USD570309S1 - Wafer boat - Google Patents
Wafer boat Download PDFInfo
- Publication number
- USD570309S1 USD570309S1 US29/274,445 US27444507F USD570309S US D570309 S1 USD570309 S1 US D570309S1 US 27444507 F US27444507 F US 27444507F US D570309 S USD570309 S US D570309S
- Authority
- US
- United States
- Prior art keywords
- wafer boat
- view
- boat
- wafer
- ornamental design
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
In the drawings, the left-hand side of each figure is regarded as the top of the figure.
Claims (1)
- The ornamental design for a wafer boat, as shown and described.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006-029089 | 2006-10-25 | ||
| JP2006029089 | 2006-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD570309S1 true USD570309S1 (en) | 2008-06-03 |
Family
ID=39466907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/274,445 Expired - Lifetime USD570309S1 (en) | 2006-10-25 | 2007-04-24 | Wafer boat |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | USD570309S1 (en) |
| TW (1) | TWD130137S1 (en) |
Cited By (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD601979S1 (en) * | 2008-03-28 | 2009-10-13 | Tokyo Electron Limited | Pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers |
| US20110062053A1 (en) * | 2009-07-13 | 2011-03-17 | Greene Tweed Of Delaware, Inc. | Chimerized Wafer Boat for Use in Semiconductor Chip Processing and Related Methods |
| USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
| USD655682S1 (en) * | 2010-06-18 | 2012-03-13 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
| USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
| USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD739831S1 (en) * | 2013-03-22 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD769201S1 (en) * | 2014-11-20 | 2016-10-18 | Tokyo Electron Limited | Wafer boat |
| USD772183S1 (en) * | 2014-11-20 | 2016-11-22 | Tokyo Electron Limited | Wafer boat |
| USD789310S1 (en) * | 2014-11-20 | 2017-06-13 | Tokyo Electron Limited | Wafer boat |
| USD791721S1 (en) * | 2014-11-20 | 2017-07-11 | Tokyo Electron Limited | Wafer boat |
| USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
| USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| USD847105S1 (en) * | 2018-05-03 | 2019-04-30 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| USD893438S1 (en) * | 2017-08-21 | 2020-08-18 | Tokyo Electron Limited | Wafer boat |
| USD908103S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
| USD908102S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
| USD939459S1 (en) * | 2019-08-07 | 2021-12-28 | Kokusai Electric Corporation | Boat for wafer processing apparatus |
| USD1022933S1 (en) * | 2021-08-27 | 2024-04-16 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
| USD1053830S1 (en) * | 2022-03-04 | 2024-12-10 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
| US20250006529A1 (en) * | 2023-06-28 | 2025-01-02 | Asm Ip Holding B. V. | Wafer boat system, holder ring and use thereof |
| USD1063875S1 (en) * | 2022-09-14 | 2025-02-25 | Kokusai Electric Corporation | Substrate lifter for semiconductor manufacturing equipment |
| USD1078667S1 (en) * | 2022-09-14 | 2025-06-10 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
| US5752609A (en) * | 1996-02-06 | 1998-05-19 | Tokyo Electron Limited | Wafer boat |
| USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
| USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
| USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
| US6056123A (en) * | 1997-12-10 | 2000-05-02 | Novus Corporation | Semiconductor wafer carrier having the same composition as the wafers |
| US6065615A (en) * | 1996-02-28 | 2000-05-23 | Asahi Glass Company, Ltd. | Vertical wafer boat |
| US6110285A (en) * | 1997-04-15 | 2000-08-29 | Toshiba Ceramics Co., Ltd. | Vertical wafer boat |
| US20020130061A1 (en) * | 2000-11-02 | 2002-09-19 | Hengst Richard R. | Apparatus and method of making a slip free wafer boat |
-
2007
- 2007-04-10 TW TW096301948F patent/TWD130137S1/en unknown
- 2007-04-24 US US29/274,445 patent/USD570309S1/en not_active Expired - Lifetime
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
| US5752609A (en) * | 1996-02-06 | 1998-05-19 | Tokyo Electron Limited | Wafer boat |
| US6065615A (en) * | 1996-02-28 | 2000-05-23 | Asahi Glass Company, Ltd. | Vertical wafer boat |
| USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
| US6110285A (en) * | 1997-04-15 | 2000-08-29 | Toshiba Ceramics Co., Ltd. | Vertical wafer boat |
| USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
| USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
| US6056123A (en) * | 1997-12-10 | 2000-05-02 | Novus Corporation | Semiconductor wafer carrier having the same composition as the wafers |
| US20020130061A1 (en) * | 2000-11-02 | 2002-09-19 | Hengst Richard R. | Apparatus and method of making a slip free wafer boat |
Cited By (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD601979S1 (en) * | 2008-03-28 | 2009-10-13 | Tokyo Electron Limited | Pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers |
| US20110062053A1 (en) * | 2009-07-13 | 2011-03-17 | Greene Tweed Of Delaware, Inc. | Chimerized Wafer Boat for Use in Semiconductor Chip Processing and Related Methods |
| USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
| USD655682S1 (en) * | 2010-06-18 | 2012-03-13 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
| USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
| USD739831S1 (en) * | 2013-03-22 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD789310S1 (en) * | 2014-11-20 | 2017-06-13 | Tokyo Electron Limited | Wafer boat |
| USD772183S1 (en) * | 2014-11-20 | 2016-11-22 | Tokyo Electron Limited | Wafer boat |
| USD769201S1 (en) * | 2014-11-20 | 2016-10-18 | Tokyo Electron Limited | Wafer boat |
| USD791721S1 (en) * | 2014-11-20 | 2017-07-11 | Tokyo Electron Limited | Wafer boat |
| USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
| USD893438S1 (en) * | 2017-08-21 | 2020-08-18 | Tokyo Electron Limited | Wafer boat |
| USD847105S1 (en) * | 2018-05-03 | 2019-04-30 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| USD908103S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
| USD908102S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
| USD939459S1 (en) * | 2019-08-07 | 2021-12-28 | Kokusai Electric Corporation | Boat for wafer processing apparatus |
| USD1022933S1 (en) * | 2021-08-27 | 2024-04-16 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
| USD1053830S1 (en) * | 2022-03-04 | 2024-12-10 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
| USD1063875S1 (en) * | 2022-09-14 | 2025-02-25 | Kokusai Electric Corporation | Substrate lifter for semiconductor manufacturing equipment |
| USD1078667S1 (en) * | 2022-09-14 | 2025-06-10 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
| US20250006529A1 (en) * | 2023-06-28 | 2025-01-02 | Asm Ip Holding B. V. | Wafer boat system, holder ring and use thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| TWD130137S1 (en) | 2009-08-01 |
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