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WO2025169485A1 - Système de mesure et système de commande - Google Patents

Système de mesure et système de commande

Info

Publication number
WO2025169485A1
WO2025169485A1 PCT/JP2024/004632 JP2024004632W WO2025169485A1 WO 2025169485 A1 WO2025169485 A1 WO 2025169485A1 JP 2024004632 W JP2024004632 W JP 2024004632W WO 2025169485 A1 WO2025169485 A1 WO 2025169485A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
reflecting member
pattern
irradiation
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/JP2024/004632
Other languages
English (en)
Japanese (ja)
Inventor
隆志 中村
岩田　浩志
裕一 井之上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to PCT/JP2024/004632 priority Critical patent/WO2025169485A1/fr
Publication of WO2025169485A1 publication Critical patent/WO2025169485A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated

Definitions

  • This disclosure relates to measurement systems and control systems.
  • a system has been proposed that uses a measuring device to measure the position of part of a robot (see, for example, Patent Document 1).
  • the measurement system disclosed herein comprises a measurement device that emits light in a predetermined irradiation direction and is capable of receiving light reflected by an object illuminated by the light, and a control device that controls the measurement device, wherein the measurement device receives light reflected by a first reflecting member, and the control device controls the irradiation direction of the light from the measurement device based on the result of receiving the light reflected by the first reflecting member so that the light is irradiated onto a second reflecting member different from the first reflecting member.
  • the measurement system disclosed herein comprises a measurement device that irradiates a reflective member with light and receives the light reflected by the reflective member, and a control device that controls the direction of light irradiation from the measurement device.
  • the control device controls the direction of light irradiation so that the trajectory of light on a surface that intersects with the optical path of the light from the measurement device exhibits a first pattern, and then controls the direction of light irradiation so that the trajectory of light on the surface exhibits a second pattern different from the first pattern, and obtains information regarding the position of the reflective member based on the results of receiving the light.
  • the measurement system disclosed herein comprises a measurement device that irradiates a reflective member with light and receives the light reflected by the reflective member, and a control device that controls the direction of light irradiation from the measurement device.
  • the measurement device comprises an irradiation device that can irradiate light in a predetermined direction based on control by the control device.
  • the control device can change the direction of light irradiation from the measurement device by rotating the irradiation device along at least one of a first rotation axis and a second rotation axis intersecting the first rotation axis.
  • the control device controls the irradiation device to rotate in a first manner along at least one of the first rotation axis and the second rotation axis to irradiate light, and then rotate the irradiation device in a second manner different from the first manner along at least one of the first rotation axis and the second rotation axis to irradiate the light, and obtains information regarding the position of the reflective member based on the result of receiving the light.
  • Figure 1 is a schematic diagram showing the overall configuration of the measurement system.
  • the measurement system 100 has a measurement device 1, a control device 2, an imaging device 3, and a movable body 4.
  • the measurement device 1, imaging device 3, movable body 4, and control device 2 are communicatively connected via a communication network NW.
  • the communication network NW includes a wired local area network.
  • the communication network NW may also include a wireless local area network, a wireless wide area network, or other communication network.
  • the measurement system 100 may include one or more measurement devices.
  • the control device 2 may be included in the measurement device 1.
  • the imaging device 3 may be included in the measurement device 1.
  • the measurement system 100 may not include a movable body 4.
  • the measurement system 100 may not include an imaging device.
  • the measuring device 1 emits light in a predetermined irradiation direction.
  • the measuring device 1 can also receive light reflected from an object illuminated by the light and transmit the light reception results to the control device 2.
  • the control device 2 controls at least one of the measuring device 1, the imaging device 3, and the movable body 4 to perform a predetermined operation.
  • the control device 2 may generate control information for causing at least one of the measuring device 1, the imaging device 3, and the movable body 4 to perform a predetermined operation, and transmit the generated control information to the device to be controlled via the communication network NW.
  • the control device 2 can also receive information from at least one of the measuring device 1, the imaging device 3, and the movable body 4 via the communication network NW.
  • the control device 2 may control the operation of at least one of the measuring device 1, the imaging device 3, and the movable body 4 based on the received information.
  • the control device 2 may generate control information for controlling the operation of at least one of the measuring device 1, the imaging device 3, and the movable body 4 based on the received information.
  • the control device 2 may also transmit the control information to an external device of the measurement system 100 via the communication network NW.
  • the movable body 4 has a part (movable part) whose position and/or posture can be changed.
  • the movable body 4 is, for example, a robot capable of performing predetermined processes on an object, such as various processes including grasping, cutting, welding, screwing, polishing, and painting, or various measurements of shape, position, physical properties, electrical properties, etc.
  • the movable body 4 may be a mobile body such as an AGV (Automatic Guided Vehicle), RGV (Rail Guided Vehicle), AMR (Autonomous Mobile Robot), drone, or unmanned aerial vehicle.
  • the movable body 4 may be equipped with an end effector capable of performing predetermined processes.
  • the reflective member 5 is a member that reflects incident light in a direction opposite to the incident direction.
  • the reflective member 5 can also be referred to as a retroreflective member that retroreflects light that is incident on the reflective member 5.
  • the reflective member 5 may be, for example, a corner cube reflector or a ball reflector.
  • the reflective member 5 may also be composed of a spherically mounted retroreflector (SMR (Spherically Mounted Retroreflector)) composed of a metal sphere and a retroreflector embedded therein.
  • SMR Spherically Mounted Retroreflector
  • the reflective member 5 may also be a marker that displays a predetermined pattern.
  • the reflective member 5 may be attached to the movable body 4.
  • the reflective member 5 may be attached to an end effector provided on the movable body 4 or near the end effector.
  • the reflective member 5 includes a first reflective member 51, a second reflective member 52, and a third reflective member 53.
  • the number of reflective members 5 provided on the movable body 4 is not limited to three and may be more or less than three.
  • multiple reflective members 5 may be attached to different objects.
  • the first reflecting member 51 may be attached to the movable body 4, and the second reflecting member 52 may be attached to an object different from the movable body 4.
  • At least one of the position and posture of the movable parts of the different objects to which multiple reflecting members 5 are attached may be changed so as to maintain the positional relationship between the reflecting members 5.
  • the part to which the reflecting members 5 are attached may be attached to an object that is not a movable body, or may be attached to a part other than the movable part of the movable body 4.
  • FIG. 2 is a schematic diagram showing the configuration of the measurement device 1.
  • the measurement device 1 has an optical comb interferometer 11, an optical path branching member 12, a mirror 13, and a light receiving element 14.
  • the optical comb interferometer 11 generates, for example, laser light as irradiation light for irradiating the reflecting member 5 from the measurement device 1.
  • the optical comb interferometer 11 may be an optical comb light source that generates pulsed light containing frequency components evenly spaced on the frequency axis. At least a portion of the irradiation light generated by the optical comb interferometer 11 passes through the optical path branching member 12 and is irradiated onto the mirror 13.
  • the optical path branching member 12 is a prism having a branching surface that transmits part of the incident light and reflects part of it.
  • the optical path branching member 12 may also be a half mirror having a branching surface.
  • the mirror 13 reflects at least a portion of the incident light and is supported so that its direction can be changed.
  • the irradiation light reflected by the mirror 13 can be irradiated onto the reflecting member 5.
  • the mirror 13 can be considered an irradiation device that can irradiate light having a predetermined diameter in a predetermined irradiation direction.
  • the light irradiated by the mirror 13 may be laser light.
  • the diameter of the light irradiated by the mirror 13 can also be referred to as the beam diameter.
  • the light irradiated onto the reflecting member 5 is reflected by the reflecting surface of the reflecting member 5 in the opposite direction to the incident direction of the irradiated light.
  • the reflected light reflected by the reflecting member 5 is incident on the mirror 13, reflected by the mirror 13, and incident on the light path branching member 12.
  • a portion of the reflected light incident on the light path branching member 12 is reflected by the branching surface of the light path branching member 12 and incident on the light receiving element 14.
  • the light receiving element 14 may be a four-part PSD (Position Sensitive Detector) that detects the position of the incident light based on the output of a photodiode located on each of the four divided light receiving surfaces according to the amount of incident light.
  • PSD Position Sensitive Detector
  • the measuring device 1 outputs the results of receiving the reflected light received by the light receiving element 14 to the control device 2 via the communication network NW. Based on the results of receiving the reflected light, the control device 2 can obtain the distance to the reflective member 5, for example, using an interferometric measurement method. The control device 2 may also obtain the distance to the reflective member 5 using a triangulation method. The control device 2 determines the position of the reflective member 5 in the measurement coordinate system based on the distance to the reflective member 5 and the angle of the light irradiated onto the reflective member 5 by the mirror 13. Information indicating the position of the reflective member 5 is one example of information related to the position of the reflective member 5. The direction of the reflective member 5 relative to the measuring device 1 is another example of information related to the position of the reflective member 5. The measuring device 1 measures the reflective member 5 based on the information related to the position of the reflective member 5.
  • FIG. 3 is a schematic diagram showing the general configuration of the control device 2.
  • the control device 2 is a computer having a communication interface 21, memory 22, and processor 23.
  • the communication interface 21 is an example of a communication unit, and has an interface circuit for accepting data to be processed by the control device 2, or for outputting data processed by the control device 2.
  • the communication interface 21 includes, for example, a communication interface circuit for connecting the control device 2 to the communication network NW.
  • the processor 23 is an example of a control unit and includes one or more processors and their peripheral circuits.
  • the processor 23 may further include other arithmetic circuits, such as a logic operation unit, a numerical operation unit, or a graphics processing unit.
  • the processor 23 executes the computer program code 220 stored in the memory 22, causing the control device 2 to perform the various processes described in this embodiment.
  • logical functional blocks for executing the operations to be performed by the control device 2 may be realized within the processor 23.
  • the processor 23 can function as a controller for realizing logical functional blocks for executing the operations to be performed by the control device 2.
  • any device typically, a computer
  • any device that executes the computer program code 220 can function as the control device 2.
  • At least one of the memory 22 and the processor 23 may be referred to as a control circuit (or circuit).
  • the control device 2 controls the direction of light emitted from the measurement device 1 so that light is irradiated onto the second reflecting member 52. At this time, the control device 2 may control the direction of light emitted from the measurement device 1 so as to search for the second reflecting member 52. It can also be said that the control device 2 controls the direction of light emitted from the measurement device 1 to search for the second reflecting member 52. In other words, the control device 2 controls the direction of light emitted from the measurement device 1 so that light is irradiated onto multiple positions on any surface PL that intersects with the optical path OP of the light from the measurement device 1.
  • the control device 2 may also control the measurement device 1 so that light is emitted from the start point of the locus R, which is an arbitrary point (for example, a vertex of a polygon) included in a range that includes the position where the target reflective member 5 is estimated to be present.
  • the control device 2 may first control the direction of light irradiation from the measurement device 1 so that the light trajectory R on the surface PL shows a first pattern, and then control the direction of light irradiation from the measurement device 1 so that the light trajectory R on the surface PL shows a second pattern different from the first pattern.
  • the second pattern may be a pattern with a narrower pitch than the first pattern, a narrower irradiation range than the first pattern, or a higher density than the first pattern when compared on the same surface PL as the first pattern.
  • the second pattern can also be said to be a pattern that searches for the reflective member 5 with higher accuracy than the first pattern.
  • the irradiation of light on the surface PL so that the trajectory R shows the first pattern can be referred to as rough scanning
  • the irradiation of light on the surface PL so that the trajectory R shows the second pattern can be referred to as fine scanning.
  • the control by the control device 2 to cause the measurement device 1 to irradiate light so that the reflective member is searched for by rough scanning can be referred to as control in the first search mode
  • the control by the control device 2 to cause the measurement device 1 to irradiate light so that the reflective member is searched for by fine scanning can be referred to as control in the second search mode.
  • the measurement coordinate system of the measurement device 1 can be expressed, for example, with the left-right direction from the measurement device 1 toward the measurement object (movable body 4) as the X axis, the front-to-back direction as the Y axis, and the up-down direction (vertical direction) as the Z axis.
  • the plane PL that intersects with the optical path OP of the light from the measurement device 1 may, as one example, be a plane that is orthogonal to the Y axis in the measurement coordinate system, or a plane that is not orthogonal. In this example, a state in which the plane PL is orthogonal to the Y axis will be described as an example.
  • Figures 4-10 are diagrams showing examples of patterns indicated by the light trajectory R.

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un système de mesure comprenant : un dispositif de mesure qui émet de la lumière dans une direction de rayonnement prescrite et qui peut recevoir la lumière réfléchie par un objet exposé à la lumière ; et un dispositif de commande qui commande le dispositif de mesure. Le système de mesure est configuré de sorte que : le dispositif de mesure reçoit la lumière réfléchie par un premier élément de réflexion ; et le dispositif de commande commande la direction de rayonnement de la lumière provenant du dispositif de mesure de sorte qu'un second élément de réflexion, différent du premier élément de réflexion, est exposé à la lumière en fonction du résultat de réception de lumière concernant la lumière réfléchie par le premier élément de réflexion. Le système de mesure peut être configuré de sorte que le dispositif de commande commande la direction de rayonnement de la lumière afin que la trajectoire de la lumière dans un plan croisant le trajet optique de la lumière provenant du dispositif de mesure indique un premier motif, puis commande la direction de rayonnement de la lumière afin que la trajectoire de la lumière dans ledit plan indique un second motif, différent du premier motif, et acquiert des informations relatives aux positions des éléments de réflexion sur la base de résultats de réception de lumière.
PCT/JP2024/004632 2024-02-09 2024-02-09 Système de mesure et système de commande Pending WO2025169485A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2024/004632 WO2025169485A1 (fr) 2024-02-09 2024-02-09 Système de mesure et système de commande

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2024/004632 WO2025169485A1 (fr) 2024-02-09 2024-02-09 Système de mesure et système de commande

Publications (1)

Publication Number Publication Date
WO2025169485A1 true WO2025169485A1 (fr) 2025-08-14

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ID=96699556

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
WO (1) WO2025169485A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008089393A (ja) * 2006-10-02 2008-04-17 Soatec Inc 光学装置及び光学式測定システム
JP2014224790A (ja) * 2013-05-17 2014-12-04 株式会社ミツトヨ 追尾式レーザー装置
JP2020508457A (ja) * 2017-03-29 2020-03-19 エスゼット ディージェイアイ テクノロジー カンパニー リミテッドＳｚ Ｄｊｉ Ｔｅｃｈｎｏｌｏｇｙ Ｃｏ．，Ｌｔｄ センサーシステム及びその方法
WO2022259536A1 (fr) * 2021-06-11 2022-12-15 株式会社ニコン Dispositif et procédé de mesure de position

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008089393A (ja) * 2006-10-02 2008-04-17 Soatec Inc 光学装置及び光学式測定システム
JP2014224790A (ja) * 2013-05-17 2014-12-04 株式会社ミツトヨ 追尾式レーザー装置
JP2020508457A (ja) * 2017-03-29 2020-03-19 エスゼット ディージェイアイ テクノロジー カンパニー リミテッドＳｚ Ｄｊｉ Ｔｅｃｈｎｏｌｏｇｙ Ｃｏ．，Ｌｔｄ センサーシステム及びその方法
WO2022259536A1 (fr) * 2021-06-11 2022-12-15 株式会社ニコン Dispositif et procédé de mesure de position

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