WO2023053620A1 - Metal-clad laminate, and laminate used for said metal-clad laminate - Google Patents
Metal-clad laminate, and laminate used for said metal-clad laminate Download PDFInfo
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- WO2023053620A1 WO2023053620A1 PCT/JP2022/024856 JP2022024856W WO2023053620A1 WO 2023053620 A1 WO2023053620 A1 WO 2023053620A1 JP 2022024856 W JP2022024856 W JP 2022024856W WO 2023053620 A1 WO2023053620 A1 WO 2023053620A1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
Definitions
- the present invention relates to a metal-clad laminate and a laminate used for the metal-clad laminate.
- Metal-clad laminates e.g., copper-clad laminates (CCL)
- CCL copper-clad laminates
- insulating resin which is the main material of a circuit board
- Printed wiring boards including metal-clad laminates are required to transmit a large amount of data at high speed as described above, and are becoming increasingly compatible with high frequencies. It is necessary to reduce the transmission loss of high frequencies for printed wiring boards to support high frequencies.
- Realization of a conductor is required.
- As a method of realizing a conductor with a low surface roughness there is a method of forming a conductor on the surface of a low dielectric base material by a dry process such as vapor deposition or sputtering, or a wet process such as plating.
- thermocompression bonding a metal foil (e.g., copper foil) with a certain surface roughness
- these methods are less smooth because the surface roughness of the conductor depends on the surface roughness of the base film.
- Using a high base film can reduce the surface roughness of the conductor.
- the low dielectric base film requires high processing temperature and adjustment of resin orientation in order to develop heat resistance, and the poor workability makes it impossible to produce a smooth low dielectric base film.
- the resin constituting the low-dielectric base film is composed of a molecular skeleton with low polarity, it is difficult to develop adhesion with a metal layer formed by a dry process such as vapor deposition or sputtering, or a wet process such as plating.
- a metal layer formed by a dry process such as vapor deposition or sputtering, or a wet process such as plating.
- the smoothness of the low-dielectric substrate film is increased, there is a possibility that this adhesion will be further reduced. Therefore, it is desired to provide a metal-clad laminate that can reduce the transmission loss of electrical signals and has excellent adhesion between the metal film and the substrate film.
- the present invention provides a metal-clad laminate that adheres even to a low-dielectric substrate film with poor adhesion, and has good adhesion to metal layers formed by dry processes such as vapor deposition and sputtering, or wet processes such as plating.
- the purpose is to provide a board.
- Another object of the present invention is to provide a laminate in which a resin layer is formed on a substrate film, which is used for forming the metal-clad laminate.
- the present inventors have made intensive studies to solve the above problems, and found that a resin composition containing a silane coupling agent having a specific surface roughness (Rz) between a metal film and a base film
- the inventors have found that the above problem can be solved by arranging different layers, and have completed the present invention.
- the present invention includes the following aspects.
- a laminate having a base film and a layer made of a resin composition containing a silane coupling agent, The surface roughness (Rz) of the layer made of the resin composition is 1 ⁇ m or less, A laminate having a dielectric constant of 3.5 or less and a dielectric loss tangent of 0.005 or less under the condition of a frequency of 28 GHz.
- the silane coupling agent is contained in an amount of 0.1 to 20 parts by mass with respect to 100 parts by mass of the resin composition.
- the silane coupling agent is a silane coupling agent containing any one of functional groups selected from imidazole skeleton, triazole skeleton, triazine skeleton, olefin skeleton, mercapto group, maleic anhydride skeleton, imide skeleton, and amino group.
- the silane coupling agent is a silane coupling agent having a butadiene skeleton.
- a printed wiring board with a shield film comprising the laminate according to any one of [1] to [19].
- a tension laminate can be provided.
- FIG. 3 is a cross-sectional view showing another example of the configuration of the metal-clad laminate of the present invention.
- the film thickness of the substrate film, the layer made of the resin composition, the metal film, etc. is the average value obtained by observing the cross section of the object to be measured using a microscope, measuring the thickness at five locations, and averaging the values.
- the laminate of the present invention has a base film and a layer made of a resin composition containing a silane coupling agent.
- the surface roughness (Rz) of the layer made of the resin composition is 1 ⁇ m or less.
- the laminate has a dielectric constant of 3.5 or less and a dielectric loss tangent of 0.005 or less under the condition of a frequency of 28 GHz.
- the base film is not particularly limited and can be appropriately selected depending on the intended purpose.
- Resins with excellent dielectric properties include polyarylene ethers such as polyetheretherketone (PEEK) resin, polyetherketone (PEK) resin, polyetherketoneketone (PEKK) resin, and polyetherketoneetherketoneketone (PEKEKK) resin.
- Ketone (PAEK) resin polyimide, modified polyimide, polytetrafluoroethylene (PTFE), tetrafluoroethylene perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), tetrafluoroethylene - Ethylene copolymer (ETFE), polyphenylene sulfide (PPS), polyphenylene ether (PPE), syndiotactic polystyrene (SPS), aramid, polyethylene naphthalate, and liquid crystal polymer (LCP).
- PTFE polytetrafluoroethylene
- PFA tetrafluoroethylene perfluoroalkyl vinyl ether copolymer
- FEP tetrafluoroethylene-hexafluoropropylene copolymer
- ETFE tetrafluoroethylene - Ethylene copolymer
- polyarylene ether ketone (PAEK) resin such as polyether ether ketone (PEEK) resin, modified polyimide, polytetrafluoroethylene (PTFE), tetrafluoroethylene perfluoroalkyl vinyl ether Copolymers (PFA), polyphenylene sulfide (PPS), and liquid crystal polymers (LCP) are preferred.
- PEEK polyether ether ketone
- PTFE polytetrafluoroethylene
- PPS polyphenylene sulfide
- LCP liquid crystal polymers
- Polyarylene ether ketone (PAEK) resin and liquid crystal polymer (LCP) are more preferable from the viewpoint of excellent dimensional stability.
- a polyether ether ketone (PEEK) resin is more preferable because it has good filler dispersibility and can be compatible with other properties even when the storage elastic modulus of the base film is adjusted by changing the amount of filler added.
- An alloy in which a plurality of resins are mixed can be used for the base film.
- the base film can contain a filler. The filler will be described in detail below.
- the base film can contain a filler in order to impart various functions such as strength, insulation, heat resistance, coefficient of thermal expansion (CTE), and adjustment of storage elastic modulus to the base.
- a filler in order to impart various functions such as strength, insulation, heat resistance, coefficient of thermal expansion (CTE), and adjustment of storage elastic modulus to the base.
- fillers include inorganic fillers and organic fillers, which can be used alone or in combination.
- inorganic fillers examples include mica, talc, boron nitride, magnesium oxide, silica, diatomaceous earth, titanium oxide, and zinc oxide.
- inorganic fillers such as mica, talc, boron nitride, magnesium oxide, and silica are preferred from the viewpoint of imparting the above functions without deteriorating the dielectric loss tangent.
- organic fillers include, but are not limited to, polyethylene terephthalate, polybutylene terephthalate, polyethylene naphthalate, polystyrene, olefin polymer, polyamide, polycarbonate, polyimide, polyether ketone, polyether ether ketone, polymethyl methacrylate, liquid crystal polymer, poly Examples include organic particles such as tetrafluoroethylene. Polystyrene, olefin polymer, liquid crystal polymer, and polytetrafluoroethylene are preferred from the viewpoint of improving the dielectric properties of the base film.
- One of the inorganic fillers and organic fillers may be selected from the above and used alone, or two or more may be used in combination. When two or more types are combined, a combination of an inorganic filler and an organic filler may be used.
- the shape of the filler is not particularly limited and can be appropriately selected depending on the purpose.
- the filler may be a spherical filler or a non-spherical filler, but from the viewpoint of coefficient of thermal expansion (CTE), a non-spherical filler is preferred.
- the shape of the non-spherical filler may be any three-dimensional shape other than a spherical shape (substantially spherical shape), and examples thereof include plate-like, scale-like, columnar, chain-like, and fibrous shapes.
- the average particle size of the filler is preferably 0.05 ⁇ m to 20 ⁇ m, preferably 0.1 ⁇ m to 15 ⁇ m, more preferably 0.1 ⁇ m to 10 ⁇ m, more preferably 0.1 ⁇ m to 7 ⁇ m.
- the filler has good dispersibility and can effectively impart the above functions. If the average particle size of the filler is 0.1 ⁇ m or more, the effect of the aspect ratio of the non-spherical filler becomes effective.
- the aspect ratio (average major axis length/average minor axis length), which means the planar direction and thickness of the non-spherical filler, is 5 or more and 500 or less, preferably 10 or more and 500 or less, from the viewpoint of the coefficient of thermal expansion (CTE). is preferably If the aspect ratio is 5 or more, it is easy to make the CTE sufficiently small. The larger the aspect ratio, the easier it is to adjust the CTE.
- the average particle size and aspect ratio of the inorganic filler can be obtained by observing, for example, using a scanning electron microscope (SEM) or a transmission electron microscope (TEM) and averaging measured values at three or more locations.
- SEM scanning electron microscope
- TEM transmission electron microscope
- the average particle size and aspect ratio of the inorganic filler present in the film (layer) for example, after embedding the film in epoxy resin, ion milling of the cross section of the film is performed using an ion milling device for cross-sectional observation. A sample is prepared, a cross section of the obtained sample is observed using a scanning electron microscope (SEM) or a transmission electron microscope (TEM), and the average of measured values at three or more points can be obtained.
- the average particle size of the organic filler is obtained by observing the cut surface of the base film with an electron microscope and measuring the maximum diameter of at least 10 particles. It can be obtained as the average dispersed particle diameter when dispersed in the inside.
- the content of the filler in the base film is preferably 1% by volume or more and 30% by volume or less, more preferably 3% by volume or more and 25% by volume or less.
- the mass ratio of Si element to carbon atoms (Si/C) on the surface of the substrate film is preferably 3% or more as measured by an electron probe microanalyzer (EPMA).
- EPMA electron probe microanalyzer
- the base film may optionally contain known additives as required.
- additives include antioxidants, light stabilizers, ultraviolet absorbers, crystal nucleating agents, plasticizers, filler dispersants, and the like.
- the film thickness of the substrate film is not particularly limited and can be appropriately selected depending on the purpose, but is preferably 10 ⁇ m to 250 ⁇ m.
- the surface roughness (Rz) of the base film is not particularly limited and can be appropriately selected according to the purpose. Considering various conditions such as the method, the surface roughness (Rz) of the base film is 1 ⁇ m or more. On the other hand, in order to keep the surface roughness (Rz) of the resin composition layer formed on the base film within a desired range, the surface roughness (Rz) of the base film is preferably 10 ⁇ m or less. Preable. That is, the surface roughness (Rz) of the substrate film is preferably 1 ⁇ m or more and 10 ⁇ m or less, more preferably 1 ⁇ m or more and 4 ⁇ m or less.
- the surface roughness (Rz) (surface roughness (Rz) of the base film, the surface roughness (Rz) of the layer composed of a resin composition containing a silane coupling agent described later, and the surface roughness of the metal film roughness (including Rz)) refers to the ten-point average roughness of the film surface.
- Ten-point average roughness Rz indicates Rz JIS described in JIS B 0601: 2013 (ISO 4287: 1997 Amd.1: 2009) Annex JA, and JIS B 0601: 2013 Annex JA JA. It can be obtained based on the method described in 2 a).
- the ten-point average roughness Rz ( ⁇ m) of the surface of the sheet is obtained by measuring the roughness curve of the test piece using a laser microscope, and from this roughness curve, JIS B 0601: 2013 (ISO 4287: 1997 Amd.1: 2009) Annex JA JA. Based on the method described in 2 a), each 10 samples are measured and their average value is obtained.
- the relative dielectric constant and dielectric loss tangent of the base film are not particularly limited and can be appropriately selected according to the purpose. , the dielectric loss tangent is preferably 0.005 or less.
- the coefficient of thermal expansion (CTE) of the base film is not particularly limited, and can be appropriately selected according to the purpose. is preferably 50 ppm or less, for example.
- the coefficient of thermal expansion was measured in a tensile mode using a thermomechanical analyzer (product name: SII//SS7100 manufactured by Hitachi High-Tech Science) under a load of 50 mN and a temperature increase rate of 5°C/min. The temperature is increased from 25°C to 250°C at a rate of 5°C/min, the temperature change in dimensions is measured, and the coefficient of linear expansion is obtained from the slope in the range from 25°C to 125°C. ,It can be carried out.
- the surface of the base film may be surface-treated by corona treatment, plasma treatment, or ultraviolet treatment for the reason of improving adhesion with the layer made of the resin composition.
- the layer made of the resin composition is formed, for example, by forming a film of the resin composition and curing the coating film made of the resin composition.
- the surface roughness (Rz) of the layer made of the resin composition is 1 ⁇ m or less.
- the surface roughness (Rz) of the layer made of the resin composition is preferably 0.01 ⁇ m or more and 1 ⁇ m or less, more preferably 0.01 ⁇ m or more and 0.5 ⁇ m or less, and more preferably 0.01 ⁇ m or more and 0.01 ⁇ m or more. 0.25 ⁇ m or less is preferred.
- the method for measuring the surface roughness (Rz) is as described in the section ⁇ characteristics of base film>> above.
- the surface roughness (Rz) of the layer made of the resin composition is 0.01 ⁇ m or more, it is possible to obtain a metal-clad laminate excellent in adhesion of the metal film.
- the metal-clad laminate can be used as a printed wiring board used for 6 GHz band communications in fifth-generation mobile communication systems.
- the metal-clad laminate can be used as a printed wiring board used for 28 GHz band communications in fifth-generation mobile communication systems.
- the resin composition is preferably made of a thermosetting resin.
- thermosetting resins include phenol resins, epoxy resins, urea resins, melamine resins, unsaturated polyester resins, polyurethane resins, polyimide resins, silicone resins, and maleimide resins. From the viewpoint of dielectric properties, it is preferably at least one of epoxy resin, polyimide resin, and maleimide resin.
- the resin composition contains a silane coupling agent.
- epoxy resins include bisphenol A type epoxy resins, bisphenol F type epoxy resins, or hydrogenated versions thereof; diglycidyl phthalate, diglycidyl isophthalate, diglycidyl terephthalate, p-hydroxybenzoic acid Glycidyl ester epoxy resins such as glycidyl ester, diglycidyl tetrahydrophthalate, diglycidyl succinate, diglycidyl adipate, diglycidyl sebacate, and triglycidyl trimellitate; ethylene glycol diglycidyl ether, propylene glycol Diglycidyl ether, 1,4-butanediol diglycidyl ether, 1,6-hexanediol diglycidyl ether, trimethylolpropane triglycidyl ether, pentaerythritol tetraglycidyl ether, tetraphenylg
- Novolac epoxy resins such as xylene structure-containing novolac epoxy resins, naphthol novolac epoxy resins, phenol novolak epoxy resins, o-cresol novolak epoxy resins, and bisphenol A novolak epoxy resins can also be used.
- epoxy resins include brominated bisphenol A type epoxy resins, phosphorus-containing epoxy resins, fluorine-containing epoxy resins, dicyclopentadiene skeleton-containing epoxy resins, naphthalene skeleton-containing epoxy resins, anthracene-type epoxy resins, and tertiary-butylcatechol-type epoxy resins.
- Resin, triphenylmethane type epoxy resin, tetraphenylethane type epoxy resin, biphenyl type epoxy resin, bisphenol S type epoxy resin, etc. can be used. These epoxy resins may be used alone or in combination of two or more.
- maleimide resins include 1-methyl-2,4-bismaleimidobenzene, N,N'-m-phenylenebismaleimide, N,N'-p-phenylenebismaleimide, and N,N'-m-toluylene.
- modified maleimide obtained by modifying the above maleimide resin with a compound having a primary amine
- polymers obtained by chain extension with amine-modified products such as dimer acid and trimer acid and maleic anhydride and pyromellitic acid.
- a commercially available compound can also be used as the maleimide resin. can be preferably used.
- the maleimide resin contained in the resin composition preferably has a weight average molecular weight of 5,000 to 100,000, more preferably 5,000 to 40,000.
- the weight-average molecular weight is 5,000 or more, the leveling property of the resin composition layer during film formation is improved, and the surface roughness of the resin composition layer can be reduced.
- the weight-average molecular weight is 100,000 or less, it is possible to impart appropriate flexibility to the cured product of the resin composition and exhibit excellent adhesiveness. Also, the heat resistance is enhanced. If the weight-average molecular weight is 40,000 or less, the solubility of the maleimide resin and other additives and the dispersibility of fillers are improved, and both performance improvement and surface roughness reduction can be achieved. .
- ⁇ Silane coupling agent>> By including a silane coupling agent in the resin composition, as shown in the following examples, the adhesion between the layer made of the resin composition and the substrate film, and the layer made of the resin composition and the metal film described later ( adhesion) can be improved, and a metal-clad laminate having good adhesion can be produced.
- the silane coupling agent used in the present invention is not particularly limited as long as it can produce a metal-clad laminate with good adhesion, and can be appropriately selected according to the purpose.
- Examples include vinyltrichlorosilane, vinyltrimethoxysilane, vinyltriethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldiethoxysilane, 3-glycid xypropyltriethoxysilane, p-styryltrimethoxysilane, 3-methacryloxypropylmethyldimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-methacryloxypropylmethyldiethoxysilane, 3-methacryloxypropyltriethoxysilane, 3-acryloxypropyltrimethoxysilane, N-2-(aminoe
- the silane coupling agent is an imidazole skeleton, a triazole skeleton, a triazine skeleton, an olefin skeleton, a mercapto group, a maleic anhydride skeleton, an imide skeleton, or a silane coupling agent containing an amino functional group. is preferred.
- a silane coupling agent having any of these groups is contained, adhesion is improved even with a small amount of addition.
- a maleimide resin is contained in the resin composition, the silane coupling agent having these groups reacts with the maleimide resin or acts as a reaction accelerator to improve heat resistance. can be done.
- the silane coupling agent is preferably in a liquid state at 100°C.
- the silane coupling agent is in a liquid state at 100° C.
- the temperature of the surface of the layer made of the resin composition rises due to the collision of the metal particles.
- the silane coupling agent is preferably a silane coupling agent having a butadiene skeleton.
- the maleimide resin and the silane coupling agent having the butadiene skeleton can be crosslinked.
- the silane coupling agent having a butadiene skeleton Shin-Etsu Chemical Co., Ltd. "X-12-1281A”, “X-12-1281A-ES”, “X-12-1287A”, “X-12-1267B” ”, “X-1267B-ES”.
- the content of the silane coupling agent in the resin composition is preferably 0.1 to 20 parts by mass of the silane coupling agent per 100 parts by mass of the resin composition. If the content of the silane coupling agent is at least the above lower limit, the adhesion is improved. If the content of the silane coupling agent exceeds the above upper limit, the silane coupling agent that has not reacted with the maleimide resin will bleed out, or the compatibility will deteriorate and the surface roughness will increase.
- the layer made of the resin composition can also contain other components such as fillers and various additives.
- the layer made of the resin composition may contain a filler for improving heat resistance, controlling fluidity, and the like.
- the type of filler is not particularly limited and can be appropriately selected depending on the purpose. can be used.
- the average particle diameter of the filler contained in the layer made of the resin composition is preferably 0.01 ⁇ m to 20 ⁇ m, preferably 0.01 ⁇ m to 10 ⁇ m, more preferably 0.01 to 5 ⁇ m.
- the content of the filler in the layer made of the resin composition is preferably 0.1% by volume or more and 50% by volume or less, more preferably 1% by volume or more and 25% by volume or less. Since the layer made of the resin composition is required to have a higher surface smoothness than the base film, it is preferable that the average particle diameter of the filler used is smaller than that of the base film and the content thereof is small.
- the resin composition may contain a tackifier, a flame retardant, a curing agent, a curing accelerator, a heat antioxidant, a leveling agent, an antifoaming agent, and a pigment.
- a solvent, etc. can be contained to such an extent that the functions of the resin composition are not affected.
- the resin composition preferably contains an oxazine, more specifically a benzoxazine resin.
- Benzoxazine resins include, for example, 6,6-(1-methylethylidene)bis(3,4-dihydro-3-phenyl-2H-1,3-benzoxazine), 6,6-(1-methylethylidene) Examples thereof include bis(3,4-dihydro-3-methyl-2H-1,3-benzoxazine) and the like, and two or more of them may be combined.
- a phenyl group, a methyl group, a cyclohexyl group, or the like may be bonded to the nitrogen of the oxazine ring.
- benzoxazine resins include "Benzoxazine Fa", “Benzoxazine Pd” and “Benzoxazine ALP-d” manufactured by Shikoku Kasei Co., Ltd., Tohoku Kako Co., Ltd. ⁇ CR-276'' and ⁇ BZ-LB-MDA'' manufactured by K.K.
- the thickness of the layer made of the resin composition is preferably 0.1 ⁇ m or more, more preferably 0.5 ⁇ m or more, still more preferably 1 ⁇ m or more, and particularly preferably 3 ⁇ m or more. If the film thickness of the layer made of the resin composition is at least the above lower limit, sufficient uniformity for smoothing the surface of the substrate film can be maintained.
- the thickness of the layer made of the resin composition is preferably 100 ⁇ m or less, more preferably 50 ⁇ m or less, even more preferably 20 ⁇ m or less, and particularly preferably 10 ⁇ m or less. If the thickness of the layer made of the resin composition is 100 ⁇ m or less, the coating of the layer made of the resin composition is easy.
- the film thickness of the layer made of the resin composition is 20 ⁇ m or less, the concentration of stress on the layer made of the resin composition can be reduced, and the adhesion can be improved. Furthermore, when the film thickness of the layer made of the resin composition is 10 ⁇ m or less, a laminate obtained by laminating a resin film containing polyetheretherketone as a base film exhibits the properties of polyetheretherketone having a low CTE in the thickness direction. Do not harm.
- the film thickness of the layer made of the resin composition is such that the layer made of the resin composition smoothes the surface of the substrate film and, in turn, smoothes the surface of the metal film, thereby obtaining a desired reduction in electrical signal loss.
- the surface roughness (Rz) ⁇ m of the substrate film It is preferably 0.7 times or more the surface roughness (Rz) ⁇ m of the substrate film, more preferably 1 time or more the surface roughness (Rz) ⁇ m of the substrate film. More preferably, the surface roughness (Rz) of the material film is at least 1.2 times the ⁇ m value.
- the dielectric constant and dielectric loss tangent of the layer made of the resin composition are not particularly limited and can be appropriately selected according to the purpose. 0.5 or less and the dielectric loss tangent is preferably 0.004 or less.
- the method for measuring the dielectric constant and the dielectric loss tangent is as described in the section ⁇ characteristics of the base film>> of the base film.
- the surface of the layer made of the resin composition may be surface-treated by corona treatment, plasma treatment, or ultraviolet treatment for the reason of improving adhesion with the metal film.
- the layer made of the resin composition can be formed by forming a film of the resin composition and curing the coating film made of the resin composition.
- the resin composition can be produced by mixing an epoxy resin, polyimide resin, maleimide resin, or the like, a silane coupling agent, and other components.
- the mixing method is not particularly limited as long as the resin composition is uniform. Since the resin composition is preferably used in the form of a solution or dispersion, a solvent is also usually used.
- solvents examples include alcohols such as methanol, ethanol, isopropyl alcohol, n-propyl alcohol, isobutyl alcohol, n-butyl alcohol, benzyl alcohol, ethylene glycol monomethyl ether, propylene glycol monomethyl ether, diethylene glycol monomethyl ether, and diacetone alcohol.
- alcohols such as methanol, ethanol, isopropyl alcohol, n-propyl alcohol, isobutyl alcohol, n-butyl alcohol, benzyl alcohol, ethylene glycol monomethyl ether, propylene glycol monomethyl ether, diethylene glycol monomethyl ether, and diacetone alcohol.
- ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, methyl amyl ketone, cyclohexanone, and isophorone; aromatic hydrocarbons such as toluene, xylene, ethylbenzene, and mesitylene; methyl acetate, ethyl acetate, ethylene glycol monomethyl ether acetate, esters such as 3-methoxybutyl acetate; aliphatic hydrocarbons such as hexane, heptane, cyclohexane and methylcyclohexane; These solvents may be used alone or in combination of two or more.
- the resin composition is a solvent-containing solution or dispersion (resin varnish)
- coating on the substrate film and formation of the coating film can be performed smoothly, and the desired thickness and surface roughness of the resin composition A coating film consisting of a substance can be easily obtained.
- the resin composition contains a solvent
- the solid content concentration is preferably in the range of 3 to 80% by mass, more preferably 10 to 50% by mass, from the viewpoint of workability including formation of a coating film.
- the solid content concentration is 80% by mass or less, the viscosity of the solution is moderate, and it is easy to apply uniformly.
- a resin varnish containing the above resin composition, a silane coupling agent, and a solvent is applied to the surface of a base film to form a resin varnish layer.
- a B-stage coating film can be formed by removing the solvent from the resin varnish layer.
- the coating film is in a B-stage state means that the resin composition is in an uncured state or a semi-cured state in which a part of the resin composition has begun to be cured, and a state in which the resin composition is further cured by heating or the like. say.
- the method for applying the resin varnish on the substrate film is not particularly limited and can be appropriately selected according to the purpose.
- a blade coating method, a doctor roll method, a doctor blade method, a curtain coating method, a slit coating method, a screen printing method, an inkjet method, a dispensing method, and the like can be mentioned.
- the B-stage coating film can be further subjected to heating or the like to form a cured coating film, that is, a layer made of the resin composition.
- the laminate has a dielectric constant of 3.5 or less and a dielectric loss tangent of 0.005 or less under the condition of a frequency of 28 GHz.
- the method for measuring the dielectric constant and the dielectric loss tangent is as described in the section ⁇ characteristics of the base film>> of the base film.
- the metal-clad laminate of the present invention is obtained by laminating a metal film on the layer made of the resin composition of the laminate of the present invention.
- a layer made of a resin composition and a metal film are laminated in this order on a substrate film.
- the metal film is preferably a metal film formed by at least one of plating, sputtering, and vapor deposition.
- a layer comprising a resin composition and a metal film may be laminated on both sides of the substrate film.
- the metal-clad laminate is laminated in the order of the metal film, the layer made of the resin composition, the substrate film, the layer made of the resin composition, and the metal film.
- FIG. 1 is a cross-sectional view showing an example of the configuration of the metal-clad laminate of the present invention.
- the metal-clad laminate 1 has a base film 2, a layer 3 made of a resin composition, and a metal film 4, which are laminated in this order.
- FIG. 2 shows another example of the structure of the metal-clad laminate of the present invention.
- the metal-clad laminate 1 of the present invention shown in FIG. 2 comprises a metal film 4a, a resin composition layer 3a, a substrate film 2, a resin composition layer 3b, and a metal film 4b, which are laminated in this order.
- the metal film is formed by at least one of plating, sputtering, and vapor deposition.
- a metal film is formed by at least one of plating, sputtering, and vapor deposition on a layer made of a resin composition having a surface roughness (Rz) of 1 ⁇ m or less, a metal film with a smooth surface is formed. can do.
- the metal films formed by these forming methods enable formation of fine pitch circuit patterns and high-precision fine circuit formation.
- the plating method and the sputtering method may be used separately or in combination. For example, when used together, a copper film can be formed by electrolytic copper plating after spreading a thin copper film by sputtering.
- the metal constituting the metal film is not particularly limited and can be appropriately selected depending on the intended purpose.
- An alloy or the like containing one or more selected types may be mentioned.
- copper and alloys containing copper are preferable from the viewpoint of shielding properties and economy.
- the method of forming the metal film includes at least one of plating, sputtering, and vapor deposition. More specifically, for example, vapor deposition films formed by physical vapor deposition (vacuum vapor deposition, sputtering, ion beam vapor deposition, electron beam vapor deposition, etc.) or chemical vapor deposition, plated films formed by plating, and the like can be mentioned. Among them, a vacuum deposition film or a sputtering film formed by a vacuum deposition method (vacuum deposition method, sputtering method, etc.) or a plated film formed by an electrolytic plating method is preferable from the viewpoint of excellent electrical conductivity in the plane direction. A sputtered film is more preferable from the viewpoint that adhesion can be improved by an anchor effect and an increase in surface temperature.
- the film thickness of the metal film is preferably 0.05 ⁇ m to 10 ⁇ m, more preferably 0.1 to 10 ⁇ m, from the viewpoint of ensuring sufficient electrical signal transmission characteristics and enabling a fine pitch of the circuit pattern. and preferably 0.5 to 10 ⁇ m.
- the surface roughness (Rz) of the metal film on the surface not in contact with the layer made of the resin composition is not particularly limited and can be appropriately selected according to the purpose. to 0.5 ⁇ m or less.
- ⁇ Effect of metal-clad laminate> It is difficult to smooth the surface of the base film because the base film contains a filler or for manufacturing reasons of the base film. By forming the film, a smooth metal film can be laminated, and transmission loss can be reduced. Further, since the layer made of the resin composition is provided, the metal-clad laminate has excellent adhesion between the base film and the metal film even when a smooth metal film is used. Furthermore, in the present invention, since the layer made of the resin composition contains a silane coupling agent, the adhesion between the base film and the metal film can be further enhanced.
- the metal film formed on the laminate of the present invention by at least one of plating, sputtering, and vapor deposition, it is possible to form a fine-pitched circuit pattern and to form a highly accurate and fine circuit. It can be a metal-clad laminate that can be used.
- the film thickness of the metal-clad laminate is not particularly limited and can be appropriately selected according to the purpose. is more preferred.
- the film thickness of the metal-clad laminate is at least the lower limit value of the above range, the handleability is excellent and the strength can be ensured.
- the thickness is equal to or less than the upper limit of the above range, lightness, thinness, shortness and flexibility can be imparted.
- a layer made of a resin composition is formed on the base film.
- a metal film is formed on the surface of the layer made of the resin composition opposite to the base film.
- a more specific method for forming a layer made of a resin composition is as described in the section ⁇ Method for producing a layer made of a resin composition>>, and includes a resin composition, a silane coupling agent,
- a coating film can be formed by applying a resin varnish containing a solvent to the surface of a substrate film to form a resin varnish layer, and then removing the solvent from the resin varnish layer. The coating film can be further cured by heating or the like to form a layer composed of the resin composition.
- the method for applying the resin varnish is not particularly limited and can be appropriately selected depending on the intended purpose.
- a doctor blade method, a curtain coating method, a slit coating method, a screen printing method, an inkjet method, a dispensing method, and the like can be mentioned.
- Examples of the method for forming the metal film include a method using a vacuum film forming method (vacuum deposition, sputtering), a method using an electroplating method, and the like.
- a method of forming a deposited film by vacuum deposition a method of forming a plated film by electrolytic plating, a method of forming a sputtered film by sputtering, or sputtering Electroplating can be performed later to form a metal film using both sputtering and plating.
- the metal-clad laminate of the present invention is a metal-clad laminate in which a layer made of a resin composition and a metal film are provided on both sides of a base film as shown in FIG.
- a layer made of a resin composition and a metal film are formed on one surface by the method described above, and then a layer made of a resin composition and a metal film are formed on the other surface of the base film by the same method.
- a film can be formed.
- a method may be used in which layers made of the resin composition are formed together on both sides of the base film, and then metal films disposed on the layer made of the resin composition are also formed together on both sides. .
- the base film and/or the layer consisting of the resin composition uses a base film or a layer consisting of the resin composition that has been surface-treated by corona treatment, plasma treatment, ultraviolet treatment, or the like, for example, the base film is prepared, the surface of the prepared base film is surface-treated, and a layer composed of the resin composition is formed on the surface-treated base film by the method described above. Moreover, after forming the layer made of the resin composition, the surface of the layer made of the resin composition may be surface-treated, and then the metal film may be formed by the method described above.
- the laminate of the present invention can be used to produce the following printed wiring boards, shield films, and printed wiring boards with shield films. can be made.
- a preferred embodiment of the laminate according to the present invention is a printed wiring board in which copper wiring is formed in the layer of the resin composition in the laminate according to the present invention.
- a printed wiring board is obtained by forming an electronic circuit on the copper-clad laminate.
- a printed wiring board is formed by laminating a substrate film and copper wiring using the laminate, and is composed of a substrate film, a layer made of a resin composition, and copper wiring in this order.
- the layer made of the resin composition and the copper wiring may be formed on both sides of the substrate film.
- a printed wiring board is manufactured by using a hot press or the like to attach a coverlay film to a surface having a wiring portion via an adhesive layer.
- the printed wiring board according to the present invention uses the low-dielectric resin composition of the present invention, it enables high-speed transmission of electronic devices and has excellent adhesion stability.
- a method for producing a printed wiring board according to the present invention for example, the adhesive layer of the laminate is brought into contact with the copper wiring, heat lamination is performed at 80 ° C. to 200 ° C., and the resin composition is removed by after-curing. There is a method to harden the different layers.
- the after-cure conditions can be, for example, 100° C. to 200° C. and 30 minutes to 4 hours.
- the shape of the copper wiring is not particularly limited, and any suitable shape may be selected as desired.
- a preferred embodiment of the laminate according to the present invention is a shield film.
- a shield film is a film for shielding various electronic devices in order to cut electromagnetic noise that affects various electronic devices such as computers, mobile phones, and analytical instruments and causes malfunctions. Also called electromagnetic wave shielding film.
- the electromagnetic wave shielding film is formed by laminating an adhesive layer, a metal layer, and the laminate of the present invention, for example.
- the layer made of the resin composition of the laminate of the present invention is in contact with the metal layer. Since the shielding film according to the present invention uses the low-dielectric resin composition of the present invention, high-speed transmission of electronic devices is possible, and the adhesive stability with electronic devices is also excellent.
- a preferred embodiment of the laminate according to the present invention is a printed wiring board with a shield film.
- a printed wiring board with a shielding film is a printed wiring board having a printed circuit on at least one side of a substrate, and the electromagnetic wave shielding film is attached on the printed wiring board.
- a printed wiring board with a shield film includes, for example, a printed wiring board, an insulating film adjacent to the surface of the printed wiring board on which the printed circuit is provided, and the electromagnetic wave shielding film. Since the printed wiring board with a shielding film according to the present invention uses the low dielectric resin composition of the present invention, it enables high-speed transmission of electronic devices and has excellent adhesion stability.
- the obtained pellets were put into a single-screw extruder with a T-die having a width of 900 mm, melt-kneaded, and continuously extruded from the T-die to obtain a PEEK substrate film having a thickness of 100 ⁇ m (Substrate A-1 ).
- Rz surface roughness
- CTE CTE in the thickness direction of this PEEK base film
- EPMA electron probe microanalyzer
- Substrates A-2 and A-3 were produced by changing the conditions of the substrate A-1 of Production Example 1 as shown in Table 1 below and adjusting the production conditions.
- the measurement results of the substrates A-2 and A-3 obtained in Production Examples 2 and 3 are shown in Table 1 below.
- ⁇ Bismaleimide resin> A trade name “SLK-3000-T50” manufactured by Shin-Etsu Chemical Co., Ltd. was used. Solid content 50%, solvent: toluene, number average molecular weight 7,725, weight average molecular weight 12,545, softening point 40°C. ⁇ Bismaleimide resin> A trade name “SLK-1500-T80” manufactured by Shin-Etsu Chemical Co., Ltd. was used. Solid content 80%, solvent: toluene, number average molecular weight 3,257, weight average molecular weight 5,040, softening point 45°C.
- ⁇ Silane coupling agent> The trade name "X-12-1281A” manufactured by Shin-Etsu Chemical Co., Ltd. was used. It is a silane coupling agent having a styrene-butadiene polymer structure. It is in a liquid state at room temperature.
- ⁇ Silane coupling agent> The trade name "VD-5" manufactured by Shikoku Kasei Kogyo Co., Ltd. was used. It is a silane coupling agent having a triazine skeleton. It has a melting point of 85°C.
- ⁇ Silane coupling agent> The trade name "2MUSIZ” manufactured by Shikoku Kasei Kogyo Co., Ltd. was used.
- silane coupling agent having an imidazole skeleton. It is in a liquid state at room temperature.
- Silane coupling agent> The trade name "KBM-403" manufactured by Shin-Etsu Chemical Co., Ltd. was used. It is a silane coupling agent having an epoxy skeleton. It is in a liquid state at room temperature.
- ⁇ Curing agent> The trade name "PERHEXA 25O” manufactured by NOF Corporation was used. 50% solids.
- benzoxazine resin> A product name “ALP-d” (liquid) manufactured by Shikoku Kasei Co., Ltd. was used.
- (Formulation example 1 of resin composition) Bismaleimide resin (SLK-3000-T50: Shin-Etsu Chemical Co., Ltd.), bismaleimide resin (SLK-1500-T80: Shin-Etsu Chemical Co., Ltd.) silane coupling agent (X-12-1281A: Shin-Etsu Chemical Co., Ltd.), curing agent (Perhexa 25O (manufactured by NOF Corporation), toluene, and methyl isobutyl ketone (MIBK) were mixed according to the composition shown in Table 2 below to obtain a coating solution (coating solution) B-1.
- Table 3 below shows the solid content ratio in the coated layer after drying the solvent from the coating film of the resin composition.
- Example 1 The surface of the PEEK base film of Production Example 1 was subjected to corona treatment, and the coating solution of Formulation Example 1 was applied to a film thickness of 5 ⁇ m on the surface-treated PEEK base film. was dried. Curing was performed at a temperature of 80° C. for 72 hours to cure the coating film. At this stage, the surface roughness (Rz) of the surface of the layer (coating film) made of the resin composition is measured, and the laminate having the PEEK base film and the layer made of the resin composition has a frequency of 28 GHz.
- Rz surface roughness
- a copper film (thickness: 0.1 ⁇ m) was formed by magnetron sputtering on the resin composition layer of the laminate having the PEEK base film and the resin composition layer.
- the adhesion force is measured for the metal-clad laminate (copper-clad laminate) of Example 1 thus obtained.
- the thickness of the copper film is as thin as 0.1 ⁇ m, if the copper film breaks when measuring the adhesion, the adhesion between the copper film and the PEEK substrate cannot be measured.
- An adhesive layer and a copper foil were laminated on the film to prevent tearing of the copper film, and then the adhesion between the copper film and the PEEK substrate was evaluated.
- a laminate (I) for adhesion measurement is produced by laminating an adhesive layer for reinforcing a copper film and a copper foil on the metal-clad laminate (copper-clad laminate) of Example 1 in the following manner. bottom.
- -Laminate for adhesion measurement (I)- A coating solution of an adhesive composition having the following composition was further coated on the copper film so that the film thickness after drying was 25 ⁇ m, and then dried to form an adhesive layer (i).
- ⁇ Composition of adhesive composition 75 parts by mass of amine-modified styrene-ethylenebutylene-styrene copolymer (manufactured by Asahi Kasei Co., Ltd.
- Tiftec MP10 bismaleimide resin (manufactured by Shin-Etsu Chemical Co., Ltd. “SKL-3000-T50”) 25 Part by mass, 3 parts by mass of organic peroxide ("Perbutyl E” manufactured by NOF Corporation).
- the electrolytic copper foil was laminated so that the glossy surface of the electrolytic copper foil was in contact with the adhesive layer (i). Thereafter, heat lamination was performed at 120° C., and after-curing was performed at 150° C. for 60 minutes to cure the adhesive layer (i) and obtain a laminate (I) for adhesion measurement.
- Electrolytic copper foil "TQ-M7-VSP" manufactured by Mitsui Kinzoku Mining (thickness: 12 ⁇ m, glossy surface: Rz: 1.27 ⁇ m, glossy surface: Ra: 0.197 ⁇ m, glossy surface: Rsm: 12.95 ⁇ m) was used.
- the laminate for adhesion measurement (I) obtained by laminating an adhesive layer for reinforcing a copper film and a copper foil on the metal-clad laminate (copper-clad laminate) of Example 1 obtained as described above Then, the adhesion force was measured as follows. In addition, after storing the laminate (I) for adhesion measurement of Example 1 at a temperature of 150° C. for one week, the adhesion was measured to evaluate the degree of reduction in adhesion due to heat resistance.
- Adhesion (N/cm) Adhesion was measured by cutting the laminate (I) for adhesion measurement into a test specimen with a width of 25 mm, and measuring the peel speed of 0.3 m / min in accordance with JIS Z0237: 2009 (adhesive tape/adhesive sheet test method). Measure the peel strength when peeling off a copper film (an adhesive layer and a copper foil are laminated on the copper film) from a base film with a layer made of a resin composition fixed to a support at a peel angle of 180 °. By doing so, the adhesion strength was measured.
- Table 4 shows the measurement results of the laminate used in Example 1 and the evaluation results of the adhesion test of the adhesion measurement laminate (I) including the copper-clad laminate.
- Example 1 Example 1
- Example 2 to 8 Comparative Example 1
- Example 2 to 8 Comparative Example 1
- Example 1 The same evaluation as in Example 1 was performed on the laminates (I) for adhesion measurement produced in Examples 2 to 8 and Comparative Example 1.
- Table 4 shows the measurement results of the laminates used in Examples 2 to 8 and Comparative Example 1, and the adhesion test evaluation results of the adhesion measurement laminate (I).
- the metal-clad laminates of the present invention produced in Examples have a smooth metal film surface, so that they are metal-clad laminates capable of reducing transmission loss. Since the layer made of the resin composition is provided, the adhesiveness between the base film and the metal film is excellent even if a smooth metal film is used. In particular, in the present invention, since the layer made of the resin composition contains a silane coupling agent, the adhesion between the base film and the metal film can be further enhanced.
- the metal-clad laminate of the present invention can be suitably used for manufacturing FPC-related products for electronic devices such as smart phones, mobile phones, optical modules, digital cameras, game machines, notebook computers, and medical instruments.
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Abstract
Description
本発明は、金属張積層板、及び該金属張積層板に用いる積層体に関する。 The present invention relates to a metal-clad laminate and a laminate used for the metal-clad laminate.
近年、スマートフォンに代表される通信機器における通信速度の高速化・大容量化に伴い、これら通信機器に使用される回路基板には、電気信号の低損失化や回路パターンのファインピッチ化、高精度で微細な回路形成が求められている。
回路基板の主材料である金属張積層板、いわゆる絶縁性樹脂からなる基材フィルムの表面に金属膜を載せ積層させた金属張積層板(例えば、銅張積層板(CCL))にも、上記回路基板と同様の性能が求められる。
各種の改良がなされた金属張積層板(例えば、銅張積層板(CCL))が提案されている(例えば、特許文献1参照)。
In recent years, with the increase in communication speed and capacity in communication devices such as smartphones, the circuit boards used in these communication devices are required to have lower electrical signal loss, finer pitch circuit patterns, and higher precision. Therefore, fine circuit formation is demanded.
Metal-clad laminates (e.g., copper-clad laminates (CCL)) in which a metal film is placed and laminated on the surface of a base film made of a so-called insulating resin, which is the main material of a circuit board, also have the above-mentioned properties. Performance similar to that of circuit boards is required.
Various improved metal-clad laminates (for example, copper-clad laminates (CCL)) have been proposed (see, for example, Patent Document 1).
金属張積層板を含むプリント配線板は、上述したように、大量のデータを高速で伝送する必要があり、高周波への対応が進んでいる。プリント配線板の高周波対応には高周波の伝送損失を低減する必要があり、基材フィルムの誘電特性や導体の表面粗さが影響を与えるため、基材フィルムの低誘電化や表面粗さの低い導体の実現が求められる。
表面粗さの低い導体を実現する方法として、低誘電基材の表面に蒸着やスパッタ等のドライプロセス、あるいは、メッキ処理等のウェットプロセスにて導体を形成する方法がある。これらの方法は、一定の表面粗さを持つ金属箔(例えば、銅箔)を熱圧着する方法と比べて、導体の表面粗さが基材フィルムの表面粗さに依存するため、平滑性の高い基材フィルムを使用することで、導体の表面粗さを低減することができる。
しかし、低誘電基材フィルムは、耐熱性を発現するために高い加工温度や樹脂配向の調整が必要であり、加工性が悪いために平滑な低誘電基材フィルムを製造できない。さらに低誘電基材フィルムは構成する樹脂が極性の低い分子骨格からなるため、蒸着やスパッタ等のドライプロセス、あるいは、メッキ処理等のウェットプロセスにより形成した金属層との密着性が発現しづらい。また、低誘電基材フィルムの平滑性を高めた場合、この密着性はさらに低下するおそれがある。
そこで、電気信号の伝送損失を低減でき、かつ金属膜と基材フィルムとの密着性に優れた金属張積層板の提供が望まれている。
Printed wiring boards including metal-clad laminates are required to transmit a large amount of data at high speed as described above, and are becoming increasingly compatible with high frequencies. It is necessary to reduce the transmission loss of high frequencies for printed wiring boards to support high frequencies. Realization of a conductor is required.
As a method of realizing a conductor with a low surface roughness, there is a method of forming a conductor on the surface of a low dielectric base material by a dry process such as vapor deposition or sputtering, or a wet process such as plating. Compared to the method of thermocompression bonding a metal foil (e.g., copper foil) with a certain surface roughness, these methods are less smooth because the surface roughness of the conductor depends on the surface roughness of the base film. Using a high base film can reduce the surface roughness of the conductor.
However, the low dielectric base film requires high processing temperature and adjustment of resin orientation in order to develop heat resistance, and the poor workability makes it impossible to produce a smooth low dielectric base film. Furthermore, since the resin constituting the low-dielectric base film is composed of a molecular skeleton with low polarity, it is difficult to develop adhesion with a metal layer formed by a dry process such as vapor deposition or sputtering, or a wet process such as plating. In addition, when the smoothness of the low-dielectric substrate film is increased, there is a possibility that this adhesion will be further reduced.
Therefore, it is desired to provide a metal-clad laminate that can reduce the transmission loss of electrical signals and has excellent adhesion between the metal film and the substrate film.
本発明は、密着性の悪い低誘電基材フィルムでも密着し、蒸着やスパッタ等のドライプロセス、あるいは、メッキ処理等のウェットプロセスにより形成された金属層に対しても密着性の良い金属張積層板を提供することを目的とする。
また、本発明は、上記金属張積層板を形成するために用いる、基材フィルム上に樹脂層が形成された積層体を提供することを目的とする。
The present invention provides a metal-clad laminate that adheres even to a low-dielectric substrate film with poor adhesion, and has good adhesion to metal layers formed by dry processes such as vapor deposition and sputtering, or wet processes such as plating. The purpose is to provide a board.
Another object of the present invention is to provide a laminate in which a resin layer is formed on a substrate film, which is used for forming the metal-clad laminate.
本発明者らは、上記課題を解決するために鋭意研究を重ねた結果、金属膜と基材フィルムとの間に、特定の表面粗さ(Rz)を有するシランカプリング剤を含む樹脂組成物からなる層を配することで、上記課題を解決できることを見出し、本発明を完成するに至った。 The present inventors have made intensive studies to solve the above problems, and found that a resin composition containing a silane coupling agent having a specific surface roughness (Rz) between a metal film and a base film The inventors have found that the above problem can be solved by arranging different layers, and have completed the present invention.
本発明は、以下の態様を包含するものである。
[1]基材フィルムとシランカプリング剤を含む樹脂組成物からなる層とを有する積層体であって、
前記樹脂組成物からなる層の表面粗さ(Rz)が1μm以下であり、
前記積層体の周波数28GHzの条件下での比誘電率が3.5以下であり、誘電正接が0.005以下である、積層体。
[2]前記表面粗さ(Rz)が0.5μm以下である、[1]に記載の積層体。
[3]前記シランカップリング剤が、前記樹脂組成物100質量部に対して0.1~20質量部含有されている、[1]又は[2]に記載の積層体。
[4]前記シランカップリング剤が、イミダゾール骨格、トリアゾール骨格、トリアジン骨格、オレフィン骨格、メルカプト基、無水マレイン酸骨格、イミド骨格、及びアミノ基のいずれかの官能基を含むシランカップリング剤である、[1]~[3]のいずれかに記載の積層体。
[5]前記シランカップリング剤は、融点が100℃以下である、[1]~[4]のいずれかに記載の積層体。
[6]前記シランカップリング剤が、ブタジエン骨格を有するシランカップリング剤である、[1]~[5]のいずれかに記載の積層体。
[7]前記樹脂組成物が、さらにマレイミド樹脂を含む、[1]~[6]のいずれかに記載の積層体。
[8]前記マレイミド樹脂の重量平均分子量が、5,000~100,000である、[7]に記載の積層体。
[9]前記マレイミド樹脂の重量平均分子量が、5,000~40,000である、[8]に記載の積層体。
[10]前記樹脂組成物が、さらにオキサジンを含む、[1]~[9]のいずれかに記載の積層体。
[11]前記樹脂組成物からなる層が、前記樹脂組成物からなる塗膜を硬化した硬化膜である、[1]~[10]のいずれかに記載の積層体。
[12]前記樹脂組成物からなる層の膜厚が、20μm以下である、[1]~[11]のいずれかに記載の積層体。
[13]前記基材フィルムの表面粗さ(Rz)が、1~4μmである、[1]~[12]のいずれかに記載の積層体。
[14]前記基材フィルムが、フィラーを含有する、[1]~[13]のいずれかに記載の積層体。
[15]前記フィラーの平均粒径が、20μm以下である、[14]に記載の積層体。
[16]前記フィラーが、マイカ、タルク、窒化ホウ素(BN)及びシリカの少なくともいずれかを含む、[14]又は[15]に記載の積層体。
[17]前記フィラーが、板状の形状を有する、[14]~[16]のいずれかに記載の積層体。
[18]前記基材フィルムの表面におけるSi元素の炭素原子に対する質量比(Si/C)が、電子線マイクロアナライザー(EPMA)による測定で3%以上を示す、[1]~[17]のいずれかに記載の積層体。
[19]前記基材フィルムが、ポリアリーレンエーテルケトン(PAEK)樹脂を含有する、[1]~[18]のいずれかに記載の積層体。
[20][1]~[19]のいずれかに記載の積層体の前記樹脂組成物からなる層上に金属膜が積層されてなる金属張積層板であって、
前記金属膜がメッキ、スパッタ、及び蒸着の少なくともいずれかの形成法で形成された金属膜である、金属張積層板。
[21]前記金属膜が銅の金属膜である、[20]に記載の金属張積層板。
[22][1]~[19]のいずれかに記載の積層体を含むプリント配線板。
[23][1]~[19]のいずれかに記載の積層体を含むシールドフィルム。
[24][1]~[19]のいずれかに記載の積層体を含むシールドフィルム付きプリント配線板。
The present invention includes the following aspects.
[1] A laminate having a base film and a layer made of a resin composition containing a silane coupling agent,
The surface roughness (Rz) of the layer made of the resin composition is 1 μm or less,
A laminate having a dielectric constant of 3.5 or less and a dielectric loss tangent of 0.005 or less under the condition of a frequency of 28 GHz.
[2] The laminate according to [1], wherein the surface roughness (Rz) is 0.5 μm or less.
[3] The laminate according to [1] or [2], wherein the silane coupling agent is contained in an amount of 0.1 to 20 parts by mass with respect to 100 parts by mass of the resin composition.
[4] The silane coupling agent is a silane coupling agent containing any one of functional groups selected from imidazole skeleton, triazole skeleton, triazine skeleton, olefin skeleton, mercapto group, maleic anhydride skeleton, imide skeleton, and amino group. , the laminate according to any one of [1] to [3].
[5] The laminate according to any one of [1] to [4], wherein the silane coupling agent has a melting point of 100° C. or less.
[6] The laminate according to any one of [1] to [5], wherein the silane coupling agent is a silane coupling agent having a butadiene skeleton.
[7] The laminate according to any one of [1] to [6], wherein the resin composition further contains a maleimide resin.
[8] The laminate according to [7], wherein the maleimide resin has a weight average molecular weight of 5,000 to 100,000.
[9] The laminate according to [8], wherein the maleimide resin has a weight average molecular weight of 5,000 to 40,000.
[10] The laminate according to any one of [1] to [9], wherein the resin composition further contains oxazine.
[11] The laminate according to any one of [1] to [10], wherein the layer comprising the resin composition is a cured film obtained by curing a coating film comprising the resin composition.
[12] The laminate according to any one of [1] to [11], wherein the layer made of the resin composition has a thickness of 20 μm or less.
[13] The laminate according to any one of [1] to [12], wherein the base film has a surface roughness (Rz) of 1 to 4 μm.
[14] The laminate according to any one of [1] to [13], wherein the base film contains a filler.
[15] The laminate according to [14], wherein the filler has an average particle size of 20 µm or less.
[16] The laminate according to [14] or [15], wherein the filler contains at least one of mica, talc, boron nitride (BN) and silica.
[17] The laminate according to any one of [14] to [16], wherein the filler has a plate-like shape.
[18] Any one of [1] to [17], wherein the mass ratio (Si/C) of Si element to carbon atoms on the surface of the substrate film is 3% or more as measured by an electron probe microanalyzer (EPMA). The laminate according to any one of the above.
[19] The laminate according to any one of [1] to [18], wherein the base film contains a polyarylene ether ketone (PAEK) resin.
[20] A metal-clad laminate obtained by laminating a metal film on a layer made of the resin composition of the laminate according to any one of [1] to [19],
A metal-clad laminate, wherein the metal film is a metal film formed by at least one of plating, sputtering, and vapor deposition.
[21] The metal-clad laminate according to [20], wherein the metal film is a copper metal film.
[22] A printed wiring board comprising the laminate according to any one of [1] to [19].
[23] A shielding film comprising the laminate according to any one of [1] to [19].
[24] A printed wiring board with a shield film comprising the laminate according to any one of [1] to [19].
本発明によれば、密着性の悪い低誘電基材フィルムでも密着し、蒸着やスパッタ等のドライプロセス、あるいは、メッキ処理等のウェットプロセスにより形成された金属層に対しても密着性の良い金属張積層板を提供することができる。
また、本発明によれば、上記金属張積層板を形成するために用いる、基材フィルム上に樹脂層が形成された積層体を提供することができる。
According to the present invention, even a low-dielectric base film with poor adhesion adheres well to a metal layer formed by a dry process such as vapor deposition or sputtering, or a wet process such as plating. A tension laminate can be provided.
Moreover, according to the present invention, it is possible to provide a laminate in which a resin layer is formed on a substrate film, which is used for forming the metal-clad laminate.
以下、本発明の積層体、及び該積層体を用いて形成された本発明の金属張積層板について詳細に説明するが、以下に記載する構成要件の説明は、本発明の一実施態様としての一例であり、これらの内容に特定されるものではない。
以下の用語の定義は、本明細書及び特許請求の範囲にわたって適用される。
基材フィルム、樹脂組成物からなる層、金属膜等の膜厚は、顕微鏡を用いて測定対象の断面を観察し、5箇所の厚さを測定し、平均した値である。
Hereinafter, the laminate of the present invention and the metal-clad laminate of the present invention formed using the laminate will be described in detail. It is an example and is not specified by these contents.
The following term definitions apply throughout the specification and claims.
The film thickness of the substrate film, the layer made of the resin composition, the metal film, etc. is the average value obtained by observing the cross section of the object to be measured using a microscope, measuring the thickness at five locations, and averaging the values.
(積層体)
本発明の積層体は、基材フィルムとシランカプリング剤を含む樹脂組成物からなる層とを有する。
樹脂組成物からなる層の表面粗さ(Rz)は、1μm以下である。
積層体の周波数28GHzの条件下での比誘電率は3.5以下であり、誘電正接は0.005以下である。
(Laminate)
The laminate of the present invention has a base film and a layer made of a resin composition containing a silane coupling agent.
The surface roughness (Rz) of the layer made of the resin composition is 1 μm or less.
The laminate has a dielectric constant of 3.5 or less and a dielectric loss tangent of 0.005 or less under the condition of a frequency of 28 GHz.
<基材フィルム>
本発明において、基材フィルムとしては、特に限定はされず、目的に応じて適宜選択することができるが、例えば、誘電特性の優れた樹脂により形成されているものであることが望ましい。誘電特性の優れた樹脂としては、ポリエーテルエーテルケトン(PEEK)樹脂、ポリエーテルケトン(PEK)樹脂、ポリエーテルケトンケトン(PEKK)樹脂、ポリエーテルケトンエーテルケトンケトン(PEKEKK)樹脂等のポリアリーレンエーテルケトン(PAEK)樹脂、ポリイミド、変性ポリイミド、ポリテトラフルオロエチレン(PTFE)、テトラフルオロエチレンパーフルオロアルキルビニルエーテル共重合体(PFA)、テトラフルオロエチレン・ヘキサフルオロプロピレン共重合体(FEP)、テトラフルオロエチレン・エチレン共重合体(ETFE)、ポリフェニレンサルファイド(PPS)、ポリフェニレンエーテル(PPE)、シンジオタクチックポリスチレン(SPS)、アラミド、ポリエチレンナフタレート、及び液晶ポリマー(LCP)が挙げられる。
これらの中でも、耐熱性及び電気特性の観点から、ポリエーテルエーテルケトン(PEEK)樹脂等のポリアリーレンエーテルケトン(PAEK)樹脂、変性ポリイミド、ポリテトラフルオロエチレン(PTFE)、テトラフルオロエチレンパーフルオロアルキルビニルエーテル共重合体(PFA)、ポリフェニレンサルファイド(PPS)、及び液晶ポリマー(LCP)が好ましい。寸法安定性が優れる観点からポリアリーレンエーテルケトン(PAEK)樹脂、及び液晶ポリマー(LCP)がより好ましい。フィラーの分散性が良く、フィラー添加量の変更により基材フィルムの貯蔵弾性率を調整しても他の特性との両立が可能なポリエーテルエーテルケトン(PEEK)樹脂がさらに好ましい。
基材フィルムには、複数の樹脂を混合したアロイを用いることができる。
基材フィルムには、フィラーを含有させることができる。以下、フィラーについて、詳しく説明する。
<Base film>
In the present invention, the base film is not particularly limited and can be appropriately selected depending on the intended purpose. Resins with excellent dielectric properties include polyarylene ethers such as polyetheretherketone (PEEK) resin, polyetherketone (PEK) resin, polyetherketoneketone (PEKK) resin, and polyetherketoneetherketoneketone (PEKEKK) resin. Ketone (PAEK) resin, polyimide, modified polyimide, polytetrafluoroethylene (PTFE), tetrafluoroethylene perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), tetrafluoroethylene - Ethylene copolymer (ETFE), polyphenylene sulfide (PPS), polyphenylene ether (PPE), syndiotactic polystyrene (SPS), aramid, polyethylene naphthalate, and liquid crystal polymer (LCP).
Among these, from the viewpoint of heat resistance and electrical properties, polyarylene ether ketone (PAEK) resin such as polyether ether ketone (PEEK) resin, modified polyimide, polytetrafluoroethylene (PTFE), tetrafluoroethylene perfluoroalkyl vinyl ether Copolymers (PFA), polyphenylene sulfide (PPS), and liquid crystal polymers (LCP) are preferred. Polyarylene ether ketone (PAEK) resin and liquid crystal polymer (LCP) are more preferable from the viewpoint of excellent dimensional stability. A polyether ether ketone (PEEK) resin is more preferable because it has good filler dispersibility and can be compatible with other properties even when the storage elastic modulus of the base film is adjusted by changing the amount of filler added.
An alloy in which a plurality of resins are mixed can be used for the base film.
The base film can contain a filler. The filler will be described in detail below.
<<フィラー>>
基材フィルムは、基材の強度、絶縁性、耐熱性、熱膨張率(CTE)、貯蔵弾性率の調整等各種の機能を付与するため、フィラーを含むことができる。フィラーとしては、例えば、無機フィラー及び有機フィラーが挙げられ、これらを単独で又は組み合わせて使用することができる。
<<Filler>>
The base film can contain a filler in order to impart various functions such as strength, insulation, heat resistance, coefficient of thermal expansion (CTE), and adjustment of storage elastic modulus to the base. Examples of fillers include inorganic fillers and organic fillers, which can be used alone or in combination.
無機フィラーとしては、例えば、マイカ、タルク、窒化ホウ素、酸化マグネシウム、シリカ、珪藻土、酸化チタン、酸化亜鉛等が挙げられる。誘電正接を悪化させずに上記の機能を付与できる観点から、マイカ、タルク、窒化ホウ素、酸化マグネシウム、シリカの無機フィラーが好ましい。 Examples of inorganic fillers include mica, talc, boron nitride, magnesium oxide, silica, diatomaceous earth, titanium oxide, and zinc oxide. Inorganic fillers such as mica, talc, boron nitride, magnesium oxide, and silica are preferred from the viewpoint of imparting the above functions without deteriorating the dielectric loss tangent.
有機フィラーとしては特に限定されないが、例えば、ポリエチレンテレフタレート、ポリブチレンテレフタレート、ポリエチレンナフタレート、ポリスチレン、オレフィンポリマー、ポリアミド、ポリカーボネート、ポリイミド、ポリエーテルケトン、ポリエーテルエーテルケトン、ポリメチルメタクリレート、液晶ポリマー、ポリテトラフルオロエチレン等の有機粒子が挙げられる。基材フィルムの誘電特性を向上できる観点から、ポリスチレン、オレフィンポリマー、液晶ポリマー、ポリテトラフルオロエチレンが好ましい。 Examples of organic fillers include, but are not limited to, polyethylene terephthalate, polybutylene terephthalate, polyethylene naphthalate, polystyrene, olefin polymer, polyamide, polycarbonate, polyimide, polyether ketone, polyether ether ketone, polymethyl methacrylate, liquid crystal polymer, poly Examples include organic particles such as tetrafluoroethylene. Polystyrene, olefin polymer, liquid crystal polymer, and polytetrafluoroethylene are preferred from the viewpoint of improving the dielectric properties of the base film.
無機フィラー及び有機フィラーは、上記のなかから1種を選択して単独で使用してもよいし、2種以上を組み合わせて使用してもよい。2種以上を組合せる場合は無機フィラーと有機フィラーの組合せであってもよい。 One of the inorganic fillers and organic fillers may be selected from the above and used alone, or two or more may be used in combination. When two or more types are combined, a combination of an inorganic filler and an organic filler may be used.
フィラーの形状としては、特に限定されず、目的に応じて適宜選択することができる。例えば、フィラーは、球状フィラーでも非球状フィラーでもよいが、熱膨張率(CTE)の観点からは、非球状フィラーが好ましい。非球状フィラーの形状は、球状(略真円球状)以外の三次元形状であればよく、例えば、板状、鱗片状、柱状、鎖状、繊維状等が挙げられる。中でも、少量でも熱膨張率(CTE)の調整が可能であり、柔軟性との両立が可能である観点から、板状、鱗片状のフィラーが好ましく、板状のフィラーがより好ましい。
フィラーの平均粒径は0.05μm以上20μm以下、好ましくは0.1μm以上15μm以下、望ましくは0.1μm以上10μm以下、より望ましくは0.1μm以上7μm以下であることが好ましい。フィラーの平均粒径が0.05μm以上であれば、フィラーの分散性がよく、効果的に上記の機能を付与できる。フィラーの平均粒径が0.1μm以上であれば、非球状フィラーのアスペクト比の効果が有効になる。フィラーの平均粒径が20μm以下であれば、粗大粒子の混入が低減し、基材フィルムの薄膜化が可能である。フィラーの平均粒径が10μm以下であれば、基材フィルムの表面粗さを小さくすることができ、平滑な樹脂組成物からなる層を形成しやすくなる。
また、非球状フィラーの平面方向と厚みを意味するアスペクト比(平均長軸長さ/平均短軸長さ)は、熱膨張率(CTE)の観点から5以上500以下、望ましくは10以上500以下であることが好ましい。
アスペクト比が5以上であればCTEを十分に小さくしやすい。
アスペクト比が大きいほどCTEを調整しやすいが、粒子径を小さくしながらアスペクト比を大きくすることは困難で、フィラーのコストが高くなる傾向があるので500以下とすることが望ましい。
The shape of the filler is not particularly limited and can be appropriately selected depending on the purpose. For example, the filler may be a spherical filler or a non-spherical filler, but from the viewpoint of coefficient of thermal expansion (CTE), a non-spherical filler is preferred. The shape of the non-spherical filler may be any three-dimensional shape other than a spherical shape (substantially spherical shape), and examples thereof include plate-like, scale-like, columnar, chain-like, and fibrous shapes. Among them, plate-like and scale-like fillers are preferable, and plate-like fillers are more preferable, from the viewpoint that the coefficient of thermal expansion (CTE) can be adjusted even in a small amount and compatibility with flexibility is possible.
The average particle size of the filler is preferably 0.05 μm to 20 μm, preferably 0.1 μm to 15 μm, more preferably 0.1 μm to 10 μm, more preferably 0.1 μm to 7 μm. When the average particle size of the filler is 0.05 μm or more, the filler has good dispersibility and can effectively impart the above functions. If the average particle size of the filler is 0.1 μm or more, the effect of the aspect ratio of the non-spherical filler becomes effective. If the average particle diameter of the filler is 20 μm or less, the inclusion of coarse particles is reduced, and the thickness of the base film can be reduced. If the average particle diameter of the filler is 10 µm or less, the surface roughness of the substrate film can be reduced, and a smooth layer made of the resin composition can be easily formed.
In addition, the aspect ratio (average major axis length/average minor axis length), which means the planar direction and thickness of the non-spherical filler, is 5 or more and 500 or less, preferably 10 or more and 500 or less, from the viewpoint of the coefficient of thermal expansion (CTE). is preferably
If the aspect ratio is 5 or more, it is easy to make the CTE sufficiently small.
The larger the aspect ratio, the easier it is to adjust the CTE.
[平均粒径、アスペクト比の測定]
無機フィラーの平均粒径及びアスペクト比は、例えば、走査型電子顕微鏡(SEM)又は透過型電子顕微鏡(TEM)を用いて観察し、3箇所以上の測定値の平均から求めることができる。なお、フィルム(層)中に存在する無機フィラーの平均粒径及びアスペクト比については、例えばフィルムをエポキシ樹脂で包埋した後、イオンミリング装置を用いてフィルム断面のイオンミリングを行って断面観察用試料を作製し、得られた試料の断面を走査型電子顕微鏡(SEM)又は透過型電子顕微鏡(TEM)を用いて観察し、3箇所以上の測定値の平均から求めることができる。
また、有機フィラーの平均粒径は、基材フィルムの切断面を電子顕微鏡で観察し、粒子の少なくとも10個の最大径を測定したときの平均値を、溶融混練と分散により基材フィルムの樹脂中に分散したときの平均分散粒径として求めることができる。
[Measurement of average particle size and aspect ratio]
The average particle size and aspect ratio of the inorganic filler can be obtained by observing, for example, using a scanning electron microscope (SEM) or a transmission electron microscope (TEM) and averaging measured values at three or more locations. Regarding the average particle size and aspect ratio of the inorganic filler present in the film (layer), for example, after embedding the film in epoxy resin, ion milling of the cross section of the film is performed using an ion milling device for cross-sectional observation. A sample is prepared, a cross section of the obtained sample is observed using a scanning electron microscope (SEM) or a transmission electron microscope (TEM), and the average of measured values at three or more points can be obtained.
In addition, the average particle size of the organic filler is obtained by observing the cut surface of the base film with an electron microscope and measuring the maximum diameter of at least 10 particles. It can be obtained as the average dispersed particle diameter when dispersed in the inside.
基材フィルム中のフィラーの含有量は、1体積%以上30体積%以下が好ましく、3体積%以上25体積%以下がより好ましい。 The content of the filler in the base film is preferably 1% by volume or more and 30% by volume or less, more preferably 3% by volume or more and 25% by volume or less.
基材フィルムの表面におけるSi元素の炭素原子に対する質量比(Si/C)は、電子線マイクロアナライザー(EPMA)による測定で3%以上を示すことが好ましい。例えば、基材フィルムが無機フィラーを含有している場合であって、基材フィルムの表面から無機フィラーが出ている場合、表面から出ている無機フィラーにシランカップリング剤が作用するため、強い密着力が発現する。よって、電子線マイクロアナライザー(EPMA)による測定で、基材フィルムの表面においてSi元素の炭素原子に対する質量比が3%以上存在する結果が得られることが好ましい。 The mass ratio of Si element to carbon atoms (Si/C) on the surface of the substrate film is preferably 3% or more as measured by an electron probe microanalyzer (EPMA). For example, if the base film contains an inorganic filler, and if the inorganic filler protrudes from the surface of the base film, the silane coupling agent acts on the inorganic filler protruding from the surface, so a strong Adhesion is developed. Therefore, it is preferable to obtain a result that the mass ratio of Si element to carbon atoms is 3% or more on the surface of the substrate film by measurement with an electron probe microanalyzer (EPMA).
<<その他の成分>>
本発明において、基材フィルムには、必要に応じて公知の添加剤を任意に含有することができる。添加剤としては、酸化防止剤、光安定剤、紫外線吸収剤、結晶核剤、可塑剤、フィラーの分散剤等が挙げられる。
<<Other Ingredients>>
In the present invention, the base film may optionally contain known additives as required. Examples of additives include antioxidants, light stabilizers, ultraviolet absorbers, crystal nucleating agents, plasticizers, filler dispersants, and the like.
<<基材フィルムの特性>>
基材フィルムの膜厚は、特に限定されず、目的に応じて適宜選択することができるが、10μm~250μmであることが好ましい。
<<Characteristics of base film>>
The film thickness of the substrate film is not particularly limited and can be appropriately selected depending on the purpose, but is preferably 10 μm to 250 μm.
基材フィルムの表面粗さ(Rz)は、特に限定されず、目的に応じて適宜選択することができるが、基材フィルムに各種機能を付与するために含有させるフィラーの種類や含有量、製造方法等の諸条件を考慮すると、基材フィルムの表面粗さ(Rz)は、1μm以上である。一方、基材フィルム上に形成される樹脂組成物からなる層の表面粗さ(Rz)を所望の範囲とするには、基材フィルムの表面粗さ(Rz)は、10μm以下であることが好ましい。つまり、基材フィルムの表面粗さ(Rz)としては、1μm以上10μm以下であることが好ましく、1μm以上4μm以下であることがより好ましい。4μm以下であれば、樹脂組成物からなる層の表面粗さを下げやすく、1μm以上であれば、基材フィルム表面における無機フィラーが出ている面積が増大し、シランカップリング剤と強く作用することで、基材フィルムと樹脂組成物からなる層との層間密着力を確保できる。
本明細書において、表面粗さ(Rz)(基材フィルムの表面粗さ(Rz)や、後述するシランカプリング剤を含む樹脂組成物からなる層の表面粗さ(Rz)及び金属膜の表面粗さ(Rz)を含む)とは、膜表面の十点平均粗さをいう。十点平均粗さRzは、JIS B 0601:2013(ISO 4287:1997 Amd.1:2009)附属書JAに記載のRzJISを示しており、JIS B 0601:2013附属書JA JA.2 a)に記載の方法に基づいて求めることができる。
The surface roughness (Rz) of the base film is not particularly limited and can be appropriately selected according to the purpose. Considering various conditions such as the method, the surface roughness (Rz) of the base film is 1 μm or more. On the other hand, in order to keep the surface roughness (Rz) of the resin composition layer formed on the base film within a desired range, the surface roughness (Rz) of the base film is preferably 10 μm or less. preferable. That is, the surface roughness (Rz) of the substrate film is preferably 1 μm or more and 10 μm or less, more preferably 1 μm or more and 4 μm or less. If it is 4 μm or less, the surface roughness of the layer made of the resin composition can be easily reduced, and if it is 1 μm or more, the area where the inorganic filler is exposed on the substrate film surface increases, and it strongly acts with the silane coupling agent. Thus, the interlayer adhesion between the base film and the layer made of the resin composition can be ensured.
In this specification, the surface roughness (Rz) (surface roughness (Rz) of the base film, the surface roughness (Rz) of the layer composed of a resin composition containing a silane coupling agent described later, and the surface roughness of the metal film roughness (including Rz)) refers to the ten-point average roughness of the film surface. Ten-point average roughness Rz indicates Rz JIS described in JIS B 0601: 2013 (ISO 4287: 1997 Amd.1: 2009) Annex JA, and JIS B 0601: 2013 Annex JA JA. It can be obtained based on the method described in 2 a).
[十点平均粗さRzの測定]
シートの表面の十点平均粗さRz(μm)は、試験片についてレーザー顕微鏡を用いて粗さ曲線を測定し、この粗さ曲線から、JIS B 0601:2013(ISO 4287:1997 Amd.1:2009)附属書JA JA.2 a)に記載の方法に基づいて、それぞれ10サンプルずつ測定し、それらの平均値を求めることにより得る。
[Measurement of ten-point average roughness Rz]
The ten-point average roughness Rz (μm) of the surface of the sheet is obtained by measuring the roughness curve of the test piece using a laser microscope, and from this roughness curve, JIS B 0601: 2013 (ISO 4287: 1997 Amd.1: 2009) Annex JA JA. Based on the method described in 2 a), each 10 samples are measured and their average value is obtained.
基材フィルムの比誘電率、及び誘電正接は、特に限定されず、目的に応じて適宜選択することができるが、電気信号の伝送損失の低減の理由から比誘電率は、3.5以下で、誘電正接は0.005以下であることが好ましい。 The relative dielectric constant and dielectric loss tangent of the base film are not particularly limited and can be appropriately selected according to the purpose. , the dielectric loss tangent is preferably 0.005 or less.
[比誘電率及び誘電正接]
基材フィルムの比誘電率及び誘電正接は、ネットワークアナライザーMS46122B(Anritsu社製)と開放型共振器ファブリペローDPS-03(KEYCOM社製)とを使用し、開放型共振器法で、温度23℃、湿度50%RH、周波数28GHzの条件で測定することができる。
[Relative permittivity and dielectric loss tangent]
The relative dielectric constant and dielectric loss tangent of the base film were determined by the open resonator method using a network analyzer MS46122B (manufactured by Anritsu) and an open resonator Fabry-Perot DPS-03 (manufactured by KEYCOM) at a temperature of 23°C. , humidity of 50% RH, and frequency of 28 GHz.
基材フィルムの熱膨張率(CTE)は、特に限定されず、目的に応じて適宜選択することができるが、プリント配線板製造時のカール防止の観点から、貼り合せる金属との熱膨張率差を小さくするとの理由から、例えば、50ppm以下であることが好ましい。
熱膨張率の測定は、熱機械分析装置〔日立ハイテクサイエンス社製 製品名:SII//SS7100〕を用いた引張モードにより、荷重:50mN、昇温速度:5℃/min.の割合で25℃から250℃まで昇温速度:5℃/minの割合で昇温し、寸法の温度変化を測定し、25℃から125℃までの範囲の傾きから線膨張係数を求めることにより、行うことができる。
The coefficient of thermal expansion (CTE) of the base film is not particularly limited, and can be appropriately selected according to the purpose. is preferably 50 ppm or less, for example.
The coefficient of thermal expansion was measured in a tensile mode using a thermomechanical analyzer (product name: SII//SS7100 manufactured by Hitachi High-Tech Science) under a load of 50 mN and a temperature increase rate of 5°C/min. The temperature is increased from 25°C to 250°C at a rate of 5°C/min, the temperature change in dimensions is measured, and the coefficient of linear expansion is obtained from the slope in the range from 25°C to 125°C. ,It can be carried out.
基材フィルムの表面は、樹脂組成物からなる層との密着性向上の理由により、コロナ処理、プラズマ処理、又は紫外線処理により表面処理されていてもよい。 The surface of the base film may be surface-treated by corona treatment, plasma treatment, or ultraviolet treatment for the reason of improving adhesion with the layer made of the resin composition.
<樹脂組成物からなる層>
樹脂組成物からなる層は、例えば、樹脂組成物を成膜し、樹脂組成物からなる塗膜を硬化することにより形成される。
樹脂組成物からなる層の表面粗さ(Rz)は、1μm以下である。
樹脂組成物からなる層の表面粗さ(Rz)は、0.01μm以上1μm以下であることが好ましく、0.01μm以上0.5μm以下であることがより好ましく、より望ましくは0.01μm以上0.25μm以下であることが好ましい。表面粗さ(Rz)の測定法は、上記<<基材フィルムの特性>>の欄で記載したとおりである。
樹脂組成物からなる層の表面粗さ(Rz)が0.01μm以上であると、金属膜の密着性にも優れた金属張積層板とすることができる。樹脂組成物からなる層の表面粗さ(Rz)が1μm以下であると、金属張積層板を第5世代移動通信システムの6GHz帯の通信に利用されるプリント配線板に使用できる。樹脂組成物からなる層の表面粗さ(Rz)が0.5μm以下であると、金属張積層板を第5世代移動通信システムの28GHz帯の通信に利用されるプリント配線板に使用できる。樹脂組成物からなる層の表面粗さ(Rz)が0.25μm以下であると、金属張積層板を30GHz以上のミリ波帯の通信に利用されるプリント配線板に使用できる。
樹脂組成物としては、熱硬化樹脂からなることが好ましい。
熱硬化性樹脂としては、例えば、フェノール樹脂、エポキシ樹脂、ユリア樹脂、メラミン樹脂、不飽和ポリエステル樹脂、ポリウレタン樹脂、ポリイミド樹脂、シリコーン樹脂、マレイミド樹脂等が挙げられるが、中でも、耐熱性、密着性、誘電特性の観点から、エポキシ樹脂、ポリイミド樹脂、又はマレイミド樹脂の少なくともいずれかであることが好ましい。
本発明では、樹脂組成物はシランカプリング剤を含む。
<Layer made of resin composition>
The layer made of the resin composition is formed, for example, by forming a film of the resin composition and curing the coating film made of the resin composition.
The surface roughness (Rz) of the layer made of the resin composition is 1 μm or less.
The surface roughness (Rz) of the layer made of the resin composition is preferably 0.01 μm or more and 1 μm or less, more preferably 0.01 μm or more and 0.5 μm or less, and more preferably 0.01 μm or more and 0.01 μm or more. 0.25 μm or less is preferred. The method for measuring the surface roughness (Rz) is as described in the section <<characteristics of base film>> above.
When the surface roughness (Rz) of the layer made of the resin composition is 0.01 μm or more, it is possible to obtain a metal-clad laminate excellent in adhesion of the metal film. When the layer made of the resin composition has a surface roughness (Rz) of 1 μm or less, the metal-clad laminate can be used as a printed wiring board used for 6 GHz band communications in fifth-generation mobile communication systems. When the layer made of the resin composition has a surface roughness (Rz) of 0.5 μm or less, the metal-clad laminate can be used as a printed wiring board used for 28 GHz band communications in fifth-generation mobile communication systems. When the surface roughness (Rz) of the layer made of the resin composition is 0.25 μm or less, the metal-clad laminate can be used for printed wiring boards used for communications in the millimeter wave band of 30 GHz or higher.
The resin composition is preferably made of a thermosetting resin.
Examples of thermosetting resins include phenol resins, epoxy resins, urea resins, melamine resins, unsaturated polyester resins, polyurethane resins, polyimide resins, silicone resins, and maleimide resins. From the viewpoint of dielectric properties, it is preferably at least one of epoxy resin, polyimide resin, and maleimide resin.
In the present invention, the resin composition contains a silane coupling agent.
<<エポキシ樹脂>>
エポキシ樹脂の例としては、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、又はそれらに水素添加したもの;フタル酸ジグリシジルエステル、イソフタル酸ジグリシジルエステル、テレフタル酸ジグリシジルエステル、p-ヒドロキシ安息香酸グリシジルエステル、テトラヒドロフタル酸ジグリシジルエステル、コハク酸ジグリシジルエステル、アジピン酸ジグリシジルエステル、セバシン酸ジグリシジルエステル、トリメリット酸トリグリシジルエステル等のグリシジルエステル系エポキシ樹脂;エチレングリコールジグリシジルエーテル、プロピレングリコールジグリシジルエーテル、1,4-ブタンジオールジグリシジルエーテル、1,6-ヘキサンジオールジグリシジルエーテル、トリメチロールプロパントリグリシジルエーテル、ペンタエリスリトールテトラグリシジルエーテル、テトラフェニルグリシジルエーテルエタン、トリフェニルグリシジルエーテルエタン、ソルビトールのポリグリシジルエーテル、ポリグリセロールのポリグリシジルエーテル等のグリシジルエーテル系エポキシ樹脂;トリグリシジルイソシアヌレート、テトラグリシジルジアミノジフェニルメタン等のグリシジルアミン系エポキシ樹脂;エポキシ化ポリブタジエン、エポキシ化大豆油等の線状脂肪族エポキシ樹脂等が挙げられるが、これらに限定するものではない。また、キシレン構造含有ノボラックエポキシ樹脂、ナフトールノボラック型エポキシ樹脂、フェノールノボラックエポキシ樹脂、o-クレゾールノボラックエポキシ樹脂、ビスフェノールAノボラックエポキシ樹脂等のノボラック型エポキシ樹脂も用いることができる。
<<epoxy resin>>
Examples of epoxy resins include bisphenol A type epoxy resins, bisphenol F type epoxy resins, or hydrogenated versions thereof; diglycidyl phthalate, diglycidyl isophthalate, diglycidyl terephthalate, p-hydroxybenzoic acid Glycidyl ester epoxy resins such as glycidyl ester, diglycidyl tetrahydrophthalate, diglycidyl succinate, diglycidyl adipate, diglycidyl sebacate, and triglycidyl trimellitate; ethylene glycol diglycidyl ether, propylene glycol Diglycidyl ether, 1,4-butanediol diglycidyl ether, 1,6-hexanediol diglycidyl ether, trimethylolpropane triglycidyl ether, pentaerythritol tetraglycidyl ether, tetraphenylglycidyl ether ethane, triphenylglycidyl ether ethane, sorbitol glycidyl ether-based epoxy resins such as polyglycidyl ether of polyglycerol and polyglycidyl ether of polyglycerol; glycidylamine-based epoxy resins such as triglycidyl isocyanurate and tetraglycidyldiaminodiphenylmethane; linear aliphatics such as epoxidized polybutadiene and epoxidized soybean oil Examples include, but are not limited to, epoxy resins and the like. Novolac epoxy resins such as xylene structure-containing novolac epoxy resins, naphthol novolac epoxy resins, phenol novolak epoxy resins, o-cresol novolak epoxy resins, and bisphenol A novolak epoxy resins can also be used.
更に、エポキシ樹脂の例として臭素化ビスフェノールA型エポキシ樹脂、リン含有エポキシ樹脂、フッ素含有エポキシ樹脂、ジシクロペンタジエン骨格含有エポキシ樹脂、ナフタレン骨格含有エポキシ樹脂、アントラセン型エポキシ樹脂、ターシャリーブチルカテコール型エポキシ樹脂、トリフェニルメタン型エポキシ樹脂、テトラフェニルエタン型エポキシ樹脂、ビフェニル型エポキシ樹脂、ビスフェノールS型エポキシ樹脂等を用いることができる。これらのエポキシ樹脂は1種のみを用いてもよく、2種以上を併用してもよい。 Furthermore, examples of epoxy resins include brominated bisphenol A type epoxy resins, phosphorus-containing epoxy resins, fluorine-containing epoxy resins, dicyclopentadiene skeleton-containing epoxy resins, naphthalene skeleton-containing epoxy resins, anthracene-type epoxy resins, and tertiary-butylcatechol-type epoxy resins. Resin, triphenylmethane type epoxy resin, tetraphenylethane type epoxy resin, biphenyl type epoxy resin, bisphenol S type epoxy resin, etc. can be used. These epoxy resins may be used alone or in combination of two or more.
<<マレイミド樹脂>>
マレイミド樹脂としては、例えば、1-メチル-2,4-ビスマレイミドベンゼン、N,N’-m-フェニレンビスマレイミド、N,N’-p-フェニレンビスマレイミド、N,N’-m-トルイレンビスマレイミド、N,N’-4,4-ビフェニレンビスマレイミド、N,N’-4,4-(3,3’-ジメチル-ビフェニレン)ビスマレイミド、N,N’-4,4-(3,3’-ジメチルジフェニルメタン)ビスマレイミド、N,N’-4,4-(3,3’-ジエチルジフェニルメタン)ビスマレイミド、N,N’-4,4-ジフェニルメタンビスマレイミド、N,N’-4,4-ジフェニルプロパンビスマレイミド、N,N’-4,4-ジフェニルエーテルビスマレイミド、N,N’-3,3-ジフェニルスルホンビスマレイミド等が挙げられる。
さらに、上記マレイミド樹脂を1級アミンを有する化合物で変性した変性マレイミドや、ダイマー酸やトリマー酸等のアミン変性物とマレイン酸無水物やピロメリット酸等で鎖延長した重合物等が挙げられる。
マレイミド樹脂は、市販の化合物を用いることもでき、具体的には例えば、DESIGNER MOLECURES Inc.製のBMI-3000、BMI-1500、BMI-2550、BMI-1400、BMI-2310、BMI-3005、BMI-689、BMI-2500、BMI-6000、BMI-6100等を好適に用いることができる。
<<Maleimide Resin>>
Examples of maleimide resins include 1-methyl-2,4-bismaleimidobenzene, N,N'-m-phenylenebismaleimide, N,N'-p-phenylenebismaleimide, and N,N'-m-toluylene. bismaleimide, N,N'-4,4-biphenylenebismaleimide, N,N'-4,4-(3,3'-dimethyl-biphenylene)bismaleimide, N,N'-4,4-(3, 3′-dimethyldiphenylmethane)bismaleimide, N,N′-4,4-(3,3′-diethyldiphenylmethane)bismaleimide, N,N′-4,4-diphenylmethanebismaleimide, N,N′-4, 4-diphenylpropanebismaleimide, N,N'-4,4-diphenyletherbismaleimide, N,N'-3,3-diphenylsulfonebismaleimide and the like.
Further examples include modified maleimide obtained by modifying the above maleimide resin with a compound having a primary amine, and polymers obtained by chain extension with amine-modified products such as dimer acid and trimer acid and maleic anhydride and pyromellitic acid.
A commercially available compound can also be used as the maleimide resin. can be preferably used.
本発明では、樹脂組成物に含有されるマレイミド樹脂の重量平均分子量は、5,000~100,000であることが好ましく、5,000~40,000であることがより好ましい。重量平均分子量が5,000以上であれば、樹脂組成物からなる層を製膜時のレベリング性が向上し、樹脂組成物からなる層の表面粗さを低減できる。重量平均分子量が100,000以下であれば、樹脂組成物の硬化物に適度な柔軟性を付与でき、優れた接着性を発現できる。また、耐熱性も高まる。重量平均分子量が、40,000以下であれば、マレイミド樹脂と他の添加剤との溶解性、及びフィラー等の分散性が向上して、性能の向上と表面粗さの低減との両立ができる。 In the present invention, the maleimide resin contained in the resin composition preferably has a weight average molecular weight of 5,000 to 100,000, more preferably 5,000 to 40,000. When the weight-average molecular weight is 5,000 or more, the leveling property of the resin composition layer during film formation is improved, and the surface roughness of the resin composition layer can be reduced. When the weight-average molecular weight is 100,000 or less, it is possible to impart appropriate flexibility to the cured product of the resin composition and exhibit excellent adhesiveness. Also, the heat resistance is enhanced. If the weight-average molecular weight is 40,000 or less, the solubility of the maleimide resin and other additives and the dispersibility of fillers are improved, and both performance improvement and surface roughness reduction can be achieved. .
<<シランカップリング剤>>
樹脂組成物中にシランカップリング剤を含有させることで、下記実施例でも示す通り、樹脂組成物からなる層と基材フィルム、及び樹脂組成物からなる層と後述する金属膜との密着性(接着性)を向上させることができ、密着性の良い金属張積層板を作製することができる。
<<Silane coupling agent>>
By including a silane coupling agent in the resin composition, as shown in the following examples, the adhesion between the layer made of the resin composition and the substrate film, and the layer made of the resin composition and the metal film described later ( adhesion) can be improved, and a metal-clad laminate having good adhesion can be produced.
本発明で用いられるシランカップリング剤としては、密着性の良い金属張積層板を作製することができれば、特に制限はなく、目的に応じて適宜選択することができるが、例えば、ビニルトリクロルシラン、ビニルトリメトキシシラン、ビニルトリエトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリメトキシシラン、3-グリシドキシプロピルトリメトキシシラン、3-グリシドキシプロピルメチルジエトキシシラン、3-グリシドキシプロピルトリエトキシシラン、p-スチリルトリメトキシシラン、3-メタクリロキシプロピルメチルジメトキシシラン、3-メタクリロキシプロピルトリメトキシシラン、3-メタクリロキシプロピルメチルジエトキシシラン、3-メタクリロキシプロピルトリエトキシシラン、3-アクリロキシプロピルトリメトキシシラン、N-2-(アミノエチル)-3-アミノプロピルメチルジメトキシシラン、N-2(アミノエチル)3-アミノプロピルトリメトキシシラン、N-2(アミノエチル)3-アミノプロピルトリエトキシシラン、3-アミノプロピルトリメトキシシラン、3-アミノプロピルトリエトキシシラン、ヘキサメチルジシラザン、3-(2-アミノエチルアミノプロピル)ジメトキシメチルシラン、3-(2-アミノエチルアミノプロピル)トリメトキシシラン、2-(2-アミノエチルチオエチル)ジエトキシメチルシラン、2-(2-アミノエチルチオエチル)トリエトキシシラン、3-[2-(2-アミノエチルアミノエチルアミノ)プロピル]トリメトキシシラン、3-トリエトキシシリル-N-(1,3-ジメチル-ブチリデン)プロピルアミン、N-フェニル-3-アミノプロピルトリメトキシシラン、N-(ビニルベンジル)-2-アミノエチル-3-アミノプロピルトリメトキシシラン塩酸塩、3-ウレイドプロピルトリエトキシシラン、3-クロロプロピルトリメトキシシラン、3-イソシアネートプロピルトリエトキシシラン、3-メルカプトプロピルメチルジメトキシシラン、3-メルカプトプロピルトリメトキシシラン、ビス(トリエトキシシリルプロピル)テトラスルフィド、イミダゾリルアルキル-トリアルコキシシラン、ジフェニルジメトキシシラン、ヘキシルトリメトキシシラン、デシルトリメトキシシラン、トリフルオロプロピルトリメトキシシラン、テトラメトキシシラン、テトラエトキシシラン、メチルトリメトキシシラン、メチルトリエトキシシラン、ジメチルトリエトキシシラン、フェニルトリエトキシシラン、等が挙げられる。 The silane coupling agent used in the present invention is not particularly limited as long as it can produce a metal-clad laminate with good adhesion, and can be appropriately selected according to the purpose. Examples include vinyltrichlorosilane, vinyltrimethoxysilane, vinyltriethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldiethoxysilane, 3-glycid xypropyltriethoxysilane, p-styryltrimethoxysilane, 3-methacryloxypropylmethyldimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-methacryloxypropylmethyldiethoxysilane, 3-methacryloxypropyltriethoxysilane, 3-acryloxypropyltrimethoxysilane, N-2-(aminoethyl)-3-aminopropylmethyldimethoxysilane, N-2 (aminoethyl) 3-aminopropyltrimethoxysilane, N-2 (aminoethyl) 3- aminopropyltriethoxysilane, 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, hexamethyldisilazane, 3-(2-aminoethylaminopropyl)dimethoxymethylsilane, 3-(2-aminoethylaminopropyl ) trimethoxysilane, 2-(2-aminoethylthioethyl)diethoxymethylsilane, 2-(2-aminoethylthioethyl)triethoxysilane, 3-[2-(2-aminoethylaminoethylamino)propyl] Trimethoxysilane, 3-triethoxysilyl-N-(1,3-dimethyl-butylidene)propylamine, N-phenyl-3-aminopropyltrimethoxysilane, N-(vinylbenzyl)-2-aminoethyl-3- Aminopropyltrimethoxysilane hydrochloride, 3-ureidopropyltriethoxysilane, 3-chloropropyltrimethoxysilane, 3-isocyanatopropyltriethoxysilane, 3-mercaptopropylmethyldimethoxysilane, 3-mercaptopropyltrimethoxysilane, bis( triethoxysilylpropyl)tetrasulfide, imidazolylalkyl-trialkoxysilane, diphenyldimethoxysilane, hexyltrimethoxysilane, decyltrimethoxysilane, trifluoropropyltrimethoxysilane, tetramethoxysilane, tetraethoxysilane, methyltrimethoxysilane, methyl triethoxysilane, dimethyltriethoxysilane, phenyltriethoxysilane, and the like.
本発明では、シランカップリング剤が、イミダゾール骨格、トリアゾール骨格、トリアジン骨格、オレフィン骨格、メルカプト基、無水マレイン酸骨格、イミド骨格、又はアミノ基のいずれかの官能基を含むシランカップリング剤であることが好ましい。これらいずれかの基を有しているシランカップリング剤を含有させると、少量の添加でも密着力が向上する。樹脂組成物中にマレイミド樹脂が含有されている場合、これらの基を有しているシランカップリング剤は、該マレイミド樹脂と反応する、あるいは反応促進剤として働くことで、耐熱性を向上させることができる。
また、本発明では、シランカップリング剤は100℃で液体の状態であることが好ましい。シランカップリング剤が100℃で液体の状態であると、金属膜をスパッタにより樹脂組成物からなる層上に形成させようとした際に、金属粒子衝突により樹脂組成物からなる層表面の温度が上昇し、スパッタ法でよく観測される100℃程度の表面温度において、アルコキシシラン基や上記の官能基が金属膜との界面に配向しやすくなり、密着力が向上する。
さらに、本発明では、シランカップリング剤が、ブタジエン骨格を有するシランカップリング剤であることが好ましい。シランカップリング剤がブタジエン骨格を有していると、樹脂組成物中にマレイミド樹脂が含有されている場合、該マレイミド樹脂と該ブタジエン骨格を有するシランカップリング剤とを架橋させることができ、それにより、架橋密度が向上することで、耐熱性、密着強度、柔軟性が向上した樹脂組成物からなる層を形成することができる。
ブタジエン骨格を有するシランカップリング剤としては、信越化学工業株式会社製の「X-12-1281A」、「X-12-1281A-ES」、「X-12-1287A」、「X-12-1267B」、「X-12-1267B-ES」が挙げられる。
In the present invention, the silane coupling agent is an imidazole skeleton, a triazole skeleton, a triazine skeleton, an olefin skeleton, a mercapto group, a maleic anhydride skeleton, an imide skeleton, or a silane coupling agent containing an amino functional group. is preferred. When a silane coupling agent having any of these groups is contained, adhesion is improved even with a small amount of addition. When a maleimide resin is contained in the resin composition, the silane coupling agent having these groups reacts with the maleimide resin or acts as a reaction accelerator to improve heat resistance. can be done.
Moreover, in the present invention, the silane coupling agent is preferably in a liquid state at 100°C. When the silane coupling agent is in a liquid state at 100° C., when a metal film is formed on the layer made of the resin composition by sputtering, the temperature of the surface of the layer made of the resin composition rises due to the collision of the metal particles. At a surface temperature of about 100° C., which is often observed in the sputtering method, the alkoxysilane groups and the above-described functional groups are more likely to be oriented at the interface with the metal film, improving adhesion.
Furthermore, in the present invention, the silane coupling agent is preferably a silane coupling agent having a butadiene skeleton. When the silane coupling agent has a butadiene skeleton and the maleimide resin is contained in the resin composition, the maleimide resin and the silane coupling agent having the butadiene skeleton can be crosslinked. By improving the crosslinking density, it is possible to form a layer made of a resin composition with improved heat resistance, adhesion strength, and flexibility.
As the silane coupling agent having a butadiene skeleton, Shin-Etsu Chemical Co., Ltd. "X-12-1281A", "X-12-1281A-ES", "X-12-1287A", "X-12-1267B" ”, “X-12-1267B-ES”.
樹脂組成物中におけるシランカップリング剤の含有量としては、樹脂組成物100質量部に対してシランカップリング剤が、0.1~20質量部含有されていることが好ましい。シランカップリング剤の含有量が上記下限値以上であれば、密着力が向上する。シランカップリング剤の含有量が上記上限値を超えるとマレイミド樹脂と反応しなかったシランカップリング剤がブリードアウトしたり、相溶性が悪化して表面粗さを大きくなったりと悪影響を与える。 The content of the silane coupling agent in the resin composition is preferably 0.1 to 20 parts by mass of the silane coupling agent per 100 parts by mass of the resin composition. If the content of the silane coupling agent is at least the above lower limit, the adhesion is improved. If the content of the silane coupling agent exceeds the above upper limit, the silane coupling agent that has not reacted with the maleimide resin will bleed out, or the compatibility will deteriorate and the surface roughness will increase.
また、樹脂組成物からなる層には、フィラーや各種添加剤等のその他の成分を含有させることもできる。 In addition, the layer made of the resin composition can also contain other components such as fillers and various additives.
<<フィラー>>
樹脂組成物からなる層は、耐熱性向上、流動性制御等のため、フィラーを含むことができる。フィラーの種類としては、特に制限されず、目的に応じて適宜選択することができるが、例えば、上記基材フィルムに含有されるフィラーとして記載した、上記<<フィラー>>の欄に記載のフィラーを用いることができる。
樹脂組成物からなる層に含有されるフィラーの平均粒径としては、0.01μm~20μm、好ましくは0.01μm~10μm、望ましくは0.01~5μmであることが好ましい。
<<Filler>>
The layer made of the resin composition may contain a filler for improving heat resistance, controlling fluidity, and the like. The type of filler is not particularly limited and can be appropriately selected depending on the purpose. can be used.
The average particle diameter of the filler contained in the layer made of the resin composition is preferably 0.01 μm to 20 μm, preferably 0.01 μm to 10 μm, more preferably 0.01 to 5 μm.
樹脂組成物からなる層中のフィラーの含有量は、0.1体積%以上50体積%以下が好ましく、1体積%以上25体積%以下がより好ましい。
樹脂組成物からなる層には基材フィルムよりも一層の表面平滑性が求められるため、用いられるフィラーの平均粒径は基材フィルムより小さいこと、含有量が少ないことが好ましい。
The content of the filler in the layer made of the resin composition is preferably 0.1% by volume or more and 50% by volume or less, more preferably 1% by volume or more and 25% by volume or less.
Since the layer made of the resin composition is required to have a higher surface smoothness than the base film, it is preferable that the average particle diameter of the filler used is smaller than that of the base film and the content thereof is small.
<<その他の成分>>
樹脂組成物には、上述した熱硬化性樹脂やシランカップリング剤やフィラーの他に、粘着付与剤、難燃剤、硬化剤、硬化促進剤、熱老化防止剤、レベリング剤、消泡剤、顔料、及び溶媒等を、樹脂組成物の機能に影響を与えない程度に含有することができる。中でも、硬化剤としてオキサジンを含有させることが好ましい。
<<Other Ingredients>>
In addition to the above-described thermosetting resin, silane coupling agent, and filler, the resin composition may contain a tackifier, a flame retardant, a curing agent, a curing accelerator, a heat antioxidant, a leveling agent, an antifoaming agent, and a pigment. , a solvent, etc. can be contained to such an extent that the functions of the resin composition are not affected. Among them, it is preferable to contain oxazine as a curing agent.
<<<オキサジン>>
樹脂組成物には、オキサジン、より具体的には、ベンゾオキサジン樹脂を含有させることが好ましい。樹脂組成物中の樹脂と、特に樹脂組成物としてマレイミド樹脂が含有されている場合にはマレイミド樹脂と、反応し、樹脂組成物の架橋密度を高めることで、被着体に対する高い接着性や、樹脂組成物硬化物の耐熱性を発現させることができるからである。
ベンゾオキサジン樹脂としては、例えば、6,6-(1-メチルエチリデン)ビス(3,4-ジヒドロ-3-フェニル-2H-1,3-ベンゾオキサジン)、6,6-(1-メチルエチリデン)ビス(3,4-ジヒドロ-3-メチル-2H-1,3-ベンゾオキサジン)等が挙げられ、二種以上組み合わせてもよい。なお、オキサジン環の窒素にはフェニル基、メチル基、シクロヘキシル基等が結合していてもよい。また、ベンゾオキサジン樹脂の具体例としては、四国化成工業(株)社製の「ベンゾオキサジンF-a」や「ベンゾオキサジンP-d」、「ベンゾオキサジンALP-d」、東北化工(株)社製「CR-276」、「BZ-LB-MDA」等が挙げられる。
<<<Oxazine>>
The resin composition preferably contains an oxazine, more specifically a benzoxazine resin. By reacting with the resin in the resin composition, particularly with the maleimide resin when the resin composition contains a maleimide resin, and increasing the crosslink density of the resin composition, high adhesion to the adherend, This is because the heat resistance of the cured product of the resin composition can be exhibited.
Benzoxazine resins include, for example, 6,6-(1-methylethylidene)bis(3,4-dihydro-3-phenyl-2H-1,3-benzoxazine), 6,6-(1-methylethylidene) Examples thereof include bis(3,4-dihydro-3-methyl-2H-1,3-benzoxazine) and the like, and two or more of them may be combined. A phenyl group, a methyl group, a cyclohexyl group, or the like may be bonded to the nitrogen of the oxazine ring. Further, specific examples of benzoxazine resins include "Benzoxazine Fa", "Benzoxazine Pd" and "Benzoxazine ALP-d" manufactured by Shikoku Kasei Co., Ltd., Tohoku Kako Co., Ltd. ``CR-276'' and ``BZ-LB-MDA'' manufactured by K.K.
樹脂組成物からなる層の膜厚は、0.1μm以上であることが好ましく、0.5μm以上であることがより好ましく、1μm以上であることが更に好ましく、3μm以上であることが特に好ましい。樹脂組成物からなる層の膜厚が上記下限値以上であれば基材フィルムの表面を平滑にするに十分な均一性を保つことができる。樹脂組成物からなる層の膜厚は、100μm以下であることが好ましく、50μm以下であることがより好ましく、20μm以下であることが更に好ましく、10μm以下であることが特に好ましい。樹脂組成物からなる層の膜厚が100μm以下であれば樹脂組成物からなる層の塗布が容易であり、樹脂組成物からなる層の膜厚が50μm以下であればプリント配線板の薄膜化が可能であり、樹脂組成物からなる層の膜厚が20μm以下であれば樹脂組成物からなる層への応力集中を低減でき、密着力を向上できる。さらに、樹脂組成物からなる層の膜厚が、10μm以下であると基材フィルムとしてポリエーテルエーテルケトンを含有する樹脂フィルムと積層した積層体で厚み方向のCTEの低いポリエーテルエーテルケトンの特性を損なわない。
また、樹脂組成物からなる層の膜厚は、樹脂組成物からなる層により基材フィルム表面を平滑にし、ひいては金属膜表面も平滑にし、所望の電気信号の低損失化を得るという観点から、基材フィルムの表面粗さ(Rz)μmの値の0.7倍以上であることが好ましく、基材フィルムの表面粗さ(Rz)μmの値の1倍以上であることがより好ましく、基材フィルムの表面粗さ(Rz)μmの値の1.2倍以上であることがさらに好ましい。
The thickness of the layer made of the resin composition is preferably 0.1 μm or more, more preferably 0.5 μm or more, still more preferably 1 μm or more, and particularly preferably 3 μm or more. If the film thickness of the layer made of the resin composition is at least the above lower limit, sufficient uniformity for smoothing the surface of the substrate film can be maintained. The thickness of the layer made of the resin composition is preferably 100 μm or less, more preferably 50 μm or less, even more preferably 20 μm or less, and particularly preferably 10 μm or less. If the thickness of the layer made of the resin composition is 100 μm or less, the coating of the layer made of the resin composition is easy. It is possible, and if the film thickness of the layer made of the resin composition is 20 μm or less, the concentration of stress on the layer made of the resin composition can be reduced, and the adhesion can be improved. Furthermore, when the film thickness of the layer made of the resin composition is 10 μm or less, a laminate obtained by laminating a resin film containing polyetheretherketone as a base film exhibits the properties of polyetheretherketone having a low CTE in the thickness direction. Do not harm.
In addition, the film thickness of the layer made of the resin composition is such that the layer made of the resin composition smoothes the surface of the substrate film and, in turn, smoothes the surface of the metal film, thereby obtaining a desired reduction in electrical signal loss. It is preferably 0.7 times or more the surface roughness (Rz) μm of the substrate film, more preferably 1 time or more the surface roughness (Rz) μm of the substrate film. More preferably, the surface roughness (Rz) of the material film is at least 1.2 times the μm value.
樹脂組成物からなる層の比誘電率、及び誘電正接は、特に限定されず、目的に応じて適宜選択することができるが、電気信号の伝送損失の低減の理由から、比誘電率は、3.5以下で、誘電正接は0.004以下であることが好ましい。
比誘電率及び誘電正接の測定方法としては、上記基材フィルムの<<基材フィルムの特性>>の欄で記載したとおりである。
The dielectric constant and dielectric loss tangent of the layer made of the resin composition are not particularly limited and can be appropriately selected according to the purpose. 0.5 or less and the dielectric loss tangent is preferably 0.004 or less.
The method for measuring the dielectric constant and the dielectric loss tangent is as described in the section <<characteristics of the base film>> of the base film.
樹脂組成物からなる層の表面は、金属膜との密着性向上の理由により、コロナ処理、プラズマ処理、又は紫外線処理により表面処理されていてもよい。 The surface of the layer made of the resin composition may be surface-treated by corona treatment, plasma treatment, or ultraviolet treatment for the reason of improving adhesion with the metal film.
<<樹脂組成物からなる層の製造方法>>
樹脂組成物からなる層は、樹脂組成物を成膜し、樹脂組成物からなる塗膜を硬化することにより形成することができる。
樹脂組成物は、エポキシ樹脂、ポリイミド樹脂、又はマレイミド樹脂等と、シランカップリング剤と、その他の成分とを混合することにより製造することができる。混合方法は特に限定されず、樹脂組成物が均一になればよい。樹脂組成物は、溶液又は分散液の状態で好ましく用いられることから、通常は、溶媒も使用される。
溶媒としては、例えば、メタノール、エタノール、イソプロピルアルコール、n-プロピルアルコール、イソブチルアルコール、n-ブチルアルコール、ベンジルアルコール、エチレングリコールモノメチルエーテル、プロピレングリコールモノメチルエーテル、ジエチレングリコールモノメチルエーテル、ジアセトンアルコール等のアルコール類;アセトン、メチルエチルケトン、メチルイソブチルケトン、メチルアミルケトン、シクロヘキサノン、イソホロン等のケトン類;トルエン、キシレン、エチルベンゼン、メシチレン等の芳香族炭化水素類;酢酸メチル、酢酸エチル、エチレングリコールモノメチルエーテルアセテ-ト、3-メトキシブチルアセテート等のエステル類;ヘキサン、ヘプタン、シクロヘキサン、メチルシクロヘキサン等の脂肪族炭化水素類等が挙げられる。これらの溶媒は、単独で用いてよいし、2種以上を組み合わせて用いてもよい。
樹脂組成物が溶媒を含む溶液又は分散液(樹脂ワニス)であると、基材フィルムへの塗工及び塗膜の形成を円滑に行うことができ、所望の厚さ及び表面粗さの樹脂組成物からなる塗膜を容易に得ることができる。
樹脂組成物が溶媒を含む場合、塗膜の形成を含む作業性等の観点から、固形分濃度は、好ましくは3~80質量%、より好ましくは10~50質量%の範囲である。固形分濃度が80質量%以下であると、溶液の粘度が適度であり、均一に塗工し易い。
塗膜の製造方法のより具体的な実施態様としては、上記樹脂組成物、シランカップリング剤、及び溶媒を含有する樹脂ワニスを、基材フィルムの表面に塗布して樹脂ワニス層を形成した後、該樹脂ワニス層から溶媒を除去することにより、Bステージ状の塗膜を形成することができる。ここで、塗膜がBステージ状であるとは、樹脂組成物が未硬化状態あるいは一部が硬化し始めた半硬化状態をいい、加熱等により、樹脂組成物の硬化が更に進行する状態をいう。
ここで、基材フィルム上に樹脂ワニスを塗布する方法としては、特に制限はなく、目的に応じて適宜選択することができるが、例えば、スプレー法、スピンコート法、ディップ法、ロールコート法、ブレードコート法、ドクターロール法、ドクターブレード法、カーテンコート法、スリットコート法、スクリーン印刷法、インクジェット法、ディスペンス法等が挙げられる。
上記Bステージ状の塗膜は、さらに加熱等を施し、硬化した塗膜、つまり樹脂組成物からなる層を形成することができる。
<<Method for producing layer made of resin composition>>
The layer made of the resin composition can be formed by forming a film of the resin composition and curing the coating film made of the resin composition.
The resin composition can be produced by mixing an epoxy resin, polyimide resin, maleimide resin, or the like, a silane coupling agent, and other components. The mixing method is not particularly limited as long as the resin composition is uniform. Since the resin composition is preferably used in the form of a solution or dispersion, a solvent is also usually used.
Examples of solvents include alcohols such as methanol, ethanol, isopropyl alcohol, n-propyl alcohol, isobutyl alcohol, n-butyl alcohol, benzyl alcohol, ethylene glycol monomethyl ether, propylene glycol monomethyl ether, diethylene glycol monomethyl ether, and diacetone alcohol. ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, methyl amyl ketone, cyclohexanone, and isophorone; aromatic hydrocarbons such as toluene, xylene, ethylbenzene, and mesitylene; methyl acetate, ethyl acetate, ethylene glycol monomethyl ether acetate, esters such as 3-methoxybutyl acetate; aliphatic hydrocarbons such as hexane, heptane, cyclohexane and methylcyclohexane; These solvents may be used alone or in combination of two or more.
When the resin composition is a solvent-containing solution or dispersion (resin varnish), coating on the substrate film and formation of the coating film can be performed smoothly, and the desired thickness and surface roughness of the resin composition A coating film consisting of a substance can be easily obtained.
When the resin composition contains a solvent, the solid content concentration is preferably in the range of 3 to 80% by mass, more preferably 10 to 50% by mass, from the viewpoint of workability including formation of a coating film. When the solid content concentration is 80% by mass or less, the viscosity of the solution is moderate, and it is easy to apply uniformly.
As a more specific embodiment of the method for producing a coating film, a resin varnish containing the above resin composition, a silane coupling agent, and a solvent is applied to the surface of a base film to form a resin varnish layer. A B-stage coating film can be formed by removing the solvent from the resin varnish layer. Here, the coating film is in a B-stage state means that the resin composition is in an uncured state or a semi-cured state in which a part of the resin composition has begun to be cured, and a state in which the resin composition is further cured by heating or the like. say.
Here, the method for applying the resin varnish on the substrate film is not particularly limited and can be appropriately selected according to the purpose. A blade coating method, a doctor roll method, a doctor blade method, a curtain coating method, a slit coating method, a screen printing method, an inkjet method, a dispensing method, and the like can be mentioned.
The B-stage coating film can be further subjected to heating or the like to form a cured coating film, that is, a layer made of the resin composition.
<積層体の特性>
積層体の周波数28GHzの条件下での比誘電率は3.5以下であり、誘電正接は0.005以下である。
比誘電率及び誘電正接の測定方法としては、上記基材フィルムの<<基材フィルムの特性>>の欄で記載したとおりである。
<Laminate characteristics>
The laminate has a dielectric constant of 3.5 or less and a dielectric loss tangent of 0.005 or less under the condition of a frequency of 28 GHz.
The method for measuring the dielectric constant and the dielectric loss tangent is as described in the section <<characteristics of the base film>> of the base film.
(金属張積層板)
本発明の金属張積層板は、上記本発明の積層体の樹脂組成物からなる層上に金属膜が積層されてなる。
金属張積層板において、基材フィルム上に樹脂組成物からなる層、金属膜はこの順で積層されている。
金属膜はメッキ、スパッタ、及び蒸着の少なくともいずれかの形成法で形成された金属膜であることが好ましい。
また、本発明の金属張積層板は、樹脂組成物からなる層及び金属膜が基材フィルムの両側に積層されていてもよい。
この場合の金属張積層板は、金属膜、樹脂組成物からなる層、基材フィルム、樹脂組成物からなる層、金属膜の順で積層されている。
(Metal clad laminate)
The metal-clad laminate of the present invention is obtained by laminating a metal film on the layer made of the resin composition of the laminate of the present invention.
In a metal-clad laminate, a layer made of a resin composition and a metal film are laminated in this order on a substrate film.
The metal film is preferably a metal film formed by at least one of plating, sputtering, and vapor deposition.
Further, in the metal-clad laminate of the present invention, a layer comprising a resin composition and a metal film may be laminated on both sides of the substrate film.
In this case, the metal-clad laminate is laminated in the order of the metal film, the layer made of the resin composition, the substrate film, the layer made of the resin composition, and the metal film.
図1は、本発明の金属張積層板の構成の一例を示す断面図である。
金属張積層板1は、基材フィルム2と、樹脂組成物からなる層3と、金属膜4とを有し、これらの順で積層されてなる。
図2に本発明の金属張積層板の構成の他の例を示す。
図2で示す本発明の金属張積層板1は、金属膜4a、樹脂組成物からなる層3a、基材フィルム2、樹脂組成物からなる層3b、金属膜4bの順で積層されてなる。
FIG. 1 is a cross-sectional view showing an example of the configuration of the metal-clad laminate of the present invention.
The metal-clad
FIG. 2 shows another example of the structure of the metal-clad laminate of the present invention.
The metal-clad
<金属膜>
金属膜は、メッキ、スパッタ、及び蒸着の少なくともいずれかの形成法で形成されている。
表面粗さ(Rz)が1μm以下の樹脂組成物からなる層上に、メッキ、スパッタ、及び蒸着の少なくともいずれかの形成法で金属膜を形成されていると、表面が平滑な金属膜を形成することができる。
また、これらの形成法で形成された金属膜は、回路パターンのファインピッチ化、及び高精度で微細な回路形成が可能となる。
メッキ形成法とスパッタ形成法は、それぞれ別個に用いられてもよいし、併用してもよい。例えば、併用する場合、薄い銅膜をスパッタ法で敷いた後に電解銅メッキ法により、銅膜を形成することができる。
<Metal film>
The metal film is formed by at least one of plating, sputtering, and vapor deposition.
When a metal film is formed by at least one of plating, sputtering, and vapor deposition on a layer made of a resin composition having a surface roughness (Rz) of 1 μm or less, a metal film with a smooth surface is formed. can do.
In addition, the metal films formed by these forming methods enable formation of fine pitch circuit patterns and high-precision fine circuit formation.
The plating method and the sputtering method may be used separately or in combination. For example, when used together, a copper film can be formed by electrolytic copper plating after spreading a thin copper film by sputtering.
金属膜を構成する金属としては、特に制限はなく、目的に応じて適宜選択することができるが、例えばニッケル、銅、銀、錫、金、パラジウム、アルミニウム、クロム、チタンおよび亜鉛からなる群から選択される1種またはこれらのいずれか1種以上を含む合金等が挙げられる。中でも、シールド性と経済性の観点から、銅、および銅を含む合金が好ましい。 The metal constituting the metal film is not particularly limited and can be appropriately selected depending on the intended purpose. An alloy or the like containing one or more selected types may be mentioned. Among them, copper and alloys containing copper are preferable from the viewpoint of shielding properties and economy.
金属膜を形成する方法としては、上述したように、メッキ、スパッタ、及び蒸着の少なくともいずれかの方法が挙げられる。より具体的には、例えば物理蒸着(真空蒸着、スパッタリング、イオンビーム蒸着、電子ビーム蒸着等)又は化学蒸着によって形成された蒸着膜、メッキによって形成されたメッキ膜等が挙げられる。中でも、真空成膜法(真空蒸着法やスパッタリング法等)で形成される真空蒸着膜又はスパッタリング膜、あるいは電解メッキ法で形成されるメッキ膜が、面方向の導電性に優れる点から好ましい。アンカー効果と表面温度の上昇により、密着性を向上できるという観点から、スパッタリング膜であることがさらに好ましい。 As mentioned above, the method of forming the metal film includes at least one of plating, sputtering, and vapor deposition. More specifically, for example, vapor deposition films formed by physical vapor deposition (vacuum vapor deposition, sputtering, ion beam vapor deposition, electron beam vapor deposition, etc.) or chemical vapor deposition, plated films formed by plating, and the like can be mentioned. Among them, a vacuum deposition film or a sputtering film formed by a vacuum deposition method (vacuum deposition method, sputtering method, etc.) or a plated film formed by an electrolytic plating method is preferable from the viewpoint of excellent electrical conductivity in the plane direction. A sputtered film is more preferable from the viewpoint that adhesion can be improved by an anchor effect and an increase in surface temperature.
金属膜の膜厚は、十分な電気信号の伝送特性を確保し、かつ回路パターンの良好なファインピッチを可能とするという観点から、0.05μm~10μmであることが好ましく、0.1~10μmであることが望ましく、0.5~10μmであることが望ましい。
樹脂組成物からなる層に接しない面の金属膜の表面粗さ(Rz)は、特に限定されず、目的に応じて適宜選択することができるが、例えば、電気信号の伝送損失の低減の理由から0.5μm以下であることが好ましい。
The film thickness of the metal film is preferably 0.05 μm to 10 μm, more preferably 0.1 to 10 μm, from the viewpoint of ensuring sufficient electrical signal transmission characteristics and enabling a fine pitch of the circuit pattern. and preferably 0.5 to 10 μm.
The surface roughness (Rz) of the metal film on the surface not in contact with the layer made of the resin composition is not particularly limited and can be appropriately selected according to the purpose. to 0.5 μm or less.
<金属張積層板の効果>
基材フィルムにはフィラーが含有されていたり、基材フィルムの製造上の理由から、基材フィルムの表面を平滑にすることは困難であるが、樹脂組成物からなる層を基材フィルム上に形成させることで、平滑な金属膜を積層させることができ、伝送損失が低減を図ることができる。また、樹脂組成物からなる層が設けられているので、平滑な金属膜を用いても、基材フィルムと金属膜との密着性に優れた金属張積層板となる。さらに本発明では、樹脂組成物からなる層にシランカプリング剤が含有されているため、より一層の基材フィルムと金属膜との密着性を図ることができる。
また、本発明の積層体上に形成される金属膜を、メッキ、スパッタ、及び蒸着の少なくともいずれかの形成法で形成させることで、回路パターンのファインピッチ化や高精度で微細な回路形成ができる金属張積層板とすることができる。
<Effect of metal-clad laminate>
It is difficult to smooth the surface of the base film because the base film contains a filler or for manufacturing reasons of the base film. By forming the film, a smooth metal film can be laminated, and transmission loss can be reduced. Further, since the layer made of the resin composition is provided, the metal-clad laminate has excellent adhesion between the base film and the metal film even when a smooth metal film is used. Furthermore, in the present invention, since the layer made of the resin composition contains a silane coupling agent, the adhesion between the base film and the metal film can be further enhanced.
In addition, by forming the metal film formed on the laminate of the present invention by at least one of plating, sputtering, and vapor deposition, it is possible to form a fine-pitched circuit pattern and to form a highly accurate and fine circuit. It can be a metal-clad laminate that can be used.
<金属張積層板の膜厚>
金属張積層板の膜厚は、特に制限はなく、目的に応じて適宜選択できるが、例えば、10μm以上300μm以下が好ましく、10μm以上200μm以下であることがより好ましく、10μm以上150μm以下であることが更に好ましい。金属張積層板の膜厚が上記範囲の下限値以上であれば、ハンドリング性に優れ、強度を確保できる。また、上記範囲の上限値以下であれば、軽薄短小化、フレキシブル性を付与できる。
<Film thickness of metal-clad laminate>
The film thickness of the metal-clad laminate is not particularly limited and can be appropriately selected according to the purpose. is more preferred. When the film thickness of the metal-clad laminate is at least the lower limit value of the above range, the handleability is excellent and the strength can be ensured. Moreover, when the thickness is equal to or less than the upper limit of the above range, lightness, thinness, shortness and flexibility can be imparted.
<金属張積層板の製造方法>
基材フィルム上に、樹脂組成物からなる層を形成する。
樹脂組成物からなる層の基材フィルムとは反対側の面に、金属膜を形成する。
樹脂組成物からなる層を形成するより具体的な方法としては、上記<<樹脂組成物からなる層の製造方法>>の欄で記載したとおりであり、樹脂組成物、シランカップリング剤、及び溶媒を含有する樹脂ワニスを、基材フィルムの表面に塗布して樹脂ワニス層を形成した後、該樹脂ワニス層から溶媒を除去することにより、塗膜を形成することができる。塗膜は、さらに加熱等を施し硬化させ、樹脂組成物からなる層を形成することができる。
樹脂ワニスを塗布する方法としては、特に制限はなく、目的に応じて適宜選択することができるが、例えば、スプレー法、スピンコート法、ディップ法、ロールコート法、ブレードコート法、ドクターロール法、ドクターブレード法、カーテンコート法、スリットコート法、スクリーン印刷法、インクジェット法、ディスペンス法等が挙げられる。
金属膜の形成方法としては、真空成膜法(真空蒸着、スパッタリング)による方法、電界メッキ法による方法等が挙げられる。
所望の膜厚、表面形状を有する金属膜を形成できる点から、真空蒸着によって蒸着膜を形成する方法、又は電解メッキによってメッキ膜を形成する方法、又はスパッタリングによってスパッタ膜を形成する方法、又はスパッタリング後に電解メッキを行いスパッタとメッキを併用した金属膜を形成することができる。
<Method for producing metal-clad laminate>
A layer made of a resin composition is formed on the base film.
A metal film is formed on the surface of the layer made of the resin composition opposite to the base film.
A more specific method for forming a layer made of a resin composition is as described in the section <<Method for producing a layer made of a resin composition>>, and includes a resin composition, a silane coupling agent, A coating film can be formed by applying a resin varnish containing a solvent to the surface of a substrate film to form a resin varnish layer, and then removing the solvent from the resin varnish layer. The coating film can be further cured by heating or the like to form a layer composed of the resin composition.
The method for applying the resin varnish is not particularly limited and can be appropriately selected depending on the intended purpose. A doctor blade method, a curtain coating method, a slit coating method, a screen printing method, an inkjet method, a dispensing method, and the like can be mentioned.
Examples of the method for forming the metal film include a method using a vacuum film forming method (vacuum deposition, sputtering), a method using an electroplating method, and the like.
From the point that a metal film having a desired film thickness and surface shape can be formed, a method of forming a deposited film by vacuum deposition, a method of forming a plated film by electrolytic plating, a method of forming a sputtered film by sputtering, or sputtering Electroplating can be performed later to form a metal film using both sputtering and plating.
本発明の金属張積層板が、図2で示すような基材フィルムの両面に樹脂組成物からなる層と金属膜がそれぞれ設けられている金属張積層板である場合には、基材フィルムの一方の面に対して、上述した方法により、樹脂組成物からなる層、金属膜を形成し、その後、基材フィルムの他方の面に対して、同様方法で、樹脂組成物からなる層、金属膜を形成することができる。あるいは、基材フィルムに対して両側の樹脂組成物からなる層を一緒に形成し、次に樹脂組成物からなる層の上に配される金属膜も両側一緒に形成する方法を用いてもよい。 When the metal-clad laminate of the present invention is a metal-clad laminate in which a layer made of a resin composition and a metal film are provided on both sides of a base film as shown in FIG. A layer made of a resin composition and a metal film are formed on one surface by the method described above, and then a layer made of a resin composition and a metal film are formed on the other surface of the base film by the same method. A film can be formed. Alternatively, a method may be used in which layers made of the resin composition are formed together on both sides of the base film, and then metal films disposed on the layer made of the resin composition are also formed together on both sides. .
基材フィルム及び/又は樹脂組成物からなる層が、コロナ処理、プラズマ処理、又は紫外線処理等で表面処理された基材フィルム又は樹脂組成物からなる層を用いる場合には、例えば、基材フィルムを用意した後、用意した基材フィルムの表面を表面処理し、その表面処理した基材フィルムに対して、上述した方法により、樹脂組成物からなる層を形成すればよい。また、樹脂組成物からなる層を形成した後、その樹脂組成物からなる層の表面を表面処理し、その後、上述した方法により、金属膜を形成すればよい。 When the base film and/or the layer consisting of the resin composition uses a base film or a layer consisting of the resin composition that has been surface-treated by corona treatment, plasma treatment, ultraviolet treatment, or the like, for example, the base film is prepared, the surface of the prepared base film is surface-treated, and a layer composed of the resin composition is formed on the surface-treated base film by the method described above. Moreover, after forming the layer made of the resin composition, the surface of the layer made of the resin composition may be surface-treated, and then the metal film may be formed by the method described above.
本発明の積層体を用いて、上記金属張積層板を作製する以外にも、本発明の積層体を用いて、以下に記載するプリント配線板や、シールドフィルムや、シールドフィルム付きプリント配線板を作製することができる。 In addition to producing the metal-clad laminate using the laminate of the present invention, the laminate of the present invention can be used to produce the following printed wiring boards, shield films, and printed wiring boards with shield films. can be made.
(プリント配線板)
本発明に係る積層体の好ましい一実施態様として、本発明の積層体中の樹脂組成物からなる層に、銅配線を形成してなるプリント配線板が挙げられる。
プリント配線板は、上記銅張積層板に電子回路を形成することにより得られる。
プリント配線板は、上記積層体を用いて、基材フィルムと銅配線とが貼り合わされており、基材フィルム、樹脂組成物からなる層及び銅配線の順に構成されている。なお、樹脂組成物からなる層及び銅配線は、基材フィルムの両面に形成されていてもよい。
例えば、熱プレス等を利用して、配線部分を有する面に、接着剤層を介してカバーレイフィルムを貼り付けることにより、プリント配線板が製造される。
本発明に係るプリント配線板は、低誘電な本発明の樹脂組成物を使用しているため、電子機器の高速伝送を可能とし、かつ接着安定性に優れたものとなる。
本発明に係るプリント配線板を製造する方法としては、例えば、上記積層体の接着剤層と銅配線とを接触させ、80℃~200℃で熱ラミネートを行い、更にアフターキュアにより樹脂組成物からなる層を硬化する方法がある。アフターキュアの条件は、例えば、100℃~200℃、30分~4時間とすることができる。上記銅配線の形状は、特に限定されず、所望に応じ、適宜形状等を選択すればよい。
(Printed wiring board)
A preferred embodiment of the laminate according to the present invention is a printed wiring board in which copper wiring is formed in the layer of the resin composition in the laminate according to the present invention.
A printed wiring board is obtained by forming an electronic circuit on the copper-clad laminate.
A printed wiring board is formed by laminating a substrate film and copper wiring using the laminate, and is composed of a substrate film, a layer made of a resin composition, and copper wiring in this order. The layer made of the resin composition and the copper wiring may be formed on both sides of the substrate film.
For example, a printed wiring board is manufactured by using a hot press or the like to attach a coverlay film to a surface having a wiring portion via an adhesive layer.
Since the printed wiring board according to the present invention uses the low-dielectric resin composition of the present invention, it enables high-speed transmission of electronic devices and has excellent adhesion stability.
As a method for producing a printed wiring board according to the present invention, for example, the adhesive layer of the laminate is brought into contact with the copper wiring, heat lamination is performed at 80 ° C. to 200 ° C., and the resin composition is removed by after-curing. There is a method to harden the different layers. The after-cure conditions can be, for example, 100° C. to 200° C. and 30 minutes to 4 hours. The shape of the copper wiring is not particularly limited, and any suitable shape may be selected as desired.
(シールドフィルム)
本発明に係る積層体の好ましい一実施態様として、シールドフィルムが挙げられる。
シールドフィルムは、コンピュータや携帯電話や分析機器等の各種電子機器に影響し誤作動の原因となる電磁波ノイズをカットするために、各種電子機器にシールドするためのフィルムである。電磁波シールドフィルムともいう。
電磁波シールドフィルムは、例えば、接着剤層、金属層、及び本発明の上記積層体を積層してなる。本発明の上記積層体の樹脂組成物からなる層と上記金属層とが接している。
本発明に係るシールドフィルムは、低誘電な本発明の樹脂組成物を使用しているため、電子機器の高速伝送が可能であり、さらに電子機器との接着安定性にも優れたものとなる。
(shield film)
A preferred embodiment of the laminate according to the present invention is a shield film.
A shield film is a film for shielding various electronic devices in order to cut electromagnetic noise that affects various electronic devices such as computers, mobile phones, and analytical instruments and causes malfunctions. Also called electromagnetic wave shielding film.
The electromagnetic wave shielding film is formed by laminating an adhesive layer, a metal layer, and the laminate of the present invention, for example. The layer made of the resin composition of the laminate of the present invention is in contact with the metal layer.
Since the shielding film according to the present invention uses the low-dielectric resin composition of the present invention, high-speed transmission of electronic devices is possible, and the adhesive stability with electronic devices is also excellent.
(シールドフィルム付プリント配線板)
本発明に係る積層体の好ましい一実施態様として、シールドフィルム付プリント配線板が挙げられる。
シールドフィルム付プリント配線板は、基板の少なくとも片面にプリント回路が設けられたプリント配線板上に、上記電磁波シールドフィルムが貼付されたものである。
シールドフィルム付プリント配線板は、例えば、プリント配線板と、プリント配線板のプリント回路が設けられた側の面に隣接する絶縁フィルムと、上記電磁波シールドフィルムとを有する。
本発明に係るシールドフィルム付プリント配線板は、低誘電な本発明の樹脂組成物を使用しているため、電子機器の高速伝送を可能とし、かつ接着安定性に優れたものとなる。
(Printed wiring board with shield film)
A preferred embodiment of the laminate according to the present invention is a printed wiring board with a shield film.
A printed wiring board with a shielding film is a printed wiring board having a printed circuit on at least one side of a substrate, and the electromagnetic wave shielding film is attached on the printed wiring board.
A printed wiring board with a shield film includes, for example, a printed wiring board, an insulating film adjacent to the surface of the printed wiring board on which the printed circuit is provided, and the electromagnetic wave shielding film.
Since the printed wiring board with a shielding film according to the present invention uses the low dielectric resin composition of the present invention, it enables high-speed transmission of electronic devices and has excellent adhesion stability.
以下に実施例を挙げて本発明を更に詳述するが、本発明の範囲はこれらの実施例に限定されるものではない。なお、下記において、部及び%は、特に断らない限り、質量基準である。 Although the present invention will be described in more detail with examples below, the scope of the present invention is not limited to these examples. In the following, parts and % are based on mass unless otherwise specified.
(基材の製造例1)
ポリエーテルエーテルケトン(PEEK)樹脂(381G:ビクトレックス社製)100質量部と合成マイカ(MK-100PGDS:片倉アグリコープ社製)45質量部とを混合し、該混合物を二軸混錬機で押出し、ペレットを作製した。使用した合成マイカの平均粒径は4.4μmで、アスペクト比は41.9であった。
得られたペレットを幅900mmのTダイス付きの単軸押出機に投入して溶融混練し、Tダイスから連続的に押し出して、厚さ100μmのPEEK基材フィルムを得た(基材A-1)。
このPEEK基材フィルムの表面粗さ(Rz)をレーザー顕微鏡を用いて測定したところ、Rz:3.63μmであった。
このPEEK基材フィルムの厚み方向のCTEを測定したところ、48ppm/℃であった。
このPEEK基材フィルムの表面におけるSi元素の炭素原子に対する質量比(Si/C)を、電子線マイクロアナライザー(EPMA)により測定してところ、12.91%であった。
製造例1で得られた基材A-1の測定結果を下記表1に示す。
(Production example 1 of base material)
100 parts by mass of polyether ether ketone (PEEK) resin (381G: manufactured by Victrex) and 45 parts by mass of synthetic mica (MK-100PGDS: manufactured by Katakura Agricorp) are mixed, and the mixture is kneaded with a twin-screw kneader. It was extruded and made into pellets. The synthetic mica used had an average particle size of 4.4 μm and an aspect ratio of 41.9.
The obtained pellets were put into a single-screw extruder with a T-die having a width of 900 mm, melt-kneaded, and continuously extruded from the T-die to obtain a PEEK substrate film having a thickness of 100 μm (Substrate A-1 ).
When the surface roughness (Rz) of this PEEK base film was measured using a laser microscope, it was Rz: 3.63 μm.
When the CTE in the thickness direction of this PEEK base film was measured, it was 48 ppm/°C.
The mass ratio of Si element to carbon atoms (Si/C) on the surface of this PEEK base film was measured by an electron probe microanalyzer (EPMA) and found to be 12.91%.
The measurement results of the substrate A-1 obtained in Production Example 1 are shown in Table 1 below.
(基材の製造例2~3)
製造例1の基材A-1の条件を下記表1のように変更し、製造条件を調整することで基材A-2~A-3を作製した。製造例2~3で得られた基材A-2~A-3の測定結果を下記表1に示す。
(Base material production examples 2-3)
Substrates A-2 and A-3 were produced by changing the conditions of the substrate A-1 of Production Example 1 as shown in Table 1 below and adjusting the production conditions. The measurement results of the substrates A-2 and A-3 obtained in Production Examples 2 and 3 are shown in Table 1 below.
(樹脂組成物で使用する各成分)
<ビスマレイミド樹脂>
信越化学工業株式会社製の商品名「SLK-3000-T50」を用いた。固形分50%、溶剤:トルエン、数平均分子量7,725、重量平均分子量12,545、軟化点40℃である。
<ビスマレイミド樹脂>
信越化学工業株式会社製の商品名「SLK-1500-T80」を用いた。固形分80%、溶剤:トルエン、数平均分子量3,257、重量平均分子量5,040、軟化点45℃である。
<シランカップリング剤>
信越化学工業株式会社製の商品名「X-12-1281A」を用いた。スチレン-ブタジエンポリマー構造を有するシランカップリング剤である。常温で液体の状態である。
<シランカップリング剤>
四国化成工業社製の商品名「VD-5」を用いた。トリアジン骨格を有するシランカップリング剤である。融点85℃である。
<シランカップリング剤>
四国化成工業社製の商品名「2MUSIZ」を用いた。イミダゾール骨格を有するシランカップリング剤である。常温で液体の状態である。
<シランカップリング剤>
信越化学工業株式会社製の商品名「KBM-403」を用いた。エポキシ骨格を有するシランカップリング剤である。常温で液体の状態である。
<硬化剤>
日油社製の商品名「パーヘキサ25O」を用いた。固形分50%である。
<硬化剤:ベンゾオキサジン樹脂>
四国化成工業株式会社製の商品名「ALP-d」(液体)を用いた。
(Each component used in the resin composition)
<Bismaleimide resin>
A trade name “SLK-3000-T50” manufactured by Shin-Etsu Chemical Co., Ltd. was used. Solid content 50%, solvent: toluene, number average molecular weight 7,725, weight average molecular weight 12,545, softening point 40°C.
<Bismaleimide resin>
A trade name “SLK-1500-T80” manufactured by Shin-Etsu Chemical Co., Ltd. was used. Solid content 80%, solvent: toluene, number average molecular weight 3,257, weight average molecular weight 5,040, softening point 45°C.
<Silane coupling agent>
The trade name "X-12-1281A" manufactured by Shin-Etsu Chemical Co., Ltd. was used. It is a silane coupling agent having a styrene-butadiene polymer structure. It is in a liquid state at room temperature.
<Silane coupling agent>
The trade name "VD-5" manufactured by Shikoku Kasei Kogyo Co., Ltd. was used. It is a silane coupling agent having a triazine skeleton. It has a melting point of 85°C.
<Silane coupling agent>
The trade name "2MUSIZ" manufactured by Shikoku Kasei Kogyo Co., Ltd. was used. It is a silane coupling agent having an imidazole skeleton. It is in a liquid state at room temperature.
<Silane coupling agent>
The trade name "KBM-403" manufactured by Shin-Etsu Chemical Co., Ltd. was used. It is a silane coupling agent having an epoxy skeleton. It is in a liquid state at room temperature.
<Curing agent>
The trade name "PERHEXA 25O" manufactured by NOF Corporation was used. 50% solids.
<Curing agent: benzoxazine resin>
A product name “ALP-d” (liquid) manufactured by Shikoku Kasei Co., Ltd. was used.
(樹脂組成物の配合例1)
ビスマレイミド樹脂(SLK-3000-T50:信越化学工業)、ビスマレイミド樹脂(SLK-1500-T80:信越化学工業)シランカップリング剤(X-12-1281A:信越化学工業)、硬化剤(パーヘキサ25O:日油社製)、トルエン、メチルイソブチルケトン(MIBK)を下記表2の配合のとおりに混合し、塗布溶液(塗液)B-1を得た。
なお、樹脂組成物の塗膜から溶剤を乾燥させた後の塗布した層における固形分比率を示した結果を下記表3に示す。
(Formulation example 1 of resin composition)
Bismaleimide resin (SLK-3000-T50: Shin-Etsu Chemical Co., Ltd.), bismaleimide resin (SLK-1500-T80: Shin-Etsu Chemical Co., Ltd.) silane coupling agent (X-12-1281A: Shin-Etsu Chemical Co., Ltd.), curing agent (Perhexa 25O (manufactured by NOF Corporation), toluene, and methyl isobutyl ketone (MIBK) were mixed according to the composition shown in Table 2 below to obtain a coating solution (coating solution) B-1.
Table 3 below shows the solid content ratio in the coated layer after drying the solvent from the coating film of the resin composition.
(樹脂組成物の配合例2~7)
配合例1の樹脂組成物B-1の条件を下記表2のように変更し、樹脂組成物B-2~B-7を作製した。配合例2~7で得られた樹脂組成物B-2~B-7の測定結果を下記表2に示す。
なお、配合例2~7についても、樹脂組成物の塗膜から溶剤を乾燥させた後の塗布した層における固形分比率を示した結果を下記表3に示す。
(Resin Composition Formulation Examples 2 to 7)
The conditions of the resin composition B-1 of Formulation Example 1 were changed as shown in Table 2 below to prepare resin compositions B-2 to B-7. The measurement results of the resin compositions B-2 to B-7 obtained in Formulation Examples 2 to 7 are shown in Table 2 below.
For Formulation Examples 2 to 7, Table 3 below shows the solid content ratio in the coated layer after drying the solvent from the coating film of the resin composition.
(実施例1)
製造例1のPEEK基材フィルムの表面をコロナ処理し、該表面処理されたPEEK基材フィルム上に、配合例1の塗布溶液を5μmの膜厚で塗布し、その後溶剤成分を揮発させ塗膜を乾燥させた。
80℃の温度で72時間養生し、塗膜を硬化させた。
この段階で、樹脂組成物からなる層(塗膜)の表面の表面粗さ(Rz)を測定し、PEEK基材フィルムと樹脂組成物からなる層とを有する積層体の周波数28GHzの条件下での比誘電率と誘電正接を測定した。
(Example 1)
The surface of the PEEK base film of Production Example 1 was subjected to corona treatment, and the coating solution of Formulation Example 1 was applied to a film thickness of 5 μm on the surface-treated PEEK base film. was dried.
Curing was performed at a temperature of 80° C. for 72 hours to cure the coating film.
At this stage, the surface roughness (Rz) of the surface of the layer (coating film) made of the resin composition is measured, and the laminate having the PEEK base film and the layer made of the resin composition has a frequency of 28 GHz. We measured the relative permittivity and dielectric loss tangent of
[比誘電率及び誘電正接]
接着剤層の比誘電率及び誘電正接は、ネットワークアナライザーMS46122B(Anritsu社製)と開放型共振器ファブリペローDPS-03(KEYCOM社製)とを使用し、開放型共振器法で、温度23℃、周波数28GHzの条件で測定した。
[Relative permittivity and dielectric loss tangent]
The relative dielectric constant and dielectric loss tangent of the adhesive layer were determined by the open resonator method using a network analyzer MS46122B (manufactured by Anritsu) and an open resonator Fabry-Perot DPS-03 (manufactured by KEYCOM) at a temperature of 23°C. , and a frequency of 28 GHz.
(密着性試験)
PEEK基材フィルムと樹脂組成物からなる層とを有する積層体の樹脂組成物からなる層上にマグネトロンスパッタリングにより銅膜(膜厚0.1μm)を形成した。
このようにして得られた実施例1の金属張積層板(銅張積層板)に対し密着力を測定する。ただし、銅膜の膜厚が0.1μmと薄いことから、密着力を測定する際、銅膜が破れてしまうと、銅膜とPEEK基材との密着力を測定することができないため、銅膜上に接着剤層と銅箔とを積層させて銅膜の破れを防止したうえで、銅膜とPEEK基材との密着性を評価することにした。
そこで、以下のようにして、実施例1の金属張積層板(銅張積層板)にさらに銅膜補強用の接着剤層と銅箔が積層された密着力測定用積層板(I)を作製した。
-密着力測定用積層板(I)-
上記銅膜上にさらに下記組成からなる接着剤組成物の塗布溶液を乾燥後の膜厚が25μmとなるように塗布し、その後乾燥させ接着剤層(i)を形成した。
・接着剤組成物の組成:アミン変性スチレン-エチレンブチレン-スチレン共重合体(旭化成社製「タフテックMP10」)75質量部、ビスマレイミド樹脂(信越化学工業社製「SKL-3000-T50」)25質量部、有機過酸化物(日油社製「パーブチルE」)3質量部からなる。
次に、接着剤層(i)上に電解銅箔の光沢面が接するように、電解銅箔を積層させた。その後、120℃で熱ラミネートを行い、更に150℃で、60分間、アフターキュアを行うことにより、接着剤層(i)を硬化させ、密着力測定用積層板(I)を得た。
・電解銅箔:三井金属鉱業製「TQ-M7-VSP」(厚さ12μm、光沢面Rz1.27μm、光沢面Ra0.197μm、光沢面Rsm12.95μm)を用いた。
上記のようにして得られた、実施例1の金属張積層板(銅張積層板)にさらに銅膜補強用の接着剤層と銅箔が積層された密着力測定用積層板(I)対して、密着力を下記のようにして測定した。
また、実施例1の密着力測定用積層板(I)対して、150℃の温度で1週間保存した後、密着力を測定し、密着力の耐熱性による低下の度合いを評価した。
(Adhesion test)
A copper film (thickness: 0.1 μm) was formed by magnetron sputtering on the resin composition layer of the laminate having the PEEK base film and the resin composition layer.
The adhesion force is measured for the metal-clad laminate (copper-clad laminate) of Example 1 thus obtained. However, since the thickness of the copper film is as thin as 0.1 μm, if the copper film breaks when measuring the adhesion, the adhesion between the copper film and the PEEK substrate cannot be measured. An adhesive layer and a copper foil were laminated on the film to prevent tearing of the copper film, and then the adhesion between the copper film and the PEEK substrate was evaluated.
Therefore, a laminate (I) for adhesion measurement is produced by laminating an adhesive layer for reinforcing a copper film and a copper foil on the metal-clad laminate (copper-clad laminate) of Example 1 in the following manner. bottom.
-Laminate for adhesion measurement (I)-
A coating solution of an adhesive composition having the following composition was further coated on the copper film so that the film thickness after drying was 25 μm, and then dried to form an adhesive layer (i).
・ Composition of adhesive composition: 75 parts by mass of amine-modified styrene-ethylenebutylene-styrene copolymer (manufactured by Asahi Kasei Co., Ltd. “Tuftec MP10”), bismaleimide resin (manufactured by Shin-Etsu Chemical Co., Ltd. “SKL-3000-T50”) 25 Part by mass, 3 parts by mass of organic peroxide ("Perbutyl E" manufactured by NOF Corporation).
Next, the electrolytic copper foil was laminated so that the glossy surface of the electrolytic copper foil was in contact with the adhesive layer (i). Thereafter, heat lamination was performed at 120° C., and after-curing was performed at 150° C. for 60 minutes to cure the adhesive layer (i) and obtain a laminate (I) for adhesion measurement.
Electrolytic copper foil: "TQ-M7-VSP" manufactured by Mitsui Kinzoku Mining (thickness: 12 µm, glossy surface: Rz: 1.27 µm, glossy surface: Ra: 0.197 µm, glossy surface: Rsm: 12.95 µm) was used.
For the laminate for adhesion measurement (I) obtained by laminating an adhesive layer for reinforcing a copper film and a copper foil on the metal-clad laminate (copper-clad laminate) of Example 1 obtained as described above Then, the adhesion force was measured as follows.
In addition, after storing the laminate (I) for adhesion measurement of Example 1 at a temperature of 150° C. for one week, the adhesion was measured to evaluate the degree of reduction in adhesion due to heat resistance.
[密着力(N/cm)]
密着力は、密着力測定用積層板(I)をカットして幅25mmの試験体とし、JIS Z0237:2009(粘着テープ・粘着シート試験方法)に準拠して、剥離速度0.3m/分、剥離角180°にて支持体に固定した樹脂組成物からなる層付き基材フィルムから銅膜(銅膜上には接着剤層と銅箔が積層されている)を剥がす際の剥離強度を測定することにより、密着力を測定した。
[Adhesion (N/cm)]
Adhesion was measured by cutting the laminate (I) for adhesion measurement into a test specimen with a width of 25 mm, and measuring the peel speed of 0.3 m / min in accordance with JIS Z0237: 2009 (adhesive tape/adhesive sheet test method). Measure the peel strength when peeling off a copper film (an adhesive layer and a copper foil are laminated on the copper film) from a base film with a layer made of a resin composition fixed to a support at a peel angle of 180 °. By doing so, the adhesion strength was measured.
実施例1で使用した積層体の測定結果、並びに銅張積層板を含む密着力測定用積層板(I)の密着性試験の評価結果を表4に示す。 Table 4 shows the measurement results of the laminate used in Example 1 and the evaluation results of the adhesion test of the adhesion measurement laminate (I) including the copper-clad laminate.
(実施例2~実施例8、比較例1)
実施例1において、使用するPEEK基材フィルム及び樹脂組成物からなる層の条件を表4に示すように変更した以外は、実施例1と同様にして、実施例2~実施例8、及び比較例1の銅張積層板、及び該銅張積層板を含む密着力測定用積層体(I)を作製した。
(Examples 2 to 8, Comparative Example 1)
In Example 1, Examples 2 to 8, and Comparative A copper-clad laminate of Example 1 and a laminate (I) for adhesion measurement containing the copper-clad laminate were produced.
実施例2~実施例8、及び比較例1で作製した密着力測定用積層体(I)に対して、実施例1と同様の評価を行った。
実施例2~実施例8、及び比較例1で使用した積層体の測定結果、並びに密着力測定用積層体(I)の密着力試験の評価結果を表4に示す。
The same evaluation as in Example 1 was performed on the laminates (I) for adhesion measurement produced in Examples 2 to 8 and Comparative Example 1.
Table 4 shows the measurement results of the laminates used in Examples 2 to 8 and Comparative Example 1, and the adhesion test evaluation results of the adhesion measurement laminate (I).
実施例で作製された本発明の金属張積層板は、金属膜表面が平滑になっているため、伝送損失を低減することができる金属張積層板となっている。樹脂組成物からなる層が設けられているので、平滑な金属膜を用いても、基材フィルムと金属膜との密着性は優れている。
特に、本発明では、樹脂組成物からなる層にシランカプリング剤が含有されているため、より一層の基材フィルムと金属膜との密着性を図ることができる。
The metal-clad laminates of the present invention produced in Examples have a smooth metal film surface, so that they are metal-clad laminates capable of reducing transmission loss. Since the layer made of the resin composition is provided, the adhesiveness between the base film and the metal film is excellent even if a smooth metal film is used.
In particular, in the present invention, since the layer made of the resin composition contains a silane coupling agent, the adhesion between the base film and the metal film can be further enhanced.
本発明の金属張積層板は、スマートフォン、携帯電話、光モジュール、デジタルカメラ、ゲーム機、ノートパソコン、医療器具等の電子機器用のFPC関連製品の製造に好適に用いられ得る。 The metal-clad laminate of the present invention can be suitably used for manufacturing FPC-related products for electronic devices such as smart phones, mobile phones, optical modules, digital cameras, game machines, notebook computers, and medical instruments.
1 金属張積層板
2 基材フィルム
3、3a、3b 樹脂組成物からなる層
4、4a、4b 金属膜
1 Metal-clad
Claims (21)
前記樹脂組成物からなる層の表面粗さ(Rz)が1μm以下であり、
前記積層体の周波数28GHzの条件下での比誘電率が3.5以下であり、誘電正接が0.005以下である、積層体。 A laminate having a base film and a layer made of a resin composition containing a silane coupling agent,
The surface roughness (Rz) of the layer made of the resin composition is 1 μm or less,
A laminate having a dielectric constant of 3.5 or less and a dielectric loss tangent of 0.005 or less under the condition of a frequency of 28 GHz.
前記金属膜がメッキ、スパッタ、及び蒸着の少なくともいずれかの形成法で形成された金属膜である、金属張積層板。 A metal-clad laminate obtained by laminating a metal film on a layer made of the resin composition of the laminate according to any one of claims 1 to 18,
A metal-clad laminate, wherein the metal film is a metal film formed by at least one of plating, sputtering, and vapor deposition.
A printed wiring board comprising the laminate according to any one of claims 1 to 18.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240278536A1 (en) * | 2021-06-15 | 2024-08-22 | Resonac Corporation | Bismaleimide composition, cured product, sheet, laminated body, and flexible printed wiring board |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011000892A (en) * | 2003-09-10 | 2011-01-06 | Nippon Zeon Co Ltd | Resin composite film |
| WO2012046615A1 (en) * | 2010-10-08 | 2012-04-12 | 富士フイルム株式会社 | Laminate production process |
| JP2016010964A (en) * | 2014-06-03 | 2016-01-21 | 三菱瓦斯化学株式会社 | Resin sheet and printed wiring board |
| JP2022083298A (en) * | 2020-11-24 | 2022-06-03 | リンテック株式会社 | Substrate for printed wiring board, metal-clad laminate and printed wiring board |
-
2022
- 2022-06-22 WO PCT/JP2022/024856 patent/WO2023053620A1/en not_active Ceased
- 2022-06-22 JP JP2023550369A patent/JP7766701B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011000892A (en) * | 2003-09-10 | 2011-01-06 | Nippon Zeon Co Ltd | Resin composite film |
| WO2012046615A1 (en) * | 2010-10-08 | 2012-04-12 | 富士フイルム株式会社 | Laminate production process |
| JP2016010964A (en) * | 2014-06-03 | 2016-01-21 | 三菱瓦斯化学株式会社 | Resin sheet and printed wiring board |
| JP2022083298A (en) * | 2020-11-24 | 2022-06-03 | リンテック株式会社 | Substrate for printed wiring board, metal-clad laminate and printed wiring board |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240278536A1 (en) * | 2021-06-15 | 2024-08-22 | Resonac Corporation | Bismaleimide composition, cured product, sheet, laminated body, and flexible printed wiring board |
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| JPWO2023053620A1 (en) | 2023-04-06 |
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