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WO1995006762A3 - Dampfphasenreinigung - Google Patents

Dampfphasenreinigung Download PDF

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Publication number
WO1995006762A3
WO1995006762A3 PCT/EP1994/002847 EP9402847W WO9506762A3 WO 1995006762 A3 WO1995006762 A3 WO 1995006762A3 EP 9402847 W EP9402847 W EP 9402847W WO 9506762 A3 WO9506762 A3 WO 9506762A3
Authority
WO
WIPO (PCT)
Prior art keywords
cleaning
vapour phase
cleaning chamber
supplied
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP1994/002847
Other languages
English (en)
French (fr)
Other versions
WO1995006762B1 (de
WO1995006762A2 (de
Inventor
Peter Hoesel
Wolfgang Mueller
Hans Norbert Adams
Werner Baggenstoss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Chemical Co
Original Assignee
Dow Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6496368&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO1995006762(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Dow Chemical Co filed Critical Dow Chemical Co
Priority to US08/605,013 priority Critical patent/US5690751A/en
Publication of WO1995006762A2 publication Critical patent/WO1995006762A2/de
Publication of WO1995006762A3 publication Critical patent/WO1995006762A3/de
Publication of WO1995006762B1 publication Critical patent/WO1995006762B1/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50Solvents
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50Solvents
    • C11D7/5004Organic solvents
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/04Apparatus
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22Organic compounds
    • C11D7/24Hydrocarbons
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22Organic compounds
    • C11D7/26Organic compounds containing oxygen
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22Organic compounds
    • C11D7/26Organic compounds containing oxygen
    • C11D7/263Ethers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Abstract

In einem Verfahren zur Reinigung einer oder mehrerer Gegenstände in der Dampfphase eines organischen Lösungsmittels wird Lösungsmitteldampf in eine Reinigungskammer (1) eingespeist, worin ein absoluter Druck von 200 mbar oder weniger aufrecht erhalten wird und die Reinigung bei einer Temperatur beim oder oberhalb des Flammpunktes des organischen Lösungsmittels durchgeführt wird. Eine bevorzugte Apparatur zur Durchführung des Reinigungsverfahrens enthält eine Reinigungskammer (1), zwei Vorratsbehälter (2 und 3), einen Verdampfer (4), eine Heizvorrichtung (5) und einen Kondensator (6). Sie sind mittels eines Leitungssystems verbunden, das mit einer Vakuumpumpe (7), zwei Pumpen (8 und 9) und Ventilen (12, 13, 14, 15, 16, 17, 18, 19, 20, 21 und 22) versehen ist. Zuluft (11) kann in die Reinigungskammer (1) gespeist werden. Abgas (10) kann mit Hilfe der Vakuumpumpe (7) aus der Apparatur entfernt werden.
PCT/EP1994/002847 1993-08-30 1994-08-29 Dampfphasenreinigung Ceased WO1995006762A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US08/605,013 US5690751A (en) 1993-08-30 1994-08-29 Vapor phase cleaning

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP4329178.3 1993-08-30
DE4329178A DE4329178B4 (de) 1993-08-30 1993-08-30 Dampfphasenreinigung

Publications (3)

Publication Number Publication Date
WO1995006762A2 WO1995006762A2 (de) 1995-03-09
WO1995006762A3 true WO1995006762A3 (de) 1995-04-06
WO1995006762B1 WO1995006762B1 (de) 1995-04-27

Family

ID=6496368

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1994/002847 Ceased WO1995006762A2 (de) 1993-08-30 1994-08-29 Dampfphasenreinigung

Country Status (3)

Country Link
US (1) US5690751A (de)
DE (1) DE4329178B4 (de)
WO (1) WO1995006762A2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19609783B4 (de) * 1996-03-13 2005-08-25 Meissner, Werner Verfahren zum Reinigen von Gegenständen sowie Anlage zur Durchführung des Verfahrens
DE19619269C2 (de) * 1996-05-13 2000-06-21 Wack O K Chemie Gmbh Verfahren und Vorrichtung zum maschinellen Reinigen von Gegenständen
JP3692380B2 (ja) * 1998-07-03 2005-09-07 Azエレクトロニックマテリアルズ株式会社 容器の洗浄方法および装置
US6354310B1 (en) 1998-11-12 2002-03-12 General Electric Company Apparatus and process to clean and strip coatings from hardware
ATE242344T1 (de) * 1999-03-24 2003-06-15 Wolf Gmbh Verfahren und anlage zur oberflächenbehandlung von teilen mit einem lösungsmittel
WO2002019390A2 (en) * 2000-08-31 2002-03-07 Chemtrace, Inc. Cleaning of semiconductor process equipment chamber parts using organic solvents
US6938439B2 (en) * 2003-05-22 2005-09-06 Cool Clean Technologies, Inc. System for use of land fills and recyclable materials
US20050129977A1 (en) * 2003-12-12 2005-06-16 General Electric Company Method and apparatus for forming patterned coated films
DE102006039715A1 (de) * 2006-08-24 2008-02-28 Dürr Ecoclean GmbH Reinigungsvorrichtung mit einer Flutkammer
EP2108464A1 (de) 2008-04-09 2009-10-14 Dow Global Technologies Inc. Verfahren zur Reinigung von Gegenstände
US8029623B2 (en) * 2008-07-08 2011-10-04 Dow Global Technologies Llc Acid removal in cleaning processes
JP5720674B2 (ja) * 2010-03-29 2015-05-20 日立金属株式会社 初期超微結晶合金、ナノ結晶軟磁性合金及びその製造方法、並びにナノ結晶軟磁性合金からなる磁性部品
DE102014109293B4 (de) 2013-07-03 2020-02-20 Thorsten Rapp Vorrichtung zur Heizung einer Entfettungs- und /oder Reinigungsanlage
DE102015117388A1 (de) 2015-10-13 2017-04-13 EMO Oberflächentechnik GmbH Vorrichtung und Verfahren zum Entgraten von Bauteilen mittels Ultraschall
DE102016109861A1 (de) * 2016-05-30 2017-11-30 EMO Oberflächentechnik GmbH Verfahren und Vorrichtung zur Reinigung von industriell gefertigten Teilen
DE102019119423A1 (de) 2019-07-17 2021-01-21 HEMO GmbH Verfahren zum Recyling von Asphalt

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989004234A1 (en) * 1987-11-12 1989-05-18 Armin Rahn Vapour phase process and apparatus
DE3738006A1 (de) * 1987-11-09 1989-05-18 Wolfgang Speck Verfahren zur reinigung von verschmutzten teilen und vorrichtung zur durchfuehrung des verfahrens
EP0381887A1 (de) * 1989-01-30 1990-08-16 Kabushiki Kaisha Tiyoda Seisakusho Verfahren und System zur Reinigung mit Lösungsmitteln
JPH0326383A (ja) * 1989-06-26 1991-02-04 Chiyoda Seisakusho:Kk 有機溶剤を使用する洗浄装置
JPH03101881A (ja) * 1989-09-18 1991-04-26 Yamazaki Kagaku Kogyo Kk 真空洗浄装置
US5081772A (en) * 1990-05-17 1992-01-21 Rochester Midland Corporation Condensation vapor degreaser
DE4128699A1 (de) * 1991-08-29 1993-03-04 Peter Warthmann Verfahren und vorrichtung zum entfetten und reinigen von behandlungsgut mit hilfe von loesungsmitteln
WO1993008933A1 (en) * 1991-11-05 1993-05-13 Gray Donald J Improved cleaning method and system
EP0581113A1 (de) * 1992-07-17 1994-02-02 S.VE.D.A. S.R.L. Società Veneta Depuratori e Affini Verfahren und Anlage zur Entfeltung von Maschinenteilen
JPH06220672A (ja) * 1992-10-30 1994-08-09 Nippon Heizu:Kk 真空脱脂洗浄方法と真空洗浄機

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU753500A1 (ru) * 1977-01-10 1980-08-07 Предприятие П/Я Г-4219 Устройство дл очистки изделий
US4231804A (en) * 1978-01-17 1980-11-04 Petterson Robert C Vapor stripping method
JPH0757913B2 (ja) * 1989-10-27 1995-06-21 オリエンタルエンヂニアリング株式会社 脱脂洗浄方法および装置
US5115576A (en) * 1989-10-27 1992-05-26 Semifab Incorporated Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol
US5108660A (en) * 1990-01-29 1992-04-28 The Procter & Gamble Company Hard surface liquid detergent compositions containing hydrocarbyl amidoalkylenesulfobetaine
US5045117A (en) * 1990-09-18 1991-09-03 Rockwell International Corporation System for removing flux residues from printed wiring assemblies
DE4031563A1 (de) * 1990-10-05 1992-04-09 Zeiss Carl Fa Verfahren zur reinigung von optischen bauelementen
DE4125891C2 (de) * 1991-08-05 1995-01-19 Hermann Ziegler Verfahren zur Reinigung verschmutzter Teile
JP3026383U (ja) 1995-12-27 1996-07-12 株式会社ジャンボトクラ 食品の成形型

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3738006A1 (de) * 1987-11-09 1989-05-18 Wolfgang Speck Verfahren zur reinigung von verschmutzten teilen und vorrichtung zur durchfuehrung des verfahrens
WO1989004234A1 (en) * 1987-11-12 1989-05-18 Armin Rahn Vapour phase process and apparatus
EP0381887A1 (de) * 1989-01-30 1990-08-16 Kabushiki Kaisha Tiyoda Seisakusho Verfahren und System zur Reinigung mit Lösungsmitteln
JPH0326383A (ja) * 1989-06-26 1991-02-04 Chiyoda Seisakusho:Kk 有機溶剤を使用する洗浄装置
JPH03101881A (ja) * 1989-09-18 1991-04-26 Yamazaki Kagaku Kogyo Kk 真空洗浄装置
US5081772A (en) * 1990-05-17 1992-01-21 Rochester Midland Corporation Condensation vapor degreaser
DE4128699A1 (de) * 1991-08-29 1993-03-04 Peter Warthmann Verfahren und vorrichtung zum entfetten und reinigen von behandlungsgut mit hilfe von loesungsmitteln
WO1993008933A1 (en) * 1991-11-05 1993-05-13 Gray Donald J Improved cleaning method and system
EP0581113A1 (de) * 1992-07-17 1994-02-02 S.VE.D.A. S.R.L. Società Veneta Depuratori e Affini Verfahren und Anlage zur Entfeltung von Maschinenteilen
JPH06220672A (ja) * 1992-10-30 1994-08-09 Nippon Heizu:Kk 真空脱脂洗浄方法と真空洗浄機

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Week 9436, Derwent World Patents Index; AN 94-291341 *
PATENT ABSTRACTS OF JAPAN vol. 15, no. 145 (C - 823) 12 April 1991 (1991-04-12) *
PATENT ABSTRACTS OF JAPAN vol. 15, no. 289 (C - 852) 23 July 1991 (1991-07-23) *

Also Published As

Publication number Publication date
DE4329178A1 (de) 1995-03-02
US5690751A (en) 1997-11-25
DE4329178B4 (de) 2006-11-09
WO1995006762A2 (de) 1995-03-09

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