AU2001253551A1 - Electroplating bath composition and method of using - Google Patents
Electroplating bath composition and method of usingInfo
- Publication number
- AU2001253551A1 AU2001253551A1 AU2001253551A AU5355101A AU2001253551A1 AU 2001253551 A1 AU2001253551 A1 AU 2001253551A1 AU 2001253551 A AU2001253551 A AU 2001253551A AU 5355101 A AU5355101 A AU 5355101A AU 2001253551 A1 AU2001253551 A1 AU 2001253551A1
- Authority
- AU
- Australia
- Prior art keywords
- electroplating bath
- bath composition
- composition
- electroplating
- bath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000009713 electroplating Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/18—Electroplating using modulated, pulsed or reversing current
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/60—Electroplating characterised by the structure or texture of the layers
- C25D5/615—Microstructure of the layers, e.g. mixed structure
- C25D5/617—Crystalline layers
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
- C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/1234—Honeycomb, or with grain orientation or elongated elements in defined angular relationship in respective components [e.g., parallel, inter- secting, etc.]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/560,671 | 2000-04-27 | ||
| US09/560,671 US6491806B1 (en) | 2000-04-27 | 2000-04-27 | Electroplating bath composition |
| PCT/US2001/012348 WO2001083854A2 (en) | 2000-04-27 | 2001-04-10 | Electroplating bath composition and method of using |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU2001253551A1 true AU2001253551A1 (en) | 2001-11-12 |
Family
ID=24238817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2001253551A Abandoned AU2001253551A1 (en) | 2000-04-27 | 2001-04-10 | Electroplating bath composition and method of using |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US6491806B1 (en) |
| EP (1) | EP1276919A2 (en) |
| AU (1) | AU2001253551A1 (en) |
| TW (1) | TW575693B (en) |
| WO (1) | WO2001083854A2 (en) |
Families Citing this family (74)
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| US7550005B2 (en) * | 1995-06-07 | 2009-06-23 | Cook Incorporated | Coated implantable medical device |
| US6921468B2 (en) * | 1997-09-30 | 2005-07-26 | Semitool, Inc. | Electroplating system having auxiliary electrode exterior to main reactor chamber for contact cleaning operations |
| US6565729B2 (en) | 1998-03-20 | 2003-05-20 | Semitool, Inc. | Method for electrochemically depositing metal on a semiconductor workpiece |
| US6497801B1 (en) | 1998-07-10 | 2002-12-24 | Semitool Inc | Electroplating apparatus with segmented anode array |
| US7189318B2 (en) | 1999-04-13 | 2007-03-13 | Semitool, Inc. | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| US7264698B2 (en) | 1999-04-13 | 2007-09-04 | Semitool, Inc. | Apparatus and methods for electrochemical processing of microelectronic workpieces |
| US7438788B2 (en) | 1999-04-13 | 2008-10-21 | Semitool, Inc. | Apparatus and methods for electrochemical processing of microelectronic workpieces |
| US6916412B2 (en) | 1999-04-13 | 2005-07-12 | Semitool, Inc. | Adaptable electrochemical processing chamber |
| US7351315B2 (en) | 2003-12-05 | 2008-04-01 | Semitool, Inc. | Chambers, systems, and methods for electrochemically processing microfeature workpieces |
| US7585398B2 (en) | 1999-04-13 | 2009-09-08 | Semitool, Inc. | Chambers, systems, and methods for electrochemically processing microfeature workpieces |
| US7160421B2 (en) | 1999-04-13 | 2007-01-09 | Semitool, Inc. | Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| WO2000061837A1 (en) | 1999-04-13 | 2000-10-19 | Semitool, Inc. | Workpiece processor having processing chamber with improved processing fluid flow |
| US7351314B2 (en) | 2003-12-05 | 2008-04-01 | Semitool, Inc. | Chambers, systems, and methods for electrochemically processing microfeature workpieces |
| US7020537B2 (en) | 1999-04-13 | 2006-03-28 | Semitool, Inc. | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| JP3643533B2 (en) * | 2000-12-27 | 2005-04-27 | 株式会社東芝 | Semiconductor device and manufacturing method thereof |
| US20050081744A1 (en) * | 2003-10-16 | 2005-04-21 | Semitool, Inc. | Electroplating compositions and methods for electroplating |
| US6740221B2 (en) * | 2001-03-15 | 2004-05-25 | Applied Materials Inc. | Method of forming copper interconnects |
| US7189647B2 (en) | 2001-04-05 | 2007-03-13 | Novellus Systems, Inc. | Sequential station tool for wet processing of semiconductor wafers |
| AU2002343330A1 (en) | 2001-08-31 | 2003-03-10 | Semitool, Inc. | Apparatus and methods for electrochemical processing of microelectronic workpieces |
| US6827833B2 (en) * | 2001-10-15 | 2004-12-07 | Faraday Technology Marketing Group, Llc | Electrodeposition of metals in high-aspect ratio cavities using modulated reverse electric fields |
| US6919011B2 (en) * | 2001-12-27 | 2005-07-19 | The Hong Kong Polytechnic University | Complex waveform electroplating |
| US6676823B1 (en) * | 2002-03-18 | 2004-01-13 | Taskem, Inc. | High speed acid copper plating |
| JP2005522587A (en) * | 2002-04-12 | 2005-07-28 | エーシーエム リサーチ,インコーポレイティド | Electropolishing and electroplating methods |
| US7247223B2 (en) * | 2002-05-29 | 2007-07-24 | Semitool, Inc. | Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces |
| DE10223957B4 (en) * | 2002-05-31 | 2006-12-21 | Advanced Micro Devices, Inc., Sunnyvale | An improved method of electroplating copper on a patterned dielectric layer |
| EP1475463B2 (en) * | 2002-12-20 | 2017-03-01 | Shipley Company, L.L.C. | Reverse pulse plating method |
| KR20040073974A (en) * | 2003-02-14 | 2004-08-21 | 롬 앤드 하스 일렉트로닉 머트어리얼즈, 엘.엘.씨. | Electroplating composition |
| US20040196697A1 (en) * | 2003-04-03 | 2004-10-07 | Ted Ko | Method of improving surface mobility before electroplating |
| JP2004315889A (en) * | 2003-04-16 | 2004-11-11 | Ebara Corp | Method for plating semiconductor substrate |
| JP2004342750A (en) * | 2003-05-14 | 2004-12-02 | Toshiba Corp | Electronic device manufacturing method |
| US20050274622A1 (en) * | 2004-06-10 | 2005-12-15 | Zhi-Wen Sun | Plating chemistry and method of single-step electroplating of copper on a barrier metal |
| US7150820B2 (en) * | 2003-09-22 | 2006-12-19 | Semitool, Inc. | Thiourea- and cyanide-free bath and process for electrolytic etching of gold |
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| CN1918327B (en) * | 2003-12-22 | 2010-08-25 | 恩索恩公司 | Copper electroplating in microelectronics |
| US7300860B2 (en) * | 2004-03-30 | 2007-11-27 | Intel Corporation | Integrated circuit with metal layer having carbon nanotubes and methods of making same |
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| US7438794B2 (en) * | 2004-09-30 | 2008-10-21 | Intel Corporation | Method of copper electroplating to improve gapfill |
| TWI400365B (en) | 2004-11-12 | 2013-07-01 | Enthone | Copper electrodeposition in microelectronics |
| FR2890984B1 (en) * | 2005-09-20 | 2009-03-27 | Alchimer Sa | ELECTRODEPOSITION PROCESS FOR COATING A SURFACE OF A SUBSTRATE WITH A METAL |
| FR2890983B1 (en) * | 2005-09-20 | 2007-12-14 | Alchimer Sa | ELECTRODEPOSITION COMPOSITION FOR COATING A SURFACE OF A SUBSTRATE WITH A METAL |
| US20070158199A1 (en) * | 2005-12-30 | 2007-07-12 | Haight Scott M | Method to modulate the surface roughness of a plated deposit and create fine-grained flat bumps |
| JP4811880B2 (en) * | 2006-01-06 | 2011-11-09 | エントン インコーポレイテッド | Electrolyte and process for depositing a matte metal layer |
| US20070178697A1 (en) * | 2006-02-02 | 2007-08-02 | Enthone Inc. | Copper electrodeposition in microelectronics |
| WO2007112768A1 (en) * | 2006-03-30 | 2007-10-11 | Freescale Semiconductor, Inc. | Process for filling recessed features in a dielectric substrate |
| EP1897973A1 (en) * | 2006-09-07 | 2008-03-12 | Enthone, Inc. | Deposition of conductive polymer and metallization of non-conductive substrates |
| KR101409710B1 (en) | 2006-09-07 | 2014-06-24 | 엔쏜 인코포레이티드 | Electrodeposition of conductive polymers and metallization of non-conductive substrates |
| US20080113508A1 (en) * | 2006-11-13 | 2008-05-15 | Akolkar Rohan N | Method of fabricating metal interconnects using a sacrificial layer to protect seed layer prior to gap fill |
| WO2008126522A1 (en) * | 2007-03-15 | 2008-10-23 | Nippon Mining & Metals Co., Ltd. | Copper electrolyte solution and two-layer flexible substrate obtained by using the same |
| US7887693B2 (en) | 2007-06-22 | 2011-02-15 | Maria Nikolova | Acid copper electroplating bath composition |
| US20090038947A1 (en) * | 2007-08-07 | 2009-02-12 | Emat Technology, Llc. | Electroplating aqueous solution and method of making and using same |
| US7905994B2 (en) | 2007-10-03 | 2011-03-15 | Moses Lake Industries, Inc. | Substrate holder and electroplating system |
| US20090250352A1 (en) * | 2008-04-04 | 2009-10-08 | Emat Technology, Llc | Methods for electroplating copper |
| US8062496B2 (en) * | 2008-04-18 | 2011-11-22 | Integran Technologies Inc. | Electroplating method and apparatus |
| US20100213073A1 (en) * | 2009-02-23 | 2010-08-26 | International Business Machines Corporation | Bath for electroplating a i-iii-vi compound, use thereof and structures containing same |
| US8262894B2 (en) | 2009-04-30 | 2012-09-11 | Moses Lake Industries, Inc. | High speed copper plating bath |
| WO2011001847A1 (en) * | 2009-07-01 | 2011-01-06 | Jx日鉱日石金属株式会社 | Electrolytic copper plating solution for filling for forming microwiring of copper for ulsi |
| KR20120100947A (en) | 2009-09-28 | 2012-09-12 | 바스프 에스이 | Waper pretreatment for copper electroplating |
| US20110108115A1 (en) * | 2009-11-11 | 2011-05-12 | International Business Machines Corporation | Forming a Photovoltaic Device |
| US20110220511A1 (en) * | 2010-03-12 | 2011-09-15 | Xtalic Corporation | Electrodeposition baths and systems |
| US9694562B2 (en) * | 2010-03-12 | 2017-07-04 | Xtalic Corporation | Coated articles and methods |
| US20110277825A1 (en) * | 2010-05-14 | 2011-11-17 | Sierra Solar Power, Inc. | Solar cell with metal grid fabricated by electroplating |
| KR101221376B1 (en) * | 2010-11-16 | 2013-01-11 | 충남대학교산학협력단 | Copper plating process |
| US20120234682A1 (en) | 2011-03-18 | 2012-09-20 | E.I. Du Pont De Nemours And Company | Process For Copper Plating Of Polyamide Articles |
| EP2518187A1 (en) * | 2011-04-26 | 2012-10-31 | Atotech Deutschland GmbH | Aqueous acidic bath for electrolytic deposition of copper |
| US20130193575A1 (en) * | 2012-01-27 | 2013-08-01 | Skyworks Solutions, Inc. | Optimization of copper plating through wafer via |
| JP6183592B2 (en) * | 2012-06-14 | 2017-08-23 | 三菱マテリアル株式会社 | Method for electrolytic refining of high purity electrolytic copper |
| CN103361694A (en) * | 2013-08-08 | 2013-10-23 | 上海新阳半导体材料股份有限公司 | Micro-pore electroplated copper filling method for three-dimensional (3D) copper interconnection high aspect ratio through-silicon-via technology |
| JP6733313B2 (en) * | 2015-08-29 | 2020-07-29 | 三菱マテリアル株式会社 | High-purity copper electrolytic refining additive and high-purity copper manufacturing method |
| US10793956B2 (en) * | 2015-08-29 | 2020-10-06 | Mitsubishi Materials Corporation | Additive for high-purity copper electrolytic refining and method of producing high-purity copper |
| DE112015007121B4 (en) | 2015-11-12 | 2023-10-05 | Mitsubishi Electric Corporation | A method of forming a Cu plating and a Cu plated substrate having a Cu plating formed by the method |
| US20170334170A1 (en) * | 2016-03-23 | 2017-11-23 | Atieh Haghdoost | Articles including adhesion enhancing coatings and methods of producing them |
| JP2020536177A (en) | 2017-09-28 | 2020-12-10 | マクステリアル インコーポレイテッド | Articles containing surface coatings and methods for producing them |
| JP2024527498A (en) | 2021-06-18 | 2024-07-25 | マックステリアル・インコーポレイテッド | Processes for Producing Coated Surfaces, Coatings, and Articles Using Same |
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| US3859337A (en) * | 1969-06-11 | 1975-01-07 | Stauffer Chemical Co | Ethylenediaminetetraacetic acid anhydride derivatives |
| DE2025538A1 (en) * | 1970-04-02 | 1971-10-21 | Lokomotivbau Elektrotech | Copper acid electrodeposition using brightener composition |
| JPS5855236B2 (en) * | 1975-07-17 | 1983-12-08 | ソニー株式会社 | Acidic Ni electroplating bath |
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| US5151167A (en) * | 1990-06-21 | 1992-09-29 | Royal Canadian Mint | Coins coated with nickel, copper and nickel and process for making such coins |
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-
2000
- 2000-04-27 US US09/560,671 patent/US6491806B1/en not_active Expired - Fee Related
-
2001
- 2001-04-10 WO PCT/US2001/012348 patent/WO2001083854A2/en not_active Ceased
- 2001-04-10 EP EP01927065A patent/EP1276919A2/en not_active Withdrawn
- 2001-04-10 AU AU2001253551A patent/AU2001253551A1/en not_active Abandoned
- 2001-04-27 TW TW90110199A patent/TW575693B/en not_active IP Right Cessation
- 2001-10-03 US US09/970,723 patent/US6893550B2/en not_active Expired - Fee Related
-
2004
- 2004-08-12 US US10/917,788 patent/US20050014014A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| US6893550B2 (en) | 2005-05-17 |
| US6491806B1 (en) | 2002-12-10 |
| US20050014014A1 (en) | 2005-01-20 |
| WO2001083854A2 (en) | 2001-11-08 |
| TW575693B (en) | 2004-02-11 |
| US20020036145A1 (en) | 2002-03-28 |
| WO2001083854A3 (en) | 2002-10-03 |
| EP1276919A2 (en) | 2003-01-22 |
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