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WO2022001107A1 - Système et procédé de transfert sous vide auto-entraîné d'échantillon - Google Patents

Système et procédé de transfert sous vide auto-entraîné d'échantillon Download PDF

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Publication number
WO2022001107A1
WO2022001107A1 PCT/CN2021/075265 CN2021075265W WO2022001107A1 WO 2022001107 A1 WO2022001107 A1 WO 2022001107A1 CN 2021075265 W CN2021075265 W CN 2021075265W WO 2022001107 A1 WO2022001107 A1 WO 2022001107A1
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WO
WIPO (PCT)
Prior art keywords
vacuum
bracket
sample
box body
sealing valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2021/075265
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English (en)
Chinese (zh)
Inventor
张小波
常正凯
闻益
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Supro Instruments Ltd
Original Assignee
Shenzhen Supro Instruments Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Supro Instruments Ltd filed Critical Shenzhen Supro Instruments Ltd
Publication of WO2022001107A1 publication Critical patent/WO2022001107A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
    • B65D81/2007—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum
    • B65D81/2015—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum in an at least partially rigid container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
    • B65D81/2007—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum
    • B65D81/2038—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum with means for establishing or improving vacuum

Definitions

  • the present application relates to the field of sample transfer, in particular to a self-driven sample vacuum transfer system and method.
  • the electric-driven vacuum transfer device can realize the storage and transfer functions of sensitive samples, there are the following problems in the specific use process: (1)
  • the electric-driven vacuum transfer device integrates components such as motors and guide devices. , generally large in size, for some compact SEMs, such as desktop SEMs, etc., cannot accommodate such a volume of vacuum transfer devices; (2)
  • SEMs and micro-nano are required.
  • the processing system provides corresponding electronic control interfaces for internal and external power connection, and involves the compatibility of interfaces of different specifications, which invisibly increases the complexity and cost of the system and raises the threshold for cross-platform transfer.
  • a self-propelled sample vacuum transfer system and method are provided.
  • a sample vacuum transfer system includes a vacuum box and a vacuum pump set.
  • the vacuum box includes a box body, a self-driven ejecting sample stage, a vacuum sealing valve body, a vacuum sealing valve air nozzle and a sample holder.
  • the self-driven ejection sample stage is provided with a cover plate, a bracket member and an elastic member which are connected in sequence. One end of the elastic member is fixed inside the box body, and the other end is movably abutted against the bracket member.
  • the sample holder is detachably arranged on the support member. When the elastic member is in a compressed state, the cover plate is in contact with the box body, and the cover plate and the box body together form a closed cavity, and the bracket member is located in the cavity.
  • the elastic member is in a free state, and the sample holder is located outside the box.
  • the vacuum sealing valve body is respectively communicated with the chamber and the air nozzle of the vacuum sealing valve.
  • the vacuum sealing valve air nozzle is used to connect the vacuum pump
  • the above self-driven sample vacuum transfer system is used for storage and transfer in the sample preparation process. It has the advantages of simple structure, cleverly utilizes the pressure formed by the vacuum environment, and can drive the sample by itself when the pressure difference between the internal and external gases reaches a certain condition. In order to carry out the next operation, it does not involve electric drive at all, which is beneficial to reduce its own volume beyond expectations, especially suitable for the use of compact sample processing equipment, compatible with most sample processing platforms such as sample preparation and characterization platforms , which solves the problem of high cost of sample pretreatment caused by the complex structure and low versatility of the existing related systems, thereby helping to improve the versatility of non-destructive cross-platform transfer of sensitive samples such as air or water vapor sensitive samples.
  • a sample vacuum transfer method comprising providing the sample vacuum transfer system described in any one of the above; placing the sample in a sample holder; placing the sample holder on a bracket member of a self-driven ejection sample stage; The bracket piece is pushed into the chamber of the box body and the cover plate of the self-driven ejection sample stage is brought into contact with the box body to close the chamber; Evacuate; close the vacuum seal valve nozzle; and transfer the vacuum box as a whole to the target platform.
  • FIG. 1 is a perspective view of a sample vacuum transfer system according to an embodiment.
  • FIG. 2 is a front view of the sample vacuum transfer system shown in FIG. 1 .
  • FIG. 3 is a cross-sectional view taken along line A-A in FIG. 2 .
  • FIG. 4 is a right side view of the system shown in FIG. 1 .
  • FIG. 5 is a perspective view of the self-driven ejection sample stage of the sample vacuum transfer system shown in FIG. 1 when it is opened.
  • FIG. 6 is a front view of the sample vacuum transfer system shown in FIG. 5 .
  • FIG. 7 is a cross-sectional view taken along line B-B in FIG. 6 .
  • FIG. 8 is a right side view of the system shown in FIG. 5 .
  • FIG. 9 is a front view of a partial structure of a sample vacuum transfer device according to another embodiment.
  • FIG. 10 is a left side view of the device shown in FIG. 9 .
  • FIG. 11 is a perspective view of the device shown in FIG. 9 .
  • FIG. 12 is a perspective view of a vacuum transfer apparatus according to another embodiment.
  • FIG. 13 is a front view of the vacuum transfer apparatus shown in FIG. 12 .
  • FIG. 14 is a top view of the vacuum transfer apparatus shown in FIG. 12 .
  • FIG. 15 is a perspective view of the self-driven ejection sample stage of the vacuum transfer device shown in FIG. 12 when it is opened.
  • FIG. 16 is a top view of the vacuum transfer apparatus shown in FIG. 15 .
  • a self-propelled sample vacuum transfer system includes a vacuum box.
  • the vacuum box includes a box body 100, a self-driven ejection sample stage 200, a vacuum sealing valve body 300, a vacuum sealing valve air nozzle 400 and a sample holder 700; the vacuum sealing valve body 300 is provided with a vacuum sealing The valve switch 500, the vacuum sealing valve air nozzle 400 has an on state and a closed state, the vacuum sealing valve body 300 is used to communicate with the vacuum pump group 600 through the vacuum sealing valve air nozzle 400 in the conductive state, and after the vacuum is pumped, the vacuum seal is closed.
  • the self-driven sample vacuum transfer system can be transferred with the valve air nozzle 400 in a closed state.
  • the vacuum sealing valve body 300 is fixed on the box body 100 by the fixing member 310 .
  • the cover plate 210 When the elastic member 260 is in a certain compressed state, the cover plate 210 is in contact with the box body 100, and the cover plate 210 and the box body 100 together form a closed cavity 180, and the bracket member is located at the In the chamber 180; in this embodiment, the box body 100 is provided with an upper box plate 110, a lower box plate 120, a bottom box plate 140 and a side box plate, an upper box plate 110, a lower box plate 120, a bottom box plate 140 and The side box plates are jointly enclosed and arranged so that part or all of the cavity 180 is formed inside the box body 100 , that is, part or all of the cavity 180 is arranged inside the box body 100 , and the bottom box plate 140 passes through the fixing device 150 and the upper box plate 110 respectively.
  • the box body 100 is also provided with an upper guide rail 160 and a lower guide rail 170.
  • the vacuum sealing valve body 300 is respectively connected to the chamber 180 and the vacuum sealing valve air nozzle 400.
  • the vacuum sealing valve air nozzle 400 is used to connect the vacuum pump set 600; the inside of the box body 100
  • a resisting member 130 is provided; in this embodiment, the resisting member 130 is fixedly disposed on the bottom box plate 140 .
  • the self-driven ejection stage 200 is provided with a cover plate 210 , a bracket member and an elastic member 260 which are connected in sequence.
  • the cover plate 210 is in the shape of a flat plate, and the box body 100 is in the shape of a prism.
  • the self-driven ejection stage 200 is further provided with a guide shaft 270 and a mounting portion 271 .
  • the mounting portion 271 is fixed inside the box body 100 , one end of the guide shaft 270 is fixed on the abutting member 130 , and the other end is fixed on the mounting portion 271 and guides
  • the shaft 270 is disposed through the bracket member, one end of the elastic member 260 is fixed on the abutting member 130, and the other end is movably abutted on the bracket member.
  • the sample holder 700 is detachably arranged on the bracket member; the bracket member is provided with an upper bracket 240 connected in sequence , the inner bracket 250 and the lower bracket 230, the sample holder 700 is detachably arranged on the upper bracket 240; the upper bracket 240 is slidably arranged on the upper rail 160, and the lower bracket 230 is slidably arranged on the lower rail 170; The positioning portion 241 of the sample holder 700 is fixed under a certain force; the bracket member is further provided with an outer bracket 220, the upper bracket 240 and the lower bracket 230 are respectively connected with the outer bracket 220, and the outer bracket 220 is connected with the cover plate 210; A middle bracket 280 is also arranged between the outer bracket 220 and the inner bracket 250 , the upper bracket 240 and the lower bracket 230 are respectively connected with the middle bracket 280 , the guide shaft 270 is arranged through the inner bracket 250 , and the guide shaft 270 also passes through the middle bracket 280 set up.
  • One end of the elastic member 260 is fixed on the resisting member 130, and the other end is movably abutted against the inner bracket 250; the elastic member 260 is a hollow member and the elastic member 260 is sleeved outside the guide shaft 270. Move along the guide shaft 270 .
  • the cover plate 210 is in contact with the box body 100 to close the cavity 180 and the bracket member is located in the cavity 180 .
  • the sample holder 700 includes a connected tray 710 and a fixed end 720.
  • the tray 710 is used to carry the sample.
  • the bracket is provided with a fixed groove corresponding to the fixed end 720.
  • the fixed end 720 is detachable It is fixed in the fixing groove so that the tray 710 can be detachably arranged on the bracket.
  • the mounting portion 271 abuts against the inner bracket 250 to restrict the elastic member 260 from further extending outward, and the sample holder 700 and its tray 710 are all located outside the box body 100 .
  • FIG. 6 and FIG. 7 together.
  • the sample holder 700 includes a connected tray 710 and a fixed end 720.
  • the tray 710 is used to carry the sample.
  • the bracket is provided with a fixed groove corresponding to the fixed end 720.
  • the fixed end 720 is detachable It is fixed in the fixing groove so that the tray 710 can be detachably arranged on the bracket.
  • the mounting portion 271 abut
  • the self-driven sample vacuum transfer system is further provided with a sealing gasket 800 on the box body 100 or the cover plate 210 .
  • a sealing gasket 800 on the box body 100 or the cover plate 210 .
  • the number of guide shafts 270 is two, and each guide shaft 270 is provided with a spring as an elastic
  • the cover plate 210 fixes the upper bracket 240 and the outer bracket 220 through the fixing part 290 ; one end of the guide shaft 270 is fixed on the abutting member 130 , and the other end is fixed on the mounting part 271 , and the upper bracket 240 is fixed on the inner bracket 240 through the fixing part 290 .
  • Bracket 250 is shown in FIG. 9 , FIG. 10 and FIG. 11 .
  • the box body 100 is provided with a resisting member 130 on the bottom box plate 140 , one end of the elastic member 260 is fixed on the resisting member 130 , and the other end movably abuts against the mounting portion 271 , that is, the other end of the elastic member 260 abuts and mounts in a compressed state
  • the mounting portion 271 may be in contact with the mounting portion 271 in a free state, or there may be a gap between the mounting portion 271 and the length of the guide shaft 270 and the elastic force of the elastic member 260 .
  • a self-driven sample vacuum transfer system includes a vacuum box 900 and a vacuum pump set 600 .
  • the vacuum pump set 600 is connected to the vacuum box 900 through the pipe body, and when transferring the sample, only the vacuum box 900 needs to be transferred.
  • the vacuum box 900 includes a box body 100, a self-driving sample ejection stage 200, a vacuum sealing valve body 300, a vacuum sealing valve gas The nozzle 400 and the sample holder 700; the vacuum seal valve body 300 is provided with a vacuum seal valve switch 500, and the sample holder 700 is located outside the box body 100 at this time, so that the samples carried by the sample holder 700 can be processed automatically or manually.
  • the vacuum seal valve switch 500 is used to make the vacuum seal valve body 300 and the chamber 180 be in a closed state or an open state when the vacuum seal valve air nozzle 400 is in a closed state.
  • the above self-driven sample vacuum transfer system is used for storage and transfer in the sample preparation process. It has the advantages of simple structure, cleverly utilizes the pressure formed by the vacuum environment, and can drive the sample by itself when the pressure difference between the internal and external gases reaches a certain condition. In order to carry out the next operation, it does not involve electric drive at all, which is beneficial to reduce its own volume beyond expectations, especially suitable for the use of compact sample processing equipment, compatible with most sample processing platforms such as sample preparation and characterization platforms , which solves the problem of high cost of sample pretreatment caused by the complex structure and low versatility of the existing related systems, thereby helping to improve the versatility of non-destructive cross-platform transfer of sensitive samples such as air or water vapor sensitive samples.
  • the present application also provides a self-driven sample vacuum transfer method, the method comprising providing the sample vacuum transfer system of any of the above embodiments; placing the sample in the sample holder; placing the sample in the sample holder On the bracket of the self-driven ejection stage; push the bracket of the self-driven ejection stage into the chamber of the cassette body and make the cover plate of the self-driven ejection stage come into contact with the cassette body to close the chamber; by vacuum sealing The valve air nozzle evacuates the vacuum sealing valve body and the connected chamber; closes the vacuum sealing valve air nozzle; the body transfers the vacuum box.
  • transferring the vacuum box as a whole includes: transferring the vacuum box as a whole to the target platform; and after transferring the vacuum box as a whole, the self-driven sample vacuum transfer method further includes the step of: vacuuming on the target platform to the self-propelled sample platform.
  • the elastic member that drives the ejection stage ejects the support member and keeps the sample holder outside the box. In this design, only the vacuum box is transferred, which has the advantage of small size. And the whole process is cleverly controlled by vacuum pressure and elastic force, without electric drive.
  • Lithium-ion battery materials were prepared in a glove box filled with a protective atmosphere of positive nitrogen gas and transferred to SEM for observation of the samples.
  • the self-driven sample vacuum transfer system is placed in the glove box.
  • the self-driven sample vacuum transfer system includes a vacuum box and a vacuum pump set, and the prepared sample is fixed on the sample holder.
  • the box body is in the open state, as shown in Figures 5 to 8, and also referring to Figures 15 and 16, the sample holder with the sample fixed thereon can be inserted into the fixing groove of the self-driven ejection sample stage.
  • the spring sleeved on the guide shaft is in an open state, as shown in FIG. 7 . Connect the air nozzle of the vacuum sealing valve and the vacuum pump group through the gas pipeline, and press the self-driven ejection sample stage into the box body.
  • the spring sleeved on the guide shaft is in a compressed state, as shown in Figure 3.
  • the self-driven pop-up sample stage is ejected by the elastic force of the compression spring, as shown in Figure 5 to Figure 8, and the sample can be observed and detected in the SEM in the next step.
  • the sample is always in a protective atmosphere or a vacuum environment to maximize the isolation of the impact of air or water vapor on the sample; moreover, only the vacuum box is transferred, which has the advantage of small size .
  • the whole process is cleverly controlled by vacuum pressure and elastic force, and no electric drive is required.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

La présente invention concerne un système et un procédé de transfert sous vide d'un échantillon, le système de transfert sous vide d'un échantillon comprenant une boîte à vide et un ensemble de pompes à vide (600), la boîte à vide comprenant un corps de boîte (100), un étage d'éjection d'échantillon auto-entraîné (200), un corps de vanne d'étanchéité sous vide (300), une buse d'air de vanne d'étanchéité sous vide (400) et un porte-échantillon (700) ; l'étage d'éjection d'échantillon auto-entraîné (200) est pourvu d'une plaque de recouvrement (210), d'un élément de support et d'un élément élastique (260) qui sont raccordés les uns à la suite des autres ; une extrémité de l'élément élastique (260) est fixée à l'intérieur du corps de boîte (100), et son autre extrémité vient en butée mobile contre une pièce de support. Lorsque l'élément élastique (260) est à l'état comprimé, une plaque de recouvrement (210) est en contact avec le corps de boîte (100), et la plaque de recouvrement (210) et le corps de boîte (100) forment ensemble une cavité fermée (180), et la pièce de support est située dans la cavité (180). Lorsque l'élément élastique (260) est dans un état libre, le porte-échantillon (700) est situé à l'extérieur du corps de boîte (100). Le corps de vanne d'étanchéité sous vide (300) est en communication avec la cavité (180) et la buse d'air de vanne d'étanchéité sous vide (400) respectivement. Le porte-échantillon (700) est disposé de manière amovible sur la pièce de support, et la buse d'air de vanne d'étanchéité sous vide (400) est utilisée pour raccorder l'ensemble de pompes à vide (600).
PCT/CN2021/075265 2020-06-30 2021-02-04 Système et procédé de transfert sous vide auto-entraîné d'échantillon Ceased WO2022001107A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202010610308.3A CN111731677B (zh) 2020-06-30 2020-06-30 自驱动型样品真空转移系统及方法
CN202010610308.3 2020-06-30

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WO2022001107A1 true WO2022001107A1 (fr) 2022-01-06

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Cited By (2)

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Publication number Priority date Publication date Assignee Title
CN114689468A (zh) * 2022-04-08 2022-07-01 重庆大学 一种用于碱金属防氧化的密封转移装置
CN114807906A (zh) * 2022-06-27 2022-07-29 江苏邑文微电子科技有限公司 一种原子层沉积设备

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CN111731677B (zh) * 2020-06-30 2024-07-09 深圳市速普仪器有限公司 自驱动型样品真空转移系统及方法
CN112362682B (zh) * 2020-11-03 2024-05-10 华北科技学院 一种岩石孔隙结构获取装置
CN113325022B (zh) * 2021-07-08 2022-11-04 上海科技大学 一种准原位光电子能谱测试装置及其测试方法

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KR20080001523U (ko) * 2006-11-29 2008-06-03 주식회사 제로팩 적층식 진공보관장치
CN202193325U (zh) * 2011-08-29 2012-04-18 成都市康华药业有限公司 一种抽真空装置
CN106275704A (zh) * 2016-10-12 2017-01-04 宁波市安通机械有限公司 一种多功能真空储存箱
CN206367717U (zh) * 2016-10-20 2017-08-01 湖南耐普恩科技有限公司 一种真空转移箱
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114689468A (zh) * 2022-04-08 2022-07-01 重庆大学 一种用于碱金属防氧化的密封转移装置
CN114807906A (zh) * 2022-06-27 2022-07-29 江苏邑文微电子科技有限公司 一种原子层沉积设备
CN114807906B (zh) * 2022-06-27 2022-09-16 江苏邑文微电子科技有限公司 一种原子层沉积设备

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CN111731677A (zh) 2020-10-02

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