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WO2025191843A1 - Dispositif à faisceau de particules chargées - Google Patents

Dispositif à faisceau de particules chargées

Info

Publication number
WO2025191843A1
WO2025191843A1 PCT/JP2024/010272 JP2024010272W WO2025191843A1 WO 2025191843 A1 WO2025191843 A1 WO 2025191843A1 JP 2024010272 W JP2024010272 W JP 2024010272W WO 2025191843 A1 WO2025191843 A1 WO 2025191843A1
Authority
WO
WIPO (PCT)
Prior art keywords
charged particle
particle beam
wavelength light
scintillator
long
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/JP2024/010272
Other languages
English (en)
Japanese (ja)
Inventor
恵理 高橋
伸 今村
俊介 水谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Corp filed Critical Hitachi High Tech Corp
Priority to PCT/JP2024/010272 priority Critical patent/WO2025191843A1/fr
Publication of WO2025191843A1 publication Critical patent/WO2025191843A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/208—Circuits specially adapted for scintillation detectors, e.g. for the photo-multiplier section
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Definitions

  • the present invention relates to a charged particle beam device equipped with a detector having a scintillator that emits light when electrons are incident on it.
  • Charged particle beam devices generate observation images of a sample by irradiating the sample with a beam of charged particles, such as an electron beam, and detecting secondary electrons, transmitted electrons, backscattered electrons, and X-rays emitted from the sample.
  • the detector that detects the electrons has a scintillator that emits light when electrons are incident on it, and a photodetector that outputs an electrical signal corresponding to the amount of light emitted by the scintillator.
  • the light emitted by the scintillator contains long-wavelength light, which has a relatively long emission wavelength, and short-wavelength light, which has a relatively short emission wavelength. Long-wavelength light has a longer decay time than short-wavelength light, which reduces the time resolution of the detector.
  • Patent Document 1 discloses a detection device equipped with an optical filter that reduces the intensity of light components with wavelengths greater than 650 nm in order to increase time resolution.
  • Patent Document 1 does not give sufficient consideration to improving the electrical signal output from the detector. If the intensity of long-wavelength light, such as light components with wavelengths greater than 650 nm, is reduced using an optical filter, the electrical signal output from the detector will decrease while electrons are incident, resulting in a degradation of the image quality of the generated observation image.
  • the present invention therefore aims to provide a charged particle beam device that suppresses degradation of the observed image while maintaining the detector's time resolution.
  • the present invention provides a charged particle beam device comprising: a charged particle source that irradiates a sample with a charged particle beam; a detector that detects electrons emitted from the sample by the irradiation of the charged particle beam and outputs an electrical signal; and a control unit that generates an observation image based on the electrical signal and controls each unit;
  • the detector has a scintillator that emits light when electrons are incident on it, a light-receiving element that outputs an electrical signal corresponding to the amount of light emitted by the scintillator, and a long-wavelength light reduction unit that reduces the intensity of long-wavelength light that has a relatively long wavelength among the light emitted by the scintillator; and the control unit controls the detector to reduce the intensity of the long-wavelength light if a parameter of the electrons incident on the scintillator exceeds a predetermined threshold, and not to reduce the intensity of the long-wavelength light if the parameter does
  • the present invention provides a charged particle beam device that suppresses degradation of the observed image while maintaining the time resolution of the detector. Issues, configurations, and advantages other than those described above will become clear from the description of the following embodiments of the invention.
  • FIG. 1 is a schematic diagram illustrating an example of the overall configuration of a charged particle beam device.
  • FIG. 10 is a schematic diagram showing another example of the overall configuration of a charged particle beam device.
  • FIG. 2 is a diagram illustrating the decay time of light emission from a scintillator.
  • FIG. 1 is a diagram comparing the emission spectra of scintillators with the energy of incident electrons.
  • FIG. 10 is a diagram comparing emission spectra with reduced long wavelength light depending on the energy of incident electrons.
  • FIG. 2 is a schematic diagram showing an example of the configuration of a detector.
  • FIG. 10 is a schematic diagram showing another example of the configuration of the detector.
  • FIG. 10 is a schematic diagram showing another example of the configuration of the detector.
  • FIG. 10 is a schematic diagram showing another example of the configuration of the detector.
  • a charged particle beam device is a device that irradiates a sample with a charged particle beam, detects secondary electrons, transmitted electrons, reflected electrons, X-rays, and the like emitted from the sample, and generates an observation image of the sample; for example, it is a scanning electron microscope that scans the sample with an electron beam.
  • the charged particle beam device 1a comprises an electron optical column 7, a sample chamber 8, and a control unit 10.
  • the insides of the electron optical column 7 and the sample chamber 8 are maintained at a vacuum.
  • the electron optical column 7 is equipped with an electron source 2 that emits an electron beam 3.
  • the sample chamber 8 is equipped with a detector 6, in which a sample 4, which is the object to be observed, is placed. The detector 6 detects secondary electrons 5a emitted from the sample 4 when irradiated with the electron beam 3, and outputs an electrical signal.
  • the detector 6 has a scintillator 6a, a light guide 6b, and a photodetector 6c.
  • the scintillator 6a is a material containing at least one element from the group consisting of Ga, Zn, In, Al, Cd, Mg, Ca, Sr, Y, Si, Gd, and Ce, and emits light when electrons are incident on it.
  • the photodetector 6c is, for example, a photomultiplier tube or a semiconductor sensor, and outputs an electrical signal corresponding to the amount of light emitted by the scintillator 6a.
  • the light guide 6b connects the scintillator 6a and the photodetector 6c, and transmits the light emitted by the scintillator 6a to the photodetector 6c, which is located outside the sample chamber 8. Note that if the photodetector 6c is located inside the sample chamber 8, the light guide 6b is not required.
  • a positive voltage may be applied to the scintillator 6a to increase the number of relatively low-energy secondary electrons 5a incident on the scintillator 6a.
  • the control unit 10 is, for example, a computer with an arithmetic unit, and generates an observation image of the sample 4 based on the electrical signal output from the light-receiving element 6c, and controls each component.
  • the charged particle beam device 1b is equipped with an electron optical column 7, a sample chamber 8, and a control unit 10, but the arrangement and shape of the detector 6 differs from that of the charged particle beam device 1a.
  • the detector 6 of the charged particle beam device 1b is placed directly above the sample 4 and has a circular or U-shape with a space through which the electron beam 3 passes.
  • the detector 6 placed directly above the sample 4 can efficiently detect backscattered electrons 5b, which are emitted in smaller quantities than secondary electrons 5a.
  • the decay time of the light emission from the scintillator 6a will be explained using Figure 3.
  • the graph in Figure 3 shows an example of the change in the light emission intensity of the scintillator 6a over time, with the vertical axis representing light emission intensity and the horizontal axis representing time.
  • the incident period is the period during which electrons are incident on the scintillator 6a
  • the non-incident period is the period during which electrons are not incident on the scintillator 6a.
  • the intensity of the light emitted by the scintillator 6a due to the incidence of secondary electrons 5a and backscattered electrons 5b does not immediately reach zero when the non-incident period begins, but decays over time as shown in Figure 3.
  • the decay time which indicates the rate at which the light intensity decays during the non-incident period, varies depending on the emission wavelength, with long-wavelength light having a relatively long emission wavelength being longer than short-wavelength light having a relatively short emission wavelength.
  • the decay time also differs depending on the type of scintillator 6a.
  • Long-wavelength light is a light component with a wavelength longer than, for example, any of 450 nm to 600 nm.
  • the light emitted during the non-incident period is called afterglow, and becomes noise in the detector 6, reducing the time resolution.
  • the reduction in time resolution can be suppressed by reducing the intensity of long-wavelength light, which has a long decay time.
  • the reduction in the intensity of long-wavelength light will be explained using Figures 4 and 5.
  • the graph in Figure 4 is an example of the emission spectrum of the scintillator 6a
  • the graph in Figure 5 is the same as Figure 4 with the intensity of long-wavelength light reduced, with the vertical axis representing emission intensity, the horizontal axis representing emission wavelength, and the depth axis representing time.
  • (a) in Figures 4 and 5 shows a case where the energy of the incident electrons is relatively high
  • (b) shows a case where the energy of the incident electrons is relatively low, with time t0 being the incidence period and time t1 being the non-incidence period.
  • the electrical signal output from the light-receiving element 6c has a value corresponding to the sum of the emission intensity of short-wavelength light and the emission intensity of long-wavelength light.
  • the emission intensity of the long-wavelength light is greater than that of the short-wavelength light, and the afterglow of the long-wavelength light may exceed the detection limit of the light-receiving element 6c. Therefore, by reducing the intensity of the long-wavelength light, as in Figure 5(a), the afterglow of the long-wavelength light can be made below the detection limit, preventing a decrease in time resolution.
  • the emission intensity of the long-wavelength light is lower than that of the short-wavelength light, and the afterglow of the long-wavelength light may fall below the detection limit of the light-receiving element 6c.
  • the emission intensity of the long-wavelength light is lower than that of the short-wavelength light, reducing the intensity of the long-wavelength light, as in Figure 5(b), reduces the emission intensity at time t0, which is the incidence period, and the quality of the observed image deteriorates.
  • the scintillator 6a by controlling whether or not to reduce the emission intensity of long-wavelength light depending on the energy of the electrons incident on the scintillator 6a, it is possible to suppress degradation of the observed image while maintaining the time resolution of the detector 6.
  • the energy of the incident electrons is higher when they are backscattered electrons 5b than when they are secondary electrons 5a.
  • the higher the voltage applied to the scintillator 6a the higher the energy of the incident electrons, so the energy of secondary electrons 5a incident when a voltage is applied to the scintillator 6a may be higher than the energy of backscattered electrons 5b when no applied voltage is present.
  • control of whether or not to reduce the emission intensity of long-wavelength light is not limited to being based on the energy of the incident electrons. For example, even if the emission intensity of long-wavelength light is lower than that of short-wavelength light, if the number of incident electron particles is relatively large, the afterglow of the long-wavelength light may exceed the detection limit of the light-receiving element 6c. In other words, whether or not to reduce the emission intensity of long-wavelength light may be controlled according to the number of electron particles incident on the scintillator 6a. The number of incident electron particles increases as the irradiation density of the electron beam 3 increases.
  • FIG. 6(a) Using Figure 6, an example of a detector 6 that controls the reduction in the intensity of long-wavelength light will be described.
  • the detector 6 illustrated in Figure 6(a) has a scintillator 6a, a variable transmittance filter 60, a light guide 6b, and a light receiving element 6c.
  • the scintillator 6a, light guide 6b, and light receiving element 6c are the same as those in the detector 6 in Figure 1, so their description will be omitted.
  • the variable transmittance filter 60 is an optical filter, such as a liquid crystal element, that is disposed between the scintillator 6a and the light guide 6b and that varies the transmittance of long-wavelength light.
  • the transmittance of the variable transmittance filter 60 is controlled by the control unit 10. More specifically, if the parameters of the electrons incident on the scintillator 6a exceed a predetermined threshold, the transmittance of the long-wavelength light is lowered so as to reduce the intensity of the long-wavelength light. If the parameters of the incident electrons do not exceed the threshold, the transmittance of the long-wavelength light is increased so as not to reduce the intensity of the long-wavelength light.
  • the parameters of the incident electrons include, for example, energy and particle number. If the parameter of the incident electrons is energy, the transmittance of long-wavelength light is reduced when the incident electrons are backscattered electrons 5b or when the acceleration voltage of the electron beam 3 is equal to or greater than a predetermined value. Even when the incident electrons are secondary electrons 5a, the transmittance of long-wavelength light is reduced when the voltage applied to the scintillator 6a is equal to or greater than a predetermined value.
  • the predetermined value is any value between 0.1 kV and 100 kV.
  • the threshold value for the energy of the incident electrons is the energy value at which the intensity of long-wavelength light is greater than the intensity of short-wavelength light, and is determined in advance depending on the type of scintillator 6a.
  • the transmittance of long-wavelength light is reduced when the irradiation density of the electron beam 3 is equal to or greater than a predetermined value.
  • the irradiation density of the electron beam 3 is calculated based on the current value of the electron beam 3 and the magnification of the observed image.
  • the threshold value for the number of particles of the incident electrons is the number of particles at which the intensity of long-wavelength light exceeds a predetermined value, for example, the number of particles at which the afterglow of long-wavelength light exceeds the detection limit of the light-receiving element 6c, and is determined in advance depending on the type of scintillator 6a.
  • the detector 6 illustrated in Figure 6(b) differs from that in (a) in that the variable transmittance filter 60 is positioned between the light guide 6b and the light receiving element 6c.
  • the rest of the configuration is the same as in (a).
  • the detector 6 illustrated in Figure 6(c) has a scintillator 6a, a variable transmittance filter 60, and a light-receiving element 6c, with the variable transmittance filter 60 positioned between the scintillator 6a and the light-receiving element 6c.
  • the functions of the scintillator 6a, variable transmittance filter 60, and light-receiving element 6c are the same as in (a) and (b).
  • the detector 6 may be provided with a fixed transmittance filter, an optical filter that absorbs at least a portion of the long-wavelength light and has a constant transmittance.
  • the control unit 10 controls the position of the fixed transmittance filter via a sliding or rotating mechanism in accordance with the parameters of the incident electrons. That is, if the parameter exceeds a threshold value, the fixed transmittance filter is placed between the scintillator 6a and the light-receiving element 6c to reduce the intensity of the long-wavelength light, and if the threshold value is not exceeded, the fixed transmittance filter is removed from between the scintillator 6a and the light-receiving element 6c.
  • a prism that refracts long-wavelength light may be provided in the detector 6.
  • the control unit 10 controls the direction of the prism via a rotary mechanism according to the parameters of the incident electrons. In other words, the orientation of the prism is controlled so that if the parameter exceeds a threshold value, long-wavelength light is prevented from entering the light-receiving element 6c, and if the parameter does not exceed the threshold value, long-wavelength light is allowed to enter the light-receiving element 6c.
  • FIG. 7 Another example of a detector 6 that controls the reduction in the intensity of long-wavelength light will be described.
  • the detector 6 illustrated in Figure 7 has a scintillator 6a, an optical fiber 70, and a photodetector 6c.
  • the scintillator 6a and photodetector 6c are similar to those in the detector 6 in Figure 1, so their description will be omitted.
  • the optical fiber 70 is a transmission path that transmits the light emitted by the scintillator 6a to the photodetector 6c.
  • the control unit 10 utilizes the difference in transmission time to perform switching control so that the photodetector 6c receives short-wavelength light and does not receive long-wavelength light. In other words, when the parameter exceeds the threshold, the photodetector 6c is turned on during periods when short-wavelength light is transmitted, and turned off during periods when long-wavelength light is transmitted.
  • a shutter that is opened and closed by the control unit 10 may be provided upstream of the light receiving element 6c.
  • the shutter is opened during the period when short wavelength light is transmitted, and closed during the period when long wavelength light is transmitted.
  • FIG. 8 Another example of a detector 6 that controls the reduction in the intensity of long-wavelength light will be described.
  • the detector 6 illustrated in Figure 8 has a scintillator 6a, a spectroscope 80, and a photodetector 6c.
  • the scintillator 6a is similar to the detector 6 in Figure 1, so its description will be omitted.
  • the spectroscope 80 separates the light emitted by the scintillator 6a into short-wavelength light and long-wavelength light.
  • the photodetector 6c is an element that outputs an electrical signal corresponding to the amount of light emitted by the scintillator 6a, and has a first photodetector 6c1 that receives long-wavelength light and a second photodetector 6c2 that receives only short-wavelength light.
  • the control unit 10 controls the first photodetector 6c1 according to the parameter of the incident electrons.
  • the first photodetector 6c1 is turned off and only the electrical signal from the second photodetector 6c2 is received; if the parameter does not exceed the threshold, the first photodetector 6c1 is turned on and electrical signals are received from both the second photodetector 6c2 and the first photodetector 6c1.
  • the intensity of the long-wavelength light may be reduced at the arrival position of the high-energy backscattered electrons 5b1, and the intensity of the long-wavelength light may not be reduced at the arrival position of the low-energy backscattered electrons 5b2.
  • FIG. 9 an example of a detector 6 will be described that reduces the intensity of long-wavelength light at the arrival position of high-energy reflected electrons 5b1, but does not reduce the intensity of long-wavelength light at the arrival position of low-energy reflected electrons 5b2.
  • the detector 6 located at the arrival position of low-energy reflected electrons 5b2 has a scintillator 6a, a light guide 6b, and a photodetector 6c.
  • the detector 6 located at the arrival position of high-energy reflected electrons 5b1 has a scintillator 6a, a long-wavelength light absorbing portion 90, a light guide 6b, and a photodetector 6c.
  • the scintillator 6a, light guide 6b, and photodetector 6c are the same as those in the detector 6 in Figure 1, so their description will be omitted.
  • the long-wavelength light absorbing portion 90 absorbs long-wavelength light, and is located somewhere between the scintillator 6a and the photodetector 6c.
  • the emission intensity of long-wavelength light is higher than that of short-wavelength light, and the afterglow of long-wavelength light reduces the time resolution. Therefore, by reducing the intensity of long-wavelength light using the long-wavelength light absorbing section 90, the reduction in time resolution can be suppressed.
  • the emission intensity of long-wavelength light is lower than that of short-wavelength light, and the afterglow of long-wavelength light is not enough to reduce the time resolution. Therefore, by not providing the long-wavelength light absorbing section 90 and not reducing the intensity of long-wavelength light, the emission intensity during the incident period can be prevented from being reduced.
  • 1a, 1b charged particle beam device
  • 2 electron source
  • 3 electron beam
  • 4 sample
  • 5a secondary electrons
  • 5b backscattered electrons
  • 5b1 high-energy backscattered electrons
  • 5b2 low-energy backscattered electrons
  • 6 detector
  • 6a scintillator
  • 6b light guide
  • 6c photodetector
  • 6c1 first photodetector
  • 6c2 second photodetector
  • 7 electron optical column
  • 8 sample chamber
  • 10 control unit
  • 60 variable transmittance filter
  • 70 optical fiber
  • 80 spectrometer
  • 90 long-wavelength light absorbing unit.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)

Abstract

Pour commander la détérioration d'une image d'observation tout en maintenant la résolution temporelle d'un détecteur, ce dispositif à faisceau de particules chargées comprend : une source de particules chargées qui expose un échantillon à un faisceau de particules chargées; un détecteur qui détecte des électrons émis à partir de l'échantillon en raison de l'exposition au faisceau de particules chargées et qui délivre un signal électrique; et une unité de commande qui, sur la base du signal électrique, génère une image d'observation et commande chaque composant. Le détecteur comprend : un scintillateur qui émet de la lumière lorsque des électrons sont incidents sur celui-ci; un élément de réception de lumière qui délivre un signal électrique correspondant à la quantité de lumière émise par le scintillateur; et une unité de réduction de lumière à longue longueur d'onde qui réduit l'intensité de la lumière à longue longueur d'onde ayant une longueur d'onde d'émission relativement longue, parmi la lumière émise par le scintillateur. L'unité de commande commande le détecteur de façon à réduire l'intensité de la lumière à longue longueur d'onde si un paramètre pour les électrons incidents sur le scintillateur dépasse un seuil prédéterminé, et de manière à ne pas réduire l'intensité de la lumière à longue longueur d'onde si le paramètre ne dépasse pas le seuil.
PCT/JP2024/010272 2024-03-15 2024-03-15 Dispositif à faisceau de particules chargées Pending WO2025191843A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2024/010272 WO2025191843A1 (fr) 2024-03-15 2024-03-15 Dispositif à faisceau de particules chargées

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2024/010272 WO2025191843A1 (fr) 2024-03-15 2024-03-15 Dispositif à faisceau de particules chargées

Publications (1)

Publication Number Publication Date
WO2025191843A1 true WO2025191843A1 (fr) 2025-09-18

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012009247A (ja) * 2010-06-24 2012-01-12 Topcon Corp 電子顕微鏡装置
JP2018152232A (ja) * 2017-03-13 2018-09-27 株式会社日立製作所 荷電粒子検出器およびそれを用いた荷電粒子線装置
WO2021005743A1 (fr) * 2019-07-10 2021-01-14 株式会社日立ハイテク Scintillateur pour dispositif à faisceau de particules chargées et dispositif à faisceau de particules chargées

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012009247A (ja) * 2010-06-24 2012-01-12 Topcon Corp 電子顕微鏡装置
JP2018152232A (ja) * 2017-03-13 2018-09-27 株式会社日立製作所 荷電粒子検出器およびそれを用いた荷電粒子線装置
WO2021005743A1 (fr) * 2019-07-10 2021-01-14 株式会社日立ハイテク Scintillateur pour dispositif à faisceau de particules chargées et dispositif à faisceau de particules chargées

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