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WO2002046490A3 - Beschichtetes substrat geringer emissivität - Google Patents

Beschichtetes substrat geringer emissivität Download PDF

Info

Publication number
WO2002046490A3
WO2002046490A3 PCT/EP2001/014304 EP0114304W WO0246490A3 WO 2002046490 A3 WO2002046490 A3 WO 2002046490A3 EP 0114304 W EP0114304 W EP 0114304W WO 0246490 A3 WO0246490 A3 WO 0246490A3
Authority
WO
WIPO (PCT)
Prior art keywords
coated substrate
low emissivity
substrate
substrates
conductive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2001/014304
Other languages
English (en)
French (fr)
Other versions
WO2002046490A2 (de
Inventor
Bernd Szyszka
Andreas Bierhals
Udo Bringmann
Thomas Hoeing
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to AU2002238412A priority Critical patent/AU2002238412A1/en
Priority to EP01986851A priority patent/EP1341947A2/de
Publication of WO2002046490A2 publication Critical patent/WO2002046490A2/de
Publication of WO2002046490A3 publication Critical patent/WO2002046490A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C03C17/2453—Coating containing SnO2
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/211—SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/216—ZnO
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/24—Doped oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

Die Erfindung betrifft ein beschichtetes Substrat mit einem an mindestens einer Oberfläche des Substrates abgeschidenen optisch transparenten und elektrisch leitfähigem Schichtsystem. Und so betrifft die Erfindung ein Verfahren zur Reduzierung der Emissivität von Substraten bei dem an mindestens einer Oberfläche des Substrates ein optisch transparentes und elektrisch leitfähiges Schichtsystem abgeschieden wird. Verwendung finden die Substrate bei der thermischen Isolierung in Gebäuden oder zur Vermeidung der Kondensation an Substraten mit hohem thermischen Emissionsvermögen und hierzu zählt insbesondere die Kondensation an Fahrzeugverglasungen.
PCT/EP2001/014304 2000-12-06 2001-12-06 Beschichtetes substrat geringer emissivität Ceased WO2002046490A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2002238412A AU2002238412A1 (en) 2000-12-06 2001-12-06 Coated substrate having a low emissivity
EP01986851A EP1341947A2 (de) 2000-12-06 2001-12-06 Beschichtetes substrat geringer emissivität

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10060681.4 2000-12-06
DE10060681 2000-12-06

Publications (2)

Publication Number Publication Date
WO2002046490A2 WO2002046490A2 (de) 2002-06-13
WO2002046490A3 true WO2002046490A3 (de) 2003-02-13

Family

ID=7666034

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2001/014304 Ceased WO2002046490A2 (de) 2000-12-06 2001-12-06 Beschichtetes substrat geringer emissivität

Country Status (3)

Country Link
EP (1) EP1341947A2 (de)
AU (1) AU2002238412A1 (de)
WO (1) WO2002046490A2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004003760B4 (de) * 2004-01-23 2014-05-22 Forschungszentrum Jülich GmbH Verfahren zur Herstellung einer leitfähigen und transparenten Zinkoxidschicht und Verwendung derselben in einer Dünnschichtsolarzelle

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4769291A (en) * 1987-02-02 1988-09-06 The Boc Group, Inc. Transparent coatings by reactive sputtering
US4835061A (en) * 1984-11-09 1989-05-30 Konishiroku Photo Industry Co., Ltd. Conductive laminate
EP0814351A2 (de) * 1996-06-21 1997-12-29 Semco Glasbeschichtung GmbH Wärmedämmende Anti-Reflex-Beschichtung und Verfahren zu deren Herstellung
WO1998018374A1 (en) * 1996-10-28 1998-05-07 Gunder Karlsson Insulating bottle
US5976683A (en) * 1996-10-24 1999-11-02 Leybold Systems Gmbh Coating system transparent to light and reflecting thermal radiation

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4835061A (en) * 1984-11-09 1989-05-30 Konishiroku Photo Industry Co., Ltd. Conductive laminate
US4769291A (en) * 1987-02-02 1988-09-06 The Boc Group, Inc. Transparent coatings by reactive sputtering
EP0814351A2 (de) * 1996-06-21 1997-12-29 Semco Glasbeschichtung GmbH Wärmedämmende Anti-Reflex-Beschichtung und Verfahren zu deren Herstellung
US5976683A (en) * 1996-10-24 1999-11-02 Leybold Systems Gmbh Coating system transparent to light and reflecting thermal radiation
WO1998018374A1 (en) * 1996-10-28 1998-05-07 Gunder Karlsson Insulating bottle

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SZCZYRBOWSKI J ET AL: "New low emissivity coating based on TwinMagR) sputtered TiO2 and Si3N4 layers", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 351, no. 1-2, 30 August 1999 (1999-08-30), pages 254 - 259, XP004183104, ISSN: 0040-6090 *

Also Published As

Publication number Publication date
AU2002238412A1 (en) 2002-06-18
EP1341947A2 (de) 2003-09-10
WO2002046490A2 (de) 2002-06-13

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