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WO2018173592A1 - Dispositif d'éjection de gouttelettes - Google Patents

Dispositif d'éjection de gouttelettes Download PDF

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Publication number
WO2018173592A1
WO2018173592A1 PCT/JP2018/005915 JP2018005915W WO2018173592A1 WO 2018173592 A1 WO2018173592 A1 WO 2018173592A1 JP 2018005915 W JP2018005915 W JP 2018005915W WO 2018173592 A1 WO2018173592 A1 WO 2018173592A1
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WO
WIPO (PCT)
Prior art keywords
signal
voltage
liquid
section
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2018/005915
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English (en)
Japanese (ja)
Inventor
賢司 前田
中谷　政次
鵬摶 李
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Corp
Original Assignee
Nidec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Corp filed Critical Nidec Corp
Priority to KR1020197025733A priority Critical patent/KR20190109537A/ko
Priority to JP2019507454A priority patent/JPWO2018173592A1/ja
Priority to CN201880015643.XA priority patent/CN110382867A/zh
Publication of WO2018173592A1 publication Critical patent/WO2018173592A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0081—Special features systems, control, safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Definitions

  • the present invention relates to a droplet discharge device.
  • Piezoelectric elements that perform energy conversion from electrical energy to mechanical energy by the piezoelectric effect have excellent responsiveness, so that liquids are ejected as droplets onto the surface of objects in a wide range of fields such as semiconductors, printing, and chemicals. It is used for a droplet discharge device.
  • Patent Document 1 and Patent Document 2 a method of providing a displacement enlarging mechanism for increasing the displacement amount of the piezoelectric element (see Patent Document 1 and Patent Document 2) and a method of providing a heating device for reducing the viscosity of the liquid have been proposed (Patent) Reference 3 and Patent Document 4).
  • the present invention has been made in view of the above-described situation, and an object thereof is to provide a droplet discharge device that can discharge droplets smoothly with a simple configuration.
  • One aspect of the droplet discharge device of the present invention includes a liquid storage unit having a liquid discharge port, a diaphragm that changes the volume of the liquid storage unit, a piezoelectric element that applies pressure vibration to the diaphragm, and a drive voltage applied to the piezoelectric element.
  • the drive voltage signal includes an ejection signal and a high-frequency signal having an amplitude smaller than that of the ejection signal.
  • Schematic diagram showing the configuration of a droplet discharge apparatus according to an embodiment Waveform diagram showing an example of discharge signal Waveform diagram showing an example of a high-frequency signal Waveform diagram showing an example of drive voltage signal Graph showing changes in amplitude of piezoelectric element
  • Schematic diagram showing the shape of the liquid near the liquid outlet Waveform diagram showing an example of drive voltage signal
  • Waveform diagram showing an example of drive voltage signal Waveform diagram showing an example of drive voltage signal
  • waveform diagram showing an example of drive voltage signal Waveform diagram showing an example of drive voltage signal
  • FIG. 1 is a schematic diagram showing a configuration of the droplet discharge device 10 according to the embodiment. *
  • the droplet discharge device 10 includes a liquid storage unit 11, a diaphragm 12, a piezoelectric element 13, and a control unit 14. *
  • Liquid storage part 11 The liquid storage part 11 has the pressure chamber 11a and the nozzle 11b. *
  • the pressure chamber 11a is formed in a hollow shape.
  • the pressure chamber 11a is formed in the cylinder shape, it is not restricted to this.
  • the pressure chamber 11a can be composed of, for example, an alloy material, a ceramic material, a synthetic resin material, or the like.
  • a liquid chamber 11c is formed inside the pressure chamber 11a. Liquid is stored in the liquid chamber 11c. Examples of the liquid include solder, thermosetting resin, ink, and coating liquid for forming a functional thin film (alignment film, resist, color filter, organic electroluminescence, etc.).
  • a liquid supply port 11d is formed on the side wall of the pressure chamber 11a. The liquid is replenished to the liquid chamber 11c from the liquid supply port 11d.
  • the nozzle 11b is formed in a plate shape.
  • the nozzle 11b is disposed so as to close one end opening of the liquid chamber 11c.
  • the nozzle 11b is formed with a liquid discharge port 11e.
  • the liquid in the liquid chamber 11c is discharged as a droplet from the liquid discharge port 11e.
  • Diaphragm 12 The diaphragm 12 is disposed so as to close the other end opening of the liquid chamber 11c.
  • the diaphragm 12 vibrates elastically when pressure vibration is applied from a piezoelectric element 13 described later. Thereby, the diaphragm 12 changes the volume of the liquid chamber 11c.
  • the diaphragm 12 has a fixed portion 12a and a flexible portion 12b.
  • the fixing part 12 a is fixed to the pressure chamber 11 a of the liquid storage part 11.
  • the fixed portion 12 a is the outer edge of the diaphragm 12.
  • the flexible part 12b is a part surrounded by the fixed part 12a.
  • the flexible part 12b is not fixed to the pressure chamber 11a of the liquid storage part 11, and can be deformed.
  • the piezoelectric element 13 is fixed to the outer surface 12S of the flexible part 12b. *
  • the material which comprises the diaphragm 12 is not restrict
  • Piezoelectric element 13 The piezoelectric element 13 is disposed on the flexible portion 12 b of the diaphragm 12. The first end portion 13p of the piezoelectric element 13 is fixed to the fixing member 15 and serves as a fixed end. The second end portion 13q of the piezoelectric element 13 is fixed to the flexible portion 12b of the diaphragm 12 and is a free end. A solder paste, an underfill material, an epoxy resin, or the like can be used to fix the first and second end portions 13p and 13q. *
  • the piezoelectric element 13 includes a plurality of piezoelectric bodies 13a, a plurality of internal electrodes 13b, and a pair of side surface electrodes 13c and 13c.
  • the piezoelectric bodies 13a and the internal electrodes 13b are alternately stacked.
  • Each piezoelectric body 13a is made of, for example, piezoelectric ceramics such as lead zirconate titanate (PZT).
  • PZT lead zirconate titanate
  • Each electric internal electrode 13b is electrically connected to one of the pair of side surface electrodes 13c, 13c. That is, the internal electrode 13c electrically connected to one side electrode 13c is electrically insulated from the other side electrode 13c.
  • Such a structure is generally referred to as a partial electrode structure. *
  • the piezoelectric element 13 only needs to include at least one piezoelectric body and a pair of electrodes, and various known piezoelectric elements having various structures can be applied as the piezoelectric element 13. *
  • the piezoelectric element 13 expands and contracts in a direction perpendicular to the outer surface 12S of the flexible portion 12b in response to application of a drive voltage signal (that is, drive pulse) VR described later. Specifically, when a drive voltage signal VR is output from the control unit 14 described later to the pair of side surface electrodes 13c and 13c, each piezoelectric body 13a expands and contracts. Along with the expansion / contraction operation of the piezoelectric element 13, pressure vibration is applied to the diaphragm 12. *
  • a drive voltage signal VR that is, drive pulse
  • Control Unit 14 The control unit 14 is realized by a microprocessor such as a CPU (Central Processing Unit) or a DSP (Digital Signal Processor), or an arithmetic device such as an ASIC (Application Specific Integrated Circuit).
  • a microprocessor such as a CPU (Central Processing Unit) or a DSP (Digital Signal Processor), or an arithmetic device such as an ASIC (Application Specific Integrated Circuit).
  • the control unit 14 generates a drive voltage signal VR for expanding and contracting the piezoelectric element 13.
  • the control unit 14 expands and contracts the piezoelectric element 13 by outputting the generated drive voltage signal VR to the one side electrode 13 c of the piezoelectric element 13.
  • FIG. 2 is a waveform diagram showing an example of the ejection signal VP used for generating the drive voltage signal VR.
  • FIG. 3 is a waveform diagram showing an example of the high-frequency signal VQ used for generating the drive voltage signal VR.
  • FIG. 4 is a waveform diagram showing an example of the drive voltage signal VR generated from the ejection signal VP and the high frequency signal VQ. *
  • the discharge signal VP is a voltage signal for driving the piezoelectric element 14 so as to apply a pressurizing vibration to the diaphragm 12 to the extent that a droplet is discharged.
  • the reference voltage interval VP1 As shown in FIG. 2, in the ejection signal VP, the reference voltage interval VP1, the voltage increase interval VP2, the voltage maintenance interval VP3, and the voltage decrease interval VP4 are sequentially repeated.
  • the voltage In the reference voltage section VP1, the voltage is maintained at the reference voltage Pg (for example, voltage 0).
  • the voltage rise section VP2 the voltage rises from the reference voltage Pg to the drive voltage Pm.
  • the voltage maintaining section VP3 the voltage is maintained at the driving voltage Pm.
  • the voltage decrease section VP4 the voltage decreases from the drive voltage Pm to the reference voltage Pg. *
  • the drive voltage Pm of the ejection signal VP is higher than the reference voltage Pg.
  • the value of the drive voltage Pm is not particularly limited, and can be, for example, 50V to 150V.
  • the drive voltage Pm is for applying a pressurizing vibration to the diaphragm 12 to the extent that droplets are ejected. Therefore, the maximum displacement of the piezoelectric element, the volume of the liquid chamber 11c, the viscosity of the liquid, etc. are comprehensively determined. It is preferable to set in consideration. *
  • the number of repetitions of each section VP1 to VP4 per second is not particularly limited, and can be, for example, 1 to 5000 times. That is, the frequency of the ejection signal VP can be 1 Hz to 5000 Hz. In order to further increase the speed (high-frequency excitation), it is preferable to use the piezoelectric element 13 that can respond at a higher speed. *
  • the rising / falling speed (waveform slope) of the discharge signal VP in the voltage rising section VP2 and the voltage falling section VP4 is not particularly limited and can be set as appropriate.
  • the amplitude (potential difference) of the high-frequency signal VQ is smaller than the amplitude (potential difference) of the ejection signal VP.
  • the high-frequency signal VQ is a voltage signal for driving the piezoelectric element 14 so as to apply a pressurizing vibration to the diaphragm 12 so as not to eject a droplet.
  • the voltage rising section VQ1 and the voltage falling section VQ2 are sequentially repeated.
  • the high-frequency signal VQ according to the present embodiment is a continuous signal that continues without interruption.
  • the voltage rise section VQ1 the voltage rises from the reference voltage Pg to the minute voltage Pn.
  • the voltage drop section VQ2 the voltage drops from the minute voltage Pn to the reference voltage Pg. *
  • the minute voltage Pn of the high-frequency signal VQ is larger than the reference voltage Pg and smaller than the drive voltage Pm.
  • the value of the minute voltage Pn is not particularly limited, and can be set to 20% or less of the drive voltage Pm, for example.
  • the number of repetitions of each section VQ1 to VQ2 per second is not particularly limited, and is preferably twice or more the drive frequency. That is, the frequency of the high frequency signal VQ is preferably 2 Hz to 30 kHz. *
  • the high-frequency signal VQ has a function of improving the fluidity of the liquid stored in the liquid storage unit 11.
  • the minute voltage Pn is preferably 1% to 20% of the driving voltage Pm
  • the frequency of the high frequency signal VQ is preferably 1 kHz to 30 kHz.
  • the fluidity can be improved as the frequency of the high-frequency signal VQ is higher.
  • the high-frequency signal VQ has a function of improving the liquid breakage when a droplet is ejected from the liquid storage unit 11.
  • the minute voltage Pn is preferably 1% to 20% of the driving voltage Pm
  • the frequency of the high frequency signal VQ is preferably 1 kHz to 5 kHz.
  • the drive voltage signal VR has a waveform obtained by superimposing the waveform of the discharge signal VP at which droplets are discharged and the waveform of the high-frequency signal VQ at which droplets are not discharged.
  • a steady voltage section VR1 As shown in FIG. 4, in the drive voltage signal VR, a steady voltage section VR1, a voltage rising section VR2, a voltage maintaining section VR3, and a voltage falling section VR4 are sequentially repeated.
  • the steady voltage interval VR1 the voltage repeats between the reference voltage Pg and the minute voltage Pn.
  • the voltage increase section VR2 the voltage increases from the reference voltage Pg to the drive voltage Pm.
  • the voltage maintaining period VR3 the voltage repeats between the drive voltage Pm and the sum (Pg + Pn) of the reference voltage Pg and the minute voltage Pn.
  • the voltage drop section VR4 the voltage drops from the drive voltage Pm to the reference voltage Pg. *
  • FIG. 5 is a graph showing a change in amplitude (that is, a displacement waveform) of the piezoelectric element 13 that expands and contracts according to the drive voltage signal VR.
  • FIG. 6 is a schematic diagram showing the shape of the liquid in the vicinity of the liquid discharge port 11e. *
  • the transition of the amplitude of the piezoelectric element 13 matches the waveform of the drive voltage signal VR.
  • the high frequency signal VQ is superimposed on the reference voltage interval VP1 of the ejection signal VP. That is, in the drive voltage signal VR, the high frequency signal VQ is positioned before the voltage increase section VR2. Therefore, the piezoelectric element 13 expands and contracts with a minute amplitude in the steady voltage section VR1 of the drive voltage signal VR. The expansion and contraction of the piezoelectric element 13 is transmitted to the entire liquid stored as minute pressurization vibration through the diaphragm 12. As a result, the fluidity of the stored liquid is improved. However, since the pressurization vibration by the high-frequency signal VQ is suppressed to the extent that droplets are not ejected, the liquid can be prevented from leaking from the liquid ejection port 11e as shown in FIG. *
  • the high-frequency signal VQ is superimposed on the voltage increase section VP2 and the voltage maintenance section VP3 of the ejection signal VP. Therefore, the piezoelectric element 13 greatly expands and contracts with a minute amplitude from the voltage increase section VR2 to the voltage maintenance section VR3 of the drive voltage signal VR. Therefore, the liquid can be smoothly pushed out from the liquid discharge port 11e as shown in FIG. 6B while maintaining the state in which the fluidity of the liquid is improved.
  • the high-frequency signal VQ is superimposed on the voltage drop interval VP3 of the ejection signal VP.
  • the high-frequency signal VQ is located within a predetermined period from at least the start point of the voltage drop section VP3 in the ejection signal VP. Therefore, the piezoelectric element 13 contracts greatly while extending and contracting with a minute amplitude from the voltage drop section VR3 to the steady voltage section VR1 of the drive voltage signal VR.
  • the liquid pushed out from the liquid discharge port 11e can be drawn into the liquid discharge port 11e while maintaining the state in which the fluidity of the liquid is improved, as shown in FIG. Stenosis in the root portion can be promoted.
  • minute pressurization vibration is further applied to the constricted portion of the liquid, the liquid breakage can be promoted, so that the tip portion of the liquid is smoothly separated as a droplet as shown in FIG. *
  • timing at which the droplets are separated is not limited to the voltage falling section VR3, and may be separated in the steady voltage section VR1 after the voltage falling section VR3. *
  • the drive voltage signal VR includes an ejection signal VP and a high-frequency signal VQ having a smaller amplitude than the ejection signal VP. Therefore, in the section where the high-frequency signal VQ is superimposed in the drive voltage signal VR, a minute pressurizing vibration can be applied to the liquid, so that the fluidity of the liquid can be improved. Therefore, even when the viscosity of the liquid is relatively high, it is possible to smoothly discharge the liquid droplets without providing a displacement enlarging mechanism or a heating device.
  • the high frequency signal VQ is a continuous signal. Therefore, the fluidity of the liquid can be improved in the entire section of the drive voltage signal VR, and the droplet can be smoothly separated at the timing when the droplet is separated.
  • the high-frequency signal VQ included in the drive voltage signal VR is a continuous signal, but the present invention is not limited to this.
  • the high frequency signal VQ may be an intermittent signal. In this case, it is possible to suppress the liquid from being heated excessively by minute vibrations, and thus it is possible to suppress the deterioration of the liquid. Further, when the piezoelectric element 13 is driven by an intermittent signal, heating of the piezoelectric element 13 itself can be suppressed, and power consumption in the piezoelectric element 13 can also be suppressed. *
  • the high-frequency signal VQ When the high-frequency signal VQ is an intermittent signal, the high-frequency signal VQ may be superimposed on at least a part of the steady voltage section VR1 of the drive voltage signal VR as shown in FIG. Thus, the fluidity of the stored liquid can be improved in advance by positioning the high-frequency signal VQ before the voltage increase section VR2.
  • the high-frequency signal VQ When the high-frequency signal VQ is an intermittent signal, the high-frequency signal VQ may be superimposed only within a predetermined period from the start time of the voltage decrease section VR4 as shown in FIG. As described above, by positioning the high-frequency signal VQ after the start time of the voltage drop section VR4, at least one of liquid constriction and / or liquid breakage can be promoted, so that the liquid droplet can be separated smoothly.
  • the high-frequency signal VQ when the high-frequency signal VQ is an intermittent signal, the high-frequency signal VQ may be superimposed on at least a part of the voltage increase section VR2, as shown in FIG. Furthermore, as shown in FIG. 10, it may be superimposed on at least a part of the voltage increase section VR3. *
  • the ejection signal VP includes the voltage maintaining section VP3 and the drive voltage signal VR includes the voltage maintaining section VR3.
  • the present invention is not limited to this.
  • the ejection signal VP does not include the voltage maintaining section VP3, and the drive voltage signal VR may not include the voltage maintaining section VR3.
  • the piezoelectric element 13 is directly fixed to the diaphragm 12, but the present invention is not limited to this.
  • an insertion member may be inserted between the piezoelectric element 13 and the diaphragm 12.
  • the insertion member can be fixed to each of the piezoelectric element 13 and the diaphragm 12 with a solder paste, an underfill material, an epoxy resin, or the like.
  • the fixing member 15 was fixed to the liquid storage part 11, it is not restricted to this.
  • the fixing member 15 may be configured to be able to support the first end portion 13p of the piezoelectric element 13 so as to be a fixed end.
  • Liquid droplet ejection device 11
  • Liquid storage unit 12
  • Diaphragm 13
  • Piezoelectric element 14
  • Control unit 15 Fixed member

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

Le problème décrit par la présente invention est de fournir un dispositif d'éjection de gouttelettes qui puisse éjecter régulièrement des gouttelettes au moyen d'une configuration simple. La solution selon l'invention porte sur un dispositif d'éjection de gouttelettes 10 qui comprend : une unité de retenue de liquide 11 qui comporte un orifice 11e d'éjection de liquide ; une membrane 12 qui modifie le volume de l'unité de retenue de liquide 11 ; un élément piézoélectrique 13 qui applique une vibration de mise sous pression à la membrane 12 ; et une unité de commande 14 qui délivre un signal de tension de commande VR à l'élément piézoélectrique 13. Le signal de tension de commande VR comprend un signal d'éjection VP et un signal haute fréquence VQ qui a une amplitude plus faible que celle du signal d'éjection VP.
PCT/JP2018/005915 2017-03-24 2018-02-20 Dispositif d'éjection de gouttelettes Ceased WO2018173592A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020197025733A KR20190109537A (ko) 2017-03-24 2018-02-20 액적 토출 장치
JP2019507454A JPWO2018173592A1 (ja) 2017-03-24 2018-02-20 液滴吐出装置
CN201880015643.XA CN110382867A (zh) 2017-03-24 2018-02-20 液滴喷出装置

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Application Number Priority Date Filing Date Title
JP2017-059005 2017-03-24
JP2017059005 2017-03-24

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WO2018173592A1 true WO2018173592A1 (fr) 2018-09-27

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KR (1) KR20190109537A (fr)
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WO (1) WO2018173592A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019163706A1 (fr) * 2018-02-23 2019-08-29 日本電産株式会社 Dispositif d'application d'agent liquide
WO2019163705A1 (fr) * 2018-02-23 2019-08-29 日本電産株式会社 Dispositif d'application d'agent liquide

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Publication number Priority date Publication date Assignee Title
CN112676104A (zh) * 2020-12-06 2021-04-20 北京工业大学 一种基于压电泵驱动的点胶装置

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JP2002143746A (ja) * 2000-11-08 2002-05-21 Matsushita Electric Ind Co Ltd 流体供給装置及び流体供給方法
JP2009013861A (ja) * 2007-07-04 2009-01-22 Alps Electric Co Ltd ドライバ内蔵圧電ポンプ
JP2015212044A (ja) * 2014-05-02 2015-11-26 セイコーエプソン株式会社 液体吐出装置、液体吐出装置の制御方法およびｄａ変換器

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JP2000033694A (ja) * 1998-07-17 2000-02-02 Max Co Ltd インクジェットのヘッド機構
JP3590298B2 (ja) 1999-05-10 2004-11-17 武蔵エンジニアリング株式会社 高速にかつ精密に制御する液体の吐出方法および装置
JP2003103207A (ja) 2001-09-28 2003-04-08 Shibaura Mechatronics Corp 塗布装置及び塗布方法
JP2004148784A (ja) * 2002-11-01 2004-05-27 Seiko Epson Corp 液滴吐出装置及び方法
US7694855B2 (en) 2004-04-23 2010-04-13 Nordson Corporation Dispenser having a pivoting actuator assembly
JP4994126B2 (ja) 2006-07-28 2012-08-08 ノイベルク有限会社 圧電駆動装置および液体吐出装置

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Publication number Priority date Publication date Assignee Title
JP2002143746A (ja) * 2000-11-08 2002-05-21 Matsushita Electric Ind Co Ltd 流体供給装置及び流体供給方法
JP2009013861A (ja) * 2007-07-04 2009-01-22 Alps Electric Co Ltd ドライバ内蔵圧電ポンプ
JP2015212044A (ja) * 2014-05-02 2015-11-26 セイコーエプソン株式会社 液体吐出装置、液体吐出装置の制御方法およびｄａ変換器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019163706A1 (fr) * 2018-02-23 2019-08-29 日本電産株式会社 Dispositif d'application d'agent liquide
WO2019163705A1 (fr) * 2018-02-23 2019-08-29 日本電産株式会社 Dispositif d'application d'agent liquide

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Publication number Publication date
KR20190109537A (ko) 2019-09-25
JPWO2018173592A1 (ja) 2020-01-23
CN110382867A (zh) 2019-10-25

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