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ATE343661T1 - Dlc-film, dlc-beschichteter plastikbehälter und verfahren und vorrichtung zur herstellung solcher behälter - Google Patents

Dlc-film, dlc-beschichteter plastikbehälter und verfahren und vorrichtung zur herstellung solcher behälter

Info

Publication number
ATE343661T1
ATE343661T1 AT00919156T AT00919156T ATE343661T1 AT E343661 T1 ATE343661 T1 AT E343661T1 AT 00919156 T AT00919156 T AT 00919156T AT 00919156 T AT00919156 T AT 00919156T AT E343661 T1 ATE343661 T1 AT E343661T1
Authority
AT
Austria
Prior art keywords
plastic container
electrode
dlc
dlc film
wall
Prior art date
Application number
AT00919156T
Other languages
English (en)
Inventor
Yuuji Yamashita
Tsuyoshi M Kage
Shigeki Mori
Original Assignee
Mitsubishi Shoji Plastics Corp
Hokkai Can
Kirin Brewery
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP29980699A external-priority patent/JP3901888B2/ja
Priority claimed from JP2000048386A external-priority patent/JP4159223B2/ja
Application filed by Mitsubishi Shoji Plastics Corp, Hokkai Can, Kirin Brewery filed Critical Mitsubishi Shoji Plastics Corp
Application granted granted Critical
Publication of ATE343661T1 publication Critical patent/ATE343661T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Chemical Vapour Deposition (AREA)
AT00919156T 1999-05-19 2000-04-21 Dlc-film, dlc-beschichteter plastikbehälter und verfahren und vorrichtung zur herstellung solcher behälter ATE343661T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP13921199 1999-05-19
JP29980699A JP3901888B2 (ja) 1999-05-19 1999-10-21 ダイヤモンドライクカーボン膜コーティングプラスチック容器の製造装置及びその製造方法
JP2000048386A JP4159223B2 (ja) 2000-02-24 2000-02-24 Ｄｌｃ膜および炭素膜コーティングプラスチック容器

Publications (1)

Publication Number Publication Date
ATE343661T1 true ATE343661T1 (de) 2006-11-15

Family

ID=27317815

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00919156T ATE343661T1 (de) 1999-05-19 2000-04-21 Dlc-film, dlc-beschichteter plastikbehälter und verfahren und vorrichtung zur herstellung solcher behälter

Country Status (10)

Country Link
US (1) US7166336B1 (de)
EP (1) EP1197581B1 (de)
KR (2) KR100549033B1 (de)
CN (1) CN1174115C (de)
AT (1) ATE343661T1 (de)
AU (1) AU768043B2 (de)
DE (1) DE60031544T2 (de)
ES (1) ES2275502T3 (de)
HK (1) HK1045542B (de)
WO (1) WO2000071780A1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2403001A (en) * 1999-12-27 2001-07-09 Mitsubishi Shoji Plastics Corporation Pet container for foods and drinks containing recycled resin and having dlc coating film formed on surface thereof
DE60234142D1 (de) * 2001-03-27 2009-12-10 Nipro Corp Albuminlösung enthaltender Kunststoffbehälter
CN1228213C (zh) 2001-04-19 2005-11-23 日精Asb机械株式会社 气障性合成树脂制容器及其制造装置以及装入物品的气障性合成树脂制容器
DE60336808D1 (de) 2002-05-28 2011-06-01 Kirin Brewery Vorrichtung zur Beschichtung eines Kunststoffbehälters mit einer diamantähnlichen Kohlenstoffschicht
JP4132982B2 (ja) * 2002-05-28 2008-08-13 麒麟麦酒株式会社 Ｄｌｃ膜コーティングプラスチック容器の製造装置
DE102004020185B4 (de) * 2004-04-22 2013-01-17 Schott Ag Verfahren und Vorrichtung für die Innenbeschichtung von Hohlkörpern sowie Verwendung der Vorrichtung
FR2872148B1 (fr) * 2004-06-24 2006-09-22 Sidel Sas Machine de traitement de bouteilles equipee d'une cartouche de raccordement interchangeable
KR101029657B1 (ko) * 2005-07-12 2011-04-15 미쯔비시 쥬우꼬오 쇼구힌호오소오기까이 가부시키가이샤 용기 내면으로의 코팅막 형성 장치 및 내면 코팅막 용기의제조 방법
US20100211180A1 (en) * 2006-03-21 2010-08-19 Jet Engineering, Inc. Tetrahedral Amorphous Carbon Coated Medical Devices
CN101778719B (zh) * 2007-08-14 2013-05-01 东洋制罐株式会社 具有真空蒸镀膜的生物降解性树脂容器和真空蒸镀膜的形成方法
JP5073545B2 (ja) * 2008-03-26 2012-11-14 東京エレクトロン株式会社 プラズマ処理装置、プラズマ処理方法
US8062470B2 (en) * 2008-05-12 2011-11-22 Yuri Glukhoy Method and apparatus for application of thin coatings from plasma onto inner surfaces of hollow containers
US20090284421A1 (en) * 2008-05-16 2009-11-19 Yuri Glukhoy RF antenna assembly having an antenna with transversal magnetic field for generation of inductively coupled plasma
WO2010095011A1 (en) 2009-02-18 2010-08-26 Council Of Scientific & Industrial Research Process to deposit diamond like carbon as protective coating on inner surface of a shaped object.
US20110001103A1 (en) * 2009-07-01 2011-01-06 Chi-Kuang Chen Elevating mechanism for measuring concentrations of medicines
EP2737890B1 (de) * 2011-07-28 2018-08-22 Terumo Kabushiki Kaisha Lagerbehälter für erythrozyten
KR101644425B1 (ko) 2015-09-22 2016-08-01 정순태 내열 음료용기 제조방법
JP7235683B2 (ja) * 2017-06-08 2023-03-08 アプライド マテリアルズ インコーポレイテッド ハードマスク及びその他のパターニング応用のための高密度低温炭素膜
KR102229237B1 (ko) * 2017-08-31 2021-03-18 새한프라텍 주식회사 우수한 가스 배리어성을 갖는 플라스틱 용기 및 그 제조방법
JP7407121B2 (ja) 2018-04-09 2023-12-28 アプライド マテリアルズ インコーポレイテッド パターニング用途のためのカーボンハードマスク及び関連方法
US11145509B2 (en) 2019-05-24 2021-10-12 Applied Materials, Inc. Method for forming and patterning a layer and/or substrate
US11270905B2 (en) 2019-07-01 2022-03-08 Applied Materials, Inc. Modulating film properties by optimizing plasma coupling materials
US11664226B2 (en) 2020-06-29 2023-05-30 Applied Materials, Inc. Methods for producing high-density carbon films for hardmasks and other patterning applications
US11664214B2 (en) 2020-06-29 2023-05-30 Applied Materials, Inc. Methods for producing high-density, nitrogen-doped carbon films for hardmasks and other patterning applications
CN115613004A (zh) * 2021-07-12 2023-01-17 北京印刷学院 内壁镀膜的塑料管及制备方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS634068A (ja) * 1986-06-23 1988-01-09 Nec Corp ダイヤモンド状カ−ボン膜
US4809876A (en) * 1987-08-27 1989-03-07 Aluminum Company Of America Container body having improved gas barrier properties
US5637353A (en) * 1990-09-27 1997-06-10 Monsanto Company Abrasion wear resistant coated substrate product
JPH06280012A (ja) * 1993-03-29 1994-10-04 Canon Inc 炭素被膜の製造方法
JPH0853116A (ja) * 1994-08-11 1996-02-27 Kirin Brewery Co Ltd 炭素膜コーティングプラスチック容器
JP2788412B2 (ja) * 1994-08-11 1998-08-20 麒麟麦酒株式会社 炭素膜コーティングプラスチック容器の製造装置および製造方法
EP1010773A4 (de) * 1997-02-19 2004-08-25 Kirin Brewery Verfahren und vorrichtungzur herstellung von mit kohlenstoff-film beschichtetem plastik-kontainer
JP3072269B2 (ja) 1997-02-19 2000-07-31 麒麟麦酒株式会社 炭素膜コーティングプラスチック容器の製造装置および製造方法
JP3669138B2 (ja) * 1998-03-05 2005-07-06 日新電機株式会社 プラズマｃｖｄ法、プラズマｃｖｄ装置及び電極
JP3698887B2 (ja) 1998-03-16 2005-09-21 株式会社アルバック ダイヤモンド状炭素膜の製造装置
FR2776540B1 (fr) * 1998-03-27 2000-06-02 Sidel Sa Recipient en matiere a effet barriere et procede et appareil pour sa fabrication
AU2403001A (en) * 1999-12-27 2001-07-09 Mitsubishi Shoji Plastics Corporation Pet container for foods and drinks containing recycled resin and having dlc coating film formed on surface thereof
JP2001240115A (ja) * 2000-02-24 2001-09-04 Mitsubishi Shoji Plast Kk 乾燥固体食品用プラスチック容器
JP4492985B2 (ja) * 2000-02-24 2010-06-30 三菱商事プラスチック株式会社 液体医薬品用プラスチック容器及び液体医薬品の保存回収方法
FR2812666B1 (fr) * 2000-08-01 2003-08-08 Sidel Sa Revetement barriere comportant une couche protectrice, procede d'obtention d'un tel revetement et recipient muni d'un tel revetement
FR2812665B1 (fr) * 2000-08-01 2003-08-08 Sidel Sa Procede de depot de revetement par plasma, dispositif de mise en oeuvre du procede et revetement obtenu par un tel procede
TW497098B (en) * 2000-11-04 2002-08-01 Li-Shin Jou Optical recording medium and recording method
US6924001B2 (en) * 2000-12-25 2005-08-02 Mitsubishi Shoji Plastics Corporation Production device for DLC film-coated plastic container and production method therefor
CN1228213C (zh) * 2001-04-19 2005-11-23 日精Asb机械株式会社 气障性合成树脂制容器及其制造装置以及装入物品的气障性合成树脂制容器
DE60336808D1 (de) * 2002-05-28 2011-06-01 Kirin Brewery Vorrichtung zur Beschichtung eines Kunststoffbehälters mit einer diamantähnlichen Kohlenstoffschicht
JP4149748B2 (ja) * 2002-06-24 2008-09-17 三菱商事プラスチック株式会社 ロータリー型量産用ｃｖｄ成膜装置及びプラスチック容器内表面へのｃｖｄ膜成膜方法

Also Published As

Publication number Publication date
CN1174115C (zh) 2004-11-03
CN1351676A (zh) 2002-05-29
DE60031544D1 (de) 2006-12-07
KR20050105285A (ko) 2005-11-03
EP1197581A4 (de) 2002-10-30
US7166336B1 (en) 2007-01-23
EP1197581B1 (de) 2006-10-25
DE60031544T2 (de) 2007-08-02
AU3987900A (en) 2000-12-12
KR100549033B1 (ko) 2006-02-02
WO2000071780A1 (fr) 2000-11-30
HK1045542A1 (en) 2002-11-29
AU768043B2 (en) 2003-11-27
KR100610130B1 (ko) 2006-08-09
HK1045542B (zh) 2005-06-03
KR20020019440A (ko) 2002-03-12
EP1197581A1 (de) 2002-04-17
ES2275502T3 (es) 2007-06-16

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Legal Events

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