[go: up one dir, main page]

GB0419772D0 - Method and apparatus for thin film metrology - Google Patents

Method and apparatus for thin film metrology

Info

Publication number
GB0419772D0
GB0419772D0 GB0419772A GB0419772A GB0419772D0 GB 0419772 D0 GB0419772 D0 GB 0419772D0 GB 0419772 A GB0419772 A GB 0419772A GB 0419772 A GB0419772 A GB 0419772A GB 0419772 D0 GB0419772 D0 GB 0419772D0
Authority
GB
United Kingdom
Prior art keywords
thin film
film metrology
metrology
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0419772A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SCALAR TECHNOLOGIES Ltd
Original Assignee
SCALAR TECHNOLOGIES Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SCALAR TECHNOLOGIES Ltd filed Critical SCALAR TECHNOLOGIES Ltd
Priority to GB0419772A priority Critical patent/GB0419772D0/en
Publication of GB0419772D0 publication Critical patent/GB0419772D0/en
Priority to PCT/GB2005/003432 priority patent/WO2006027568A1/en
Priority to EP05784553A priority patent/EP1789753A1/en
Ceased legal-status Critical Current

Links

GB0419772A 2004-09-07 2004-09-07 Method and apparatus for thin film metrology Ceased GB0419772D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0419772A GB0419772D0 (en) 2004-09-07 2004-09-07 Method and apparatus for thin film metrology
PCT/GB2005/003432 WO2006027568A1 (en) 2004-09-07 2005-09-07 Method and apparatus for thin film metrology
EP05784553A EP1789753A1 (en) 2004-09-07 2005-09-07 Method and apparatus for thin film metrology

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0419772A GB0419772D0 (en) 2004-09-07 2004-09-07 Method and apparatus for thin film metrology

Publications (1)

Publication Number Publication Date
GB0419772D0 true GB0419772D0 (en) 2004-10-06

Family

ID=33156097

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0419772A Ceased GB0419772D0 (en) 2004-09-07 2004-09-07 Method and apparatus for thin film metrology

Country Status (3)

Country Link
EP (1) EP1789753A1 (en)
GB (1) GB0419772D0 (en)
WO (1) WO2006027568A1 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
DK2251454T3 (en) 2009-05-13 2014-10-13 Sio2 Medical Products Inc Container coating and inspection
WO2013170052A1 (en) 2012-05-09 2013-11-14 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
EP2776603B1 (en) 2011-11-11 2019-03-06 SiO2 Medical Products, Inc. PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS
US20150297800A1 (en) 2012-07-03 2015-10-22 Sio2 Medical Products, Inc. SiOx BARRIER FOR PHARMACEUTICAL PACKAGE AND COATING PROCESS
CA2890066C (en) 2012-11-01 2021-11-09 Sio2 Medical Products, Inc. Coating inspection method
EP2920567B1 (en) 2012-11-16 2020-08-19 SiO2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
WO2014085348A2 (en) 2012-11-30 2014-06-05 Sio2 Medical Products, Inc. Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
EP4234753A3 (en) 2013-03-11 2023-11-01 SiO2 Medical Products, Inc. Coated packaging
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
EP2971227B1 (en) 2013-03-15 2017-11-15 Si02 Medical Products, Inc. Coating method.
EP3122917B1 (en) 2014-03-28 2020-05-06 SiO2 Medical Products, Inc. Antistatic coatings for plastic vessels
CA2995225C (en) 2015-08-18 2023-08-29 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
US20200024727A1 (en) 2015-12-12 2020-01-23 Indian Institute of Technology Guwahati System, apparatus and method for monitoring of surface profile and thickness measurement in thin films
CN113048894B (en) * 2021-03-04 2022-10-18 上海精测半导体技术有限公司 Device and method for detecting change of reflected light and film thickness measuring device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59120909A (en) * 1982-12-28 1984-07-12 Fujitsu Ltd Method for measuring thickness of resist coated film
DE3600346A1 (en) * 1986-01-08 1987-07-09 Fraunhofer Ges Forschung METHOD FOR IMAGING LASER INTERFEROMETRY AND LASER INTERFEROMETER FOR IMPLEMENTING THE METHOD
DD265055A3 (en) * 1986-07-29 1989-02-22 Technisches Glas Veb K ARRANGEMENT FOR INTERFEROMETRIC CLEARANCE AND THICKNESS MEASUREMENT
JPS6475903A (en) * 1987-09-18 1989-03-22 Ricoh Kk Method for measuring refractive index and film thickness
US5563709A (en) * 1994-09-13 1996-10-08 Integrated Process Equipment Corp. Apparatus for measuring, thinning and flattening silicon structures
AT410257B (en) * 2000-10-23 2003-03-25 Mte Innovative Measurement Sol DEVICE FOR CHECKING AND CHECKING A SINGLE GLASS PANEL OR INSULATING GLASS ELEMENT
DE10225488A1 (en) * 2002-06-10 2003-12-18 Bild Und Signalverarbeitung Mb Method and device for non-contact thickness measurement of transparent measurement objects

Also Published As

Publication number Publication date
EP1789753A1 (en) 2007-05-30
WO2006027568A1 (en) 2006-03-16

Similar Documents

Publication Publication Date Title
GB0419772D0 (en) Method and apparatus for thin film metrology
TWI366271B (en) Method of forming at least one thin film device
GB2419795B (en) X-ray thin film inspection apparatus and thin film inspection apparatus and method for patterned wafer
EP1969391A4 (en) Thin film emitter-absorber apparatus and methods
EP1877255A4 (en) Thin film production method and apparatus
SG139762A1 (en) Lithographic apparatus and method for calibrating the same
TWI349302B (en) Film formation method and apparatus for semiconductor process
TWI367130B (en) Film coating apparatus and film coating method
EP1600270A4 (en) Substrate dividing apparatus and method for dividing substrate
EP1614768A4 (en) Method for forming film
GB0403645D0 (en) Organic thin film manufacturing method and manufacturing apparatus
EP1707017A4 (en) Method and apparatus for measuring jitter
TWI351058B (en) Film separation method and film separation apparatus
IL182623A (en) Method of manufacturing an alloyed film and apparatus for the method
GB2401563B (en) Method for forming plural-layered coated film
EP1863070A4 (en) Exposure apparatus and method for manufacturing device
EP1724817A4 (en) Film forming apparatus
EP1705699A4 (en) Film forming device and film forming method
EP1609884A4 (en) Thin film forming apparatus and method for forming thin film
GB2398883B (en) Method and apparatus for watermarking film
EP1947688A4 (en) Film peeling method and film peeling apparatus
EP1918417A4 (en) Method of forming film and apparatus for film formation
SG121947A1 (en) Lithographic apparatus and position measuring method
GB2416209B (en) Method and apparatus for measuring film thickness and film thickness growth
AU2003265462A8 (en) Method and apparatus for thin film thickness mapping

Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)