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EP3554723A1 - Dispositif de séparation pour du polysilicium - Google Patents

Dispositif de séparation pour du polysilicium

Info

Publication number
EP3554723A1
EP3554723A1 EP17746082.1A EP17746082A EP3554723A1 EP 3554723 A1 EP3554723 A1 EP 3554723A1 EP 17746082 A EP17746082 A EP 17746082A EP 3554723 A1 EP3554723 A1 EP 3554723A1
Authority
EP
European Patent Office
Prior art keywords
polysilicon
openings
screen
sieve
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP17746082.1A
Other languages
German (de)
English (en)
Other versions
EP3554723B1 (fr
Inventor
Thomas Buschhardt
Simon Ehrenschwendtner
Thomas HINTERBERGER
Hans-Günther WACKERBAUER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siltronic AG
Original Assignee
Siltronic AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siltronic AG filed Critical Siltronic AG
Publication of EP3554723A1 publication Critical patent/EP3554723A1/fr
Application granted granted Critical
Publication of EP3554723B1 publication Critical patent/EP3554723B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
    • B07B13/00—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices
    • B07B13/04—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices according to size
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
    • B07B13/00—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices
    • B07B13/04—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices according to size
    • B07B13/07—Apparatus in which aggregates or articles are moved along or past openings which increase in size in the direction of movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
    • B07B1/00—Sieving, screening, sifting, or sorting solid materials using networks, gratings, grids, or the like
    • B07B1/46—Constructional details of screens in general; Cleaning or heating of screens
    • B07B1/4609—Constructional details of screens in general; Cleaning or heating of screens constructional details of screening surfaces or meshes
    • B07B1/4654—Corrugated Screening surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
    • B07B13/00—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices
    • B07B13/14—Details or accessories
    • B07B13/16—Feed or discharge arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
    • B07B4/00—Separating solids from solids by subjecting their mixture to gas currents
    • B07B4/08—Separating solids from solids by subjecting their mixture to gas currents while the mixtures are supported by sieves, screens, or like mechanical elements

Definitions

  • the invention relates to a deposition device for polysilicon.
  • Polycrystalline silicon (polysilicon in short) serves as the starting material for
  • Polycrystalline silicon is usually produced by means of the Siemens process. For most applications, the thus produced polycrystalline
  • Silicon rods are broken down into small fragments, which are usually classified according to size.
  • screening machines are used to sort or classify polycrystalline silicon after comminution into different size classes.
  • polycrystalline silicon granules are produced in a fluidized bed reactor.
  • the polysilicon granule is usually divided into two or more fractions or classes after its preparation by means of a sieve
  • a screening machine is generally a machine for screening, ie the separation (separation) of solid mixtures to particle sizes.
  • Planschwangsiebmaschinen occurs in litter screening machines in addition to the horizontal and a vertical screen acceleration.
  • dust particles and fines are formed in such significant quantities that a yield loss during crystal pulling occurs without further screening or separation. Therefore, there is a need to separate small particles and dust from the polysilicon prior to crystal pulling.
  • From DE 198 22 996 C1 is a separation device for elongated solid parts, which has a vibrating floor with a number extending in the conveying direction
  • the object of the invention is achieved by a separation device for
  • Polysilicon with at least one screen plate comprising a polysilicon feed region, a profiled region with peaks and valleys, one on the profiled area adjoining area with sieve openings, and one
  • Removal area wherein the screen openings expand in the direction of the removal area, and arranged below the screen openings partition plate, which is horizontally and vertically displaceable.
  • the screen plate according to the invention provides a partition plate which is arranged below the screen openings or the area with screen openings.
  • Removal range can be varied because the partition plate is horizontally displaceable.
  • the partition plate can also be moved vertically, so that the distance to the screen openings can be varied.
  • the effective size of the screen openings can be varied.
  • the separator plate can be arranged so that polysilicon of a size of less than or equal to 4 mm falls through the sieve opening and is separated from the remaining polysilicon via the separator plate.
  • the partition plate may be inclined to the vertical, that the separated polysilicon is accommodated in a collecting container, while larger polysilicon also falls through the screen openings, but is taken up in another collecting container, which is arranged in the conveying direction behind the partition plate.
  • the partition plate can therefore fulfill very different functions.
  • the object is also achieved by a method wherein Polysiliciunn on the
  • Sieve plate of a deposition device according to the invention is applied, which is set in such a way that the Polysiliciunn a movement in
  • Polysilicon is separated, wherein the discontinued polysilicon is processed without the separated small particle polysilicon.
  • the position and height of the separator plate is chosen in one embodiment depending on how much the polysilicon has been vibrated.
  • the partition plate preferably has a distance to the wire stretch of 5 mm to 20 mm, more preferably a distance of 1 mm to 5 mm.
  • Small-particle polysilicon is to be understood as meaning a subset of the discontinued amount of polysilicon which is to be separated off by means of the sieve system.
  • the finely divided polysilicon thus corresponds to the fraction to be separated.
  • the screen plate comprises a feed area in which the polysilicon is applied.
  • the polysilicon is conveyed by means of a conveyor trough
  • the screen plate also comprises a profiled area with grooves or grooves or generally depressions and projections, so that the profiled area depressions and peaks.
  • the screen plate comprises - next to the profiled area - an area with screen openings.
  • the screen openings are arranged in the conveying direction immediately behind the wells of the profiled area.
  • the tips of the profiled area continue into the area with screen openings, so that the entire screen plate is profiled, but the screen plate has screen openings instead of depressions at its rear end in the conveying direction.
  • the profile of the profiled area may differ from the profile in the area of the sieve openings.
  • the latter may be particularly advantageous if the Siebrow or with the polysilicon in
  • the separation of the fine fraction or small fragments / particles thus takes place via the sieve openings of the sieve plate in conjunction with the separating plate.
  • Fragments / particles received by a arranged below the screen openings of the screen plate collecting container are received by a arranged below the screen openings of the screen plate collecting container. Larger fragments are in the profiled area over the tips to
  • the removal area is connected to a conveyor trough, over which the larger fragments are removed.
  • another screen plate may join to separate another fraction from the polysilicon.
  • the invention thus provides a screen plate, which can be used in all types of screening, in which in the first region of the screen plate of
  • Fines or small-scale silicon collects in sinks and is selectively separated in the last region of the sieve plate by expanding sieve openings.
  • the design of the profiled area of the sieve plate depends on the fraction to be separated.
  • the depth and angle of the depressions of the profiled area are to be designed in such a way that the fraction to be separated, e.g. the fine fraction collects there.
  • the severing device consists essentially of a sieving line which can be divided into two areas.
  • the first area is the inlet area. In this area, the fines accumulate in the sinks and thus targeted the
  • Siebmple on there introduced screen openings which expand in the conveying direction. Through these screen openings, the separation of the desired Si fraction occurs or fine fraction. The fact that the sieve openings in the conveying direction is wide, this system does not tend to clog.
  • the sieve openings extend up to the end of the separating device located in the conveying direction.
  • the screen openings are therefore open towards the end. This is an essential feature to ensure that no silicon fragments accumulate or block the sieve opening in the separator.
  • the screen openings preferably have an opening angle of 1 to 20 ° and more preferably of 5-15 °.
  • the screen openings preferably have a length of 5 mm to 50 mm, particularly preferably a length of 20 to 40 mm.
  • the screen openings at the end in the conveying direction continue to widen.
  • the opening angle of this second expansion is preferably 40-150 °, more preferably 60-120 °.
  • the angle of the screen openings can be changed by suitable devices.
  • elements made of an elastic material can be used for this purpose. It has been shown that this
  • the suction mounted below the screen openings, which is positioned so that the suction is preferably between the beginning of the screen openings and the partition plate itself.
  • the suction preferably has a distance to the lower sieve plate of 1 mm to 50 mm, more preferably a distance of 5 mm to 20 mm.
  • Another preferred embodiment of the deposition according to the invention is the installation of a gas stream above the screen openings.
  • This comprises one or more gas nozzles, which are directed to the screen openings.
  • the gas jet may tend to be soft or hard.
  • a soft jet is preferably used to support the deposition of dust.
  • a hard jet is preferably suitable for the deposition of the smaller polysilicon fragments, 0.1 mm to 4 mm.
  • the gas stream can also be formed as laminar flow.
  • Suitable gases are clean room air according to DIN EN ISO 14644-1 (ISO1 to ISO6), clean dry air, nitrogen and argon.
  • the gas stream is preferably to be positioned between the beginning of the sieve openings and the separating plate.
  • the removal area is connected to a conveyor trough, over which the larger fragments are removed.
  • another screen plate can then be used to separate another fraction from the polysilicon.
  • the sieving path is one or more
  • the screen stretch is lined or coated with one or more materials selected from the group consisting of plastic, ceramic, glass, diamond, amorphous carbon, and silicon.
  • the polysilicon contacting portions of the screen are lined or coated with one or more materials selected from the group consisting of plastic, ceramic, glass, diamond, amorphous carbon, and silicon.
  • the screening line comprises a metallic base body and a coating or lining of one or more materials selected from the group consisting of plastic, ceramic, glass, diamond, amorphous carbon and silicon.
  • the screen path comprises a plastic body and a coating or lining of one or more materials selected from the group consisting of ceramic, glass, diamond, amorphous carbon, and silicon.
  • the screen comprises a coating of titanium nitride, titanium carbide, aluminum titanium nitride, DLC (Diamond Like Carbon), silicon carbide, nitride bonded silicon carbide, or tungsten carbide.
  • the breaking sizes (BG) 1, 2, 3 can be used via this screening device.
  • these fraction sizes have the following
  • the individual fractions have small and larger size classes
  • the proportion of larger and smaller fragments can be up to 5% each.
  • the screening device is suitable for the deposition of small cells
  • Polysilicon pieces which have a diameter of 0.05 to 2 mm as well
  • the separation device comprises a funnel for depositing polysilicon material, two delivery units, and two
  • the first unit is referred to as unit 1 and the second unit as unit 2.
  • the delivery rate of polysilicon in kg / min can be set separately for each unit.
  • the delivery rate of polysilicon in kg / min can be set separately for each unit.
  • Flow rate of the unit 1 equal to the unit 2.
  • the flow rate of the unit 1 is smaller than that
  • the removal area is designed so that the polysilicon material in the
  • This sampling area can also be vibrated to ensure that no polysilicon material remains.
  • the angle of this outlet is preferably 5 to 45 ° and more preferably 15 to 25 °.
  • Fig. 1 shows the schematic structure of a screen plate of a separating device according to the invention.
  • Fig. 2 shows schematically a separation device with suction and separation plate.
  • Fig. 3 shows schematically a separation device with suction and gas flow.
  • the sieve plate 1 comprises a feed area 2, in which the polysilicon
  • the polysilicon can be conveyed for example by means of a conveyor trough to the screen and delivered to the feed area 2 of the screen plate 1.
  • the screen plate 1 also comprises a profiled area 3. This profiled area
  • the fine fraction contained in the polysilicon accumulates during the movement of the polysilicon on the profiled area 3 in the depressions 31 of the profiled area 3.
  • the screen plate 1 comprises - following the profiled area 3 - an area
  • the depressions 31 of the profiled portion 3 are arranged.
  • the fines of the polysilicon located in the depressions 31 of the profiled area 3 are guided in a targeted manner to the sieve openings 41 of the area 4.
  • the tips 32 of the profiled area 3 preferably also continue in the area 4, so that the entire screen plate 1 is profiled, but in the area 4 instead of depressions 31 it has screen openings 41.
  • the separation of the fine fraction thus takes place via the sieve openings 41 of the sieve plate 1.
  • the separated fine fractions can be absorbed, for example, by a collecting container arranged below the sieve openings 41 of the sieve plate 1. Larger fragments are in the profiled area over the tips 32 to
  • the sieve openings 41 widen in the conveying direction by an opening angle a1.
  • the screen openings 41 have at the end of the area 4 a further widening 6, characterized by an opening angle a2.
  • Suction 8 mounted below the screen openings 41, which is positioned so that the suction 8 is preferably located between the beginning of the screen openings 41 and the partition plate 7.
  • Another preferred embodiment of the deposition according to the invention is the installation of a gas stream 9 above the sieve openings 41.
  • the polysilicon material delivered by the polysilicon manufacturer in the bag also contains smaller debris and fines.
  • the fine material in particular with grain sizes smaller than 4 mm, has a negative influence on the drawing process and must therefore be removed before use.
  • the Polybruch answering 2 was used.
  • Testpoylsiliciummaterial of the fraction size 2 (without fines ⁇ 4 mm) were given.
  • the application of the test polysilicon material is preferably carried out via a funnel.
  • the container to be filled is positioned over the first conveyor unit at the end of the strainer, so that the
  • Test polysilicon material can be promoted in the container without problems.
  • the preliminarily separated test material is used for this test.
  • the conveyor unit 2 g of separated fine material are added after 2 kg of test polymaterial, so that in the end a total of 10 g of fine material was added for this test.
  • the conveyor unit and the strainer were started.
  • the flow rate was set to 3kg +/- 0.5kg per minute before the test.
  • Test 3 For this purpose, a conveyor unit plus a suction sieve with a gas flow from above was used.
  • the separation device comprises two screen plates, each comprising a polysilicon loading area, a profiled area with peaks and troughs, an area adjoining the profiled area with screen openings, and a removal area, wherein the screen openings in Direction of the removal area on wide, and arranged below the screen openings separating plate which is horizontally and vertically displaceable, and an exhaust below the screen openings.
  • the removal area of the first sieve plate adjoins the feed area of the second sieve plate, ie polysilicon which was not separated in the first sieving line is placed on the second sieve line. In both screens, exhausts are provided below the screen openings.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Silicon Compounds (AREA)
  • Combined Means For Separation Of Solids (AREA)

Abstract

L'invention concerne un dispositif de séparation pour du polysilicium, pourvu d'au moins une plaque perforée (1). Le dispositif comporte une zone d'alimentation (2) en polysilicium, une zone profilée (3) pourvue de pointes (32) et de creux (31), une zone (4) située dans le prolongement de la zone profilée (3) et pourvue d'ouvertures de tamisage (41), et une zone de prélèvement (5), les ouvertures de tamisage (41) s'élargissant en direction de la zone de prélèvement (5), et une plaque séparatrice (7) qui est agencée au-dessous des ouvertures de tamisage et qui peut coulisser horizontalement et verticalement.
EP17746082.1A 2016-12-16 2017-07-28 Dispositif de séparation pour du polysilicium Active EP3554723B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016225248.8A DE102016225248A1 (de) 2016-12-16 2016-12-16 Abscheidevorrichtung für Polysilicium
PCT/EP2017/069199 WO2018108334A1 (fr) 2016-12-16 2017-07-28 Dispositif de séparation pour du polysilicium

Publications (2)

Publication Number Publication Date
EP3554723A1 true EP3554723A1 (fr) 2019-10-23
EP3554723B1 EP3554723B1 (fr) 2022-11-30

Family

ID=59501437

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17746082.1A Active EP3554723B1 (fr) 2016-12-16 2017-07-28 Dispositif de séparation pour du polysilicium

Country Status (9)

Country Link
US (1) US11154908B2 (fr)
EP (1) EP3554723B1 (fr)
JP (1) JP7005627B2 (fr)
KR (1) KR102330224B1 (fr)
CN (1) CN110072638B (fr)
DE (1) DE102016225248A1 (fr)
FI (1) FI3554723T3 (fr)
TW (1) TWI660793B (fr)
WO (1) WO2018108334A1 (fr)

Families Citing this family (4)

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Publication number Priority date Publication date Assignee Title
JP7622204B2 (ja) * 2020-08-24 2025-01-27 ワッカー ケミー アクチエンゲゼルシャフト バルク材料を分級するための分離装置用スクリーンプレート
US20230392784A1 (en) * 2020-11-02 2023-12-07 E.On Energiinfrastruktur Ab Device and method for sorting a particulate stream
DE102023102854B3 (de) 2023-02-06 2024-05-02 Alztec GmbH Vorrichtung und Verfahren zur flexiblen Klassierung von poly- und/oder monokristallinem Silizium
CN117430119B (zh) * 2023-12-20 2024-02-20 四川优赛思智能科技有限公司 一种具备自动堵眼功能的工业硅冶炼系统

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DE826211C (de) * 1950-06-13 1951-12-27 Dr Albert Remien Vorrichtung zum Sortieren von Obst u. dgl.
EP0139783A1 (fr) 1983-11-01 1985-05-08 Ventilatorenfabrik Oelde Gmbh Appareil pour le traitement de rebuts, déchets ou analogues
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US5819951A (en) * 1996-10-29 1998-10-13 A.S.T. Advanced Screening Technologies Ltd. Separator plate for the screening of a particulate material and a sorting apparatus comprising same
AUPO638997A0 (en) * 1997-04-23 1997-05-22 Unisearch Limited Metal contact scheme using selective silicon growth
DE19822996C1 (de) * 1998-05-22 1999-04-22 Siemens Ag Abscheidevorrichtung für langgestreckte Feststoffteile
DE19839024A1 (de) * 1998-08-27 2000-03-09 Wacker Chemie Gmbh Windsichten für Polysilicium
DE19914998A1 (de) 1999-04-01 2000-10-12 Wacker Chemie Gmbh Schwingförderer und Verfahren zur Förderung von Siliciumbruch
JP2002011408A (ja) * 2000-06-30 2002-01-15 Sumitomo Heavy Ind Ltd 振動ふるい装置
US8021483B2 (en) * 2002-02-20 2011-09-20 Hemlock Semiconductor Corporation Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods
US6889846B2 (en) * 2002-03-15 2005-05-10 Johnson Crushers International Hybrid screen
DE102006035081A1 (de) 2006-07-28 2008-01-31 Wacker Chemie Ag Verfahren und Vorrichtung zur Herstellung von klassiertem polykristallinen Siliciumbruch in hoher Reinheit
KR100882556B1 (ko) * 2007-06-21 2009-02-17 주식회사 블루웨일스크린 폐수처리용 스크린장치의 스크린바 고정구조
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CN205161144U (zh) * 2015-12-02 2016-04-20 蒋和忠 一种设有链式振动分离筛装置的收割机

Also Published As

Publication number Publication date
CN110072638B (zh) 2022-08-26
TWI660793B (zh) 2019-06-01
US11154908B2 (en) 2021-10-26
FI3554723T3 (fi) 2023-03-21
JP7005627B2 (ja) 2022-01-21
WO2018108334A1 (fr) 2018-06-21
DE102016225248A1 (de) 2018-06-21
TW201838726A (zh) 2018-11-01
JP2020513313A (ja) 2020-05-14
EP3554723B1 (fr) 2022-11-30
US20200086348A1 (en) 2020-03-19
CN110072638A (zh) 2019-07-30
KR20190097152A (ko) 2019-08-20
KR102330224B1 (ko) 2021-11-22

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