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TWD130137S1 - Crystal Boat - Google Patents

Crystal Boat

Info

Publication number
TWD130137S1
TWD130137S1 TW096301948F TW96301948F TWD130137S1 TW D130137 S1 TWD130137 S1 TW D130137S1 TW 096301948 F TW096301948 F TW 096301948F TW 96301948 F TW96301948 F TW 96301948F TW D130137 S1 TWD130137 S1 TW D130137S1
Authority
TW
Taiwan
Prior art keywords
wafers
wafer
creation
item
supports
Prior art date
Application number
TW096301948F
Other languages
Chinese (zh)
Inventor
佐藤泉
金子裕史
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TWD130137S1 publication Critical patent/TWD130137S1/en

Links

Abstract

【物品用途】;本創作的物品是一種晶舟,主要是為了載置整批晶圓,進行相關處理用的載具。;【創作特點】;該晶舟,乃如立體圖所示,大體上是由兩片位置互為平行的圓形端板,以及兩個圓形端板間設有三道軸向晶圓支架所組成;如左側視圖及右側視圖觀之,該端板的內周具有V形缺口,且端板的周面上設有U形槽及小圓孔等;另如前視圖所示,該晶圓支架具有密集的梳齒形構造,得以使多數片的晶圓被放置在支架間,形成平穩的載置性,且有利於處理整批晶圓的構造;整體觀之,確為一新穎獨特之設計。[Purpose of the item]; The item of this creation is a wafer boat, which is mainly used as a carrier for carrying a whole batch of wafers for related processing.; [Features of the creation]; As shown in the three-dimensional diagram, the wafer boat is generally composed of two circular end plates that are parallel to each other, and three axial wafer supports between the two circular end plates; as shown in the left and right side views, the inner circumference of the end plate has a V-shaped notch, and the circumference of the end plate is provided with a U-shaped groove and a small round hole; as shown in the front view, the wafer support has a dense comb-tooth structure, which allows most wafers to be placed between the supports, forming a stable loading structure that is conducive to processing a whole batch of wafers; overall, it is indeed a novel and unique design.

TW096301948F 2006-10-25 2007-04-10 Crystal Boat TWD130137S1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006029089 2006-10-25

Publications (1)

Publication Number Publication Date
TWD130137S1 true TWD130137S1 (en) 2009-08-01

Family

ID=39466907

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096301948F TWD130137S1 (en) 2006-10-25 2007-04-10 Crystal Boat

Country Status (2)

Country Link
US (1) USD570309S1 (en)
TW (1) TWD130137S1 (en)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD140831S1 (en) * 2008-03-28 2011-06-01 東京威力科創股份有限公司 Semiconductor manufacturing heat preservation cylinder base
US20110062053A1 (en) * 2009-07-13 2011-03-17 Greene Tweed Of Delaware, Inc. Chimerized Wafer Boat for Use in Semiconductor Chip Processing and Related Methods
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
TWD163542S (en) * 2013-03-22 2014-10-11 日立國際電氣股份有限公司 Wafer boat for substrate processing equipment
TWD166332S (en) * 2013-03-22 2015-03-01 日立國際電氣股份有限公司 Part of the wafer boat for substrate processing equipment
TWD165429S (en) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment
TWD168827S (en) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment
TWD167988S (en) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment
JP1537313S (en) * 2014-11-20 2015-11-09
JP1537312S (en) * 2014-11-20 2015-11-09
JP1537630S (en) * 2014-11-20 2015-11-09
JP1537629S (en) * 2014-11-20 2015-11-09
JP1563649S (en) * 2016-02-12 2016-11-21
JP1597807S (en) * 2017-08-21 2018-02-19
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
USD908102S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
USD908103S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
JP1658652S (en) * 2019-08-07 2020-04-27
JP1706322S (en) * 2021-08-27 2022-01-31
JP1731670S (en) * 2022-03-04 2025-12-15 Substrate holder for substrate processing apparatus
JP1741512S (en) * 2022-09-14 2023-04-11
JP1741513S (en) * 2022-09-14 2023-04-11
EP4498411A3 (en) * 2023-06-28 2025-03-26 ASM IP Holding B.V. Wafer boat system, holder ring and use thereof

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
JP3122364B2 (en) * 1996-02-06 2001-01-09 東京エレクトロン株式会社 Wafer boat
TW325588B (en) * 1996-02-28 1998-01-21 Asahi Glass Co Ltd Vertical wafer boat
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
KR100284567B1 (en) * 1997-04-15 2001-04-02 후지이 아키히로 Vertical wafer boat
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
US6056123A (en) * 1997-12-10 2000-05-02 Novus Corporation Semiconductor wafer carrier having the same composition as the wafers
US20020130061A1 (en) * 2000-11-02 2002-09-19 Hengst Richard R. Apparatus and method of making a slip free wafer boat

Also Published As

Publication number Publication date
USD570309S1 (en) 2008-06-03

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