AU2003281574A1 - Detection method and apparatus - Google Patents

Detection method and apparatus

Info

Publication number: AU2003281574A1
Authority: AU; Australia
Prior art keywords: detection method; detection
Prior art date: 2002-07-19
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2003281574A

Inventor

Victor Higgs

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Aoti Operating Co Inc

Original Assignee

Aoti Operating Co Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-07-19

Filing date

2003-07-14

Publication date

2004-02-09

2003-07-14 Application filed by Aoti Operating Co Inc filed Critical Aoti Operating Co Inc

2004-02-09 Publication of AU2003281574A1 publication Critical patent/AU2003281574A1/en

Status Abandoned legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6489—Photoluminescence of semiconductors
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers

Landscapes

Health & Medical Sciences (AREA)
Biochemistry (AREA)
Physics & Mathematics (AREA)
Life Sciences & Earth Sciences (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
General Health & Medical Sciences (AREA)
General Physics & Mathematics (AREA)
Immunology (AREA)
Pathology (AREA)
Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
Testing Or Measuring Of Semiconductors Or The Like (AREA)
Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

AU2003281574A 2002-07-19 2003-07-14 Detection method and apparatus Abandoned AU2003281574A1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
GB0216815.1		2002-07-19
GB0216815A GB0216815D0 (en)	2002-07-19	2002-07-19	Detection method and apparatus
PCT/GB2003/003022 WO2004010121A1 (en)	2002-07-19	2003-07-14	Detection method and apparatus

Publications (1)

Publication Number	Publication Date
AU2003281574A1 true AU2003281574A1 (en)	2004-02-09

Family

ID=9940777

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2003281574A Abandoned AU2003281574A1 (en)	2002-07-19	2003-07-14	Detection method and apparatus

Country Status (4)

Country	Link
AU (1)	AU2003281574A1 (en)
GB (1)	GB0216815D0 (en)
TW (1)	TW200427978A (en)
WO (1)	WO2004010121A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB9618897D0 (en)	1996-09-10	1996-10-23	Bio Rad Micromeasurements Ltd	Micro defects in silicon wafers
GB0308182D0 (en)	2003-04-09	2003-05-14	Aoti Operating Co Inc	Detection method and apparatus
TWI439684B (en)	2005-07-06	2014-06-01	Nanometrics Inc	Photoluminescence imaging with preferential detection of photoluminescence signals emitted from a specified material layer of a wafer or other workpiece
TWI391645B (en)	2005-07-06	2013-04-01	Nanometrics Inc	Differential wavelength photoluminescence for non-contact measuring of contaminants and defects located below the surface of a wafer or other workpiece
RU2374607C2 (en) *	2007-10-11	2009-11-27	Валерий Андреевич Базыленко	Method of controlling surface roughness based on effect of photoluminescence of nanoparticles
US9633865B2 (en)	2008-02-22	2017-04-25	Rohm And Haas Electronic Materials Cmp Holdings, Inc.	Low-stain polishing composition
CN102089874A (en) *	2008-07-09	2011-06-08	Bt成像股份有限公司	Thin film imaging method and apparatus
KR20110055631A (en) *	2008-08-19	2011-05-25	비티 이미징 피티와이 리미티드	Method and apparatus for fault detection
US8441639B2 (en) *	2009-09-03	2013-05-14	Kla-Tencor Corp.	Metrology systems and methods
WO2011079353A1 (en) *	2010-01-04	2011-07-07	Bt Imaging Pty Ltd	Improved illumination systems and methods for photoluminescence imaging of photovoltaic cells and wafers
US8629411B2 (en)	2010-07-13	2014-01-14	First Solar, Inc.	Photoluminescence spectroscopy
US9354177B2 (en) *	2013-06-26	2016-05-31	Kla-Tencor Corporation	System and method for defect detection and photoluminescence measurement of a sample
CN110854032A (en) *	2019-11-13	2020-02-28	上海华力集成电路制造有限公司	Method for detecting particle defects in germanium-silicon process
CN111337458A (en) *	2020-03-30	2020-06-26	创能动力科技有限公司	Defect detection method and system for semiconductor layer
CN114486926B (en) *	2021-12-30	2024-03-26	深圳瑞波光电子有限公司	Failure analysis method for semiconductor laser chip

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4571685A (en) *	1982-06-23	1986-02-18	Nec Corporation	Production system for manufacturing semiconductor devices
GB9618897D0 (en) *	1996-09-10	1996-10-23	Bio Rad Micromeasurements Ltd	Micro defects in silicon wafers
GB9803842D0 (en) *	1998-02-25	1998-04-22	Shin Etsu Handotai Europ Ltd	Semiconductor wafer inspection apparatus

2002
- 2002-07-19 GB GB0216815A patent/GB0216815D0/en not_active Ceased
2003
- 2003-07-14 AU AU2003281574A patent/AU2003281574A1/en not_active Abandoned
- 2003-07-14 WO PCT/GB2003/003022 patent/WO2004010121A1/en not_active Ceased
- 2003-07-17 TW TW92119557A patent/TW200427978A/en unknown

Also Published As

Publication number	Publication date
GB0216815D0 (en)	2002-08-28
TW200427978A (en)	2004-12-16
WO2004010121A1 (en)	2004-01-29

Publication	Publication Date	Title
AU2003275045A1 (en)	2004-05-25	Knowledge system method and apparatus
AU2003271973A1 (en)	2004-05-04	Position sensing apparatus and method
GB0204167D0 (en)	2002-04-10	Object detection apparatus and method
AU2003218412A1 (en)	2003-10-13	Geophysical method and apparatus
AU2002326453A1 (en)	2003-02-17	First-arriving-pulse detection apparatus and associated methods
AU2003902423A0 (en)	2003-06-05	Apparatus and method
AU2003902318A0 (en)	2003-05-29	Improved Sensing Apparatus And Method
AUPR899401A0 (en)	2001-12-13	Method and apparatus for non-motion detection
AU2003303361A1 (en)	2004-07-22	Analysis apparatus and method
AU2003234595A1 (en)	2003-12-02	Apparatus and method for detecting obstacles
AU2003233956A1 (en)	2003-10-20	Method and apparatus for improved cell detection
AU2003295167A1 (en)	2004-07-29	Sensing apparatus and method
AU2003291081A1 (en)	2004-07-29	Identification apparatus and method
AU2003303418A1 (en)	2004-07-22	Object identifying method and apparatus
AU2003281574A1 (en)	2004-02-09	Detection method and apparatus
AU2002347417A1 (en)	2004-05-13	Space-dyeing method and apparatus
AU2003282945A1 (en)	2004-05-13	Method and apparatus for fingerprint detection
AU2003211257A1 (en)	2003-09-29	Signal processing method and signal processing apparatus
AU2003271932A1 (en)	2004-05-13	Method and apparatus for detecting surveillance devices
AU2003208397A1 (en)	2003-09-02	Sensing apparatus and method
AU2003297889A1 (en)	2004-07-29	Method and apparatus for asperity detection
AU2003214281A1 (en)	2003-09-29	Method and apparatus for sensing
AU2003229892A1 (en)	2003-10-27	Method and apparatus for gas detection
GB0216620D0 (en)	2002-08-28	Detection method and apparatus
AU2003211475A1 (en)	2003-09-09	Receiving apparatus and receiving method

Legal Events

Date	Code	Title	Description
2005-07-21	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase