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GB9803842D0 - Semiconductor wafer inspection apparatus - Google Patents

Semiconductor wafer inspection apparatus

Info

Publication number
GB9803842D0
GB9803842D0 GBGB9803842.5A GB9803842A GB9803842D0 GB 9803842 D0 GB9803842 D0 GB 9803842D0 GB 9803842 A GB9803842 A GB 9803842A GB 9803842 D0 GB9803842 D0 GB 9803842D0
Authority
GB
United Kingdom
Prior art keywords
semiconductor wafer
inspection apparatus
wafer inspection
semiconductor
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9803842.5A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Europe Ltd
Original Assignee
Shin Etsu Handotai Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Europe Ltd filed Critical Shin Etsu Handotai Europe Ltd
Priority to GBGB9803842.5A priority Critical patent/GB9803842D0/en
Publication of GB9803842D0 publication Critical patent/GB9803842D0/en
Priority to PCT/GB1999/000536 priority patent/WO1999044231A1/en
Ceased legal-status Critical Current

Links

GBGB9803842.5A 1998-02-25 1998-02-25 Semiconductor wafer inspection apparatus Ceased GB9803842D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GBGB9803842.5A GB9803842D0 (en) 1998-02-25 1998-02-25 Semiconductor wafer inspection apparatus
PCT/GB1999/000536 WO1999044231A1 (en) 1998-02-25 1999-02-22 Semiconductor wafer inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9803842.5A GB9803842D0 (en) 1998-02-25 1998-02-25 Semiconductor wafer inspection apparatus

Publications (1)

Publication Number Publication Date
GB9803842D0 true GB9803842D0 (en) 1998-04-22

Family

ID=10827484

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9803842.5A Ceased GB9803842D0 (en) 1998-02-25 1998-02-25 Semiconductor wafer inspection apparatus

Country Status (2)

Country Link
GB (1) GB9803842D0 (en)
WO (1) WO1999044231A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0216184D0 (en) * 2002-07-12 2002-08-21 Aoti Operating Co Inc Detection method and apparatus
GB0216622D0 (en) * 2002-07-17 2002-08-28 Aoti Operating Co Inc Detection method and apparatus
GB0216815D0 (en) * 2002-07-19 2002-08-28 Aoti Operating Co Inc Detection method and apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4644172A (en) * 1984-02-22 1987-02-17 Kla Instruments Corporation Electronic control of an automatic wafer inspection system
US4851902A (en) * 1986-10-29 1989-07-25 Electroplating Engineers Of Japan, Limited Auatomatic inspection system for IC lead frames and visual inspection method thereof
JPS63216354A (en) * 1987-03-05 1988-09-08 Mitsubishi Electric Corp Appearance inspection equipment for semiconductor devices
JPH09167788A (en) * 1995-12-14 1997-06-24 Shin Etsu Handotai Co Ltd Inspecting method and handling device of wafer
DE19610124C2 (en) * 1996-03-14 1999-04-01 Siemens Ag Device for checking electrical components, in particular integrated circuits

Also Published As

Publication number Publication date
WO1999044231A1 (en) 1999-09-02

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)