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AU2003281077A1 - Detection method and apparatus - Google Patents

Detection method and apparatus

Info

Publication number
AU2003281077A1
AU2003281077A1 AU2003281077A AU2003281077A AU2003281077A1 AU 2003281077 A1 AU2003281077 A1 AU 2003281077A1 AU 2003281077 A AU2003281077 A AU 2003281077A AU 2003281077 A AU2003281077 A AU 2003281077A AU 2003281077 A1 AU2003281077 A1 AU 2003281077A1
Authority
AU
Australia
Prior art keywords
detection method
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003281077A
Inventor
Victor Higgs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aoti Operating Co Inc
Original Assignee
Aoti Operating Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aoti Operating Co Inc filed Critical Aoti Operating Co Inc
Publication of AU2003281077A1 publication Critical patent/AU2003281077A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6489—Photoluminescence of semiconductors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Landscapes

  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
AU2003281077A 2002-07-17 2003-07-14 Detection method and apparatus Abandoned AU2003281077A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0216622.1 2002-07-17
GB0216622A GB0216622D0 (en) 2002-07-17 2002-07-17 Detection method and apparatus
PCT/GB2003/003045 WO2004008119A1 (en) 2002-07-17 2003-07-14 Detection method and apparatus

Publications (1)

Publication Number Publication Date
AU2003281077A1 true AU2003281077A1 (en) 2004-02-02

Family

ID=9940657

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003281077A Abandoned AU2003281077A1 (en) 2002-07-17 2003-07-14 Detection method and apparatus

Country Status (4)

Country Link
AU (1) AU2003281077A1 (en)
GB (1) GB0216622D0 (en)
TW (1) TW200411167A (en)
WO (1) WO2004008119A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI391645B (en) * 2005-07-06 2013-04-01 Nanometrics Inc Differential wavelength photoluminescence for non-contact measuring of contaminants and defects located below the surface of a wafer or other workpiece
DE102007057011B4 (en) * 2007-11-23 2011-04-28 Pi Photovoltaik-Institut Berlin Ag Detecting device and method for detecting damage of a solar cell by means of photoluminescence
DE102010011066B4 (en) * 2010-03-11 2020-10-22 Pi4_Robotics Gmbh Photovoltaic module or photovoltaic cell or semiconductor component identification method and photovoltaic module or photovoltaic cell or semiconductor component identification device
CN104025276A (en) * 2011-11-07 2014-09-03 Bt成像股份有限公司 Wafer Grading and Sorting for Photovoltaic Cell Manufacturing
JP6296001B2 (en) 2015-05-20 2018-03-20 信越半導体株式会社 Manufacturing method and evaluation method of silicon epitaxial wafer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4571685A (en) * 1982-06-23 1986-02-18 Nec Corporation Production system for manufacturing semiconductor devices
GB9618897D0 (en) * 1996-09-10 1996-10-23 Bio Rad Micromeasurements Ltd Micro defects in silicon wafers
GB9803842D0 (en) * 1998-02-25 1998-04-22 Shin Etsu Handotai Europ Ltd Semiconductor wafer inspection apparatus

Also Published As

Publication number Publication date
GB0216622D0 (en) 2002-08-28
TW200411167A (en) 2004-07-01
WO2004008119A1 (en) 2004-01-22

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase