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WO2008140024A4 - ガスセンサー、これを用いた気体計測システム、およびそのための気体検知モジュール - Google Patents

ガスセンサー、これを用いた気体計測システム、およびそのための気体検知モジュール Download PDF

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Publication number
WO2008140024A4
WO2008140024A4 PCT/JP2008/058571 JP2008058571W WO2008140024A4 WO 2008140024 A4 WO2008140024 A4 WO 2008140024A4 JP 2008058571 W JP2008058571 W JP 2008058571W WO 2008140024 A4 WO2008140024 A4 WO 2008140024A4
Authority
WO
WIPO (PCT)
Prior art keywords
gas
measuring system
sensor
detecting element
gas sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/058571
Other languages
English (en)
French (fr)
Other versions
WO2008140024A1 (ja
Inventor
Yasuhiko Kasama
Kenji Omote
Kuniyoshi Yokoo
Yuzo Mizobuchi
Haruna Oizumi
Morihiko Saida
Hiroyuki Sagami
Kazuaki Mizokami
Takeo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo University of Science
Ideal Star Inc
Original Assignee
Tokyo University of Science
Ideal Star Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007316222A external-priority patent/JP4530034B2/ja
Application filed by Tokyo University of Science, Ideal Star Inc filed Critical Tokyo University of Science
Priority to US12/599,268 priority Critical patent/US8381587B2/en
Priority to EP08752457.5A priority patent/EP2154520B1/en
Publication of WO2008140024A1 publication Critical patent/WO2008140024A1/ja
Publication of WO2008140024A4 publication Critical patent/WO2008140024A4/ja
Anticipated expiration legal-status Critical
Priority to US13/617,178 priority patent/US20130061660A1/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226—Construction of measuring vessels; Electrodes therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

　半導体の製造設備における個別のガス配管にも設置可能な超小型となりうるガスセンサー、これを用いた気体計測システム、およびそのための気体検知モジュールを提供する。誘電性半導体を有し、気体の吸着状態に応じて導電率が変化する気体検知素子と、気体検知素子に対して直列に接続された静電容量部と、気体検知素子および静電容量部を含む電気素子の電気的端部に夫々接続された一対の電極とを備え、この一対の電極に印加される極性反転を含み周期的に変化する電圧に応じて変化する電気的応答から、気体検知素子への気体の吸着状態を検知可能とすることを特徴とするガスセンサー。
PCT/JP2008/058571 2007-05-08 2008-05-08 ガスセンサー、これを用いた気体計測システム、およびそのための気体検知モジュール Ceased WO2008140024A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/599,268 US8381587B2 (en) 2007-05-08 2008-05-08 Gas sensor, gas measuring system using the gas sensor, and gas detection module for the gas sensor
EP08752457.5A EP2154520B1 (en) 2007-05-08 2008-05-08 Gas sensor, gas measuring system using the gas sensor, and gas detection method
US13/617,178 US20130061660A1 (en) 2007-05-08 2012-09-14 Gas Sensor, Gas Measuring System Using the Gas Sensor, and Gas Detection Module for the Gas Sensor

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007123983 2007-05-08
JP2007-123983 2007-05-08
JP2007-316222 2007-12-06
JP2007316222A JP4530034B2 (ja) 2007-03-30 2007-12-06 ガスセンサー、そのための気体検知モジュール、およびこれらを用いた気体計測システム

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US13/617,178 Continuation US20130061660A1 (en) 2007-05-08 2012-09-14 Gas Sensor, Gas Measuring System Using the Gas Sensor, and Gas Detection Module for the Gas Sensor

Publications (2)

Publication Number Publication Date
WO2008140024A1 WO2008140024A1 (ja) 2008-11-20
WO2008140024A4 true WO2008140024A4 (ja) 2009-03-26

Family

ID=41528820

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/058571 Ceased WO2008140024A1 (ja) 2007-05-08 2008-05-08 ガスセンサー、これを用いた気体計測システム、およびそのための気体検知モジュール

Country Status (3)

Country Link
US (2) US8381587B2 (ja)
EP (1) EP2154520B1 (ja)
WO (1) WO2008140024A1 (ja)

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KR20130008037A (ko) * 2010-03-05 2013-01-21 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치를 제작하는 방법
JP5341049B2 (ja) * 2010-10-29 2013-11-13 日本発條株式会社 セラミックス焼結体の製造方法、セラミックス焼結体およびセラミックスヒータ
US9285332B2 (en) 2011-12-12 2016-03-15 Korea Institute Of Science And Technology Low power consumption type gas sensor and method for manufacturing the same
KR101344738B1 (ko) * 2011-12-12 2013-12-26 한국과학기술연구원 고감도 투명 가스 센서 및 그 제조방법
US9704761B2 (en) 2014-09-17 2017-07-11 Lam Research Corporation Corrosion sensor retainer assembly apparatus and method for detecting corrosion
JP7222157B2 (ja) * 2018-04-02 2023-02-15 イデア・インターナショナル株式会社 金属イオン内包フラーレンを用いた高感度分子検出装置
JP2019184265A (ja) * 2018-04-03 2019-10-24 イデア・インターナショナル株式会社 金属イオン内包フラーレンを用いた高感度肺がん検査装置
RU2686878C1 (ru) * 2018-07-05 2019-05-06 Федеральное государственное бюджетное образовательное учреждение высшего образования "Саратовский государственный технический университет имени Гагарина Ю.А." (СГТУ имени Гагарина Ю.А.) Одноэлектродный газовый сенсор на основе окисленного титана, способ его изготовления, сенсорное устройство и мультисенсорная линейка на его основе
US11353381B1 (en) * 2020-06-09 2022-06-07 Applied Materials, Inc. Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room
EP4001906B1 (en) * 2020-11-20 2024-10-02 Infineon Technologies AG Gas-sensitive device
CN112986339B (zh) * 2020-12-04 2022-04-05 西安交通大学 一种基于交流阻抗的半导体气体传感器测量方法

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Also Published As

Publication number Publication date
US20130061660A1 (en) 2013-03-14
US8381587B2 (en) 2013-02-26
EP2154520A4 (en) 2013-07-17
WO2008140024A1 (ja) 2008-11-20
EP2154520A1 (en) 2010-02-17
US20100206049A1 (en) 2010-08-19
EP2154520B1 (en) 2015-12-09

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