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WO2009054064A1 - 基板ロード装置 - Google Patents

基板ロード装置 Download PDF

Info

Publication number
WO2009054064A1
WO2009054064A1 PCT/JP2007/070898 JP2007070898W WO2009054064A1 WO 2009054064 A1 WO2009054064 A1 WO 2009054064A1 JP 2007070898 W JP2007070898 W JP 2007070898W WO 2009054064 A1 WO2009054064 A1 WO 2009054064A1
Authority
WO
WIPO (PCT)
Prior art keywords
container
state
substrates
chamber
separated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/070898
Other languages
English (en)
French (fr)
Inventor
Masayasu Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to PCT/JP2007/070898 priority Critical patent/WO2009054064A1/ja
Publication of WO2009054064A1 publication Critical patent/WO2009054064A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

基板ロード装置は、大気側と真空雰囲気との間で基板を移動させる装置であり、基板の搬出入を行う密閉自在の容器は、容器内部にスラスト移動を自在とする基板ホルダーを有し、容器上部に開閉を自在とする蓋部を有する。基板ホルダーは、容器内においてスラスト移動することによって、容器内を上下の二室に分ける分離状態と一室とする連通状態との状態切り替えを自在とする。分離状態とすることによって、一方の室を真空状態に保持したままで他方の室を大気側に開放させることができ、この大気側に開放した室によって容器内外に対して基板を搬出入する。一方、蓋部を閉じて容器を密閉状態とした状態で、容器内を連通状態とすることによって、容器内において二室間で基板を移動させる。これによって、ゲートバルブを要することなく基板の搬出入を行う。
PCT/JP2007/070898 2007-10-26 2007-10-26 基板ロード装置 Ceased WO2009054064A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/070898 WO2009054064A1 (ja) 2007-10-26 2007-10-26 基板ロード装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/070898 WO2009054064A1 (ja) 2007-10-26 2007-10-26 基板ロード装置

Publications (1)

Publication Number Publication Date
WO2009054064A1 true WO2009054064A1 (ja) 2009-04-30

Family

ID=40579174

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/070898 Ceased WO2009054064A1 (ja) 2007-10-26 2007-10-26 基板ロード装置

Country Status (1)

Country Link
WO (1) WO2009054064A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011035103A (ja) * 2009-07-31 2011-02-17 Tokyo Electron Ltd 搬送装置及び処理システム
JP2012138551A (ja) * 2010-12-28 2012-07-19 Shibaura Mechatronics Corp ロードロック装置および真空処理装置
JP2013524445A (ja) * 2010-04-01 2013-06-17 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド レーザアブレーション誘導結合プラズマ質量分析のための改良された試料チャンバ
JP2013197312A (ja) * 2012-03-19 2013-09-30 Shibaura Mechatronics Corp 減圧装置および減圧方法
JP2015173282A (ja) * 2015-05-12 2015-10-01 芝浦メカトロニクス株式会社 ロードロック装置および真空処理装置
JP2019153695A (ja) * 2018-03-02 2019-09-12 株式会社アルバック 真空処理装置、搬出入室

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10242234A (ja) * 1997-02-26 1998-09-11 Fujitsu Ltd 製造装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10242234A (ja) * 1997-02-26 1998-09-11 Fujitsu Ltd 製造装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011035103A (ja) * 2009-07-31 2011-02-17 Tokyo Electron Ltd 搬送装置及び処理システム
JP2013524445A (ja) * 2010-04-01 2013-06-17 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド レーザアブレーション誘導結合プラズマ質量分析のための改良された試料チャンバ
JP2012138551A (ja) * 2010-12-28 2012-07-19 Shibaura Mechatronics Corp ロードロック装置および真空処理装置
JP2013197312A (ja) * 2012-03-19 2013-09-30 Shibaura Mechatronics Corp 減圧装置および減圧方法
JP2015173282A (ja) * 2015-05-12 2015-10-01 芝浦メカトロニクス株式会社 ロードロック装置および真空処理装置
JP2019153695A (ja) * 2018-03-02 2019-09-12 株式会社アルバック 真空処理装置、搬出入室

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