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AU2001253551A1 - Electroplating bath composition and method of using - Google Patents

Electroplating bath composition and method of using

Info

Publication number
AU2001253551A1
AU2001253551A1 AU2001253551A AU5355101A AU2001253551A1 AU 2001253551 A1 AU2001253551 A1 AU 2001253551A1 AU 2001253551 A AU2001253551 A AU 2001253551A AU 5355101 A AU5355101 A AU 5355101A AU 2001253551 A1 AU2001253551 A1 AU 2001253551A1
Authority
AU
Australia
Prior art keywords
electroplating bath
bath composition
composition
electroplating
bath
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001253551A
Inventor
Nathan E. Baxter
Valery M. Dubin
Kimin Hong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of AU2001253551A1 publication Critical patent/AU2001253551A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18Electroplating using modulated, pulsed or reversing current
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/615Microstructure of the layers, e.g. mixed structure
    • C25D5/617Crystalline layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/12Semiconductors
    • C25D7/123Semiconductors first coated with a seed layer or a conductive layer
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/1234Honeycomb, or with grain orientation or elongated elements in defined angular relationship in respective components [e.g., parallel, inter- secting, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
AU2001253551A 2000-04-27 2001-04-10 Electroplating bath composition and method of using Abandoned AU2001253551A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/560,671 2000-04-27
US09/560,671 US6491806B1 (en) 2000-04-27 2000-04-27 Electroplating bath composition
PCT/US2001/012348 WO2001083854A2 (en) 2000-04-27 2001-04-10 Electroplating bath composition and method of using

Publications (1)

Publication Number Publication Date
AU2001253551A1 true AU2001253551A1 (en) 2001-11-12

Family

ID=24238817

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001253551A Abandoned AU2001253551A1 (en) 2000-04-27 2001-04-10 Electroplating bath composition and method of using

Country Status (5)

Country Link
US (3) US6491806B1 (en)
EP (1) EP1276919A2 (en)
AU (1) AU2001253551A1 (en)
TW (1) TW575693B (en)
WO (1) WO2001083854A2 (en)

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Also Published As

Publication number Publication date
US6893550B2 (en) 2005-05-17
US6491806B1 (en) 2002-12-10
US20050014014A1 (en) 2005-01-20
WO2001083854A2 (en) 2001-11-08
TW575693B (en) 2004-02-11
US20020036145A1 (en) 2002-03-28
WO2001083854A3 (en) 2002-10-03
EP1276919A2 (en) 2003-01-22

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