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WO2022045542A1 - Prise d'inspection - Google Patents

Prise d'inspection Download PDF

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Publication number
WO2022045542A1
WO2022045542A1 PCT/KR2021/007411 KR2021007411W WO2022045542A1 WO 2022045542 A1 WO2022045542 A1 WO 2022045542A1 KR 2021007411 W KR2021007411 W KR 2021007411W WO 2022045542 A1 WO2022045542 A1 WO 2022045542A1
Authority
WO
WIPO (PCT)
Prior art keywords
conductive
sheet
socket
inspection
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2021/007411
Other languages
English (en)
Korean (ko)
Inventor
김규선
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Snow Co Ltd
Original Assignee
Snow Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Snow Co Ltd filed Critical Snow Co Ltd
Publication of WO2022045542A1 publication Critical patent/WO2022045542A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G01R1/0441—Details
    • G01R1/0466—Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test

Definitions

  • the present invention relates to a socket for inspection, and more particularly, to a socket for inspection having a multi-layered structure, having a support sheet, so that the height of the socket can be easily improved, and operability is improved.
  • the device under test such as a semiconductor element that has been manufactured
  • the device under test is subjected to an electrical test to determine whether the device is defective.
  • a predetermined test signal is transmitted from the test equipment to the device under test to determine whether the device under test is defective.
  • This test socket has stable mechanical contact capability when each device under test moves to the correct position and makes accurate repeated contact with the socket mounted on the test board, and stable electrical contact capability to minimize signal distortion at the electrical contact point during signal transmission. This is required
  • test board and the device to be tested are not directly connected to each other, but indirectly connected to each other by using an intermediary device called a socket for testing.
  • a socket for testing an intermediary device
  • FIG. 1 is a view showing a single-layer structure type test socket according to the prior art.
  • the single-layer structure type test socket 10 has a shape in which a plurality of conductive parts 12 are contained in the insulating part 11 made of an insulating elastic material. These conductive parts 12 are arranged in the plane direction to correspond to the leads of the device under test. Meanwhile, the conductive part 12 is insulated and supported by the insulating part 11 .
  • each of the conductive parts 12 is in contact with the pad of the test board. Thereafter, when the device under test descends, the lead of the device under test presses the conductive part 12 while in contact with each conductive part 12 , and accordingly, the conductive particles in the conductive part 12 are in close contact with each other while Forms a state in which electricity can be energized. Thereafter, when a predetermined test signal is applied from the test board, the test signal is transmitted to the device under test through the socket for testing 10, and the reflected signal from the device under test is tested through the socket for testing, conversely. transmitted to the board.
  • Such a socket for inspection has the characteristic of exhibiting conductivity only in the thickness direction when pressed in the thickness direction, and since mechanical means such as soldering or springs are not used, it has excellent durability and can achieve simple electrical connection.
  • the single-layer structure type socket according to the prior art has a problem in that the thickness of the socket is thin, and the larger the contact space with the device under test or the more conductive parts it contacts, the greater the resistance deviation between the conductive parts due to the non-uniformity of the contact pressure.
  • increasing the thickness in a single-layer structure is also difficult due to physical limitations, and it is difficult to secure uniform quality between conductive parts.
  • Patent Document 1 Korean Patent Publication No. 10-1782604 (2017.09.21)
  • the present invention is to solve the problems of the prior art described above, and an object of the present invention is to provide a socket for inspection having a multi-layer structure and having a support sheet to easily improve the height of the socket and improve operability .
  • the pitch between the conductive parts is small and the conductive parts are mainly distributed on the outside. It is to provide a socket for inspection that can improve stable quality and lifespan when it is vulnerable to physical impact.
  • one aspect of the present invention is a socket for testing that electrically connects a terminal of a device under test and a pad of a test apparatus to each other, and is electrically disconnected by an insulating support and the insulating support.
  • a first conductive sheet having a plurality of first conductive portions in contact with a terminal of the device under test, an insulating support portion and a second conductive portion having a plurality of second conductive portions electrically disconnected by the insulating support portion and contacting a pad of the test apparatus
  • a sheet and a plurality of through-holes through which the first and second conductive parts are electrically energized up and down are formed, and a support sheet interposed between the first conductive sheet and the second conductive sheet is provided.
  • the first conductive part and the second conductive part may be a socket for inspection, characterized in that a plurality of conductive particles are arranged in a thickness direction to be formed.
  • the first conductive portion and the second conductive portion, the conductive particle density (D1) of the portion protruding to the outside of the insulating support portion is located inside the insulating support portion conductive particles It may be a socket for inspection, characterized in that it is higher than the density (D2).
  • the thickness d of the support sheet is greater than a height h1 of a lower protrusion of the first conductive part and a height h2 of an upper protrusion of the second conductive part, and the first Socket for inspection, characterized in that it is composed of less than or equal to the sum of the height h1 of the lower protrusion 112 of the conductive part 110 and the height h2 of the upper protrusion 212 of the second conductive part 210 .
  • the diameter of the through hole of the support sheet is 1.1 to 1.5 times larger than the diameter of the lower protrusion of the first conductive part inserted into the through hole and the diameter of the upper protrusion of the second conductive part It may be a socket for inspection, characterized in that.
  • the insulating support part and the insulating support part are electrically disconnected, and the terminal of the device under test and the A first conductive sheet having a plurality of first conductive parts in contact with the second conductive sheet and a second conductive sheet electrically disconnected by the insulating support and a plurality of second conductive parts in contact with a pad of the test apparatus, and the first conductive part and a plurality of through-holes through which the part and the second conductive part are electrically energized, and a support sheet interposed between the first conductive sheet and the second conductive sheet, wherein the support sheet is located in an outer region.
  • It may be a socket for inspection, having an outer support for supporting the conductive portion and the second conductive portion, and an inner space formed inside the outer support.
  • the first conductive portion and the second conductive portion, the conductive particle density (D1) of the portion protruding to the outside of the insulating support portion is located inside the insulating support portion conductive particles It may be a socket for inspection, characterized in that it is higher than the density (D2).
  • the thickness d of the support sheet is greater than a height h1 of a lower protrusion of the first conductive part and a height h2 of an upper protrusion of the second conductive part, and the first Socket for inspection, characterized in that it is composed of less than or equal to the sum of the height h1 of the lower protrusion 112 of the conductive part 110 and the height h2 of the upper protrusion 212 of the second conductive part 210 .
  • the diameter of the through hole of the support sheet is 1.1 to 1.5 times larger than the diameter of the lower protrusion of the first conductive part inserted into the through hole and the diameter of the upper protrusion of the second conductive part It may be a socket for inspection, characterized in that.
  • the insulating support part and the insulating support part are electrically disconnected, and the terminal of the device under test and the A first conductive sheet having a plurality of first conductive parts in contact with the second conductive sheet and a second conductive sheet electrically disconnected by the insulating support and a plurality of second conductive parts in contact with a pad of the test apparatus, and the first conductive part and a support sheet having a plurality of through-holes through which the part and the second conductive part are electrically energized up and down, and a support sheet interposed between the first conductive sheet and the second conductive sheet, wherein the support sheet is located in an inner region of the first It may be a socket for inspection, having an inner support portion supporting the conductive portion and the second conductive portion, and an outer space portion formed outside the inner support portion.
  • the first conductive portion and the second conductive portion, the conductive particle density (D1) of the portion protruding to the outside of the insulating support portion is located inside the insulating support portion conductive particles It may be a socket for inspection, characterized in that it is higher than the density (D2).
  • the thickness d of the support sheet is greater than a height h1 of a lower protrusion of the first conductive part and a height h2 of an upper protrusion of the second conductive part, and the first Socket for inspection, characterized in that it is composed of less than or equal to the sum of the height h1 of the lower protrusion 112 of the conductive part 110 and the height h2 of the upper protrusion 212 of the second conductive part 210 .
  • the diameter of the through hole of the support sheet is 1.1 to 1.5 times larger than the diameter of the lower protrusion of the first conductive part inserted into the through hole and the diameter of the upper protrusion of the second conductive part It may be a socket for inspection, characterized in that.
  • the insulating support part and the insulating support part are electrically disconnected, and the terminal of the device under test and the A first conductive sheet having a plurality of first conductive parts in contact with the second conductive sheet and a second conductive sheet electrically disconnected by the insulating support and a plurality of second conductive parts in contact with a pad of the test apparatus, and the first conductive part and a plurality of through-holes through which the part and the second conductive part are electrically conducted up and down, and a support sheet interposed between the first conductive sheet and the second conductive sheet
  • the support sheet includes: an outer support part supporting the first conductive part and the second conductive part; an inner support part for supporting the first conductive part and the second conductive part located in the inner region; And it may be a socket for inspection, having an interspace formed between the outer support and the inner support.
  • the first conductive portion and the second conductive portion, the conductive particle density (D1) of the portion protruding to the outside of the insulating support portion is located inside the insulating support portion conductive particles It may be a socket for inspection, characterized in that it is higher than the density (D2).
  • the thickness d of the support sheet is greater than a height h1 of a lower protrusion of the first conductive part and a height h2 of an upper protrusion of the second conductive part, and the first Socket for inspection, characterized in that it is composed of less than or equal to the sum of the height h1 of the lower protrusion 112 of the conductive part 110 and the height h2 of the upper protrusion 212 of the second conductive part 210 .
  • the diameter of the through hole of the support sheet is 1.1 to 1.5 times larger than the diameter of the lower protrusion of the first conductive part inserted into the through hole and the diameter of the upper protrusion of the second conductive part It may be a socket for inspection, characterized in that.
  • the height of the socket for inspection can be stably improved due to the support sheet provided between the first conductive sheet and the second conductive sheet.
  • the space portion is formed in the support sheet, a space can be secured in the middle layer of the multi-layered inspection socket, thereby reducing the compressive force acting on each conductive part compared to the single-layered inspection socket. there is.
  • the damage acting on each conductive part can be reduced due to the stress reduction effect from the central part of each conductive part to the outside when each conductive part is compressed, and the soft operation of the socket for inspection Inducing the operability may be improved.
  • FIG. 1 is a view showing a single-layer structure type test socket according to the prior art.
  • FIGS. 2 (a) and (b) are views showing a socket for inspection according to an embodiment of the present invention.
  • FIG 3 (a) and (b) are views showing a socket for inspection according to a second embodiment of the present invention.
  • FIG. 4 is a plan view of a socket for inspection to which a support sheet according to a second embodiment of the present invention is applied.
  • FIG 5 (a) and (b) are views showing a socket for inspection according to a third embodiment of the present invention.
  • FIG. 6 is a plan view of a socket for inspection to which a support sheet according to a third embodiment of the present invention is applied.
  • FIG 7 (a) and (b) are views showing a socket for inspection according to a fourth embodiment of the present invention.
  • FIG. 8 is a plan view of a socket for inspection to which a support sheet according to a fourth embodiment of the present invention is applied.
  • FIGS. 2 (a) and (b) are views showing a socket for inspection according to an embodiment of the present invention.
  • an inspection socket 1000 of the present invention is a socket for inspection that electrically connects a terminal of a device under test and a pad of a test apparatus to each other, and includes a first conductive sheet 100 and a second conductive sheet ( 200 ) and a support sheet 300 .
  • the socket for inspection 1000 is electrically disconnected by the insulating support part 120 and the insulating support part 120 and having a plurality of first conductive parts 110 in contact with the terminals of the device under test.
  • the test socket 1000 may be formed in a sheet form having a predetermined thickness. At this time, the socket for inspection 1000 is configured to allow only an electrical flow in a thickness direction without an electrical flow in the plane direction, and electrically connects the lead of the device under test and the pad of the test board in the vertical direction.
  • This test socket 1000 is used to perform an electrical test of the device to be tested, thereby determining whether the manufactured device is defective.
  • the first conductive sheet 100 includes the first conductive part 110 and the insulating support part 120
  • the second conductive sheet 200 includes the second conductive part 210 and the insulating support part 220 . do.
  • the insulating support parts 120 and 220 form the body of the socket 1000 for inspection, and support the conductive parts 110 and 210 when each of the conductive parts 110 and 210, which will be described later, receives a contact load, and adjacent conductive parts. It serves to block the electrical connection between the parts (110, 210).
  • the insulating supports 120 and 220 serve to protect the respective conductive parts 110 and 210 by absorbing a contact force when a lead of a device under test such as a semiconductor element or a pad of a test board comes into contact with each other.
  • the insulating supports 120 and 220 are preferably made of an insulating polymer material having a cross-linked structure. More specifically, the insulating polymer material includes conjugated diene rubbers such as polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber, and hydrogenated substances thereof, styrene- Block copolymer rubbers such as butadiene-diene block copolymer rubber, styrene-isoprene block copolymer, and their hydrogenated substances, chloroprene, urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer Rubber, ethylene-propylene-diene copolymer rubber, and the like can be used. In particular, it is preferable to use silicone rubber from the viewpoints of molding processability and electrical properties.
  • conjugated diene rubbers such as
  • a liquid silicone rubber is preferably crosslinked or condensed.
  • the liquid silicone rubber preferably has a viscosity of 10 5 pores or less at a shear rate of 10 -1 sec, and may be any one of a condensed type, an addition type, and a vinyl group and a hydroxyl group.
  • dimethyl silicone raw rubber, methyl vinyl silicone raw rubber, methylphenyl vinyl silicone raw rubber, etc. are mentioned.
  • the first and second conductive parts 110 and 210 extend in the thickness direction to enable electrical flow in the thickness direction while being compressed when pressed in the thickness direction. are spaced apart from each other. Insulative support parts 120 and 220 having insulating properties are disposed between the first and second conductive parts 110 and 210 to block an electrical flow between the first and second conductive parts 110 and 210 .
  • the upper end of the first conductive part 110 is configured to be in contact with the lead of the device under test, and the lower end of the second conductive part 210 is configured to be in contact with the pad of the test board.
  • the first and second conductive parts 110 and 210 are formed such that a plurality of conductive particles are vertically oriented in the elastic insulating material. These plurality of conductive particles serve to enable electrical connection while contacting each other when the first and second conductive parts 110 and 210 are pressed by the device under test.
  • the conductive particles are finely spaced apart or in weak contact, and when the first and second conductive parts 110 and 210 are pressed and compressed, the conductive particles are securely in contact with each other to enable electrical connection.
  • the first and second conductive parts 110 and 210 have a form in which a plurality of conductive particles are densely arranged in the vertical direction in the elastic insulating material, and each conductive part 110 , 210 is approximately the device under test. It is arranged in a position corresponding to the lead of
  • each conductive particle is aligned in the elastic insulating material by a magnetic field, and a conductive column extending long in the vertical direction is formed. That is, the first and second conductive parts 110 and 210 have a structure in which a plurality of conductive columns are arranged in parallel.
  • the conductive particles particles made of a metal exhibiting magnetism, such as nickel, iron, cobalt, or particles made of these alloys, or particles containing these metals, or using these particles as core particles, gold, Those that have been plated with a conductive metal that is difficult to be oxidized such as silver, palladium, or rhodium may be used.
  • the support sheet 300 is disposed between the first conductive sheet 100 and the second conductive sheet 200 to improve the thickness direction of the socket for inspection 1000 .
  • the support sheet 300 includes a support part 310 and a plurality of through holes 320 . That is, the support sheet 300 includes a support part 310 supporting the plurality of first and second conductive parts 110 and 210 between the first conductive sheet 100 and the second conductive sheet 200 , and the support part A plurality of through-holes 320 are formed in the 310 at positions corresponding to the conductive paths of the first and second conductive parts 110 and 210 .
  • the lower protrusion 112 of the first conductive sheet 100 and the upper protrusion 212 of the second conductive sheet 200 are inserted into the plurality of through holes 320 of the support sheet 300 in both directions. do.
  • between the first conductive sheet 100 and the support sheet 300 and between the second conductive sheet 200 and the support sheet 300 are integrally formed by an adhesive on the upper or lower surfaces of the insulating supports 120 and 220 . can be fixed.
  • the support sheet 300 may be made of an insulating material, and more specifically, a thermosetting resin such as glass fiber reinforced epoxy resin, polyimide resin, polyethylene terephthalate resin, vinyl chloride resin, polystyrene resin, polyacrylonitrile resin, polyethylene It may be made of a resin, an acrylic resin, a thermoplastic resin such as polybutadiene resin, and other various insulating resins.
  • a thermosetting resin such as glass fiber reinforced epoxy resin, polyimide resin, polyethylene terephthalate resin, vinyl chloride resin, polystyrene resin, polyacrylonitrile resin, polyethylene
  • a resin an acrylic resin
  • a thermoplastic resin such as polybutadiene resin
  • the conductive particle density D1 of the portions 112 , 113 , 212 , 213 protruding to the outside of the insulating support part 120 , 220 is the insulating property. It may be configured to be higher than the conductive particle density D2 of the portions 111 and 211 positioned inside the supports 120 and 220 .
  • the portions 112 , 113 , 212 , and 213 protruding upward or downward rather than the portions surrounded and supported by the insulating support portions 120 and 220 among the first and second conductive portions 110 and 120 are external devices or other devices. As a part in contact with the part, durability may be weak due to external action. Therefore, the durability of the first and second conductive parts 110 and 120 is reinforced by increasing the density of conductive particles constituting the portions 112 , 113 , 212 , and 213 protruding to the outside of the insulating support parts 120 and 220 . and can improve lifespan.
  • the thickness d of the support sheet 300 is the height h1 of the lower protrusion 112 of the first conductive part 110 and the height h2 of the upper protrusion 212 of the second conductive part 210 .
  • ) can be configured to be larger than
  • the thickness d of the support sheet 300 is determined by a height h1 of the lower protrusion 112 of the first conductive part 110 and a height h1 of the upper protrusion 212 of the second conductive part 210 ( h2) or less.
  • the first conductive portion ( The lower protrusion 112 of 110 and the upper protrusion 212 of the second conductive part 210 are in contact with an appropriate force, so that the electrical connection between the first conductive sheet 100 and the second conductive sheet 200 is more reliable can be guaranteed
  • the diameter of the through hole 320 of the support sheet 300 is the diameter of the lower protrusion 112 of the first conductive part 110 inserted into the through hole 320 and the upper protrusion of the second conductive part 210 . It may be configured to be 1.1 to 1.5 times larger than the diameter of 212 . That is, as the diameters of the through-holes 320 of the support sheet 300 and the protrusions 112 and 212 of the conductive parts 110 and 120 are controlled, the protrusions 112 and 212 penetrate the support sheet 300 . While it can be easily inserted into the ball 320, the operability can be improved by appropriately accommodating some deformation in the lateral direction when pressed by the device under test.
  • FIG. 3 (a) and (b) are views showing a socket for inspection according to a second embodiment of the present invention
  • Figure 4 is a plan view of the socket for inspection to which the support sheet according to the second embodiment of the present invention is applied. .
  • the support sheet 400 is disposed between the first conductive sheet 100 and the second conductive sheet 200 to improve the thickness direction height of the socket for inspection 1000 .
  • the support sheet 400 includes an outer support part 410 and a plurality of through holes 420 . That is, the support sheet 400 includes an outer support part 410 supporting the plurality of first and second conductive parts 110 and 210 positioned outside between the first conductive sheet 100 and the second conductive sheet 200 . and a plurality of through holes 420 are formed in the outer support portion 410 at positions corresponding to the conductive paths of the first and second conductive portions 110 and 210 .
  • the support sheet 400 may further include an inner space 430 surrounded by the outer support 410 .
  • a space can be secured in the middle layer of the multi-layered inspection socket 1000 , and thus, the first and second conductive portions compared to the single-layered inspection socket
  • the compressive force acting on (110, 210) can be reduced. That is, the lifespan of the test socket 1000 may be improved due to a reduction in stress applied to the first and second conductive parts 110 and 210 .
  • the first and second conductive parts 110 and 210 are compressed due to the stress reduction effect from the center of each conductive part 110 and 210 to the outside. Damage acting on the first and second conductive parts 110 and 210 may be reduced, and operability may be improved by inducing a soft operation of the test socket 1000 . That is, due to an open cell structure inside the support sheet 400 , it may be easy to secure operation stability for the center portion.
  • FIG. 5 (a) and (b) are views showing a socket for inspection according to a third embodiment of the present invention
  • Figure 6 is a plan view of the socket for inspection to which the support sheet according to the third embodiment of the present invention is applied. .
  • the third embodiment is useful for improving the physical operability and resistance deviation of the outer conductive part when the terminals of the device under test are mainly located on the outside of the package and the pitch between the terminals is dense.
  • the support sheet 500 is disposed between the first conductive sheet 100 and the second conductive sheet 200 to improve the thickness direction height of the socket for inspection 1000 .
  • the support sheet 500 includes an inner support part 510 and a plurality of through holes 520 . That is, the support sheet 500 includes an inner support part 510 supporting the plurality of first and second conductive parts 110 and 210 positioned inside between the first conductive sheet 100 and the second conductive sheet 200 . A plurality of through-holes 520 are formed in the inner support part 510 at positions corresponding to the conductive paths of the first and second conductive parts 110 and 210 .
  • the support sheet 500 may further include an outer space 530 formed outside the inner support 510 .
  • a space can be secured in the middle layer of the multi-layered inspection socket 1000 , and thus, the first and second conductive portions compared to the single-layered inspection socket
  • the compressive force acting on (110, 210) can be reduced. That is, the lifespan of the test socket 1000 may be improved due to a reduction in stress applied to the first and second conductive parts 110 and 210 .
  • the first and second conductive parts 110 and 210 are compressed due to the stress reduction effect from the center of each conductive part 110 and 210 to the outside. Damage acting on the first and second conductive parts 110 and 210 may be reduced, and operability may be improved by inducing a soft operation of the test socket 1000 . That is, due to the open cell structure of the outer side of the support sheet 400 , it may be easy to secure the operation stability of the outer part.
  • FIG. 7 (a) and (b) are views showing a socket for inspection according to a fourth embodiment of the present invention
  • Figure 8 is a plan view of the socket for inspection to which the support sheet according to the fourth embodiment of the present invention is applied. .
  • the fourth embodiment is useful for lowering the contact pressure and improving the physical operability and resistance deviation of the conductive part when there are many terminals of the device under test and the area thereof is wide.
  • the support sheet 600 is disposed between the first conductive sheet 100 and the second conductive sheet 200 to improve the thickness direction height of the socket for inspection 1000 .
  • the support sheet 600 includes an outer support portion 610a , an inner support portion 610b , and a plurality of through holes 620 . That is, the support sheet 600 includes an outer support part 610a that supports the plurality of first and second conductive parts 110 and 210 positioned in an outer region between the first conductive sheet 100 and the second conductive sheet 200 . and an inner supporter 610b supporting a plurality of first and second conductive portions 110 and 210 positioned in an inner region between the first conductive sheet 100 and the second conductive sheet 200, wherein the outer supporter A plurality of through-holes 620 are formed at positions corresponding to the conductive paths of the first and second conductive parts 110 and 210 in the 610a and the inner support part 610b.
  • the support sheet 600 may further include a space 630 formed between the outer support 610a and the inner support 610b.
  • the interspace portion 630 By forming the interspace portion 630 in the support sheet 600 , a space can be secured in the middle layer of the multi-layered inspection socket 1000 , and thus, the first and second conductive portions compared to the single-layered inspection socket
  • the compressive force acting on (110, 210) can be reduced. That is, the lifespan of the test socket 1000 may be improved due to a reduction in stress applied to the first and second conductive parts 110 and 210 .
  • the first and second conductive parts 110 and 210 are compressed due to the stress reduction effect from the center of each conductive part 110 and 210 to the outside. Damage acting on the first and second conductive parts 110 and 210 may be reduced, and operability may be improved by inducing a soft operation of the test socket 1000 . That is, as a plurality of open cell structures inside the support sheet 400 are secured, uniform operability may be easily secured.
  • the multi-layered inspection socket can be expected to have the effect of securing resistance stability at a lower contact pressure than the single-structured inspection socket.
  • the contact pressure increase ratio according to the increase in the compression length may be reduced compared to the case where the space portion is not provided. That is, when the space portion is provided in the support sheet, compared to the case where the space portion is not provided, the lifespan improvement effect can be expected when evaluating the life span for the same compression length.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

Un mode de réalisation de la présente invention concerne une prise d'inspection pour connecter électriquement une borne d'un dispositif à inspecter et un bloc d'un appareil de test l'un à l'autre, la prise d'inspection comprenant : une première feuille conductrice ayant une partie de support isolante et une pluralité de premières parties conductrices électriquement déconnectées par la partie de support isolante et en contact avec la borne du dispositif à inspecter ; une seconde feuille conductrice ayant une partie de support isolante et une pluralité de secondes parties conductrices électriquement déconnectées par la partie de support isolante et en contact avec le bloc de l'appareil de test ; et une feuille de support qui dispose d'une pluralité de trous traversants à travers lesquels les premières parties conductrices et les secondes parties conductrices sont excitées verticalement, et qui est interposée entre la première feuille conductrice et la seconde feuille conductrice.
PCT/KR2021/007411 2020-08-28 2021-06-14 Prise d'inspection Ceased WO2022045542A1 (fr)

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KR10-2020-0109609 2020-08-28
KR1020200109609A KR102388678B1 (ko) 2020-08-28 2020-08-28 검사용 소켓

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KR102725355B1 (ko) * 2022-06-07 2024-11-06 주식회사 아이에스시 검사용 커넥터
KR102868587B1 (ko) * 2023-12-13 2025-10-02 주식회사 아이에스시 테스트 소켓
KR102796224B1 (ko) * 2024-01-02 2025-04-14 신종천 조립 구조의 러버 소켓

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