JP4146463B2 - バリヤ効果材料を被覆した容器、その製造方法および装置 - Google Patents
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Description
− 上記の基材を形成するポリマー材料からなる容器のブランクがエンクロージャ内に配置されるステップと、
− 少なくとも1つの炭素前駆体が、10mbrよりも低い非常に低い圧力で気体状態で反応チャンバ内に注入され、アルカン、アルケン、アルキンおよび芳香族化合物またはそれらのいくつかの組み合わせから選択されるステップと、
− ガラス転移温度下の温度でポリマーを維持しながら、ポリマー傾向を有するアモルファス炭素材料を堆積させる温度条件下で、プラズマを発生させるのに十分な比較的低い電力で、UHF帯域のマイクロ波が反応チャンバ内で同時に電磁励起されるステップとからなることを特徴とする方法に関する。
気体前駆体を注入する手段と電磁励起手段を取り付けたエンクロージャを有するプラズマ発生装置を備える装置であって、基材を形成するポリマーを、ポリマー傾向を有するアモルファス炭素材料からなるバリヤ効果を有する材料で被覆するために、前駆体を注入する手段は、アルカン、アルケン、アルキンおよび芳香族化合物かまたはそれらのいくつかの組み合わせから選択される気体状態の前駆体を発生する手段に接続され、基材を形成するポリマー材料をポリマー傾向を有するアモルファス炭素材料からなるバリヤ効果を有する材料で被覆するために、注入手段は、エンクロージャに開いたもので、10mbarよりも低い非常に低い圧力で気体前駆体を送出するように設計され、電磁励起手段は、UHF帯域のマイクロ波を発生させる十分な定格のものであることを特徴とする装置である。
Claims (9)
- バリヤ効果を有する材料と、製造する容器の形状を有する基材(容器ブランク(18))を形成するポリマー材料から形成された異なる材料からなるボトルまたはフラスコなどの容器を形成するように、電磁波によって励起されたプラズマを用いる装置であり、
気体前駆体を注入する手段(7)と電磁励起手段(8〜12)を取り付けたエンクロージャ(2)を有するプラズマ発生装置を備える装置であって、基材を形成する前記ポリマーを、ポリマー傾向を有するアモルファス炭素材料からなるバリヤ効果を有する材料で被覆するために、前駆体を注入する手段(7)は、アルカン、アルケン、アルキンおよび芳香族化合物かまたはそれらのいくつかの組み合わせから選択される気体状態の前駆体を発生する手段に接続され、注入手段は、非常に低い圧力で気体前駆体を送出するように設計され、前記電磁励起手段(8〜12)は、UHF帯域のマイクロ波を発生させる十分な定格のものであることを特徴とする装置。 - 前記エンクロージャ(2)の寸法が、処理される前記容器ブランク(18)の寸法よりも実質的に大きく、前記注入手段が、前記容器ブランク(18)の外側の前記エンクロージャ(2)内に開いていることによって、前記容器ブランクが閉じられているため、装置は、前記容器ブランクの外側にプラズマを発生し、前記容器ブランクの外面上にポリマー傾向を有するアモルファス炭素材料の被覆が堆積されることを特徴とする請求項1に記載の装置。
- 気体前駆体を注入するための前記注入手段(7)が、前記エンクロージャ(2)内に配置された前記容器ブランク(18)の内側に開いており、
前記容器ブランク(18)内に開き、その中に著しい真空を発生させることができるポンプ手段(6)が前記注入手段に備えられていることにより、反応チャンバを構成する前記容器ブランク内にプラズマが発生され、前記容器ブランクの内面上にポリマー傾向を有するアモルファス炭素材料の被覆が堆積され、
前記ポンプ手段(6)も同時に前記エンクロージャ(2)内に真空を発生させるように配設されて、前記ブランクの内部と外部との間の圧力差を減少させることを特徴とする請求項1に記載の装置。 - 前記エンクロージャ(2)が、前記気相前駆体を注入する前記注入手段のインジェクタ(17)を支持するために設計され、密封閉鎖状態をもたらす取外し可能なカバー(4)と、前記ポンプ手段の吸気オリフィス(5)を備え、
前記エンクロージャが、前記容器ブランク(18)をその首部で支持する手段(17)を有し、前記容器ブランクの縁部(23)を、前記吸気オリフィスおよび前記インジェクタを取り囲む前記カバーの内面(22)に対して密封させることを特徴とする請求項3に記載の装置。 - 前記支持手段(17)が、軸方向に変位可能(19)であるため、前記被覆を堆積する前に前記吸気オリフィスとインジェクタに蓋をするカバー(4)の内面に対して前記容器ブランクを接触させるか、または前記被覆が堆積された後にそこから完成した容器を除去することを特徴とする請求項4に記載の装置。
- 前記マイクロ波励起手段は、前記エンクロージャ(2)を囲み、横方向の短絡手段(10)を備えたキャビティ(1)に半径方向に接続された導波管(8)を備えることを特徴とする請求項1から5に記載の装置。
- 前記エンクロージャ(2)の横方向の寸法が、前記容器ブランク(18)の本体の寸法に近似するものであることを特徴とする請求項3から6のいずれか一項に記載の装置。
- 前記マイクロ波励起手段は、導波管(15)に接続され、前記エンクロージャ(2)を囲み縦方向の短絡手段(11)を備えたキャビティ(1)に半径方向に配置されたアンテナ(13)を備えることを特徴とする請求項1から5のいずれか一項に記載の装置。
- 前記マイクロ波励起手段は、導波管(15)に接続され、前記エンクロージャ(2)を囲み縦方向の短絡手段(11)を備えたキャビティ(1)に同軸方向に配置されたアンテナ(13)を備えることを特徴とする請求項1から5のいずれか一項に記載の装置。
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9803824A FR2776540B1 (fr) | 1998-03-27 | 1998-03-27 | Recipient en matiere a effet barriere et procede et appareil pour sa fabrication |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2000540946A Division JP3921345B2 (ja) | 1998-03-27 | 1999-03-25 | バリヤ効果材料を被覆した容器、その製造方法および装置 |
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| Publication Number | Publication Date |
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| JP2006131306A JP2006131306A (ja) | 2006-05-25 |
| JP4146463B2 true JP4146463B2 (ja) | 2008-09-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2000540946A Expired - Fee Related JP3921345B2 (ja) | 1998-03-27 | 1999-03-25 | バリヤ効果材料を被覆した容器、その製造方法および装置 |
| JP2005291021A Expired - Fee Related JP4383402B2 (ja) | 1998-03-27 | 2005-10-04 | バリヤ効果材料を被覆した容器、その製造方法および装置 |
| JP2005291022A Expired - Fee Related JP4146463B2 (ja) | 1998-03-27 | 2005-10-04 | バリヤ効果材料を被覆した容器、その製造方法および装置 |
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| JP2000540946A Expired - Fee Related JP3921345B2 (ja) | 1998-03-27 | 1999-03-25 | バリヤ効果材料を被覆した容器、その製造方法および装置 |
| JP2005291021A Expired - Fee Related JP4383402B2 (ja) | 1998-03-27 | 2005-10-04 | バリヤ効果材料を被覆した容器、その製造方法および装置 |
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| Country | Link |
|---|---|
| US (3) | US6919114B1 (ja) |
| EP (1) | EP1068032B1 (ja) |
| JP (3) | JP3921345B2 (ja) |
| KR (1) | KR100483471B1 (ja) |
| CN (1) | CN1204981C (ja) |
| AT (1) | ATE219973T1 (ja) |
| AU (1) | AU740485B2 (ja) |
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| DE (1) | DE69902027T2 (ja) |
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| FR (2) | FR2776540B1 (ja) |
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| PL (1) | PL192583B1 (ja) |
| PT (1) | PT1068032E (ja) |
| RU (1) | RU2189401C2 (ja) |
| WO (1) | WO1999049991A1 (ja) |
| ZA (1) | ZA200004926B (ja) |
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1998
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1999
- 1999-03-25 EP EP99910425A patent/EP1068032B1/fr not_active Revoked
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- 1999-03-25 AU AU29389/99A patent/AU740485B2/en not_active Ceased
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- 1999-03-25 RU RU2000127029/12A patent/RU2189401C2/ru not_active IP Right Cessation
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- 1999-03-25 WO PCT/FR1999/000692 patent/WO1999049991A1/fr not_active Ceased
- 1999-03-25 AT AT99910425T patent/ATE219973T1/de not_active IP Right Cessation
- 1999-03-25 US US09/647,005 patent/US6919114B1/en not_active Expired - Fee Related
- 1999-10-12 FR FR9912934A patent/FR2783667B1/fr not_active Expired - Fee Related
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- 2000-09-25 NO NO20004779A patent/NO324213B1/no not_active IP Right Cessation
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