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RU2018122773A3 - - Google Patents

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Publication number
RU2018122773A3
RU2018122773A3 RU2018122773A RU2018122773A RU2018122773A3 RU 2018122773 A3 RU2018122773 A3 RU 2018122773A3 RU 2018122773 A RU2018122773 A RU 2018122773A RU 2018122773 A RU2018122773 A RU 2018122773A RU 2018122773 A3 RU2018122773 A3 RU 2018122773A3
Authority
RU
Russia
Application number
RU2018122773A
Other versions
RU2018122773A (ru
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of RU2018122773A publication Critical patent/RU2018122773A/ru
Publication of RU2018122773A3 publication Critical patent/RU2018122773A3/ru

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00Drying solid materials or objects by processes not involving the application of heat
    • F26B5/12Drying solid materials or objects by processes not involving the application of heat by suction

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Drying Of Solid Materials (AREA)
RU2018122773A 2015-11-25 2016-11-25 Способ и установка для сушки камеры в вакууме RU2018122773A (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP15196344.4 2015-11-25
EP15196344.4A EP3173720B1 (fr) 2015-11-25 2015-11-25 Procédé et installation de séchage d'enceinte sous vide
PCT/EP2016/078900 WO2017089588A1 (fr) 2015-11-25 2016-11-25 Procede et installation de sechage d'enceinte sous vide

Publications (2)

Publication Number Publication Date
RU2018122773A RU2018122773A (ru) 2019-12-25
RU2018122773A3 true RU2018122773A3 (ru) 2019-12-25

Family

ID=54707575

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2018122773A RU2018122773A (ru) 2015-11-25 2016-11-25 Способ и установка для сушки камеры в вакууме

Country Status (5)

Country Link
US (1) US20180347902A1 (ru)
EP (2) EP3173720B1 (ru)
JP (1) JP2018538504A (ru)
RU (1) RU2018122773A (ru)
WO (1) WO2017089588A1 (ru)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113915956A (zh) * 2021-10-13 2022-01-11 大冶市兴进铝业有限公司 一种型材干燥装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7316323B2 (ja) * 2021-06-30 2023-07-27 株式会社Screenホールディングス 減圧乾燥装置および減圧乾燥方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5555191Y2 (ru) * 1975-04-02 1980-12-20
WO2001088449A1 (en) * 2000-05-19 2001-11-22 Sun Tae Choi Method of drying wood and a system therefor
JP5064119B2 (ja) * 2007-06-07 2012-10-31 東京エレクトロン株式会社 真空引き方法及び記憶媒体
FR2920046A1 (fr) * 2007-08-13 2009-02-20 Alcatel Lucent Sas Procede de post-traitement d'un support de transport pour le convoyage et le stockage atmospherique de substrats semi-conducteurs, et station de post-traitement pour la mise en oeuvre d'un tel procede
US8230616B2 (en) * 2009-06-11 2012-07-31 Sterilucent, Inc. Apparatus and method for drying and sterilizing objects in a load
JP5927066B2 (ja) * 2012-07-05 2016-05-25 株式会社協真エンジニアリング 乾燥装置及び乾燥方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113915956A (zh) * 2021-10-13 2022-01-11 大冶市兴进铝业有限公司 一种型材干燥装置

Also Published As

Publication number Publication date
US20180347902A1 (en) 2018-12-06
EP3380799A1 (fr) 2018-10-03
JP2018538504A (ja) 2018-12-27
EP3173720A1 (fr) 2017-05-31
EP3173720B1 (fr) 2019-03-13
RU2018122773A (ru) 2019-12-25
WO2017089588A1 (fr) 2017-06-01

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Legal Events

Date Code Title Description
FA94 Acknowledgement of application withdrawn (non-payment of fees)

Effective date: 20200528