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WO2022001107A1 - 自驱动型样品真空转移系统及方法 - Google Patents

自驱动型样品真空转移系统及方法 Download PDF

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Publication number
WO2022001107A1
WO2022001107A1 PCT/CN2021/075265 CN2021075265W WO2022001107A1 WO 2022001107 A1 WO2022001107 A1 WO 2022001107A1 CN 2021075265 W CN2021075265 W CN 2021075265W WO 2022001107 A1 WO2022001107 A1 WO 2022001107A1
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WIPO (PCT)
Prior art keywords
vacuum
bracket
sample
box body
sealing valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2021/075265
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English (en)
French (fr)
Inventor
张小波
常正凯
闻益
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Shenzhen Supro Instruments Ltd
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Shenzhen Supro Instruments Ltd
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Publication date
Application filed by Shenzhen Supro Instruments Ltd filed Critical Shenzhen Supro Instruments Ltd
Publication of WO2022001107A1 publication Critical patent/WO2022001107A1/zh
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Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
    • B65D81/2007—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum
    • B65D81/2015—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum in an at least partially rigid container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
    • B65D81/2007—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum
    • B65D81/2038—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum with means for establishing or improving vacuum

Definitions

  • the present application relates to the field of sample transfer, in particular to a self-driven sample vacuum transfer system and method.
  • the electric-driven vacuum transfer device can realize the storage and transfer functions of sensitive samples, there are the following problems in the specific use process: (1)
  • the electric-driven vacuum transfer device integrates components such as motors and guide devices. , generally large in size, for some compact SEMs, such as desktop SEMs, etc., cannot accommodate such a volume of vacuum transfer devices; (2)
  • SEMs and micro-nano are required.
  • the processing system provides corresponding electronic control interfaces for internal and external power connection, and involves the compatibility of interfaces of different specifications, which invisibly increases the complexity and cost of the system and raises the threshold for cross-platform transfer.
  • a self-propelled sample vacuum transfer system and method are provided.
  • a sample vacuum transfer system includes a vacuum box and a vacuum pump set.
  • the vacuum box includes a box body, a self-driven ejecting sample stage, a vacuum sealing valve body, a vacuum sealing valve air nozzle and a sample holder.
  • the self-driven ejection sample stage is provided with a cover plate, a bracket member and an elastic member which are connected in sequence. One end of the elastic member is fixed inside the box body, and the other end is movably abutted against the bracket member.
  • the sample holder is detachably arranged on the support member. When the elastic member is in a compressed state, the cover plate is in contact with the box body, and the cover plate and the box body together form a closed cavity, and the bracket member is located in the cavity.
  • the elastic member is in a free state, and the sample holder is located outside the box.
  • the vacuum sealing valve body is respectively communicated with the chamber and the air nozzle of the vacuum sealing valve.
  • the vacuum sealing valve air nozzle is used to connect the vacuum pump
  • the above self-driven sample vacuum transfer system is used for storage and transfer in the sample preparation process. It has the advantages of simple structure, cleverly utilizes the pressure formed by the vacuum environment, and can drive the sample by itself when the pressure difference between the internal and external gases reaches a certain condition. In order to carry out the next operation, it does not involve electric drive at all, which is beneficial to reduce its own volume beyond expectations, especially suitable for the use of compact sample processing equipment, compatible with most sample processing platforms such as sample preparation and characterization platforms , which solves the problem of high cost of sample pretreatment caused by the complex structure and low versatility of the existing related systems, thereby helping to improve the versatility of non-destructive cross-platform transfer of sensitive samples such as air or water vapor sensitive samples.
  • a sample vacuum transfer method comprising providing the sample vacuum transfer system described in any one of the above; placing the sample in a sample holder; placing the sample holder on a bracket member of a self-driven ejection sample stage; The bracket piece is pushed into the chamber of the box body and the cover plate of the self-driven ejection sample stage is brought into contact with the box body to close the chamber; Evacuate; close the vacuum seal valve nozzle; and transfer the vacuum box as a whole to the target platform.
  • FIG. 1 is a perspective view of a sample vacuum transfer system according to an embodiment.
  • FIG. 2 is a front view of the sample vacuum transfer system shown in FIG. 1 .
  • FIG. 3 is a cross-sectional view taken along line A-A in FIG. 2 .
  • FIG. 4 is a right side view of the system shown in FIG. 1 .
  • FIG. 5 is a perspective view of the self-driven ejection sample stage of the sample vacuum transfer system shown in FIG. 1 when it is opened.
  • FIG. 6 is a front view of the sample vacuum transfer system shown in FIG. 5 .
  • FIG. 7 is a cross-sectional view taken along line B-B in FIG. 6 .
  • FIG. 8 is a right side view of the system shown in FIG. 5 .
  • FIG. 9 is a front view of a partial structure of a sample vacuum transfer device according to another embodiment.
  • FIG. 10 is a left side view of the device shown in FIG. 9 .
  • FIG. 11 is a perspective view of the device shown in FIG. 9 .
  • FIG. 12 is a perspective view of a vacuum transfer apparatus according to another embodiment.
  • FIG. 13 is a front view of the vacuum transfer apparatus shown in FIG. 12 .
  • FIG. 14 is a top view of the vacuum transfer apparatus shown in FIG. 12 .
  • FIG. 15 is a perspective view of the self-driven ejection sample stage of the vacuum transfer device shown in FIG. 12 when it is opened.
  • FIG. 16 is a top view of the vacuum transfer apparatus shown in FIG. 15 .
  • a self-propelled sample vacuum transfer system includes a vacuum box.
  • the vacuum box includes a box body 100, a self-driven ejection sample stage 200, a vacuum sealing valve body 300, a vacuum sealing valve air nozzle 400 and a sample holder 700; the vacuum sealing valve body 300 is provided with a vacuum sealing The valve switch 500, the vacuum sealing valve air nozzle 400 has an on state and a closed state, the vacuum sealing valve body 300 is used to communicate with the vacuum pump group 600 through the vacuum sealing valve air nozzle 400 in the conductive state, and after the vacuum is pumped, the vacuum seal is closed.
  • the self-driven sample vacuum transfer system can be transferred with the valve air nozzle 400 in a closed state.
  • the vacuum sealing valve body 300 is fixed on the box body 100 by the fixing member 310 .
  • the cover plate 210 When the elastic member 260 is in a certain compressed state, the cover plate 210 is in contact with the box body 100, and the cover plate 210 and the box body 100 together form a closed cavity 180, and the bracket member is located at the In the chamber 180; in this embodiment, the box body 100 is provided with an upper box plate 110, a lower box plate 120, a bottom box plate 140 and a side box plate, an upper box plate 110, a lower box plate 120, a bottom box plate 140 and The side box plates are jointly enclosed and arranged so that part or all of the cavity 180 is formed inside the box body 100 , that is, part or all of the cavity 180 is arranged inside the box body 100 , and the bottom box plate 140 passes through the fixing device 150 and the upper box plate 110 respectively.
  • the box body 100 is also provided with an upper guide rail 160 and a lower guide rail 170.
  • the vacuum sealing valve body 300 is respectively connected to the chamber 180 and the vacuum sealing valve air nozzle 400.
  • the vacuum sealing valve air nozzle 400 is used to connect the vacuum pump set 600; the inside of the box body 100
  • a resisting member 130 is provided; in this embodiment, the resisting member 130 is fixedly disposed on the bottom box plate 140 .
  • the self-driven ejection stage 200 is provided with a cover plate 210 , a bracket member and an elastic member 260 which are connected in sequence.
  • the cover plate 210 is in the shape of a flat plate, and the box body 100 is in the shape of a prism.
  • the self-driven ejection stage 200 is further provided with a guide shaft 270 and a mounting portion 271 .
  • the mounting portion 271 is fixed inside the box body 100 , one end of the guide shaft 270 is fixed on the abutting member 130 , and the other end is fixed on the mounting portion 271 and guides
  • the shaft 270 is disposed through the bracket member, one end of the elastic member 260 is fixed on the abutting member 130, and the other end is movably abutted on the bracket member.
  • the sample holder 700 is detachably arranged on the bracket member; the bracket member is provided with an upper bracket 240 connected in sequence , the inner bracket 250 and the lower bracket 230, the sample holder 700 is detachably arranged on the upper bracket 240; the upper bracket 240 is slidably arranged on the upper rail 160, and the lower bracket 230 is slidably arranged on the lower rail 170; The positioning portion 241 of the sample holder 700 is fixed under a certain force; the bracket member is further provided with an outer bracket 220, the upper bracket 240 and the lower bracket 230 are respectively connected with the outer bracket 220, and the outer bracket 220 is connected with the cover plate 210; A middle bracket 280 is also arranged between the outer bracket 220 and the inner bracket 250 , the upper bracket 240 and the lower bracket 230 are respectively connected with the middle bracket 280 , the guide shaft 270 is arranged through the inner bracket 250 , and the guide shaft 270 also passes through the middle bracket 280 set up.
  • One end of the elastic member 260 is fixed on the resisting member 130, and the other end is movably abutted against the inner bracket 250; the elastic member 260 is a hollow member and the elastic member 260 is sleeved outside the guide shaft 270. Move along the guide shaft 270 .
  • the cover plate 210 is in contact with the box body 100 to close the cavity 180 and the bracket member is located in the cavity 180 .
  • the sample holder 700 includes a connected tray 710 and a fixed end 720.
  • the tray 710 is used to carry the sample.
  • the bracket is provided with a fixed groove corresponding to the fixed end 720.
  • the fixed end 720 is detachable It is fixed in the fixing groove so that the tray 710 can be detachably arranged on the bracket.
  • the mounting portion 271 abuts against the inner bracket 250 to restrict the elastic member 260 from further extending outward, and the sample holder 700 and its tray 710 are all located outside the box body 100 .
  • FIG. 6 and FIG. 7 together.
  • the sample holder 700 includes a connected tray 710 and a fixed end 720.
  • the tray 710 is used to carry the sample.
  • the bracket is provided with a fixed groove corresponding to the fixed end 720.
  • the fixed end 720 is detachable It is fixed in the fixing groove so that the tray 710 can be detachably arranged on the bracket.
  • the mounting portion 271 abut
  • the self-driven sample vacuum transfer system is further provided with a sealing gasket 800 on the box body 100 or the cover plate 210 .
  • a sealing gasket 800 on the box body 100 or the cover plate 210 .
  • the number of guide shafts 270 is two, and each guide shaft 270 is provided with a spring as an elastic
  • the cover plate 210 fixes the upper bracket 240 and the outer bracket 220 through the fixing part 290 ; one end of the guide shaft 270 is fixed on the abutting member 130 , and the other end is fixed on the mounting part 271 , and the upper bracket 240 is fixed on the inner bracket 240 through the fixing part 290 .
  • Bracket 250 is shown in FIG. 9 , FIG. 10 and FIG. 11 .
  • the box body 100 is provided with a resisting member 130 on the bottom box plate 140 , one end of the elastic member 260 is fixed on the resisting member 130 , and the other end movably abuts against the mounting portion 271 , that is, the other end of the elastic member 260 abuts and mounts in a compressed state
  • the mounting portion 271 may be in contact with the mounting portion 271 in a free state, or there may be a gap between the mounting portion 271 and the length of the guide shaft 270 and the elastic force of the elastic member 260 .
  • a self-driven sample vacuum transfer system includes a vacuum box 900 and a vacuum pump set 600 .
  • the vacuum pump set 600 is connected to the vacuum box 900 through the pipe body, and when transferring the sample, only the vacuum box 900 needs to be transferred.
  • the vacuum box 900 includes a box body 100, a self-driving sample ejection stage 200, a vacuum sealing valve body 300, a vacuum sealing valve gas The nozzle 400 and the sample holder 700; the vacuum seal valve body 300 is provided with a vacuum seal valve switch 500, and the sample holder 700 is located outside the box body 100 at this time, so that the samples carried by the sample holder 700 can be processed automatically or manually.
  • the vacuum seal valve switch 500 is used to make the vacuum seal valve body 300 and the chamber 180 be in a closed state or an open state when the vacuum seal valve air nozzle 400 is in a closed state.
  • the above self-driven sample vacuum transfer system is used for storage and transfer in the sample preparation process. It has the advantages of simple structure, cleverly utilizes the pressure formed by the vacuum environment, and can drive the sample by itself when the pressure difference between the internal and external gases reaches a certain condition. In order to carry out the next operation, it does not involve electric drive at all, which is beneficial to reduce its own volume beyond expectations, especially suitable for the use of compact sample processing equipment, compatible with most sample processing platforms such as sample preparation and characterization platforms , which solves the problem of high cost of sample pretreatment caused by the complex structure and low versatility of the existing related systems, thereby helping to improve the versatility of non-destructive cross-platform transfer of sensitive samples such as air or water vapor sensitive samples.
  • the present application also provides a self-driven sample vacuum transfer method, the method comprising providing the sample vacuum transfer system of any of the above embodiments; placing the sample in the sample holder; placing the sample in the sample holder On the bracket of the self-driven ejection stage; push the bracket of the self-driven ejection stage into the chamber of the cassette body and make the cover plate of the self-driven ejection stage come into contact with the cassette body to close the chamber; by vacuum sealing The valve air nozzle evacuates the vacuum sealing valve body and the connected chamber; closes the vacuum sealing valve air nozzle; the body transfers the vacuum box.
  • transferring the vacuum box as a whole includes: transferring the vacuum box as a whole to the target platform; and after transferring the vacuum box as a whole, the self-driven sample vacuum transfer method further includes the step of: vacuuming on the target platform to the self-propelled sample platform.
  • the elastic member that drives the ejection stage ejects the support member and keeps the sample holder outside the box. In this design, only the vacuum box is transferred, which has the advantage of small size. And the whole process is cleverly controlled by vacuum pressure and elastic force, without electric drive.
  • Lithium-ion battery materials were prepared in a glove box filled with a protective atmosphere of positive nitrogen gas and transferred to SEM for observation of the samples.
  • the self-driven sample vacuum transfer system is placed in the glove box.
  • the self-driven sample vacuum transfer system includes a vacuum box and a vacuum pump set, and the prepared sample is fixed on the sample holder.
  • the box body is in the open state, as shown in Figures 5 to 8, and also referring to Figures 15 and 16, the sample holder with the sample fixed thereon can be inserted into the fixing groove of the self-driven ejection sample stage.
  • the spring sleeved on the guide shaft is in an open state, as shown in FIG. 7 . Connect the air nozzle of the vacuum sealing valve and the vacuum pump group through the gas pipeline, and press the self-driven ejection sample stage into the box body.
  • the spring sleeved on the guide shaft is in a compressed state, as shown in Figure 3.
  • the self-driven pop-up sample stage is ejected by the elastic force of the compression spring, as shown in Figure 5 to Figure 8, and the sample can be observed and detected in the SEM in the next step.
  • the sample is always in a protective atmosphere or a vacuum environment to maximize the isolation of the impact of air or water vapor on the sample; moreover, only the vacuum box is transferred, which has the advantage of small size .
  • the whole process is cleverly controlled by vacuum pressure and elastic force, and no electric drive is required.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

一种样品真空转移系统及方法，该样品真空转移系统包括真空盒和真空泵组（600），真空盒包括盒体(100)、自驱动弹出样品台(200)、真空密封阀体(300)、真空密封阀气嘴(400)和样品托(700)，自驱动弹出样品台（200）设有顺序连接的盖板（210）、支架件及弹性件（260），弹性件（260）一端固定于盒体（100）内部，另一端活动抵接支架件；弹性件（260）处于压缩状态下，盖板（210）与盒体（100）相接触且盖板（210）与盒体（100）共同形成封闭的腔室（180），且支架件位于腔室（180）中；弹性件（260）处于自由状态下，样品托（700）位于盒体（100）外；真空密封阀体（300）分别连通腔室（180）及真空密封阀气嘴（400）；样品托（700）可拆卸地设置于支架件上，真空密封阀气嘴（400）用于连接真空泵组（600）。

Description

自驱动型样品真空转移系统及方法
相关申请的交叉引用
本申请要求于2020年6月30日提交中国专利局、申请号为2020106103083、发明名称为“自驱动型样品真空转移系统及方法”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及样品转移领域，特别是涉及自驱动型样品真空转移系统及方法。
技术背景
手套箱、扫描电镜和微纳加工系统已在传统材料、先进新材料、半导体材料、纳米材料和催化材料等方面获得广泛的应用。实现磁性材料、低介电系数材料、生物医用材料、高分子复合材料和陶瓷材料直接精细加工和高分辨表征，并在新材料、环境、能源和化学等领域显现出了极大的潜力。但是在具体应用中，某些样品在制备、存储和转移过程中，存在被空气或水汽污染或氧化的风险。为避免对空气或水汽敏感材料因制备、存储和转移过程中被污染或氧化的问题，需要全程处于干燥保护性气氛或真空环境。样品真空转移系统无疑是解决问题的关键技术。现有样品真空转移技术普遍使用带有外置或内置的电力驱动装置，例如德国Kammrath-Weiss公司商业化真空转移装置产品等，通过电机、控制装置、导向装置与真空系统集成，驱动并控制真空系统盒盖的开启与关闭。
虽然目前现有的电驱动型真空转移装置可以实现对敏感样品的存储和转移功能，但是在具体使用过程中存在如下问题：(1)电驱动型真空转移装置因为集成有电机、导向装置等部件，普遍体积较大，对于某些体积紧凑的扫描电镜，如台式扫描电镜等，无法承放这样体积的真空转移装置；(2)为实现电力驱动和控制，需要手套箱、扫描电镜和微纳加工系统提供相应的电控接口做内外电力连接，并涉及不同规格接口兼容性问题，无形中增加系统的复杂程度和成本，提高跨平台转移使用的门槛。
发明内容
根据本申请的各种实施例，提供一种自驱动型样品真空转移系统及方法。
一种样品真空转移系统，其包括真空盒和真空泵组。所述真空盒包括盒体、自驱动弹出样品台、真空密封阀体、真空密封阀气嘴及样品托。所述自驱动弹出样品台设有顺序连接的盖板、支架件及弹性件。所述弹性件一端固定于所述盒体内部，另一端活动抵接所述支架件。所述样品托可拆卸地设置于所述支架件上。所述弹性件处于压缩状态下，所述盖板与所述盒体相接触且所述盖板与所述盒体共同形成封闭的腔室，所述支架件位于所述腔室中。所述弹性件处于自由状态下，所述样品托位于所述盒体外。所述真空密封阀体分别连通所述腔室及所述真空密封阀气嘴。所述真空密封阀气嘴用于连接真空泵组。
上述自驱动型样品真空转移系统，用于样品制备过程中存储和转移，具有结构简单的优点，巧妙地利用了真空环境所形成的压力，在内外气体压力差达到一定条件时能够自行驱动样品，以便进行下一步的操作，使用时完全不涉及电力驱动，有利于在超出预期之上缩减自身体积，尤其适用于体积紧凑的样品处理设备使用，兼容绝大多数样品处理平台例如样品制备及表征平台，解决了目前已有的相关系统由于结构复杂，通用性不强所导致的样品前处理成本高昂的问题，从而有利于提升敏感样品例如空气或水汽敏感样品无损跨平台转移的通用性。
一种样品真空转移方法，包括提供上述任一项所述的样品真空转移系统；将样品放入样品托中；将样品托放在自驱动弹出样品台的支架件上；将自驱动弹出样品台的支架件推送入盒体的腔室中且使自驱动弹出样品台的盖板与盒体相接触以封闭腔室；通过真空密封阀气嘴对真空密封阀体及其所连通的腔室进行抽真空；关闭真空密封阀气嘴；及将真空盒整体转移至目标平台。
附图说明
图1为一实施例的样品真空转移系统的立体图。
图2为图1所示样品真空转移系统的主视图。
图3为沿图2中A-A线的剖视图。
图4为图1所示系统的右视图。
图5为图1所示样品真空转移系统的自驱动弹出样品台开启时的立体图。
图6为图5所示样品真空转移系统的主视图。
图7为沿图6中B-B线的剖视图。
图8为图5所示系统的右视图。
图9为另一实施例的样品真空转移装置的部分结构的主视图。
图10为图9所示装置的左视图。
图11为图9所示装置的立体图。
图12为另一实施例的真空转移装置的立体图。
图13为图12所示真空转移装置的主视图。
图14为图12所示真空转移装置的俯视图。
图15为图12所示真空转移装置的自驱动弹出样品台开启时的立体图。
图16为图15所示真空转移装置的俯视图。
具体实施方式
为使本申请的上述目的、特征和优点能够更加明显易懂，下面结合附图对本申请的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本申请。但是本申请能够以很多不同于在此描述的其它方式来实施，本领域技术人员可以在不违背本申请内涵的情况下做类似改进，因此本申请不受下面公开的具体实施例的限制。
需要说明的是，当元件被称为“固定于”或“设置于”另一个元件，它可以直接在另一个元件上或者也可以存在居中的元件。当一个元件被认为是“连接”另一个元件，它可以是直接连接到另一个元件或者可能同时存在居中元件。本申请的说明书所使用的术语“垂直的”、“水平的”、“左”、“右”以及类似的表述只是为了说明的目的，并不表示是唯一的实施方式。
除非另有定义，本申请的说明书所使用的所有的技术和科学术语与属于本申请的技术领域的技术人员通常理解的含义相同。在本申请的说明书中所使用的术语只是为了描述具体的实施方式的目的，不是旨在于限制本申请。本申请的说明书所使用的术语“和/或”包括一个或多个相关的所列项目的任意的和所有的组合。
在其中一个实施例中，如图1所示，一种自驱动型样品真空转移系统，其包括真空盒。请一并参阅图2及图3，真空盒包括盒体100、自驱动弹出样品台200、真空密封阀体300、真空密封阀气嘴400及样品托700；真空密封阀体300设有真空密封阀开关500，真空密封阀气嘴400具有导通状态及关闭状态，真空密封阀体300用于通过导通状态下的真空密封阀气嘴400连通真空泵组600，抽完真空后，关闭真空密封阀气嘴400以使其处于关闭状态下，即可转移自驱动型样品真空转移系统。真空密封阀体300通过固定件310固定于盒体100上。
所述弹性件260处于一定压缩状态下，所述盖板210与所述盒体100相接触且所述盖板210与所述盒体100共同形成封闭的腔室180，所述支架件位于所述腔室180中；本实施例中，盒体100设有上盒板110、下盒板120、底盒板140及侧盒板，上盒板110、下盒板120、底盒板140及侧盒板共同围合设置以使盒体100内部形成腔室180的部分或全部，即腔室180部分或全部设置于盒体100内部，底盒板140分别通过固定装置150与上盒板110及下盒板120相固定。盒体100内部还设有上导轨160及下导轨170，真空密封阀体300分别连通腔室180及真空密封阀气嘴400，真空密封阀气嘴400用于连接真空泵组600；盒体100内部设有抵持件130；本实施例中，抵持件130固定设置于底盒板140上。
自驱动弹出样品台200设有顺序连接的盖板210、支架件及弹性件260，盖板210呈平板状，盒体100具有棱柱体形状。自驱动弹出样品台200还设有导向轴270及安装部271，安装部271固定于盒体100内部，导向轴270一端固定于抵持件130上，另一端固定于安装部271上，且导向轴270穿过支架件设置，弹性件260一端固定于抵持件130上，另一端活动抵接支架件，样品托700可拆卸地设置于支架件上；支架件设有顺序连接的上支架240、内支架250及下支架230，样品托700可拆卸地设置于上支架240上；上支架240滑动设置于上导轨160上，下支架230滑动设置于下导轨170上；上支架240还设有用于在一定力度下固定样品托700的定位部241；支架件还设有外支架220，上支架240及下支架230分别与外支架220连接，外支架220与盖板210相连接；支架件于外支架220及内支架250之间还设有中支架280，上支架240及下支架230还分别与中支架280连接，导向轴270穿过内支架250设置，导向轴270还穿过中支架280设置。弹性件260一端固定于抵持件130上，另一端活动抵接内支架250；弹性件260为中空件且弹性件260 套设于导向轴270外，弹性件260处于伸缩状态下，使支架件沿导向轴270移动。如图3及图4所示，弹性件260处于一定压缩状态下，盖板210与盒体100相接触以封闭腔室180且支架件位于腔室180中。
如图5所示，弹性件260处于自由状态下，样品托700位于盒体100外。请一并参阅图6及图7，样品托700包括相连接的托盘710及固定端720，托盘710用于承载样品，支架件开设有与固定端720相对应的固定槽，固定端720可拆卸地固定于固定槽中，以使托盘710可拆卸地设置于支架件上。此时安装部271抵持内支架250以限制弹性件260进一步向外伸展，样品托700及其托盘710全部位于盒体100外。请一并参阅图8，自驱动型样品真空转移系统于盒体100或盖板210上还设有密封垫800，弹性件260处于一定压缩状态下，盖板210通过密封垫800与盒体100相接触以封闭腔室180。
为了更好地展示真空盒内部的结构，在其中一个实施例中，如图9、图10及图11所示，导向轴270的数量为两个，每一导向轴270外设有一弹簧作为弹性件260，盖板210通过固定部290固定上支架240及外支架220；导向轴270一端固定于抵持件130上，另一端固定于安装部271上，上支架240通过固定部290固定于内支架250。盒体100于底盒板140上设有抵持件130，弹性件260一端固定于抵持件130上，另一端活动抵接安装部271，即弹性件260的另一端在压缩状态抵接安装部271，在自由状态下可以与安装部271相接触，也可以与安装部271存在间隙，该间隙根据导向轴270的长度及弹性件260的弹性力而定。
在其中一个实施例中，如图12、图13及图14所示，一种自驱动型样品真空转移系统，其包括真空盒900及真空泵组600。在使用时，真空泵组600通过管体连接真空盒900，在转移样品时，只需转移真空盒900即可。该自驱动型样品真空转移系统自驱动样品弹出盒体100请一并参阅图15及图16，真空盒900包括盒体100、自驱动弹出样品台200、真空密封阀体300、真空密封阀气嘴400及样品托700；真空密封阀体300设有真空密封阀开关500，此时样品托700位于盒体100外，以便于自动或手动处理样品托700所承载的样品。真空密封阀开关500用于在真空密封阀气嘴400处于关闭状态下，使真空密封阀体300及腔室180处于封闭状态或开放状态。
上述自驱动型样品真空转移系统，用于样品制备过程中存储和转移，具有结构简单的 优点，巧妙地利用了真空环境所形成的压力，在内外气体压力差达到一定条件时能够自行驱动样品，以便进行下一步的操作，使用时完全不涉及电力驱动，有利于在超出预期之上缩减自身体积，尤其适用于体积紧凑的样品处理设备使用，兼容绝大多数样品处理平台例如样品制备及表征平台，解决了目前已有的相关系统由于结构复杂，通用性不强所导致的样品前处理成本高昂的问题，从而有利于提升敏感样品例如空气或水汽敏感样品无损跨平台转移的通用性。
在其中一个实施例中，本申请还提供了一种自驱动型样品真空转移方法，该方法包括提供上述任一实施例的样品真空转移系统；将样品放入样品托中；将样品托放在自驱动弹出样品台的支架件上；将自驱动弹出样品台的支架件推送入盒体的腔室中且使自驱动弹出样品台的盖板与盒体相接触以封闭腔室；通过真空密封阀气嘴对真空密封阀体及其所连通的腔室进行抽真空；关闭真空密封阀气嘴；体转移真空盒。
在其中一个实施例中，整体转移真空盒包括：将真空盒整体转移至目标平台；且整体转移真空盒之后，所述自驱动型样品真空转移方法还包括步骤：于目标平台进行抽真空至自驱动弹出样品台的弹性件弹出支架件且使样品托位于盒体外。这样的设计，转移的仅仅是真空盒，具有体积小的优点。且全过程巧妙采用真空压力配合弹力进行控制，无需电力驱动。
下面以锂离子电池材料为例，进一步给出本申请各实施例的具体应用，可以理解的是，本申请同样适用于其他要求严格的材料制备中。
锂离子电池材料由于其易氧化，易吸附水汽而改性的特点，决定了在进行锂离子电池材料制备及微观形貌观察过程中不能够接触大气环境。在充满正压氮气保护性气氛的手套箱内制备锂离子电池材料，并转移至SEM扫描电镜中观察该样品。将自驱动型样品真空转移系统放置于手套箱内，自驱动型样品真空转移系统包括真空盒和真空泵组，将制备好的样品固定于样品托上。此时盒体处于开启状态，如图5至图8所示，亦可一并参阅图15及图16，即可将固定有样品的样品托插入自驱动弹出样品台的固定槽中。此时，套在导向轴的弹簧处于张开状态，如图7所示。通过气体管路连接真空密封阀气嘴和真空泵组，压入自驱动弹出样品台进入盒体内，此时套在导向轴的弹簧处于压缩状态，如图3所示。启动真空泵组对盒体抽真空处理，达到一定真空度后关闭真空密封阀开关，使盒体保持真 空密封状态。将气体管路从真空密封阀气嘴内取出，从手套箱中取出真空盒，转移至SEM样品仓中，并固定好真空盒。在移动转移过程中，样品始终固定在样品托上，并真空密封于盒体内。关闭SEM样品仓并启动SEM抽真空系统，当SEM样品仓达到一定真空度时，由于真空盒体1与样品仓内外压差快速缩小，即SEM样品仓压力快递下降，并不断接近真空盒体1的压力，受到压缩弹簧的弹力作用而弹出自驱动弹出样品台，如图5至图8所示，并能够在SEM中对样品进行下一步观察检测。由上述说明可见，在制备、转移及观测过程中，样品始终处于保护性气氛或真空环境，最大限度地隔绝空气或水汽对样品的影响；而且，转移的仅仅是真空盒，具有体积小的优点。全过程巧妙采用真空压力配合弹力进行控制，无需电力驱动。
以上所述实施例的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，然而，只要这些技术特征的组合不存在矛盾，都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本申请的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本申请构思的前提下，还可以做出若干变形和改进，这些都属于本申请的保护范围。因此，本申请专利的保护范围应以所附权利要求为准。

Claims (20)

  1. 一种样品真空转移系统，包括：
    真空泵组；及
    真空盒，包括：
    盒体；
    自驱动弹出样品台，所述自驱动弹出样品台设有顺序连接的盖板、支架件及弹性件，所述弹性件一端固定于所述盒体内部，另一端活动抵接所述支架件；
    真空密封阀体；
    真空密封阀气嘴，用于连接所述真空泵组；及
    样品托，可拆卸地设置于所述支架件上；
    其中所述弹性件处于压缩状态下，所述盖板与所述盒体相接触且所述盖板与所述盒体共同形成封闭的腔室，所述支架件位于所述腔室中；所述弹性件处于自由状态下，所述样品托位于所述盒体外；所述真空密封阀体分别连通所述腔室及所述真空密封阀气嘴。
  2. 根据权利要求1所述的系统，其中所述盖板具有凸出形状以使所述盖板内部存在成为部分所述腔室的空间。
  3. 根据权利要求1所述的系统，其中所述盒体具有棱柱体或者圆柱体形状。
  4. 根据权利要求1所述的系统，其中所述真空密封阀体设置于所述盒体内且所述真空密封阀气嘴露置于所述盒体外。
  5. 根据权利要求1所述的系统，其中所述腔室位于所述盒体内部，所述弹性件处于压缩状态下，所述盖板与所述盒体相接触以封闭所述腔室。
  6. 根据权利要求1所述的系统，其中所述真空密封阀体设有真空密封阀开关，所述真空密封阀开关用于在所述真空密封阀气嘴处于关闭状态下，使所述真空密封阀体及所述腔室处于封闭状态或开放状态。
  7. 根据权利要求1所述的系统，其中所述样品托包括相连接的托盘及固定端，所述托盘用于承载样品，所述支架件开设有与所述固定端相对应的固定槽，所述固定端可拆卸地固定于所述固定槽中，以使所述托盘可拆卸地设置于所述支架件上。
  8. 根据权利要求1所述的系统，其中所述盒体或所述盖板上还设有密封垫，所述弹 性件处于压缩状态下，所述盖板通过所述密封垫与所述盒体相接触以封闭所述腔室。
  9. 根据权利要求1所述的系统，其中所述盒体内部设有抵持件。
  10. 根据权利要求9所述的系统，其中所述自驱动弹出样品台还设有导向轴及安装部，所述安装部固定于所述盒体内部，所述导向轴一端固定于所述抵持件上，另一端固定于所述安装部上。
  11. 根据权利要求10所述的系统，其中所述支架件设有顺序连接的上支架、内支架及下支架，所述导向轴穿过所述内支架设置，所述弹性件一端固定于所述抵持件上，另一端活动抵接所述内支架；所述弹性件为中空件且所述弹性件套设于所述导向轴外，所述弹性件处于伸缩状态下，使所述支架件沿所述导向轴移动。
  12. 根据权利要求11所述的系统，其中所述样品托可拆卸地设置于所述上支架上。
  13. 根据权利要求11所述的系统，其中所述盒体内部还设有上导轨及下导轨，所述上支架滑动设置于所述上导轨上，所述下支架滑动设置于所述下导轨上。
  14. 根据权利要求11所述的系统，其中所述支架件还设有外支架，所述上支架及所述下支架分别与所述外支架连接，所述外支架与所述盖板相连接。
  15. 根据权利要求11所述的系统，其中所述上支架还设有用于在一定力度下固定所述样品托的定位部。
  16. 根据权利要求11所述的系统，其中所述支架件还设有位于所述外支架及所述内支架之间的中支架，所述上支架及所述下支架还分别与所述中支架连接，所述导向轴还穿过所述中支架设置。
  17. 根据权利要求1所述的系统，其中所述弹性件为弹簧或弹性块。
  18. 根据权利要求1所述的系统，还包括管体，所述真空泵组通过所述管体连接所述真空密封阀气嘴。
  19. 一种样品真空转移方法，包括：
    提供权利要求1所述的样品真空转移系统；
    将样品放入样品托中；
    将样品托放在自驱动弹出样品台的支架件上；
    将自驱动弹出样品台的支架件推送入盒体的腔室中且使自驱动弹出样品台的盖板与 盒体相接触以封闭腔室；
    通过真空密封阀气嘴对真空密封阀体及其所连通的腔室进行抽真空；
    关闭真空密封阀气嘴；及
    将真空盒整体转移至目标平台。
  20. 根据权利要求19所述的方法，其中在将真空盒整体转移至目标平台之后，还包括于目标平台进行抽真空至自驱动弹出样品台的弹性件弹出支架件且使样品托位于盒体外。
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