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WO2008146725A1 - シリコン単結晶の製造方法及びｎ型高ドープ半導体基板 - Google Patents

シリコン単結晶の製造方法及びｎ型高ドープ半導体基板 Download PDF

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Publication number
WO2008146725A1
WO2008146725A1 PCT/JP2008/059512 JP2008059512W WO2008146725A1 WO 2008146725 A1 WO2008146725 A1 WO 2008146725A1 JP 2008059512 W JP2008059512 W JP 2008059512W WO 2008146725 A1 WO2008146725 A1 WO 2008146725A1
Authority
WO
WIPO (PCT)
Prior art keywords
single crystal
silicon single
production
semiconductor substrate
type semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/059512
Other languages
English (en)
French (fr)
Inventor
Shinichi Kawazoe
Yasuhito Narushima
Toshimichi Kubota
Fukuo Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumco Techxiv Corp
Original Assignee
Sumco Techxiv Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumco Techxiv Corp filed Critical Sumco Techxiv Corp
Priority to US12/602,479 priority Critical patent/US8574363B2/en
Priority to DE112008001470.1T priority patent/DE112008001470B4/de
Publication of WO2008146725A1 publication Critical patent/WO2008146725A1/ja
Anticipated expiration legal-status Critical
Priority to US14/038,136 priority patent/US8747551B2/en
Ceased legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
    • C30B15/04—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt adding doping materials, e.g. for n-p-junction
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/203—Controlling or regulating the relationship of pull rate (v) to axial thermal gradient (G)
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

　シリコン融液にリン（Ｐ）及びゲルマニウム（Ｇｅ）、又はシリコン－ゲルマニウム融液にリンを添加した後、得られたシリコン融液からチョクラルスキー法によりシリコン単結晶を育成する際に、リン濃度［Ｐ］（atoms／cm３）が、４．８４×１０１９atoms／cm３以上、８．４９×１０１９atoms／cm３以下、リン濃度［Ｐ］（atoms／cm）３）及びＧｅ濃度［Ｇｅ］（atoms／cm３）が、下記式（１）の関係を満たすように結晶を育成することを特徴とする。
PCT/JP2008/059512 2007-05-31 2008-05-23 シリコン単結晶の製造方法及びｎ型高ドープ半導体基板 Ceased WO2008146725A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/602,479 US8574363B2 (en) 2007-05-31 2008-05-23 Process for production of silicon single crystal, and highly doped N-type semiconductor substrate
DE112008001470.1T DE112008001470B4 (de) 2007-05-31 2008-05-23 Prozess zum Herstellen eines Silizium-Einkristalls und hochdotiertes n-leitendes Halbleitersubstrat
US14/038,136 US8747551B2 (en) 2007-05-31 2013-09-26 Process for production of silicon single crystal, and highly doped N-type semiconductor substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007146082A JP4516096B2 (ja) 2007-05-31 2007-05-31 シリコン単結晶の製造方法
JP2007-146082 2007-05-31

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/602,479 A-371-Of-International US8574363B2 (en) 2007-05-31 2008-05-23 Process for production of silicon single crystal, and highly doped N-type semiconductor substrate
US14/038,136 Division US8747551B2 (en) 2007-05-31 2013-09-26 Process for production of silicon single crystal, and highly doped N-type semiconductor substrate

Publications (1)

Publication Number Publication Date
WO2008146725A1 true WO2008146725A1 (ja) 2008-12-04

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059512 Ceased WO2008146725A1 (ja) 2007-05-31 2008-05-23 シリコン単結晶の製造方法及びｎ型高ドープ半導体基板

Country Status (4)

Country Link
US (2) US8574363B2 (ja)
JP (1) JP4516096B2 (ja)
DE (1) DE112008001470B4 (ja)
WO (1) WO2008146725A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011001770A1 (ja) * 2009-06-29 2011-01-06 株式会社Sumco エピタキシャルシリコンウェーハとその製造方法
EP2292813A1 (en) * 2009-09-07 2011-03-09 SUMCO Corporation Method of producing single crystal silicon

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4359320B2 (ja) * 2007-05-31 2009-11-04 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 ドーピング装置、及びシリコン単結晶の製造方法
JP2010153631A (ja) * 2008-12-25 2010-07-08 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 エピタキシャルシリコンウェーハとその製造方法
JP2010199356A (ja) * 2009-02-26 2010-09-09 Shin Etsu Handotai Co Ltd シリコンエピタキシャルウェーハおよびシリコンエピタキシャルウェーハの製造方法
JP5246065B2 (ja) * 2009-06-29 2013-07-24 株式会社Ｓｕｍｃｏ エピタキシャルシリコンウェーハとその製造方法
WO2011007678A1 (ja) * 2009-07-16 2011-01-20 株式会社Sumco エピタキシャルシリコンウェーハとその製造方法
US11078595B2 (en) * 2017-02-28 2021-08-03 Sumco Corporation Method of producing silicon single crystal ingot and silicon single crystal ingot
CA3175051A1 (en) 2020-03-12 2021-09-16 Umicore Heavily doped n-type germanium
EP3770306A1 (en) 2020-03-12 2021-01-27 Umicore Heavily doped n-type germanium
CN116670338A (zh) * 2020-12-04 2023-08-29 胜高股份有限公司 单晶硅的培育方法
TW202523921A (zh) 2023-12-01 2025-06-16 比利時商烏明克公司 超高摻雜之ｎ型鍺單晶及由其衍生的晶圓

Citations (4)

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JPH097961A (ja) * 1995-06-22 1997-01-10 Motorola Inc 高ドープｎ＋基板およびその製造方法
JP2002145694A (ja) * 2000-11-07 2002-05-22 Univ Shinshu 無転位シリコン単結晶成長に用いる種子結晶および無転位シリコン単結晶の製造方法
JP2004307305A (ja) * 2003-04-10 2004-11-04 Sumitomo Mitsubishi Silicon Corp シリコン単結晶及び単結晶育成方法
JP2006052133A (ja) * 2004-08-12 2006-02-23 Siltronic Ag シリコンからなるドーピングされた半導体ウェーハを製造する方法およびこの種の半導体ウェーハ

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DE3232259A1 (de) 1982-08-30 1984-03-01 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von halbleitermaterial hoher dotierung
JPS59156993A (ja) 1983-02-23 1984-09-06 Komatsu Denshi Kinzoku Kk Ｃｚ単結晶のド−プ方法およびその装置
JP2682600B2 (ja) * 1988-03-25 1997-11-26 住友電気工業株式会社 ▲ｉｉｉ▼−ｖ族化合物半導体単結晶の製造方法
JP3670513B2 (ja) 1999-04-28 2005-07-13 東芝セラミックス株式会社 シリコン単結晶の製造方法
DE10007179B4 (de) * 2000-02-17 2004-08-19 Siltronic Ag Verfahren und Vorrichtung zum Dotieren einer Schmelze mit einem Dotierstoff
JP2003002785A (ja) * 2001-06-15 2003-01-08 Shin Etsu Handotai Co Ltd 表層部にボイド無欠陥層を有する直径３００ｍｍ以上のシリコン単結晶ウエーハおよびその製造方法
WO2003027362A1 (en) * 2001-09-28 2003-04-03 Memc Electronic Materials, Inc. Process for preparing an arsenic-doped single crystal silicon using a submersed dopant feeder
KR100486877B1 (ko) 2002-10-15 2005-05-03 주식회사 실트론 저융점 도판트 주입관이 설치된 실리콘 단결정 성장 장치및 저융점 도판트 주입 방법
JP4708697B2 (ja) 2002-11-11 2011-06-22 株式会社Ｓｕｍｃｏ エピタキシャルシリコンウェーハ
JP4590876B2 (ja) 2004-02-04 2010-12-01 株式会社Sumco エピタキシャルシリコンウェーハの製造方法及びその方法で製造されたシリコンウェーハ
JP4359320B2 (ja) * 2007-05-31 2009-11-04 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 ドーピング装置、及びシリコン単結晶の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH097961A (ja) * 1995-06-22 1997-01-10 Motorola Inc 高ドープｎ＋基板およびその製造方法
JP2002145694A (ja) * 2000-11-07 2002-05-22 Univ Shinshu 無転位シリコン単結晶成長に用いる種子結晶および無転位シリコン単結晶の製造方法
JP2004307305A (ja) * 2003-04-10 2004-11-04 Sumitomo Mitsubishi Silicon Corp シリコン単結晶及び単結晶育成方法
JP2006052133A (ja) * 2004-08-12 2006-02-23 Siltronic Ag シリコンからなるドーピングされた半導体ウェーハを製造する方法およびこの種の半導体ウェーハ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011001770A1 (ja) * 2009-06-29 2011-01-06 株式会社Sumco エピタキシャルシリコンウェーハとその製造方法
JP2011009614A (ja) * 2009-06-29 2011-01-13 Sumco Corp エピタキシャルシリコンウェーハとその製造方法
US8659020B2 (en) 2009-06-29 2014-02-25 Sumco Corporation Epitaxial silicon wafer and method for manufacturing same
EP2292813A1 (en) * 2009-09-07 2011-03-09 SUMCO Corporation Method of producing single crystal silicon
US8888911B2 (en) 2009-09-07 2014-11-18 Sumco Techxiv Corporation Method of producing single crystal silicon

Also Published As

Publication number Publication date
US20140020617A1 (en) 2014-01-23
DE112008001470T5 (de) 2010-05-06
DE112008001470B4 (de) 2018-05-03
US8574363B2 (en) 2013-11-05
US20110049438A1 (en) 2011-03-03
JP2008297166A (ja) 2008-12-11
JP4516096B2 (ja) 2010-08-04
US8747551B2 (en) 2014-06-10

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