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WO2019064782A1 - Dispositif d'application d'agent liquide - Google Patents

Dispositif d'application d'agent liquide Download PDF

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Publication number
WO2019064782A1
WO2019064782A1 PCT/JP2018/025149 JP2018025149W WO2019064782A1 WO 2019064782 A1 WO2019064782 A1 WO 2019064782A1 JP 2018025149 W JP2018025149 W JP 2018025149W WO 2019064782 A1 WO2019064782 A1 WO 2019064782A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric element
liquid agent
diaphragm
horn
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2018/025149
Other languages
English (en)
Japanese (ja)
Inventor
賢司 前田
中谷　政次
正也 高崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Corp
Saitama University NUC
Original Assignee
Nidec Corp
Saitama University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Corp, Saitama University NUC filed Critical Nidec Corp
Publication of WO2019064782A1 publication Critical patent/WO2019064782A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details

Definitions

  • the present invention relates to a liquid agent application apparatus.
  • a piezoelectric element that converts energy from electrical energy to mechanical energy by the piezoelectric effect is excellent in responsiveness, and thus discharges liquid as droplets onto the surface of an object in a wide range of fields such as semiconductors, printing, chemicals, etc. It is used for a droplet discharge device.
  • the liquid agent may not be applied with a sufficient pressure and may not be discharged smoothly.
  • Patent Document 1 and Patent Document 2 a method of providing a displacement enlarging mechanism for increasing the displacement amount of the piezoelectric element (see Patent Document 1 and Patent Document 2) and a method of providing a heating device for reducing the viscosity of the liquid have been proposed (Patent Reference 3 and Patent Document 4).
  • the present invention has been made in view of the above-described situation, and an object of the present invention is to provide a liquid agent discharge device capable of smoothly discharging a liquid agent with a simple configuration.
  • a liquid medicine application device concerning one mode of the present invention is provided with a liquid medicine storage part, a diaphragm, and a drive part.
  • the liquid agent reservoir has a liquid agent outlet.
  • the diaphragm changes the internal volume of the fluid reservoir.
  • the drive is located above the diaphragm.
  • the drive unit has a drive piezoelectric element, an excitation piezoelectric element, and a horn.
  • the driving piezoelectric element vibrates in response to the application of the first driving voltage signal.
  • the vibration piezoelectric element vibrates in response to the application of a second drive voltage signal whose amplitude is smaller than that of the first drive voltage signal and whose frequency is higher than that of the first drive voltage signal.
  • the horn vibrates together with the vibrating piezoelectric element.
  • liquid agent discharge device capable of smoothly discharging a liquid agent with a simple configuration.
  • connection means that two members are fixed or connected to each other. Thus, when two members are connected, they always operate together. Also, “contact” means that two members are not fixed or connected to each other, although the two members are in direct contact with each other. When two members are in contact, there are times when they work together and when they do not work together. Moreover, in the present specification, the "end” of each member means the end in the expansion and contraction direction of the piezoelectric element.
  • FIG. 1 is a schematic view showing a configuration of a liquid agent application device 10 according to a first embodiment.
  • the liquid agent application device 10 includes a liquid agent storage unit 11, a diaphragm 12, a drive unit 13, a fixing member 14, and a control unit 15.
  • the liquid agent reservoir 11, the diaphragm 12, the drive unit 13, and the fixing member 14 constitute a head 16.
  • the liquid agent storage unit 11 has a housing 11 a and a nozzle 11 b.
  • the housing 11a is formed in a hollow shape.
  • the housing 11a is formed in a cylindrical shape, but is not limited thereto.
  • the housing 11a can be made of, for example, an alloy material, a ceramic material, a synthetic resin material, or the like, and is designed to have high rigidity so as not to be deformed by application of a pressing force by a drive unit 13 described later.
  • the rigidity of the housing 11a can be appropriately adjusted by optimizing the thickness according to the constituent material. When the housing 11a is manufactured by molding and casting, the rigidity of the housing 11a can be effectively improved by providing a rib on the outer peripheral surface.
  • a pressure chamber 11c is formed inside the housing 11a.
  • a liquid agent is stored in the pressure chamber 11c.
  • the liquid include solder, thermosetting resin, ink, and coating liquid for forming a functional thin film (alignment film, resist, color filter, organic electroluminescence, etc.), but not limited thereto.
  • a liquid agent supply port 11d is formed on the side wall of the housing 11a.
  • the liquid agent supplied from a liquid agent supply device passes through the liquid agent supply port 11 d and is replenished into the pressure chamber 11 c.
  • the nozzle 11b is formed in a plate shape.
  • the nozzle 11b is arranged to close an opening at one end of the housing 11a.
  • the discharge port 11e is formed in the nozzle 11b.
  • the liquid agent in the pressure chamber 11c is discharged as droplets from the discharge port 11e to the outside.
  • Diaphragm 12 The diaphragm 12 is disposed to close the other end opening of the housing 11a.
  • the diaphragm 12 elastically vibrates when pressure vibration is applied from a piezoelectric element 13 described later. Thereby, the diaphragm 12 changes the volume of the pressure chamber 11 c formed in the liquid agent reservoir 11.
  • the diaphragm 12 When the diaphragm 12 is convexly curved toward the inside of the pressure chamber 11c, the volume of the pressure chamber 11c is reduced. Thus, the liquid agent is discharged from the discharge port 11e. Thereafter, when the diaphragm 12 returns to a steady state by its own elasticity, the volume of the pressure chamber 11 c also returns. At this time, the liquid agent is replenished from the liquid agent supply port 11 d to the pressure chamber 11 c.
  • the constituent material of the diaphragm 12 is not particularly limited, and, for example, an alloy material, a ceramic material, and a synthetic resin material can be used.
  • the drive unit 13 is a member for driving the diaphragm 12 to extend and retract.
  • the drive unit 13 is located on the diaphragm 12.
  • the drive unit 13 is disposed between the diaphragm 12 and the fixing member 14.
  • the drive unit 13 is sandwiched between the diaphragm 12 and the fixing member 14.
  • the first end 13 p of the drive unit 13 opposite to the diaphragm 12 is connected to the fixing member 14. That is, the first end 13 p of the drive unit 13 is fixed to the fixing member 14. Therefore, the first end 13p of the drive unit 13 is a fixed end.
  • the first end 13p of the drive unit 13 can be connected to the fixing member 14 via an adhesive such as epoxy resin, for example.
  • the first end 13 p of the drive unit 13 is a part of the vibration excitation piezoelectric element 21 described later.
  • the second end 13 q of the drive unit 13 on the diaphragm 12 side is in contact with the diaphragm 12. That is, the second end 13 q of the drive unit 13 is not fixed to the diaphragm 12.
  • the first end 13 p of the drive unit 13 is a part of the drive piezoelectric element 20 described later.
  • the drive unit 13 has a drive piezoelectric element 20, an excitation piezoelectric element 21 and a horn 22.
  • the driving piezoelectric element 20 is located on the diaphragm 12.
  • the driving piezoelectric element 20 is disposed between the diaphragm 12 and the vibrating piezoelectric element 21.
  • the driving piezoelectric element 20 is sandwiched between the diaphragm 12 and the vibrating piezoelectric element 21.
  • the driving piezoelectric element 20 is connected to the vibrating piezoelectric element 21.
  • the driving piezoelectric element 20 can be connected to the vibrating piezoelectric element 21 via an adhesive such as epoxy resin, for example.
  • the driving piezoelectric element 20 is in contact with the diaphragm 12. That is, the driving piezoelectric element 20 is not connected to the diaphragm 12. However, the driving piezoelectric element 20 may be connected to the diaphragm 12.
  • the driving piezoelectric element 20 has a plurality of piezoelectric members 20a, a plurality of internal electrodes 20b, and a pair of side electrodes 20c and 20c.
  • the piezoelectric members 20a and the internal electrodes 20b are alternately stacked.
  • Each piezoelectric body 20a is made of, for example, a piezoelectric ceramic such as lead zirconate titanate (PZT).
  • Each internal electrode 20b is electrically connected to one of the pair of side electrodes 20c and 20c. That is, the internal electrode 20b electrically connected to one side electrode 20c is electrically insulated from the other side electrode 20c.
  • Such a structure is generally referred to as a partial electrode structure.
  • the drive piezoelectric element 20 only needs to include at least one piezoelectric body and a pair of electrodes, and various known piezoelectric elements can be used as the drive piezoelectric element 20.
  • the driving piezoelectric element 20 vibrates in accordance with a first driving voltage signal (that is, a driving pulse) applied from the control unit 15 described later. Specifically, when the first drive voltage signal is applied from the control unit 15 to the pair of side electrodes 20c, 20c, each piezoelectric body 20a expands and contracts. With the expansion and contraction of each of the piezoelectric members 20 a, pressure vibration is applied to the diaphragm 12.
  • a first driving voltage signal that is, a driving pulse
  • the vibrating piezoelectric element 21 is located on the driving piezoelectric element 20.
  • the vibrating piezoelectric element 21 is disposed between the diaphragm 12 and the horn 22.
  • the vibrating piezoelectric element 21 is disposed between the driving piezoelectric element 20 and the horn 22.
  • the vibrating piezoelectric element 21 is sandwiched between the driving piezoelectric element 20 and the horn 22.
  • the vibrating piezoelectric element 21 is connected to the driving piezoelectric element 20.
  • the vibrating piezoelectric element 21 is connected to the horn 22.
  • the vibrating piezoelectric element 21 can be connected to the horn 22 through an adhesive such as epoxy resin, for example.
  • the vibrating piezoelectric element 21 at least includes one piezoelectric body and a pair of electrodes. Various well-known piezoelectric elements can be used as the piezoelectric element 21 for excitation.
  • the vibrating piezoelectric element 21 vibrates in response to the second drive voltage signal (i.e., a drive pulse) applied from the control unit 15.
  • the second drive voltage signal applied to the vibration piezoelectric element 21 is a high frequency signal having a frequency higher than that of the first drive voltage signal applied to the drive piezoelectric element 20.
  • the amplitude (potential difference) of the second drive voltage signal is preferably smaller than the amplitude (potential difference) of the first drive voltage signal.
  • the vibrating piezoelectric element 21 to which the second drive voltage signal is applied applies a minute pressure vibration to the diaphragm 12 to such an extent that the liquid agent is not discharged from the discharge port 11 e.
  • the flowability of the liquid stored in the liquid storage portion 11 can be improved, and the liquid drainability of the liquid discharged from the discharge port 11 e can be improved.
  • the amplitude of the second drive voltage signal is preferably 1% to 20% of the amplitude of the first drive voltage signal, and the frequency of the second drive voltage signal is 1 kHz to 30 kHz is preferred.
  • the higher the frequency of the second drive voltage signal the more the fluidity can be improved.
  • the amplitude of the second drive voltage signal is preferably 1% to 20% of the amplitude of the first drive voltage signal, and the frequency of the second drive voltage signal is 1 kHz to 5 kHz. Is preferred.
  • the horn 22 is located on the vibrating piezoelectric element 21.
  • the horn 22 is disposed between the fixing member 14 and the piezoelectric element 21 for excitation.
  • the horn 22 is sandwiched by the fixing member 14 and the piezoelectric element 21 for excitation.
  • the horn 22 is a cylindrical metal rod.
  • the horn 22 is connected to each of the fixed member 14 and the piezoelectric element 21 for excitation.
  • the horn 22 can be connected to the fixing member 14 via an adhesive such as epoxy resin, for example.
  • the horn 22 is a vibrating body for increasing the displacement amount of the diaphragm 12 due to the expansion and contraction of the vibrating piezoelectric element 21 by vibrating together with the vibrating piezoelectric element 21.
  • the natural vibration frequency F1 of the horn 22 is equal to or less than the drive limit frequency F2 of the vibration-use piezoelectric element 21.
  • the natural vibration frequency F1 of the horn 22 is a frequency when the horn 22 performs free vibration.
  • the natural vibration frequency F1 of the horn 22 is a frequency unique to the horn 22.
  • the natural vibration frequency F1 of the horn 22 is determined by the shape, material, mass and the like of the horn 22. Therefore, the shape, the material, the mass, and the like of the horn 22 are not particularly limited, as long as the natural vibration frequency F1 is set to a desired value.
  • the drive limit frequency F2 of the excitation piezoelectric element 21 is the maximum value of the limit frequency at which the excitation piezoelectric element 21 can be driven with a stable amplitude.
  • the drive limit frequency F2 of the vibration-use piezoelectric element 21 is a frequency unique to the vibration-use piezoelectric element 21.
  • the drive limit frequency F2 of the vibration-use piezoelectric element 21 is determined by the configuration of the vibration-use piezoelectric element 21.
  • the frequency (hereinafter referred to as "second drive voltage signal frequency") F3 of the second drive voltage signal applied to the vibration piezoelectric element 21 is set to the drive limit frequency F2 or less.
  • the horn Reference numeral 22 resonates with the vibrating piezoelectric element 21.
  • the natural vibration frequency F1 of the horn 22 is closer to the second drive voltage signal frequency F3, the degree of resonance between the horn 22 and the vibrating piezoelectric element 21 becomes higher, and the horn 22 and the vibrating piezoelectric element 21 The amplitude of the Then, when the natural vibration frequency F1 of the horn 22 is the same as the second drive voltage signal frequency F3, the degree of resonance between the horn 22 and the vibrating piezoelectric element 21 becomes maximum, and the horn 22 and the vibrating piezoelectric element The amplitude with 21 also becomes maximum.
  • the amplitude between the horn 22 and the piezoelectric element 21 for excitation becomes large.
  • the displacement amount of the diaphragm 12 by 21 can be increased. Therefore, even if the amplitude of the vibration-generating piezoelectric element 21 is reduced, it is possible to maintain the sufficient displacement of the diaphragm and to improve the flowability and the flowability of the liquid agent. Therefore, the amplitude of the second drive voltage signal applied to the vibration-use piezoelectric element 21 can be reduced, so that the heat generation of the vibration-use piezoelectric element 21 can be suppressed and the power consumption can be reduced.
  • the fixing member 14 is a member for fixing the first end 13 p of the drive unit 13.
  • the fixing member 14 is disposed on the liquid agent reservoir 11.
  • the fixing member 14 only needs to be able to fix the first end 13 p of the drive unit 13, and may be separated from the liquid agent storage unit 11.
  • the shape of the fixing member 14 is not limited to the shape of FIG. 1 and can be appropriately changed in consideration of the arrangement relationship with the peripheral members.
  • Control Unit 15 is a microprocessor such as a central processing unit (CPU) or a digital signal processor (DSP), or an arithmetic device such as an application specific integrated circuit (ASIC), and a power MOSFET (metal-oxide).
  • -It is implement
  • the control unit 15 generates a first drive voltage signal for driving the drive piezoelectric element 20 and a second drive voltage signal for driving the vibration piezoelectric element 21.
  • the control unit 15 sends the generated first drive voltage signal to the power amplifier to amplify the power and applies this to the drive piezoelectric element 20 to vibrate the drive piezoelectric element 20.
  • the control unit 15 sends the generated second drive voltage signal to the power amplifier to amplify the power, and applies this to the vibration-use piezoelectric element 21 to vibrate the vibration-use piezoelectric element 21.
  • the control unit 15 sets the second drive voltage signal frequency F3 of the second drive voltage signal to be equal to or lower than the drive limit frequency F2 of the vibration-use piezoelectric element 21, and the natural vibration frequency F1 of the horn 22 and the second drive voltage signal frequency. It sets so that F3 may become multiple relation.
  • the control unit 15 adjusts the second drive voltage signal frequency F3 of the second drive voltage signal in accordance with the displacement of the vibration-use piezoelectric element 21.
  • a method of controlling the crest value constant from the current and voltage in the waveform of the second drive voltage signal or a method of controlling the phase difference between the current and voltage in the waveform of the drive voltage signal to be constant may be used. it can.
  • the phase difference at the resonance frequency is obtained in advance and used as a control target value, and feedback is performed so that the phase difference detected in actual driving matches the control target value.
  • the second drive voltage signal frequency F3 can be matched with the natural vibration frequency F1, so that excitation can be performed efficiently, and it is possible to realize high efficiency of the apparatus as well as lowering the viscosity of the liquid agent. .
  • FIG. 2 is a schematic view showing a configuration of a liquid agent application device 10 a according to a second embodiment.
  • the difference between the liquid agent application device 10 according to the first embodiment and the liquid agent application device 10a according to the second embodiment is that the arrangement of the driving piezoelectric element 20, the vibrating piezoelectric element 21 and the horn 22 is interchanged. It is. Therefore, in the following, the difference will be mainly described.
  • the drive unit 13 a is located on the diaphragm 12.
  • the drive unit 13 a is disposed between the diaphragm 12 and the fixing member 14.
  • the first end 13 p of the drive unit 13 a is connected to the fixing member 14.
  • the second end 13 q of the drive unit 13 a is in contact with the diaphragm 12.
  • the first end 13 p of the drive unit 13 a is a part of the vibration-use piezoelectric element 21, and the second end 13 q of the drive unit 13 a is a part of the horn 22.
  • the horn 22 is located above the diaphragm 12.
  • the horn 22 is disposed between the diaphragm 12 and the driving piezoelectric element 20.
  • the horn 22 is sandwiched between the diaphragm 12 and the driving piezoelectric element 20.
  • the horn 22 contacts the diaphragm 12 and is connected to the driving piezoelectric element 20.
  • the driving piezoelectric element 20 is disposed between the horn 22 and the vibrating piezoelectric element 21.
  • the driving piezoelectric element 20 is sandwiched between the horn 22 and the vibrating piezoelectric element 21.
  • the driving piezoelectric element 20 is connected to each of the vibrating piezoelectric element 21 and the horn 22.
  • the vibrating piezoelectric element 21 is disposed between the fixed member 14 and the driving piezoelectric element 20.
  • the vibrating piezoelectric element 21 is sandwiched between the fixing member 14 and the driving piezoelectric element 20.
  • the vibrating piezoelectric element 21 is connected to each of the fixing member 14 and the driving piezoelectric element 20.
  • the horn 22 is as described in the first embodiment.
  • the natural vibration frequency F1 and the second drive voltage signal frequency F3 the amount of displacement of the diaphragm 12 by the vibration piezoelectric element 21 can be increased by the horn 22.
  • the horn 22, the driving piezoelectric element 20, and the vibrating piezoelectric element 21 are sequentially arranged from the diaphragm 12 side, but the invention is not limited thereto.
  • the order of the horn 22, the driving piezoelectric element 20, and the vibrating piezoelectric element 21 can be arbitrarily switched.
  • FIG. 3 is a schematic view showing a configuration of a liquid agent application device 10 b according to a third embodiment.
  • the difference between the liquid agent applying apparatus 10 according to the first embodiment and the liquid agent applying apparatus 10 b according to the third embodiment is that a preload spring 17 is disposed between the drive unit 13 and the fixing member 14. Therefore, in the following, the difference will be mainly described.
  • the preload spring 17 is located above the drive unit 13.
  • the preload spring 17 is disposed between the drive unit 13 and the fixing member 14.
  • the preload spring 17 is sandwiched between the drive unit 13 and the fixing member 14.
  • the first end 17 p of the preload spring 17 opposite to the drive unit 13 is connected to the fixing member 14. That is, the first end 17 p of the preload spring 17 is fixed to the fixing member 14. Therefore, the first end 17p of the preload spring 17 is a fixed end.
  • the first end 17p of the preload spring 17 may be directly fastened to the fixing member 14, or may be connected to the fixing member 14 via an adhesive such as an epoxy resin.
  • the second end 17 q of the preload spring 17 on the drive unit 13 side is connected to the first end 13 p of the drive unit 13. That is, the second end 17 q of the preload spring 17 is fixed to the first end 13 p of the drive unit 13. Therefore, in the present embodiment, the first end 13p of the drive unit 13 is not a fixed end.
  • the second end 17 q of the preload spring 17 may be directly fastened to the drive unit 13, or may be connected to the drive unit 13 via an adhesive such as an epoxy resin.
  • the present invention is not limited to this.
  • a known spring such as a disc spring, a plate spring, or a spiral spring can be used.
  • the spring constant of the preload spring 17 is preferably larger than the spring constant of the diaphragm 12.
  • the preload spring 17 presses the drive unit 13 against the diaphragm 12 side.
  • the preload spring 17 always presses the drive portion 13 against the diaphragm 12 regardless of whether the drive piezoelectric element 20 is in the expanded state or the contracted state.
  • the drive portion 13 can be pressed against the diaphragm 12 by the pressing force of the preload spring 17. Therefore, while suppressing the tensile force which arises in the piezoelectric element 20 for a drive, the ringing of the drive part 13 can be suppressed.
  • the contraction speed of the drive unit 13 is greater than the return speed of the diaphragm 12 when the extended drive piezoelectric element 20 contracts. Because the drive unit 13 is fast, the drive unit 13 may be separated from the diaphragm 12. However, if the drive unit 13 is pressed against the diaphragm 12 by the pressing force of the preload spring 17 as in the present embodiment, the drive unit 13 can be prevented from peeling off from the diaphragm 12.
  • the first end 13 p of the drive unit 13 is connected to the fixing member 14, but may be in contact with the fixing member 14.
  • the second end 13 q of the drive unit 13 is in contact with the diaphragm 12, but may be connected to the diaphragm 12.
  • the second end 13 q of the drive unit 13 is in direct contact with the diaphragm 12, but the drive unit is between the second end 13 q and the diaphragm 12.
  • An intermediate member that is in surface contact with the surface 13 and in point contact with the diaphragm 12 may be sandwiched.
  • the intermediate member is fixed to the second end 13 q of the drive unit 13 and is capable of coming into and coming out of contact with the diaphragm 12.
  • the driving piezoelectric element 20 is connected to the horn 22 and the vibrating piezoelectric element 21 and the vibrating piezoelectric element 21 is connected to the fixing member 14, the present invention is not limited to this.
  • the driving piezoelectric element 20 and the vibrating piezoelectric element 21 may be fixed between the fixing member 14 and the horn 22 by the fastener 30.
  • a screw or the like can be used as the fastener 30.
  • the fastener 30 penetrates the driving piezoelectric element 20 and the exciting piezoelectric element 21 and is fastened to the horn 22.
  • the fastener 30 preferably has a sufficient fastening force.
  • Each of the driving piezoelectric element 20 and the vibrating piezoelectric element 21 is formed in a shape (for example, a hollow ring) through which the fastener 30 can be penetrated.
  • the vibrating piezoelectric element is compared to, for example, connection via an elastic body such as an adhesive. The vibration of the element 21 can be efficiently transmitted to the horn 22.
  • the driving piezoelectric element 20 and the vibrating piezoelectric element 21 may be arranged in the opposite manner in FIG.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Coating Apparatus (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Reciprocating Pumps (AREA)

Abstract

Le problème décrit par la présente invention est de fournir un dispositif de distribution d'agent liquide qui a une configuration simple et qui est susceptible de distribuer sans à-coups un agent liquide. La solution selon l'invention porte sur un dispositif d'application (10) d'agent liquide qui est pourvu de : une membrane (12) qui change le volume interne d'un réservoir (11) d'agent liquide; et une unité d'attaque (13) qui est positionnée au-dessus de la membrane (12). L'unité d'attaque (13) comprend un élément piézoélectrique d'attaque (20), un élément piézoélectrique vibrant (21) et un avertisseur sonore (22). L'élément piézoélectrique d'attaque (20) vibre en réponse à l'application d'un premier signal de tension d'attaque. L'élément piézoélectrique vibrant (21) vibre en réponse à l'application d'un second signal de tension d'attaque ayant une intensité inférieure à celle du premier signal de tension d'attaque et une fréquence supérieure à celle du premier signal de tension d'attaque. L'avertisseur sonore (22) vibre avec l'élément piézoélectrique vibrant (21).
PCT/JP2018/025149 2017-09-28 2018-07-03 Dispositif d'application d'agent liquide Ceased WO2019064782A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-188839 2017-09-28
JP2017188839A JP2021014787A (ja) 2017-09-28 2017-09-28 液剤塗布装置

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WO2019064782A1 true WO2019064782A1 (fr) 2019-04-04

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Citations (6)

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JPS62247182A (ja) * 1986-04-17 1987-10-28 Ricoh Co Ltd 電歪振動子ポンプ装置
JP2003120541A (ja) * 2001-10-19 2003-04-23 Matsushita Electric Ind Co Ltd 小型ポンプ及びその駆動方法
JP2005353755A (ja) * 2004-06-09 2005-12-22 Seiko Epson Corp 圧電素子、圧電アクチュエーター、圧電ポンプ、インクジェット式記録ヘッド、インクジェットプリンター、表面弾性波素子、周波数フィルタ、発振器、電子回路、薄膜圧電共振器、および電子機器
US20060083639A1 (en) * 2004-10-12 2006-04-20 Industrial Technology Research Institute PDMS valve-less micro pump structure and method for producing the same
US20070263887A1 (en) * 2006-05-15 2007-11-15 Adaptivenergy, Llc Vibration amplification system for piezoelectric actuators and devices using the same
JP2017101598A (ja) * 2015-12-02 2017-06-08 セイコーエプソン株式会社 液体噴射装置、プログラム、制御装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62247182A (ja) * 1986-04-17 1987-10-28 Ricoh Co Ltd 電歪振動子ポンプ装置
JP2003120541A (ja) * 2001-10-19 2003-04-23 Matsushita Electric Ind Co Ltd 小型ポンプ及びその駆動方法
JP2005353755A (ja) * 2004-06-09 2005-12-22 Seiko Epson Corp 圧電素子、圧電アクチュエーター、圧電ポンプ、インクジェット式記録ヘッド、インクジェットプリンター、表面弾性波素子、周波数フィルタ、発振器、電子回路、薄膜圧電共振器、および電子機器
US20060083639A1 (en) * 2004-10-12 2006-04-20 Industrial Technology Research Institute PDMS valve-less micro pump structure and method for producing the same
US20070263887A1 (en) * 2006-05-15 2007-11-15 Adaptivenergy, Llc Vibration amplification system for piezoelectric actuators and devices using the same
JP2017101598A (ja) * 2015-12-02 2017-06-08 セイコーエプソン株式会社 液体噴射装置、プログラム、制御装置

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