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WO2003019168A1 - Capteur de gaz mos - Google Patents

Capteur de gaz mos Download PDF

Info

Publication number
WO2003019168A1
WO2003019168A1 PCT/JP2002/006808 JP0206808W WO03019168A1 WO 2003019168 A1 WO2003019168 A1 WO 2003019168A1 JP 0206808 W JP0206808 W JP 0206808W WO 03019168 A1 WO03019168 A1 WO 03019168A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
metal oxide
gas sensor
high frequency
depressurizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2002/006808
Other languages
English (en)
French (fr)
Inventor
Teruaki Katsube
Kousei Onoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Uchiya Thermostat Co Ltd
Original Assignee
Uchiya Thermostat Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Uchiya Thermostat Co Ltd filed Critical Uchiya Thermostat Co Ltd
Publication of WO2003019168A1 publication Critical patent/WO2003019168A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
PCT/JP2002/006808 2001-08-27 2002-07-04 Capteur de gaz mos Ceased WO2003019168A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001255541A JP4659295B2 (ja) 2001-08-27 2001-08-27 金属酸化物半導体ガスセンサ
JP2001-255541 2001-08-27

Publications (1)

Publication Number Publication Date
WO2003019168A1 true WO2003019168A1 (fr) 2003-03-06

Family

ID=19083494

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/006808 Ceased WO2003019168A1 (fr) 2001-08-27 2002-07-04 Capteur de gaz mos

Country Status (2)

Country Link
JP (1) JP4659295B2 (ja)
WO (1) WO2003019168A1 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006023224A (ja) * 2004-07-09 2006-01-26 Uchiya Thermostat Kk ガス検知素子及びその製造方法
EP2282198A1 (en) * 2004-11-24 2011-02-09 Sensirion Holding AG Method for applying a layer to a substrate
JP4845469B2 (ja) * 2005-10-07 2011-12-28 富士電機株式会社 薄膜ガスセンサ
EP1841002B1 (en) * 2006-03-31 2009-05-20 Sony Deutschland Gmbh Battery leakage detection system
JP2007322184A (ja) * 2006-05-31 2007-12-13 Ngk Spark Plug Co Ltd アンモニアガスセンサ
JP5638765B2 (ja) * 2009-03-25 2014-12-10 ウチヤ・サーモスタット株式会社 ナノ粒子を含む堆積膜の製造方法
JP6687931B2 (ja) * 2016-08-25 2020-04-28 フィガロ技研株式会社 ＳｎＯ２系ガスセンサ
CN113447530B (zh) * 2021-02-26 2022-09-09 河南大学 一种气体传感装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59119253A (ja) * 1982-12-25 1984-07-10 Ngk Spark Plug Co Ltd ガス感応体素子
JPH055713A (ja) * 1991-10-31 1993-01-14 New Cosmos Electric Corp ガス検知素子の製造方法
JPH06160324A (ja) * 1992-10-23 1994-06-07 Yamatake Honeywell Co Ltd 窒素酸化物検出素子およびその製造方法
JPH06288953A (ja) * 1993-02-05 1994-10-18 Fuji Electric Co Ltd 厚膜ガスセンサ
JPH08109463A (ja) * 1994-10-12 1996-04-30 Agency Of Ind Science & Technol 超高速プラズマジェット発生装置及び該装置を用いた溶射被膜製造方法
WO2001031324A1 (en) * 1999-10-27 2001-05-03 Ngk Spark Plug Co., Ltd. Oxygen sensor and method for manufacturing sensor element

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58131551A (ja) * 1982-02-01 1983-08-05 Shinei Kk センサ
JPS594113A (ja) * 1982-06-30 1984-01-10 松下電器産業株式会社 湿度検出素子の製造法
JPH0552790A (ja) * 1991-08-28 1993-03-02 Ricoh Co Ltd ガスセンサ
JPH05322818A (ja) * 1992-05-25 1993-12-07 Takeo Oki 温・湿度セラミックセンサとその製造方法
DE69922776T2 (de) * 1999-01-21 2005-12-08 Sony International (Europe) Gmbh Nanoteilchenstruktur zur Anwendung in einer elektronischen Anordnung, insbesondere in einem chemischen Sensor
JP3812215B2 (ja) * 1999-04-02 2006-08-23 富士電機機器制御株式会社 薄膜ガスセンサ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59119253A (ja) * 1982-12-25 1984-07-10 Ngk Spark Plug Co Ltd ガス感応体素子
JPH055713A (ja) * 1991-10-31 1993-01-14 New Cosmos Electric Corp ガス検知素子の製造方法
JPH06160324A (ja) * 1992-10-23 1994-06-07 Yamatake Honeywell Co Ltd 窒素酸化物検出素子およびその製造方法
JPH06288953A (ja) * 1993-02-05 1994-10-18 Fuji Electric Co Ltd 厚膜ガスセンサ
JPH08109463A (ja) * 1994-10-12 1996-04-30 Agency Of Ind Science & Technol 超高速プラズマジェット発生装置及び該装置を用いた溶射被膜製造方法
WO2001031324A1 (en) * 1999-10-27 2001-05-03 Ngk Spark Plug Co., Ltd. Oxygen sensor and method for manufacturing sensor element

Also Published As

Publication number Publication date
JP4659295B2 (ja) 2011-03-30
JP2003065989A (ja) 2003-03-05

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