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WO2009119983A3 - 중복 영상을 이용한 에프피디 기판 및 반도체 웨이퍼 검사시스템 - Google Patents

중복 영상을 이용한 에프피디 기판 및 반도체 웨이퍼 검사시스템 Download PDF

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Publication number
WO2009119983A3
WO2009119983A3 PCT/KR2009/001234 KR2009001234W WO2009119983A3 WO 2009119983 A3 WO2009119983 A3 WO 2009119983A3 KR 2009001234 W KR2009001234 W KR 2009001234W WO 2009119983 A3 WO2009119983 A3 WO 2009119983A3
Authority
WO
WIPO (PCT)
Prior art keywords
semiconductor wafer
inspection system
wafer inspection
fpd substrate
duplicate images
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2009/001234
Other languages
English (en)
French (fr)
Other versions
WO2009119983A2 (ko
Inventor
홍기현
나상찬
김태홍
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WISEPLANET CO Ltd
Original Assignee
WISEPLANET CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WISEPLANET CO Ltd filed Critical WISEPLANET CO Ltd
Priority to JP2011501713A priority Critical patent/JP2011515865A/ja
Priority to CN2009800000812A priority patent/CN101681862B/zh
Publication of WO2009119983A2 publication Critical patent/WO2009119983A2/ko
Publication of WO2009119983A3 publication Critical patent/WO2009119983A3/ko
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection

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  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

본 발명은 중복 영상을 이용한 에프피디 기판 및 반도체 웨이퍼 검사시스템에 관한 것으로서, 더욱 상세하게는 평판 디스플레이 패널에 묻혀있는 파티클 혹은 표면에 존재하는 파티클 및 돌출된 파티클의 존재 유무를 한 번의 스캔으로 두 개 또는 그 이상의 이미지를 중복하여 획득함으로써, 한 번의 검사만으로 대부분의 결함 및 이물을 종류별로 검출할 수 있는 중복 영상을 이용한 에프피디 기판 및 반도체 웨이퍼 검사시스템에 관한 것이다.
PCT/KR2009/001234 2008-03-28 2009-03-12 중복 영상을 이용한 에프피디 기판 및 반도체 웨이퍼 검사시스템 Ceased WO2009119983A2 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011501713A JP2011515865A (ja) 2008-03-28 2009-03-12 重複映像を用いたｆｐｄ基板及び半導体ウエハ検査システム
CN2009800000812A CN101681862B (zh) 2008-03-28 2009-03-12 利用重复图像的fpd基板及半导体晶片检查系统

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2008-0029120 2008-03-28
KR1020080029120A KR100863341B1 (ko) 2008-03-28 2008-03-28 중복 영상을 이용한 에프피디 기판 및 반도체 웨이퍼검사시스템

Publications (2)

Publication Number Publication Date
WO2009119983A2 WO2009119983A2 (ko) 2009-10-01
WO2009119983A3 true WO2009119983A3 (ko) 2009-11-26

Family

ID=40153333

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/001234 Ceased WO2009119983A2 (ko) 2008-03-28 2009-03-12 중복 영상을 이용한 에프피디 기판 및 반도체 웨이퍼 검사시스템

Country Status (4)

Country Link
JP (1) JP2011515865A (ko)
KR (1) KR100863341B1 (ko)
CN (1) CN101681862B (ko)
WO (1) WO2009119983A2 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6465722B2 (ja) * 2015-04-06 2019-02-06 株式会社ディスコ 加工装置
KR101972517B1 (ko) * 2017-09-05 2019-05-02 주식회사 에이치비테크놀러지 검사대상체 표면 검사를 위한 듀얼 라인 광학 검사 시스템
JP7102271B2 (ja) * 2018-07-17 2022-07-19 ファスフォードテクノロジ株式会社 半導体製造装置および半導体装置の製造方法
CN111142315A (zh) * 2020-02-25 2020-05-12 北京工业大学 近地激光照明装置
CN113013048A (zh) * 2021-02-24 2021-06-22 上海华力集成电路制造有限公司 晶圆缺陷检测方法
KR102539964B1 (ko) 2021-04-30 2023-06-05 주식회사 바이텍시스템 정전척 및 이를 이용한 기판 검사장치
KR20230104390A (ko) 2021-12-30 2023-07-10 삼성디스플레이 주식회사 기판 검사 장치 및 기판 검사 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990039130A (ko) * 1997-11-10 1999-06-05 윤종용 납땜 검사 장치 및 이에 적합한 검사 방법
KR20000016969A (ko) * 1998-08-27 2000-03-25 윤종용 기판납땜검사용조명및광학장치
KR20020015627A (ko) * 2000-08-22 2002-02-28 요네다 겐지 표면검사용 조명장치 및 표면검사장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4190636B2 (ja) * 1998-11-24 2008-12-03 日本エレクトロセンサリデバイス株式会社 表面検査装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990039130A (ko) * 1997-11-10 1999-06-05 윤종용 납땜 검사 장치 및 이에 적합한 검사 방법
KR20000016969A (ko) * 1998-08-27 2000-03-25 윤종용 기판납땜검사용조명및광학장치
KR20020015627A (ko) * 2000-08-22 2002-02-28 요네다 겐지 표면검사용 조명장치 및 표면검사장치

Also Published As

Publication number Publication date
CN101681862B (zh) 2011-08-31
CN101681862A (zh) 2010-03-24
KR100863341B1 (ko) 2008-10-15
JP2011515865A (ja) 2011-05-19
WO2009119983A2 (ko) 2009-10-01

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