[go: up one dir, main page]

WO2008111325A1 - 弾性表面波装置 - Google Patents

弾性表面波装置 Download PDF

Info

Publication number
WO2008111325A1
WO2008111325A1 PCT/JP2008/050696 JP2008050696W WO2008111325A1 WO 2008111325 A1 WO2008111325 A1 WO 2008111325A1 JP 2008050696 W JP2008050696 W JP 2008050696W WO 2008111325 A1 WO2008111325 A1 WO 2008111325A1
Authority
WO
WIPO (PCT)
Prior art keywords
acoustic wave
surface acoustic
idt electrode
wavelength
wave device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/050696
Other languages
English (en)
French (fr)
Inventor
Michio Kadota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2009503917A priority Critical patent/JP4992968B2/ja
Publication of WO2008111325A1 publication Critical patent/WO2008111325A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02551—Characteristics of substrate, e.g. cutting angles of quartz substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

　温度変化による特性の変動が生じ難く、ＩＤＴの電極指１本当たりの反射係数が高く、狭帯域化が容易な弾性表面波装置を得る。 　オイラー角（０°±５°，０°～１４０°，０°±４０°）である水晶からなる圧電基板２上に、ＩＤＴ電極３が形成されており、ＩＤＴ電極３を覆うようにｃ軸配向のＺｎＯからなる圧電膜４が形成されており、圧電膜４の表面が略平坦化されており、弾性表面波としてレイリー波が利用されており、前記ＩＤＴ電極が、Ａｌ、Ａｕ、Ｔａ、Ｗ、Ｐｔ、Ｃｕ、ＮｉまたはＭｏを主体とする金属材料からなり、弾性表面波の波長λとした場合、ＩＤＴ電極において主体となる金属と、ＩＤＴ電極の弾性表面波の波長で規格化した規格化膜厚と、圧電膜の弾性表面波の波長で規格化した規格化膜厚とは、下記の表１で示す各組み合わせの範囲内とされている弾性表面波装置１。
PCT/JP2008/050696 2007-03-12 2008-01-21 弾性表面波装置 Ceased WO2008111325A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009503917A JP4992968B2 (ja) 2007-03-12 2008-01-21 弾性表面波装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-062268 2007-03-12
JP2007062268 2007-03-12

Publications (1)

Publication Number Publication Date
WO2008111325A1 true WO2008111325A1 (ja) 2008-09-18

Family

ID=39759268

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050696 Ceased WO2008111325A1 (ja) 2007-03-12 2008-01-21 弾性表面波装置

Country Status (2)

Country Link
JP (1) JP4992968B2 (ja)
WO (1) WO2008111325A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010283807A (ja) * 2009-05-08 2010-12-16 Murata Mfg Co Ltd 弾性表面波装置
CN102668375A (zh) * 2009-10-19 2012-09-12 株式会社村田制作所 弹性表面波装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999005788A1 (en) * 1997-07-28 1999-02-04 Kabushiki Kaisha Toshiba Surface acoustic wave device and method of producing the same
JP2002280856A (ja) * 2001-03-21 2002-09-27 Seiko Epson Corp 弾性表面波素子の製造方法
JP2003037467A (ja) * 2001-07-24 2003-02-07 Murata Mfg Co Ltd 弾性表面波装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0818388A (ja) * 1993-09-16 1996-01-19 Matsushita Electric Ind Co Ltd 表面波フィルタ素子とその製造方法
JP3205978B2 (ja) * 1995-08-08 2001-09-04 住友電気工業株式会社 表面弾性波素子
JP3196678B2 (ja) * 1997-02-07 2001-08-06 株式会社村田製作所 表面波装置
JP3341759B2 (ja) * 1999-10-15 2002-11-05 住友電気工業株式会社 表面弾性波素子
JP4244656B2 (ja) * 2003-02-26 2009-03-25 株式会社村田製作所 弾性表面波装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999005788A1 (en) * 1997-07-28 1999-02-04 Kabushiki Kaisha Toshiba Surface acoustic wave device and method of producing the same
JP2002280856A (ja) * 2001-03-21 2002-09-27 Seiko Epson Corp 弾性表面波素子の製造方法
JP2003037467A (ja) * 2001-07-24 2003-02-07 Murata Mfg Co Ltd 弾性表面波装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KADOTA M., KONDO C., CHUBACHI N.: "ZnO Maku Hyomen Kenma ni yoru SAW Filter no Shuhasu Tokusei Baratsuki no Teigen", THE TRANSACTIONS OF THE INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS, vol. J76-A, no. 10, 25 October 1993 (1993-10-25), pages 1399 - 1406 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010283807A (ja) * 2009-05-08 2010-12-16 Murata Mfg Co Ltd 弾性表面波装置
CN102668375A (zh) * 2009-10-19 2012-09-12 株式会社村田制作所 弹性表面波装置

Also Published As

Publication number Publication date
JP4992968B2 (ja) 2012-08-08
JPWO2008111325A1 (ja) 2010-06-24

Similar Documents

Publication Publication Date Title
JP4992911B2 (ja) 弾性表面波装置
US20090009028A1 (en) Surface acoustic wave device
WO2008146449A1 (ja) 弾性波素子
CN108028637A (zh) 弹性波装置
JP2020156003A (ja) 弾性波装置
US7705515B2 (en) Surface acoustic wave device
JPWO2009139108A1 (ja) 弾性境界波装置
US11863155B2 (en) Surface acoustic wave element
WO2007072479A3 (en) Piezoelectric composite material
CN108141198B (zh) 弹性波装置
JPWO2010070816A1 (ja) 弾性表面波装置
JPWO2021060150A5 (ja)
US10658564B2 (en) Surface acoustic wave device
WO2002007311A3 (en) Integrated tunable surface acoustic wave technology and systems provided thereby
WO2007141049A3 (de) Oszillatorkreis mit akustischen eintor-oberflächenwellenresonatoren
WO2008111325A1 (ja) 弾性表面波装置
JP2004507960A5 (ja)
JP4466655B2 (ja) 弾性境界波装置
WO2008123131A1 (ja) 弾性表面波装置
WO2008123132A1 (ja) 弾性表面波装置
JP2012227626A (ja) 弾性表面波素子
JP2002141768A5 (ja)
JP2006121259A5 (ja)
JPWO2011074464A1 (ja) 弾性境界波装置
CN101911482B (zh) 弹性表面波装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08703546

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2009503917

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08703546

Country of ref document: EP

Kind code of ref document: A1