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WO2012033301A3 - 웨이퍼 검사장치 및 이를 구비한 웨이퍼 검사 시스템 - Google Patents

웨이퍼 검사장치 및 이를 구비한 웨이퍼 검사 시스템 Download PDF

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Publication number
WO2012033301A3
WO2012033301A3 PCT/KR2011/006455 KR2011006455W WO2012033301A3 WO 2012033301 A3 WO2012033301 A3 WO 2012033301A3 KR 2011006455 W KR2011006455 W KR 2011006455W WO 2012033301 A3 WO2012033301 A3 WO 2012033301A3
Authority
WO
WIPO (PCT)
Prior art keywords
wafer inspection
same
wafer
inspection device
inspection system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2011/006455
Other languages
English (en)
French (fr)
Other versions
WO2012033301A4 (ko
WO2012033301A2 (ko
Inventor
유정수
이상태
서정석
최성곤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hanmi Semiconductor Co Ltd
Spo Inc
Original Assignee
Hanmi Semiconductor Co Ltd
Spo Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hanmi Semiconductor Co Ltd, Spo Inc filed Critical Hanmi Semiconductor Co Ltd
Publication of WO2012033301A2 publication Critical patent/WO2012033301A2/ko
Publication of WO2012033301A3 publication Critical patent/WO2012033301A3/ko
Publication of WO2012033301A4 publication Critical patent/WO2012033301A4/ko
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G01N21/9503—Wafer edge inspection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

본 발명은 웨이퍼의 테두리 영역에 크랙, 칩핑 등의 결함의 유무와 웨이퍼의 연마 상태를 검사하기 위한 웨이퍼 검사장치에 관한 것이다.
PCT/KR2011/006455 2010-09-09 2011-08-31 웨이퍼 검사장치 및 이를 구비한 웨이퍼 검사 시스템 Ceased WO2012033301A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0088462 2010-09-09
KR1020100088462A KR101228459B1 (ko) 2010-09-09 2010-09-09 웨이퍼 검사장치 및 이를 구비한 웨이퍼 검사 시스템

Publications (3)

Publication Number Publication Date
WO2012033301A2 WO2012033301A2 (ko) 2012-03-15
WO2012033301A3 true WO2012033301A3 (ko) 2012-05-31
WO2012033301A4 WO2012033301A4 (ko) 2012-07-26

Family

ID=45811044

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/006455 Ceased WO2012033301A2 (ko) 2010-09-09 2011-08-31 웨이퍼 검사장치 및 이를 구비한 웨이퍼 검사 시스템

Country Status (2)

Country Link
KR (1) KR101228459B1 (ko)
WO (1) WO2012033301A2 (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6150392B2 (ja) * 2013-09-13 2017-06-21 コマツＮｔｃ株式会社 ウエハ側面検査装置
KR20190134275A (ko) 2018-05-25 2019-12-04 주식회사 넥서스원 웨이퍼의 에지 영역 검사 시스템 및 검사 방법
WO2020174990A1 (ja) * 2019-02-28 2020-09-03 吉野石膏株式会社 板状体の検査装置
KR102136084B1 (ko) 2020-06-16 2020-08-13 주식회사 넥서스원 웨이퍼의 에지 영역 검사 시스템
IL278191A (en) * 2020-10-20 2022-05-01 Metzerplas Coop Agricultural Organization Ltd System and method for detecting and removing defective drippers
CN114199885A (zh) * 2021-12-09 2022-03-18 合肥御微半导体技术有限公司 一种晶圆检测装置及其方法
CN115980090B (zh) * 2023-01-17 2024-04-30 南京光智元科技有限公司 芯片及其测试方法
JP2024158608A (ja) * 2023-04-28 2024-11-08 株式会社Ｓｃｒｅｅｎホールディングス 撮像装置、基板観察装置、基板処理装置および撮像方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200188365Y1 (ko) * 2000-02-03 2000-07-15 주식회사셀라이트 웨이퍼 테두리 결함 검사장치
KR20040077287A (ko) * 2003-02-28 2004-09-04 삼성전자주식회사 웨이퍼의 에지 노광 영역 검사 방법 및 장치
KR20070064376A (ko) * 2004-11-30 2007-06-20 시바우라 메카트로닉스 가부시키가이샤 표면 검사 장치 및 표면 검사 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007240519A (ja) 2006-02-08 2007-09-20 Tokyo Electron Ltd 欠陥検査方法、欠陥検査装置及びコンピュータプログラム

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200188365Y1 (ko) * 2000-02-03 2000-07-15 주식회사셀라이트 웨이퍼 테두리 결함 검사장치
KR20040077287A (ko) * 2003-02-28 2004-09-04 삼성전자주식회사 웨이퍼의 에지 노광 영역 검사 방법 및 장치
KR20070064376A (ko) * 2004-11-30 2007-06-20 시바우라 메카트로닉스 가부시키가이샤 표면 검사 장치 및 표면 검사 방법

Also Published As

Publication number Publication date
KR101228459B1 (ko) 2013-01-31
WO2012033301A4 (ko) 2012-07-26
WO2012033301A2 (ko) 2012-03-15
KR20120026311A (ko) 2012-03-19

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