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DK3167694T4 - Apparat og fremgangsmåde til plasmasyntese af grafitiske produkter, inklusiv graphen - Google Patents

Apparat og fremgangsmåde til plasmasyntese af grafitiske produkter, inklusiv graphen Download PDF

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Publication number
DK3167694T4
DK3167694T4 DK15730237.3T DK15730237T DK3167694T4 DK 3167694 T4 DK3167694 T4 DK 3167694T4 DK 15730237 T DK15730237 T DK 15730237T DK 3167694 T4 DK3167694 T4 DK 3167694T4
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DK
Denmark
Prior art keywords
including graphene
graphite products
plasma synthesis
plasma
synthesis
Prior art date
Application number
DK15730237.3T
Other languages
English (en)
Other versions
DK3167694T3 (da
DK3167694T5 (da
Inventor
Dale Andrew Pennington
Aaron Robert Clayton
Katarzyna Luiza Juda
Catharina Paukner
Lukasz Kurzepa
John Cooper Robert Henry St
Krzysztof Kazimierz Koziol
Jerome Yi-Zhe Joaug
Original Assignee
Levidian Nanosystems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=51266610&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DK3167694(T4) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Levidian Nanosystems Ltd filed Critical Levidian Nanosystems Ltd
Publication of DK3167694T3 publication Critical patent/DK3167694T3/da
Publication of DK3167694T4 publication Critical patent/DK3167694T4/da
Application granted granted Critical
Publication of DK3167694T5 publication Critical patent/DK3167694T5/da

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C01B32/184—Preparation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/02—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material
    • B01D46/023—Pockets filters, i.e. multiple bag filters mounted on a common frame
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/126—Microwaves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/129—Radiofrequency
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C01B32/184—Preparation
    • C01B32/186—Preparation by chemical vapour deposition [CVD]
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/4622—Microwave discharges using waveguides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0869—Feeding or evacuating the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0875—Gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0892—Materials to be treated involving catalytically active material
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2204/00—Structure or properties of graphene
    • C01B2204/04—Specific amount of layers or specific thickness

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Plasma Technology (AREA)
DK15730237.3T 2014-06-13 2015-06-12 Apparat og fremgangsmåde til plasmasyntese af grafitiske produkter der indbefatter graphen DK3167694T5 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB1410639.7A GB201410639D0 (en) 2014-06-13 2014-06-13 Apparatus and method for plasma synthesis of graphitic products including graphene
PCT/GB2015/051745 WO2015189643A1 (en) 2014-06-13 2015-06-12 Apparatus and method for plasma synthesis of graphitic products including graphene

Publications (3)

Publication Number Publication Date
DK3167694T3 DK3167694T3 (da) 2018-08-06
DK3167694T4 true DK3167694T4 (da) 2022-07-18
DK3167694T5 DK3167694T5 (da) 2022-08-29

Family

ID=51266610

Family Applications (1)

Application Number Title Priority Date Filing Date
DK15730237.3T DK3167694T5 (da) 2014-06-13 2015-06-12 Apparat og fremgangsmåde til plasmasyntese af grafitiske produkter der indbefatter graphen

Country Status (12)

Country Link
US (3) US11802052B2 (da)
EP (1) EP3167694B9 (da)
JP (1) JP6752782B2 (da)
CA (1) CA2951878C (da)
DK (1) DK3167694T5 (da)
GB (2) GB201410639D0 (da)
IL (1) IL249457B (da)
MY (1) MY179001A (da)
PL (1) PL3167694T5 (da)
SA (1) SA516380482B1 (da)
TR (1) TR201809765T4 (da)
WO (1) WO2015189643A1 (da)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201410639D0 (en) * 2014-06-13 2014-07-30 Fgv Cambridge Nanosystems Ltd Apparatus and method for plasma synthesis of graphitic products including graphene
US11148202B2 (en) 2015-12-16 2021-10-19 6K Inc. Spheroidal dehydrogenated metals and metal alloy particles
US10987735B2 (en) 2015-12-16 2021-04-27 6K Inc. Spheroidal titanium metallic powders with custom microstructures
PT109387B (pt) * 2016-05-13 2021-12-14 Inst Superior Tecnico Processo e sistema para a produção seletiva de nanoestruturas bidimensionais autónomas utilizando tecnologia plasma
EP3523013A4 (en) 2016-10-06 2020-05-27 Lyten, Inc. MICROWAVE REACTOR SYSTEM WITH GAS-SOLID SEPARATION
US12281013B2 (en) 2016-10-06 2025-04-22 Lyten, Inc. Microwave reactor system enclosing a self-igniting plasma
US9812295B1 (en) 2016-11-15 2017-11-07 Lyten, Inc. Microwave chemical processing
CN110248893B (zh) * 2016-12-21 2023-12-01 雷莫工业公司 用于生产石墨烯纳米片的等离子体方法
US9997334B1 (en) 2017-02-09 2018-06-12 Lyten, Inc. Seedless particles with carbon allotropes
US9767992B1 (en) 2017-02-09 2017-09-19 Lyten, Inc. Microwave chemical processing reactor
CA3052851C (en) * 2017-02-10 2023-08-01 Raymor Industries Inc. Graphenic carbon nanoparticles having a low polyaromatic hydrocarbon concentration and processes of making same
CN110418816B (zh) 2017-03-16 2022-05-31 利腾股份有限公司 碳和弹性体整合
US10920035B2 (en) 2017-03-16 2021-02-16 Lyten, Inc. Tuning deformation hysteresis in tires using graphene
CA3076487A1 (en) * 2017-04-07 2018-10-11 Nuionic Technologies Lp Microwave enhancement of chemical reactions
US9987611B1 (en) 2017-08-08 2018-06-05 H Quest Vanguard, Inc. Non-thermal plasma conversion of hydrocarbons
US11358113B2 (en) 2017-08-08 2022-06-14 H Quest Vanguard, Inc. Non-thermal micro-plasma conversion of hydrocarbons
US10434490B2 (en) 2017-08-08 2019-10-08 H Quest Vanguard, Inc. Microwave-induced non-thermal plasma conversion of hydrocarbons
US11358869B2 (en) 2017-08-08 2022-06-14 H Quest Vanguard, Inc. Methods and systems for microwave assisted production of graphitic materials
CA3191035A1 (en) * 2017-08-08 2019-02-14 H Quest Vanguard, Inc. Method for conversion of hydrocarbons via microwave-generated non-thermal plasma
WO2019126196A1 (en) 2017-12-22 2019-06-27 Lyten, Inc. Structured composite materials
CN112105922B (zh) 2018-01-04 2024-09-03 利腾股份有限公司 谐振气体传感器
US10644368B2 (en) 2018-01-16 2020-05-05 Lyten, Inc. Pressure barrier comprising a transparent microwave window providing a pressure difference on opposite sides of the window
WO2019246257A1 (en) 2018-06-19 2019-12-26 Amastan Technologies Inc. Process for producing spheroidized powder from feedstock materials
DE102018132896A1 (de) 2018-12-19 2020-06-25 Universität Duisburg-Essen Verfahren zur Herstellung eines Graphen-Komposits
SG11202106688SA (en) 2018-12-21 2021-07-29 Performance Nanocarbon Incorporated In situ production and functionalization of carbon materials via gas-liquid mass transfer and uses thereof
JP7042492B2 (ja) * 2018-12-26 2022-03-28 シーズテクノ株式会社 基板上のグラフェン膜の直接成膜法及び走査型プローブ顕微鏡用カンチレバー
CN109824038B (zh) * 2019-02-20 2022-03-25 南京大学 一种高效消除化学气相沉积法石墨烯褶皱的方法
US12159768B2 (en) * 2019-03-25 2024-12-03 Recarbon, Inc. Controlling exhaust gas pressure of a plasma reactor for plasma stability
CN110090604B (zh) * 2019-04-24 2021-09-17 南京奥依菲光电科技有限公司 制备石墨烯包覆无机非金属微/纳米颗粒的工艺
US11489161B2 (en) 2019-10-25 2022-11-01 Lyten, Inc. Powdered materials including carbonaceous structures for lithium-sulfur battery cathodes
US11309545B2 (en) 2019-10-25 2022-04-19 Lyten, Inc. Carbonaceous materials for lithium-sulfur batteries
US11398622B2 (en) 2019-10-25 2022-07-26 Lyten, Inc. Protective layer including tin fluoride disposed on a lithium anode in a lithium-sulfur battery
US11342561B2 (en) 2019-10-25 2022-05-24 Lyten, Inc. Protective polymeric lattices for lithium anodes in lithium-sulfur batteries
US12126024B2 (en) 2019-10-25 2024-10-22 Lyten, Inc. Battery including multiple protective layers
EP4414470A3 (en) 2019-11-18 2024-10-23 6K Inc. Unique feedstocks for spherical powders and methods of manufacturing
US11623197B2 (en) 2020-01-23 2023-04-11 Lyten, Inc. Complex modality reactor for materials production and synthesis
CN116034496A (zh) 2020-06-25 2023-04-28 6K有限公司 微观复合合金结构
US11773014B2 (en) 2020-08-04 2023-10-03 Lyten, Inc. Toughened carbon-containing glass materials
WO2022067303A1 (en) 2020-09-24 2022-03-31 6K Inc. Systems, devices, and methods for starting plasma
AU2021371051A1 (en) 2020-10-30 2023-03-30 6K Inc. Systems and methods for synthesis of spheroidized metal powders
CA3197544A1 (en) 2021-01-11 2022-07-14 6K Inc. Methods and systems for reclamation of li-ion cathode materials using microwave plasma processing
US12042861B2 (en) 2021-03-31 2024-07-23 6K Inc. Systems and methods for additive manufacturing of metal nitride ceramics
EP4340984A4 (en) 2021-05-17 2025-04-09 H Quest Vanguard, Inc. MICROWAVE-ASSISTED FLUIDIZED BED REACTOR
US12261023B2 (en) 2022-05-23 2025-03-25 6K Inc. Microwave plasma apparatus and methods for processing materials using an interior liner
US12040162B2 (en) 2022-06-09 2024-07-16 6K Inc. Plasma apparatus and methods for processing feed material utilizing an upstream swirl module and composite gas flows
GB2620597A (en) 2022-07-12 2024-01-17 Levidian Nanosystems Ltd Apparatus and method for producing graphene and hydrogen
WO2024044498A1 (en) 2022-08-25 2024-02-29 6K Inc. Plasma apparatus and methods for processing feed material utilizing a powder ingress preventor (pip)
US12195338B2 (en) 2022-12-15 2025-01-14 6K Inc. Systems, methods, and device for pyrolysis of methane in a microwave plasma for hydrogen and structured carbon powder production
CN116281975B (zh) * 2023-03-29 2025-01-10 福州大学 一种交流组合等离子体制备纳米材料的方法
AU2024264640A1 (en) * 2023-05-09 2024-12-19 Rodolfo Antonio M. Gomez Manufacture of graphene and large graphene electrodes
CN117550590A (zh) * 2023-06-06 2024-02-13 清华大学 石墨烯制备方法和制备装置
US20250357083A1 (en) * 2024-05-14 2025-11-20 Rimere, Llc Systems and Methods for Energizing Elements in Reactor Flow via Microwave
GB202407629D0 (en) 2024-05-29 2024-07-10 Levidian Nanosystems Ltd Process for producing electrode material
GB202408499D0 (en) 2024-06-13 2024-07-31 Levidian Nanosystems Ltd Process for producing electrode material

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2794913B2 (ja) 1990-07-25 1998-09-10 住友電気工業株式会社 導電性グラファイト膜の形成方法
US5349154A (en) * 1991-10-16 1994-09-20 Rockwell International Corporation Diamond growth by microwave generated plasma flame
FR2701267B1 (fr) † 1993-02-05 1995-04-07 Schwob Yvan Procédé pour la fabrication de suies carbonées à microstructures définies.
WO2001046067A1 (en) * 1999-12-21 2001-06-28 Bechtel Bwxt Idaho, Llc Hydrogen and elemental carbon production from natural gas and other hydrocarbons
RU2234457C2 (ru) * 2001-06-01 2004-08-20 Общество с ограниченной ответственностью "Научно-производственная компания "НеоТекПродакт" Способ получения фуллеренсодержащей сажи и устройство для его осуществления
GB0201600D0 (en) 2002-01-24 2002-03-13 Univ Cambridge Tech Large- scale plasma synthesis of hollow nanostructures
CA2584508A1 (en) * 2002-05-09 2003-11-09 Institut National De La Recherche Scientifique Method for producing single-wall carbon nanotubes
KR20050085704A (ko) * 2002-12-17 2005-08-29 이 아이 듀폰 디 네모아 앤드 캄파니 반응 챔버 플라스마 반응기 시스템으로 증발-응축 방법을사용하는 나노입자의 제조 방법
WO2005039753A1 (en) * 2003-10-15 2005-05-06 Dow Corning Ireland Limited Fonctionalisation of particles
AU2003292562A1 (en) * 2003-12-17 2005-07-05 Frontier Carbon Corporation Apparatus and method for preparing fullerene
SG111177A1 (en) * 2004-02-28 2005-05-30 Wira Kurnia Fine particle powder production
US7164095B2 (en) * 2004-07-07 2007-01-16 Noritsu Koki Co., Ltd. Microwave plasma nozzle with enhanced plume stability and heating efficiency
KR101207602B1 (ko) 2004-09-07 2012-12-03 닛신 엔지니어링 가부시키가이샤 미립자의 제조방법 및 장치
JP4988164B2 (ja) 2005-03-08 2012-08-01 株式会社日清製粉グループ本社 微粒子の製造方法と装置
CA2500766A1 (en) * 2005-03-14 2006-09-14 National Research Council Of Canada Method and apparatus for the continuous production and functionalization of single-walled carbon nanotubes using a high frequency induction plasma torch
US20100072430A1 (en) * 2005-10-14 2010-03-25 Gergely John S Compositions of carbon nanosheets and process to make the same
US20100314788A1 (en) † 2006-08-18 2010-12-16 Cheng-Hung Hung Production of Ultrafine Particles in a Plasma System Having Controlled Pressure Zones
GB0902784D0 (en) * 2009-02-19 2009-04-08 Gasplas As Plasma reactor
KR101252333B1 (ko) 2009-04-02 2013-04-08 서울대학교산학협력단 열플라즈마 화학기상증착법을 이용한 제어 가능한 그래핀 시트 제조방법
US20100301212A1 (en) 2009-05-18 2010-12-02 The Regents Of The University Of California Substrate-free gas-phase synthesis of graphene sheets
KR101085848B1 (ko) 2009-11-20 2011-11-23 (주)아이티네이드 유비쿼터스 컴퓨팅 네트워크에서의 멤버 관리방법
US8721843B2 (en) * 2010-10-15 2014-05-13 Cedar Ridge Research, Llc Method for producing graphene in a magnetic field
GB2490355B (en) * 2011-04-28 2015-10-14 Gasplas As Method for processing a gas and a device for performing the method
KR101265939B1 (ko) * 2011-06-10 2013-05-21 한국세라믹기술원 유도 열 플라즈마를 이용한 그래핀 제조방법
US20130022530A1 (en) * 2011-07-19 2013-01-24 Robert Angelo Mercuri Production Of Exfoliated Graphite
JP2013040151A (ja) 2011-08-19 2013-02-28 Tokyo Institute Of Technology テトラフルオロエチレンの製造方法
US8486363B2 (en) * 2011-09-30 2013-07-16 Ppg Industries Ohio, Inc. Production of graphenic carbon particles utilizing hydrocarbon precursor materials
US20140030447A1 (en) * 2012-01-17 2014-01-30 Synos Technology, Inc. Deposition of Graphene or Conjugated Carbons Using Radical Reactor
US9514932B2 (en) * 2012-08-08 2016-12-06 Applied Materials, Inc. Flowable carbon for semiconductor processing
KR101330230B1 (ko) * 2013-02-05 2013-11-18 재단법인 철원플라즈마 산업기술연구원 고밀도로 나노입자가 결정화되어 있는 그래핀―나노 융합체
WO2014131043A1 (en) * 2013-02-25 2014-08-28 Solan, LLC Methods for fabricating graphite-based structures and devices made therefrom
JP6153118B2 (ja) * 2013-08-30 2017-06-28 国立研究開発法人産業技術総合研究所 マイクロ波プラズマ処理装置
US9327232B2 (en) * 2013-10-04 2016-05-03 Marsulex Environmental Technologies Corporation Circulating dry scrubber system and method
GB201410639D0 (en) * 2014-06-13 2014-07-30 Fgv Cambridge Nanosystems Ltd Apparatus and method for plasma synthesis of graphitic products including graphene
GB2545643B (en) * 2015-12-15 2022-06-15 Levidian Nanosystems Ltd Apparatus and method for plasma synthesis of carbon nanotubes

Also Published As

Publication number Publication date
IL249457B (en) 2022-01-01
MY179001A (en) 2020-10-26
EP3167694B1 (en) 2018-05-02
GB2527209A (en) 2015-12-16
EP3167694B9 (en) 2022-08-10
DK3167694T3 (da) 2018-08-06
PL3167694T5 (pl) 2022-09-12
JP2017523121A (ja) 2017-08-17
US20250154008A1 (en) 2025-05-15
US20240010499A1 (en) 2024-01-11
WO2015189643A1 (en) 2015-12-17
GB201410639D0 (en) 2014-07-30
CA2951878C (en) 2023-04-25
US12252402B2 (en) 2025-03-18
CA2951878A1 (en) 2015-12-17
SA516380482B1 (ar) 2023-01-31
PL3167694T3 (pl) 2018-10-31
EP3167694A1 (en) 2017-05-17
EP3167694B2 (en) 2022-04-13
IL249457A0 (en) 2017-02-28
US20170113935A1 (en) 2017-04-27
TR201809765T4 (tr) 2018-07-23
JP6752782B2 (ja) 2020-09-09
GB201510364D0 (en) 2015-07-29
US11802052B2 (en) 2023-10-31
DK3167694T5 (da) 2022-08-29
GB2527209B (en) 2019-08-28

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