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WO2016068541A1 - Connecteur électrique comprenant une feuille d'isolation poreuse ayant un trou traversant, et son procédé de fabrication - Google Patents

Connecteur électrique comprenant une feuille d'isolation poreuse ayant un trou traversant, et son procédé de fabrication Download PDF

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Publication number
WO2016068541A1
WO2016068541A1 PCT/KR2015/011128 KR2015011128W WO2016068541A1 WO 2016068541 A1 WO2016068541 A1 WO 2016068541A1 KR 2015011128 W KR2015011128 W KR 2015011128W WO 2016068541 A1 WO2016068541 A1 WO 2016068541A1
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WO
WIPO (PCT)
Prior art keywords
sheet
conductive
support
elastic
under test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2015/011128
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English (en)
Korean (ko)
Inventor
정영배
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ISC Co Ltd
Original Assignee
ISC Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ISC Co Ltd filed Critical ISC Co Ltd
Publication of WO2016068541A1 publication Critical patent/WO2016068541A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Definitions

  • the present invention relates to an electrical connection device that can be used for inspection of an electrical element, and more particularly, to an electrical connection body for electrically connecting and connecting a device under test and an inspection device, and a manufacturing method thereof.
  • test socket for connecting a device under test and an inspection device is frequently used.
  • the test socket connects the connection terminal of the device under test and the pad of the test apparatus with each other so that an electric signal flows in both directions.
  • An elastic conductive sheet or a pogo pin may be used as a contact means used in the test socket, and an example of an electrical connector using the elastic conductive sheet is shown in FIG. 1.
  • the electrical connector 100 is mounted on the inspection apparatus 200, and is disposed below the support sheet 110 and the support sheet 110 on which the conductive pads 130 are formed. It is made of an elastic sheet 120, and is aligned and fixed to the inspection apparatus 200 by the frame 220 and the guide pin 230.
  • the elastic sheet 120 enables electrical flow in the thickness direction and electrical flow in the plane direction perpendicular to the thickness direction, and is elastically compressed so that the connection terminal 310 of the device under test 300 is elastically compressed. It is designed to absorb the impact force from the.
  • the elastic sheet 120 insulates and supports the conductive portion 121 disposed between the connection terminal 310 of the device under test 300 and the pad 210 of the inspection device 200, and the conductive portion 121. It consists of an insulating portion 122.
  • the insulating part 122 is made of an elastic material such as silicone rubber, and the conductive part 121 is made of a shape in which a plurality of conductive particles are contained in the elastic material.
  • the support sheet 110 is attached to the upper surface of the elastic sheet 120 to support the conductive pad 130.
  • the support sheet 110 is made of a material such as polyimide having insulation.
  • a porous insulating sheet 140 such as a mesh or a nonwoven fabric may be used.
  • the porous insulating sheet 140 is integrally coupled to the conductive pad 130 as shown in FIG. 2 or has a structure inserted into the elastic sheet 120 as shown in FIG. 3.
  • Patent Document 1 a mesh sheet having a porous mesh form and an electrode integrally connected to the mesh sheet are disclosed, and Korean Patent Registration No. 10-1204941 Patent Document 2 discloses a structure in which a conductive pad protrudes from an upper surface and a lower surface of a sheet member while filling a void in a porous insulating sheet and is integrally bonded to the sheet member.
  • the conventional test socket using the porous insulating sheet has advantages in durability and ease of manufacture, but there is little utility of the porous insulating sheet in order to have a fine pitch or high current characteristics.
  • the present invention is to improve the performance of the electrical connection for the test socket using the conventional porous insulating sheet described above, by using a porous insulating sheet having a through-hole, to improve the electrical characteristics and durability of the electrical connection, etc. For that purpose.
  • the manufacturing method of the electrical connection body which concerns on this invention for solving the said technical problem is a manufacturing method of the electrical connection body which electrically connects a device under test and an inspection apparatus,
  • the conductive particles may be made by curing the elastic material of the liquid disposed in a line.
  • the electrical connector according to the present invention for solving the above technical problem is an electrical connector for electrically connecting the device under test and the test device,
  • Another electrical connector according to the present invention for solving the above technical problem is an electrical connector for electrically connecting the device under test and the test device,
  • a first support sheet made of a porous insulating sheet having a plurality of through holes formed at respective positions corresponding to the connection terminals of the device under test;
  • a second support sheet made of a porous insulating sheet having a plurality of through holes formed at respective positions corresponding to the connection terminals of the device under test;
  • a conductive part formed as an elastic material on the lower side of the second supporting sheet and formed by agglomerating conductive particles in a position corresponding to the through hole, and an insulating part formed adjacent to the conductive part to insulate and support the conductive part.
  • a second elastic sheet; The second elastic sheet is attached and disposed on the first support sheet such that the through holes of the first support sheet and the through holes of the second support sheet are arranged in a line.
  • Another electrical connector according to the present invention for solving the above technical problem is an electrical connector for electrically connecting the device under test and the test device,
  • a first support sheet made of a porous insulating sheet having a plurality of through holes formed at respective positions corresponding to the connection terminals of the device under test;
  • a second support sheet made of a porous insulating sheet having a plurality of through holes formed at respective positions corresponding to the connection terminals of the device under test;
  • a third elastic sheet formed of an elastic material and including a conductive portion formed by agglomerating conductive particles in a position corresponding to the through hole, and an insulating portion formed adjacent to the conductive portion to insulate and support the conductive portion.
  • the second elastic sheet is attached and disposed on the first support sheet so that the through holes of the first support sheet, the through holes of the second support sheet, and the conductive parts of the third elastic sheet are arranged in a line.
  • the third elastic sheet is attached and disposed on the sheet.
  • the conductive portion of the second elastic sheet of the electrical connectors according to the present invention is formed at a higher density than the conductive portion of the first elastic sheet.
  • An electrical connector for a test socket and a method of manufacturing the same according to the present invention can expect the following effects.
  • the through hole serves to align the conductive particles and the conductive particles are agglomerated between the through holes to form a high density conductive pad. Therefore, the electrical connector can exhibit excellent characteristics of high current.
  • the support sheet by forming the support sheet with the porous insulating sheet, the bonding force between the sheet and the elastic material is strengthened, so that durability of the electrical connection body can be improved even when the gap between the connection terminals of the device under test is narrow.
  • the electrical connection body can exhibit excellent high current characteristics.
  • FIG. 1 is a cross-sectional view schematically showing a conventional electrical connection for a test socket.
  • FIG. 2 is a cross-sectional view showing an example of a conventional electrical connection for a test socket using a porous insulating sheet.
  • FIG 3 is a cross-sectional view showing another example of a conventional electrical connection for a test socket using a porous insulating sheet.
  • Figure 4 is a plan view showing a porous insulating sheet formed with a through hole according to an embodiment of the present invention.
  • 5 to 7 are cross-sectional views showing a process in which an electrical contact body is manufactured in a mold according to an embodiment of the present invention.
  • FIG. 8 is a cross-sectional view showing an electrical connection body according to an embodiment of the present invention.
  • FIG. 9 is a cross-sectional view showing an electrical connection body according to a modification of the present invention.
  • FIG. 10 is a cross-sectional view showing an electrical connection body according to another modification of the present invention.
  • 4 to 6 illustrate a method of manufacturing an electrical connector for a test socket according to an embodiment of the present invention.
  • the support sheet 410 is formed by forming a plurality of through holes 411 at positions corresponding to the connection terminals 310 of the device under test 300 in the porous insulating sheet.
  • the through hole 411 may be formed by laser or mechanical processing.
  • the porous insulating sheet is formed in the form of a porous mesh, and is preferably formed of an organic fiber or a porous silicon film while having insulation.
  • organic fibers include fluororesin fibers such as polytetrafluoroethylene resin, aramid fibers, and polyethylene fibers. , Polyarylate fibers, nylon fibers, polyester fibers and the like can be used.
  • the supporting sheet 410 is inserted into the mold 500 having an empty internal space.
  • Ferromagnetic layers 510 are formed at positions corresponding to the connection terminals 310 of the device under test 300, and the through holes 411 of the support sheet 410 are ferromagnetic layers. It is disposed at a position corresponding to 510.
  • the liquid elastic material 424 containing the conductive particles 423 in the mold 500 is filled.
  • the elastic material a heat resistant high molecular material having a crosslinked structure is preferable.
  • liquid silicone rubber, high hardness urethane resin, epoxy resin, acrylic resin and the like can be used.
  • a magnetic field is applied in the thickness direction of the mold 500 through the ferromagnetic layer 510 so that the conductive particles 423 are arranged in the thickness direction as shown in FIG. 7. That is, the conductive particles 423 are gathered to a position corresponding to the ferromagnetic layer 510 by the magnetic field and arranged in a line.
  • the through hole 411 of the support sheet 410 shown in FIG. 4 serves to align the conductive particles 423, so that the conductive particles 423 can be aggregated with high density between the through holes 411. Can be.
  • the liquid elastic material may be cured by heating or the like to manufacture an electrical connection including the support sheet 410 having the through hole 411 formed therein.
  • the electrical connector according to the embodiment of the present invention includes a support sheet 410 made of a porous insulating sheet having a through hole 411, and an elastic material disposed below the support sheet 410. It includes an elastic sheet 420 made of.
  • the through hole 411 of the support sheet 410 is formed at a position corresponding to the connection terminal 310 of the device under test 300.
  • the elastic sheet 420 is formed adjacent to the conductive portion 421 and the conductive portion 421 formed by agglomeration of conductive particles at a position corresponding to the through hole 411, and insulates the conductive portion 421. It consists of an insulating part 422 supporting.
  • the electrical connector 400 according to the present invention can maintain sufficient durability even when the conductive portions 421 are minute by using a porous insulating sheet, and conductive particles are agglomerated between the through holes 411 to achieve high density.
  • a conductive pad can be formed.
  • the content of the conductive particles between the conductive portion 421a of the first elastic sheet 420a and the conductive portion 421b of the second elastic sheet 420b may be different from each other. That is, by forming the conductive portion 421b of the second elastic sheet 420b to have a higher density than the conductive portion 421a of the first elastic sheet 420a, the conductivity is enhanced and the electrical connection force is increased.
  • the conductive part 421b of the () may be formed at a high density. That is, it can be formed at a high density by reducing the gap of the conductive portion 421b of the second elastic sheet 420b.
  • the elastic sheet 420c which does not include a support sheet made of a porous insulating sheet may be further formed on the two electrical connectors shown in FIG. 9. This is shown in FIG. 10.
  • the electrical connector shown in FIG. 10 includes conductive portions 421a, 421b, and 421c made up of three layers divided by porous insulating sheets 410a and 410b, and the conductive portion 421b is more than the conductive portions 421a and 421c. It is formed at a high density.
  • the electrical connector according to the present invention described above and a method of manufacturing the same may be most suitably applied to test sockets for inspection of semiconductor devices, etc., but are not limited to test sockets and require electrical connection between devices or devices. It can be applied to various technical fields.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

La présente invention concerne un connecteur électrique pour connecter électriquement un dispositif à tester à un dispositif de test, et son procédé de fabrication, le connecteur électrique améliorant des caractéristiques de courant élevé, la durabilité et analogue par le fait qu'il comprend : une feuille de support constituée d'une feuille d'isolation poreuse ayant une pluralité de trous traversants formés à chaque emplacement correspondant à des bornes de raccordement du dispositif à tester ; une feuille élastique formée d'un matériau élastique au niveau d'un côté inférieur de la feuille de support et comprenant une partie de conduction formée par condensation de particules conductrices au niveau des emplacements correspondant aux trous traversants, et une partie isolante formée de façon adjacente à la partie de conduction de manière à isoler et soutenir la partie de conduction.
PCT/KR2015/011128 2014-10-29 2015-10-21 Connecteur électrique comprenant une feuille d'isolation poreuse ayant un trou traversant, et son procédé de fabrication Ceased WO2016068541A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2014-0148158 2014-10-29
KR1020140148158A KR101606284B1 (ko) 2014-10-29 2014-10-29 관통 홀이 형성된 다공성 절연시트를 갖는 전기적 접속체 및 테스트 소켓

Publications (1)

Publication Number Publication Date
WO2016068541A1 true WO2016068541A1 (fr) 2016-05-06

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PCT/KR2015/011128 Ceased WO2016068541A1 (fr) 2014-10-29 2015-10-21 Connecteur électrique comprenant une feuille d'isolation poreuse ayant un trou traversant, et son procédé de fabrication

Country Status (3)

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KR (1) KR101606284B1 (fr)
TW (1) TWI595719B (fr)
WO (1) WO2016068541A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101739537B1 (ko) * 2016-05-11 2017-05-25 주식회사 아이에스시 검사용 소켓 및 도전성 입자
KR101739536B1 (ko) * 2016-05-11 2017-05-24 주식회사 아이에스시 검사용 소켓 및 도전성 입자
KR101970697B1 (ko) * 2017-03-31 2019-04-22 주식회사 이노글로벌 레이저 가공 기술이 적용된 탄소 섬유를 이용한 양방향 도전성 패턴 모듈 및 그 제조방법, 이를 이용한 양방향 도전성 소켓
KR101985445B1 (ko) * 2018-07-25 2019-06-04 주식회사 아이에스시 검사용 도전 시트
KR102139946B1 (ko) * 2019-01-23 2020-08-12 주식회사 이노글로벌 테스트 소켓 및 이의 제조방법
KR102139945B1 (ko) * 2019-01-23 2020-08-03 주식회사 이노글로벌 테스트 소켓 및 이의 제조방법
KR102175797B1 (ko) * 2019-03-25 2020-11-06 주식회사 아이에스시 검사용 소켓
KR102046283B1 (ko) * 2019-07-29 2019-11-18 주식회사 새한마이크로텍 이방 전도성 시트
KR102597496B1 (ko) * 2021-09-07 2023-11-02 주식회사 아이에스시 전기접속용 소켓
KR102868587B1 (ko) 2023-12-13 2025-10-02 주식회사 아이에스시 테스트 소켓

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10247536A (ja) * 1997-03-05 1998-09-14 Jsr Corp 異方導電性シートおよびその製造方法
JP2000243485A (ja) * 1999-02-17 2000-09-08 Jsr Corp 異方導電性シート
JP2003021648A (ja) * 2002-04-04 2003-01-24 Jsr Corp 異方導電性シートの製造方法
JP2008082983A (ja) * 2006-09-28 2008-04-10 Jsr Corp 異方導電性コネクターおよびこの異方導電性コネクターを用いた被検査体の検査方法
KR101266124B1 (ko) * 2012-04-03 2013-05-27 주식회사 아이에스시 고밀도 도전부를 가지는 테스트용 소켓 및 그 제조방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10247536A (ja) * 1997-03-05 1998-09-14 Jsr Corp 異方導電性シートおよびその製造方法
JP2000243485A (ja) * 1999-02-17 2000-09-08 Jsr Corp 異方導電性シート
JP2003021648A (ja) * 2002-04-04 2003-01-24 Jsr Corp 異方導電性シートの製造方法
JP2008082983A (ja) * 2006-09-28 2008-04-10 Jsr Corp 異方導電性コネクターおよびこの異方導電性コネクターを用いた被検査体の検査方法
KR101266124B1 (ko) * 2012-04-03 2013-05-27 주식회사 아이에스시 고밀도 도전부를 가지는 테스트용 소켓 및 그 제조방법

Also Published As

Publication number Publication date
TWI595719B (zh) 2017-08-11
TW201630284A (zh) 2016-08-16
KR101606284B1 (ko) 2016-03-25

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