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WO2008111325A1 - Dispositif à onde acoustique de surface - Google Patents

Dispositif à onde acoustique de surface Download PDF

Info

Publication number
WO2008111325A1
WO2008111325A1 PCT/JP2008/050696 JP2008050696W WO2008111325A1 WO 2008111325 A1 WO2008111325 A1 WO 2008111325A1 JP 2008050696 W JP2008050696 W JP 2008050696W WO 2008111325 A1 WO2008111325 A1 WO 2008111325A1
Authority
WO
WIPO (PCT)
Prior art keywords
acoustic wave
surface acoustic
idt electrode
wavelength
wave device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/050696
Other languages
English (en)
Japanese (ja)
Inventor
Michio Kadota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2009503917A priority Critical patent/JP4992968B2/ja
Publication of WO2008111325A1 publication Critical patent/WO2008111325A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02551—Characteristics of substrate, e.g. cutting angles of quartz substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

L'invention concerne un dispositif à onde acoustique de surface dans lequel une variation de caractéristique due à une variation de température ne se produit pas aisément, un coefficient de réflexion par doigt d'électrode de IDT est élevé, et un fonctionnement en bande étroite est facilité. Sur un substrat piézo-électrique (2) de quartz ayant un angle d'Euler (0°±5°, 0°-140°, 0°±40°), une électrode IDT (3) est formée, un film piézo-électrique (4) de ZnO ayant une orientation d'axe c est formé pour couvrir l'électrode IDT (3), une surface du film piézo-électrique (4) est sensiblement rendue plane, une onde de Rayleigh est utilisée en tant qu'onde acoustique de surface et l'électrode IDT est faite d'un matériau métallique comprenant principalement Al, Au, Ta, W, Pt, Cu, Ni ou Mo. En supposant que la longueur d'onde d'une onde acoustique de surface soit λ, le métal principal de l'électrode IDT, l'épaisseur de film de l'électrode IDT rendue standard par la longueur d'onde d'une onde acoustique de surface, et l'épaisseur de film du film piézo-électrique rendu standard par la longueur d'onde d'une onde acoustique de surface dans le dispositif acoustique d'onde de surface (1) tombe dans la plage de chaque combinaison, comme représenté sur le Tableau 1.
PCT/JP2008/050696 2007-03-12 2008-01-21 Dispositif à onde acoustique de surface Ceased WO2008111325A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009503917A JP4992968B2 (ja) 2007-03-12 2008-01-21 弾性表面波装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007062268 2007-03-12
JP2007-062268 2007-03-12

Publications (1)

Publication Number Publication Date
WO2008111325A1 true WO2008111325A1 (fr) 2008-09-18

Family

ID=39759268

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050696 Ceased WO2008111325A1 (fr) 2007-03-12 2008-01-21 Dispositif à onde acoustique de surface

Country Status (2)

Country Link
JP (1) JP4992968B2 (fr)
WO (1) WO2008111325A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010283807A (ja) * 2009-05-08 2010-12-16 Murata Mfg Co Ltd 弾性表面波装置
CN102668375A (zh) * 2009-10-19 2012-09-12 株式会社村田制作所 弹性表面波装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999005788A1 (fr) * 1997-07-28 1999-02-04 Kabushiki Kaisha Toshiba Dispositif de traitement d'ondes acoustiques de surface et son procede de fabrication
JP2002280856A (ja) * 2001-03-21 2002-09-27 Seiko Epson Corp 弾性表面波素子の製造方法
JP2003037467A (ja) * 2001-07-24 2003-02-07 Murata Mfg Co Ltd 弾性表面波装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0818388A (ja) * 1993-09-16 1996-01-19 Matsushita Electric Ind Co Ltd 表面波フィルタ素子とその製造方法
JP3205978B2 (ja) * 1995-08-08 2001-09-04 住友電気工業株式会社 表面弾性波素子
JP3196678B2 (ja) * 1997-02-07 2001-08-06 株式会社村田製作所 表面波装置
JP3341759B2 (ja) * 1999-10-15 2002-11-05 住友電気工業株式会社 表面弾性波素子
JP4244656B2 (ja) * 2003-02-26 2009-03-25 株式会社村田製作所 弾性表面波装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999005788A1 (fr) * 1997-07-28 1999-02-04 Kabushiki Kaisha Toshiba Dispositif de traitement d'ondes acoustiques de surface et son procede de fabrication
JP2002280856A (ja) * 2001-03-21 2002-09-27 Seiko Epson Corp 弾性表面波素子の製造方法
JP2003037467A (ja) * 2001-07-24 2003-02-07 Murata Mfg Co Ltd 弾性表面波装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KADOTA M., KONDO C., CHUBACHI N.: "ZnO Maku Hyomen Kenma ni yoru SAW Filter no Shuhasu Tokusei Baratsuki no Teigen", THE TRANSACTIONS OF THE INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS, vol. J76-A, no. 10, 25 October 1993 (1993-10-25), pages 1399 - 1406 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010283807A (ja) * 2009-05-08 2010-12-16 Murata Mfg Co Ltd 弾性表面波装置
CN102668375A (zh) * 2009-10-19 2012-09-12 株式会社村田制作所 弹性表面波装置

Also Published As

Publication number Publication date
JP4992968B2 (ja) 2012-08-08
JPWO2008111325A1 (ja) 2010-06-24

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