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ZA200703117B - Method and apparatus for growing a group (III) metal nitride film and a group (III) metal nitride film - Google Patents

Method and apparatus for growing a group (III) metal nitride film and a group (III) metal nitride film

Info

Publication number
ZA200703117B
ZA200703117B ZA200703117A ZA200703117A ZA200703117B ZA 200703117 B ZA200703117 B ZA 200703117B ZA 200703117 A ZA200703117 A ZA 200703117A ZA 200703117 A ZA200703117 A ZA 200703117A ZA 200703117 B ZA200703117 B ZA 200703117B
Authority
ZA
South Africa
Prior art keywords
iii
group
nitride film
metal nitride
growing
Prior art date
Application number
ZA200703117A
Inventor
Butcher Kenneth Scott Alexander
Ep Fouquet Marie-Pierre Francoise Wintrebert
Chen Patrick Po-Tsang
Ten Have John Leo Paul
Johnson David Ian
Original Assignee
Gallium Entpr Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gallium Entpr Pty Ltd filed Critical Gallium Entpr Pty Ltd
Publication of ZA200703117B publication Critical patent/ZA200703117B/en

Links

ZA200703117A 2004-09-27 2007-04-16 Method and apparatus for growing a group (III) metal nitride film and a group (III) metal nitride film ZA200703117B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US61391004P 2004-09-27 2004-09-27

Publications (1)

Publication Number Publication Date
ZA200703117B true ZA200703117B (en) 2009-09-30

Family

ID=39086055

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA200703117A ZA200703117B (en) 2004-09-27 2007-04-16 Method and apparatus for growing a group (III) metal nitride film and a group (III) metal nitride film

Country Status (2)

Country Link
CN (1) CN101124353B (en)
ZA (1) ZA200703117B (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2396449B1 (en) * 2009-02-13 2015-08-05 Gallium Enterprises Pty Ltd Plasma deposition
WO2012016236A1 (en) * 2010-07-30 2012-02-02 First Solar, Inc. Distributor heater
DE102011114671A1 (en) 2011-09-30 2013-04-04 Osram Opto Semiconductors Gmbh Method for producing an optoelectronic semiconductor chip and optoelectronic semiconductor chip
CN104428444B (en) * 2012-07-13 2016-09-21 盖列姆企业私人有限公司 Membrane formation device and method
CN111739856B (en) * 2014-10-31 2025-01-07 迪睿合株式会社 Thermally conductive sheet, method for manufacturing thermally conductive sheet, heat dissipating component and semiconductor device
JP6578570B2 (en) * 2015-03-03 2019-09-25 国立大学法人大阪大学 Method for producing group III nitride semiconductor crystal substrate
CN107429383B (en) * 2015-03-30 2020-07-24 东曹株式会社 Gallium nitride based sintered body and method for producing the same
KR102740114B1 (en) * 2018-10-10 2024-12-10 도소 가부시키가이샤 Gallium nitride-based sintered body and its manufacturing method
CN109599543B (en) * 2018-11-21 2020-07-14 新疆大学 A kind of preparation method of negative electrode material
FI129719B (en) * 2019-06-25 2022-07-29 Picosun Oy Plasma in a substrate processing apparatus
CN111351702B (en) * 2020-03-19 2021-10-15 中国科学院金属研究所 A method for determining fracture strain of flexible base metal films
CN111678615A (en) * 2020-05-19 2020-09-18 电子科技大学 A fiber grating liquid level sensor for temperature detection
CN119057678B (en) * 2024-10-09 2025-09-09 华中科技大学 Processing method and polishing device for ultraviolet-assisted high-efficiency polishing of diamond

Also Published As

Publication number Publication date
CN101124353B (en) 2011-12-14
CN101124353A (en) 2008-02-13

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