area of the effluent flow conduit may continuously decrease along the tapered section.
  • the volume defined by the tapered section of the effluent flow conduit may be substantially frusto-conical.
  • providing a tapered section may improve the mixing of the effluent gas flow within the effluent flow conduit of the head unit. Improved mixing of the effluent gas flow may improve the destruction and removal efficiency (DRE) of the abatement apparatus.
  • the tapered section may improve mixing of the effluent gas flow with any additives that have been injected into the effluent gas flow.
  • the head unit may be monolithic.
  • monolithic may be defined as the head unit being a single, unitary component.
  • the monolithic head unit may be in the form of a single piece of material.
  • the monolithic head unit may include components that are welded together, thereby effectively becoming a single, unitary component.
  • the effluent flow conduit may be monolithic.
  • the surface of the head unit defining the first section, the smooth curved section, and the second section of the effluent flow conduit may be monolithic.
  • the effluent flow conduits may be arranged about a central axis of the head unit.
  • the effluent flow conduits may be arranged in a generally circular array when viewed along a central axis of the head unit.
  • the central axis of the head unit may be substantially coaxial with a central axis of the combustion chamber.
  • each effluent flow conduit is configured to direct the effluent gas flow generally radially inwardly as it passes through the head unit.
  • the central axis at the conduit inlet may be offset from the central axis at the conduit outlet.
  • the central axis at the conduit inlet may be substantially parallel with the central axis at the conduit outlet.
  • the angle between the central axis at the conduit inlet and the central axis at the conduit outlet may be from about 90° to about 180°.
  • the angle between the central axis at the conduit inlet and the central axis at the conduit outlet may be from about 120° to about 180°.
  • the or each conduit outlet When viewed along the central axis of the head unit, the or each conduit outlet may be generally radially inward of the or each conduit inlet.
  • routing an inject flow conduit internally within the head unit may enable improved thermal control of the head unit. Furthermore, internally routing the effluent flow conduit and the inject flow conduit may reduce the number of connections and seals around the head unit. This may therefore provide more free space within the abatement apparatus. Such embodiments may reduce downtime during servicing as fewer leak checks may be required.
  • a surface layer may be present on one or more surfaces of the head unit.
  • a surface layer may be present on the surface(s) defining the effluent flow conduit(s).
  • a nickel surface layer may be present on the surface(s) defining the effluent flow conduit(s).
  • this may improve the corrosion resistance of the effluent flow conduit(s).
  • the head unit may define the nozzle configured to inject the effluent gas flow into the combustion chamber.
  • Figure 2 illustrates a cross-sectional view of portion of an abatement apparatus including a head unit (6) in accordance with an embodiment of the present invention.
  • a surface of the head unit (6) defines an effluent flow conduit (7).
  • the effluent flow conduit (7) is configured to direct an effluent gas flow through the head unit (6) during use.
  • the surface defining the inner face of the effluent flow conduit (7) provides a first section (8) for directing effluent flow in a first direction (Di), and a second section for directing the effluent flow in a second direction (D2).
  • the head unit (15) is a head plate (17).
  • the head unit (15) comprises a plurality of effluent flow conduits (18).
  • the head unit (15) comprises six effluent flow conduits (18).
  • the effluent flow conduits (18) are as defined elsewhere herein.
  • the majority of the effluent flow conduits (18) are arranged on an upstream side of the head unit (15).
  • the effluent flow conduits (18) each extend through the head unit (15) and define a flow path for effluent gas flow to pass into the combustion chamber of the abatement apparatus (not shown) during use.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Incineration Of Waste (AREA)

Abstract

La présente invention concerne une unité de tête destinée à être disposée au niveau d'une entrée d'une chambre de combustion d'un appareil de réduction, l'unité de tête définissant un conduit d'écoulement d'effluent configuré pour diriger un écoulement gazeux d'effluent à travers l'unité de tête. Une surface qui définit la face interne du conduit d'écoulement d'effluent fournit une première section de conduit destinée à diriger un écoulement d'effluent dans une première direction et une seconde section de conduit destinée à diriger un écoulement d'effluent dans une seconde direction, et une section incurvée lisse de conduit entre ladite première section et la seconde section configurée pour faire passer la direction d'écoulement de l'écoulement gazeux d'effluent de ladite première direction à ladite seconde direction le long de la section incurvée lisse.
PCT/IB2024/058657 2023-10-03 2024-09-05 Unité de tête pour appareil de réduction et procédé de production de l'unité de tête Pending WO2025074176A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US202363587516P 2023-10-03 2023-10-03
US63/587,516 2023-10-03
GB2316153.2 2023-10-23
GB2316153.2A GB2634574A (en) 2023-10-03 2023-10-23 Head unit for abatement apparatus

Publications (1)

Publication Number Publication Date
WO2025074176A1 true WO2025074176A1 (fr) 2025-04-10

Family

ID=92973571

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2024/058657 Pending WO2025074176A1 (fr) 2023-10-03 2024-09-05 Unité de tête pour appareil de réduction et procédé de production de l'unité de tête

Country Status (2)

Country Link
TW (1) TW202530592A (fr)
WO (1) WO2025074176A1 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6153150A (en) * 1998-01-12 2000-11-28 Advanced Technology Materials, Inc. Apparatus and method for controlled decomposition oxidation of gaseous pollutants
US20230213186A1 (en) * 2020-06-05 2023-07-06 Edwards Limited Inlet assembly for an abatement assembly and method of conveying an effluent to an abatement chamber

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6153150A (en) * 1998-01-12 2000-11-28 Advanced Technology Materials, Inc. Apparatus and method for controlled decomposition oxidation of gaseous pollutants
US20230213186A1 (en) * 2020-06-05 2023-07-06 Edwards Limited Inlet assembly for an abatement assembly and method of conveying an effluent to an abatement chamber

Also Published As

Publication number Publication date
TW202530592A (zh) 2025-08-01

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